CN113390907A - Sample stage for electron back scattering diffraction - Google Patents
Sample stage for electron back scattering diffraction Download PDFInfo
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- CN113390907A CN113390907A CN202110672363.XA CN202110672363A CN113390907A CN 113390907 A CN113390907 A CN 113390907A CN 202110672363 A CN202110672363 A CN 202110672363A CN 113390907 A CN113390907 A CN 113390907A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
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Abstract
The application relates to a sample stage for electron back scattering diffraction, in particular to the field of sample stage structures; the first cylinder is connected with the second cylinder, a vertical surface perpendicular to the top surface of the second cylinder is arranged on the side wall of the second cylinder, an object placing groove is arranged in the position, opposite to the vertical surface, of the side wall of the second cylinder, the side wall, close to the top surface of the second cylinder, of the object placing groove is of a horn-shaped structure, the side wall, close to the first cylinder, of the object placing groove is an arc surface, a screw hole is formed in the side wall, close to the first cylinder, of the object placing groove, the other end of the screw hole extends to the side wall of the second cylinder, the axis of the screw hole is arranged in the bottom surface of the object placing groove, and a bolt is screwed in the screw hole; when the sample needs to be scanned, the conductive adhesive is coated on the surface of the bottom of the object placing groove, the sample is arranged on the bottom surface of the object placing groove, the bolt is screwed to fix the sample in the object placing groove, and the scanning high-resolution EBSD image does not generate sawteeth, so that the reliability of data is improved.
Description
Technical Field
The application relates to the field of sample stage structures, in particular to a sample stage for electron back scattering diffraction.
Background
The Electron Back Scattering Diffraction (EBSD) technology can perform diffraction with spatial resolution at submicron level while keeping the conventional characteristics of a scanning electron microscope, and is an effective analysis means in material research. The EBSD test requires that the sample be fixed to a sample stage having a 70 degree bevel to facilitate acquisition of information from the sample surface by a probe.
In the prior art, a sample is adhered to a slope by a conductive adhesive, and then the sample is scanned to obtain a high-resolution EBSD image.
However, since a long time is required for acquiring the high-resolution EBSD image, the sample is attached to the sample stage by using the conductive adhesive, and since a long time is required for the sample scanning process, the sample may slightly move due to gravity during the sample scanning process, which may cause the high-resolution EBSD image to generate jaggies, and reduce the reliability of data.
Disclosure of Invention
The present invention is directed to provide a sample stage for electron backscatter diffraction, so as to solve the problems in the prior art that a long time is required for obtaining a high resolution EBSD image, a conductive adhesive is used to adhere the sample on the sample stage, a long time is required for a sample scanning process, the sample is weakly moved due to gravity in the sample scanning process, and therefore, a sawtooth is generated on the high resolution EBSD image, and reliability of data is reduced.
In order to achieve the above purpose, the embodiment of the present invention adopts the following technical solutions:
in a first aspect, the present application provides a sample stage for electron backscatter diffraction, the sample stage comprising: a first column, a second column and a bolt; the first column body is connected with the second column body, a vertical surface vertical to the top surface of the second column body is arranged on the side wall of the second column body, a storage groove is arranged on the side wall of the second column body opposite to the vertical surface, the included angle between the plane of the bottom surface of the storage groove and the vertical surface is an acute angle, the side wall of the storage groove close to the top surface of the second column body is of a horn-shaped structure, the cross section of the horn-shaped structure close to one side of the first cylinder is larger than that of the horn-shaped structure far away from one side of the first cylinder, the side wall of the object placing groove close to the first cylinder is parallel to the top surface of the second cylinder, a screw hole is arranged on the side wall of the object placing groove close to the first cylinder, one end of the screw hole extends to the side wall of the second cylinder, the other end of the screw hole extends to the bottom surface of the object placing groove, and the axis of the screw hole is arranged in the bottom surface of the object placing groove, the axis of the screw hole is vertical to the vertical surface and the coincident line of the bottom surface of the object placing groove, and the bolt is in threaded connection with the screw hole.
Optionally, the diameter of the first cylinder is 3mm to 3.2mm, and the diameter of the second cylinder is 12mm to 15 mm.
Optionally, an included angle between the bottom surface of the storage groove and the vertical surface is 70 degrees.
Optionally, the first column and the second column are made of conductive materials.
Optionally, the first cylinder and the second cylinder are both made of high-purity brass.
Optionally, a second vertical surface is disposed on the sidewall of the first column, and the second vertical surface and the vertical surface are parallel to each other.
Optionally, the bolt is a flat-ended set screw.
The invention has the beneficial effects that:
the application provides a sample platform includes: a first column, a second column and a bolt; the first column body is connected with the second column body, a vertical surface vertical to the top surface of the second column body is arranged on the side wall of the second column body, a storage groove is arranged on the side wall of the second column body opposite to the vertical surface, the included angle between the plane of the bottom surface of the storage groove and the vertical surface is an acute angle, the side wall of the storage groove close to the top surface of the second column body is of a horn-shaped structure, the cross section of the horn-shaped structure close to one side of the first cylinder is larger than that of the horn-shaped structure far away from one side of the first cylinder, the side wall of the object placing groove close to the first cylinder is parallel to the top surface of the second cylinder, a screw hole is arranged on the side wall of the object placing groove close to the first cylinder, one end of the screw hole extends to the side wall of the second cylinder, the other end of the screw hole extends to the bottom surface of the object placing groove, the axis of the screw hole is arranged in the bottom surface of the object placing groove, the axis of the screw hole is vertical to a coincident line of the vertical surface and the bottom surface of the object placing groove, and the bolt is in threaded connection with the screw hole; when the sample needs to be scanned, the conductive adhesive is coated on the surface of the bottom of the storage tank, the sample is arranged on the bottom surface of the storage tank, the bolt is screwed to fix the sample in the storage tank, and the sample is difficult to move during scanning, so that sawteeth are not generated on a high-resolution EBSD image obtained by scanning, and the reliability of data is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic partial structural diagram of a sample stage for electron backscatter diffraction according to an embodiment of the present invention;
FIG. 2 is a schematic partial structural diagram of another sample stage for electron backscatter diffraction according to an embodiment of the present invention;
FIG. 3 is a schematic partial structural diagram of another sample stage for electron backscatter diffraction according to an embodiment of the present invention;
FIG. 4 is a schematic partial structural diagram of another sample stage for electron backscatter diffraction according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of another sample stage for electron backscatter diffraction according to an embodiment of the present invention.
Icon: 10-a first cylinder; 11-a second vertical plane; 20-a second cylinder; 21-a storage groove; 22-screw holes; 23-vertical plane; 30-bolt.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are one embodiment of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In order to make the implementation of the present invention clearer, the following detailed description is made with reference to the accompanying drawings.
Fig. 1 is a schematic partial structural diagram of a sample stage for electron backscatter diffraction according to an embodiment of the present invention; as shown in fig. 1, the present application provides a sample stage for electron backscatter diffraction, the sample stage comprising: a first cylinder 10, a second cylinder 20, and a bolt 30; the first column body 10 is connected with the second column body 20, a vertical surface 23 vertical to the top surface of the second column body 20 is arranged on the side wall of the second column body 20, a placing groove 21 is arranged on the side wall of the second column body 20 opposite to the vertical surface 23, the included angle between the plane of the bottom surface of the placing groove 21 and the vertical surface 23 is an acute angle, the side wall of the placing groove 21 close to the top surface of the second column body 20 is a horn-shaped structure, the cross section of the horn-shaped structure close to one side of the first column body 10 is larger than that of the horn-shaped structure far away from the first column body 10, the side wall of the placing groove 21 close to the first column body 10 is parallel to the top surface of the second column body 20, a screw hole 22 is arranged on the side wall of the placing groove 21, one end of the screw hole 22 extends to the side wall of the second column body 20, the other end of the screw hole 22 extends to the bottom surface of the placing groove 21, the axis of the screw hole 22 is arranged in the bottom surface of the placing groove 21, and the axis of the screw hole 22 is vertical to the coincident line of the vertical surface 23 and the bottom surface of the placing groove 21, the bolt 30 is screwed in the screw hole 22.
One end of the first column 10 is connected to the second column 20, and the first cooperation hall coincides with the axis of the second column 20, the first column 10 and the second column 20 may be integrally formed, or the first column 10 and the second column 20 may be connected together by using techniques such as welding, and in practical applications, the radius of the second column 20 is larger than the radius of the first column 10, the first column 10 is used to clamp the sample stage for electron backscatter diffraction on a fixed platform, which may be a desktop or other working table, and is not specifically limited herein, the first column 10 and the second column 20 are generally cylindrical in shape, a vertical surface 23 is provided on a side wall of the second column 20, the vertical surface 23 is perpendicular to a top surface of the first column 10, that is, the vertical surface 23 is parallel to the axes of the first column 10 and the second column 20, the surface area of the vertical surface 23 is determined according to actual requirements, and is not specifically limited herein, the sidewall of the second column 20 opposite to the vertical surface 23 is provided with a storage slot 21, the storage slot 21 is provided on the sidewall of the end of the second column 20 far from the first column 10, the bottom surface of the storage slot 21 is an inclined surface, the included angle between the inclined surface and the vertical surface 23 is an acute angle, the storage slot 21 is used for placing a sample to be tested, the storage slot 21 is provided on the sidewall of the second column 20, and the storage slot 21 includes a bottom surface and two opposite side surfaces, one of the two opposite side surfaces is close to the first column 10, and the other one is far from the first column 10, in practical application, the two opposite sidewall of the storage slot 21 is perpendicular to the bottom surface of the storage slot 21, generally, one slot should include four side surfaces, that is two side surfaces of the storage slot 21 of the present application parallel to the axis of the second column 20 do not exist, in combination with the structure of the present application, the present application is to link up the two side surfaces of the object placing groove 21 parallel to the axis of the second column 20, the side wall of the object placing groove 21 close to the top surface of the second column 20 is in a horn-shaped structure, the cross section of the horn-shaped structure close to one side of the first column 10 is larger than the cross section of the side far from one side of the first column 10, the side wall of the object placing groove 21 close to one side of the first column 10 is parallel to the second column 20, that is, the side wall of the object placing groove 21 close to one side of the first column 10 is a plane, and the center of the arc surface is located in the object placing groove 21, that is, the specific structure of the object placing groove 21 is an inclined plane of the bottom surface, the two opposite side walls are respectively in the horn-shaped structure and the plane, the specific shape of the side wall of the horn-shaped structure is that the cross section of one end close to the top surface of the second column 20 is smaller than the cross section of one end far from the top surface of the second column 20, the side wall of the horn-shaped structure comprises two planes and two side surfaces which are positioned on the same horizontal plane, the two planes are parallel to the side wall of the object placing groove 21 close to one side of the first column 10, and the positions where the two planes are close to each other are respectively provided with one side surface, namely, the two planes and the two side surfaces of the side wall of the horn-shaped structure which are positioned on the same horizontal plane are both vertical to the bottom surface of the object placing groove 21; in practical application, the included angle between the two side surfaces is 90 degrees,
when the disc-shaped sample to be tested needs to be clamped, one end of the disc-shaped sample to be tested is placed on the side wall of the object placing groove 21 close to one side of the first column 10, and the disc-shaped sample to be tested is clamped through the bolt, so that the other end of the disc-shaped sample to be tested is clamped between the two side faces; when a to-be-detected sample with a rectangular structure needs to be clamped, one end of the to-be-detected sample with the rectangular structure is placed on two planes which are positioned on the same horizontal plane and on the side wall of the object placing groove 21 close to one side of the first column 10, and the disc-shaped to-be-detected sample is clamped through a bolt, so that the other end of the to-be-detected sample with the rectangular structure is clamped between the two side faces, namely the sample table can be used for clamping the disc-shaped to-be-detected sample and the to-be-detected sample with the rectangular structure; the side wall of the object placing groove 21 close to the first column 10 is provided with a screw hole 22, the other end of the screw hole 22 extends to the side wall of the second column 20, the axis of the screw hole 22 is arranged in the bottom surface of the object placing groove 21, and the axis of the screw hole 22 is perpendicular to the coincident line of the vertical surface 23 and the bottom surface of the object placing groove 21, a bolt 30 is screwed in the screw hole 22, the distance between the side wall of the object placing groove 21 far away from the first column 10 and the side wall close to the first column 10 is determined according to the actual requirement, and is not particularly limited, in the practical application, the distance between the side wall of the object placing groove 21 far away from the first column 10 and the side wall close to the first column 10 determines the size of the sample to be tested which can be clamped by the object placing groove 21, the size of the bolt 30 is determined according to the size of the screw hole 22, so that the bolt 30 can be matched with the thread inside the screw hole 22, so that one end of the bolt 30 deep into the screw hole 22 can be screwed by the bolt 30, the position change of the bolt 30 is realized, that is, the bolt 30 is close to the side wall of the object holding groove 21 far away from the first column 10 or far away from the side wall of the object holding groove 21 far away from the first column 10 by screwing the bolt 30; the object placing groove 21 is used for fixing a sample to be detected, when the sample to be detected needs to be detected, if the sample to be detected is in a disc-shaped structure, a conductive adhesive is arranged on the bottom surface of the object placing groove 21, one side of the sample to be detected is in contact with the side surface, close to the first column 10, of the object placing groove 21, the other side of the sample to be detected is in contact with the horn-shaped structure, the bolt 30 is screwed, the sample to be detected is clamped between the bolt 30 and the side wall, far away from the first column 10, of the object placing groove 21, the bolt 30 fixes the sample in the object placing groove 21, the sample is further difficult to move during scanning, sawteeth are not generated on a high-resolution EBSD image obtained through scanning, and the reliability of data is further increased; in addition, in practical application, the conductive adhesive disposed on the bottom surface of the placement groove 21 is a colloid having conductive property, the position of the conductive adhesive coated on the modification groove 21 is generally the position of the sample to be tested, the included angle between the bottom surface of the placement groove 21 and the vertical surface 23 is determined according to practical requirements, and is not specifically limited herein, one end of the screw hole 22 extends to the side wall of the second column 20, the other end of the screw hole 22 extends to the bottom surface of the placement groove 21, the length of the screw hole 22 is determined according to practical requirements, and is not specifically limited herein, in addition, a sample to be tested can be disposed on the top surface of the second column 20 for scanning electron microscope characterization under conventional conditions, in practical application, the height of the sample to be tested disposed on the top surface of the second column 20 is generally 0.1mm to 3mm, the specific height of the sample to be tested is determined according to practical requirements, and the contact area between the sample to be tested and the top surface of the second column 20 is generally not greater than the top surface of the second column 20 Surface area of (a).
Optionally, a side surface of the article placing groove 21 close to the first column 10 is an arc surface, and a center of the arc surface is located at a side of the article placing groove 21 close to the first column 10.
Optionally, the diameter of the first cylinder 10 is 3mm to 3.2mm, and the diameter of the second cylinder 20 is 12mm to 15 mm.
The diameter of the first column 10 can be 3mm, also can be 3.2mm, still can be 3mm ~ 3.2mm between arbitrary size, the diameter of the second column 20 can be 12mm, also can be 15mm, still can be 12mm ~ 15mm between arbitrary size, do not do specific limitation here, because this first column is used for with the sample platform joint of this application on other platforms, then the geometric dimensions of this second column sets up according to the size that other platforms need the assembly position, do not do specific limitation here.
Optionally, the bottom surface of the storage slot 21 forms an angle of 70 degrees with the vertical surface 23.
Because in the EBSD test, the plane that matches with the camera is the inclined plane, and inclination is 70 degrees, then set up this bottom surface of putting thing groove 21 and the contained angle of perpendicular 23 to 70 degrees, the convenient test to the sample that awaits measuring.
Optionally, the materials of the first cylinder 10 and the second cylinder 20 are both conductive materials.
In the detection process of the EBSD test, when current passes through both the first pillar 10 and the second pillar 20, the material of the first pillar 10 and the material of the second pillar 20 are conductive materials, so as to facilitate the EBSD test of a sample to be tested.
Optionally, the materials of the first cylinder 10 and the second cylinder 20 are high-purity brass.
Because brass has good conductive property and is easy to machine, high-purity brass is used as the materials of the first cylinder 10 and the second cylinder 20, namely the sample stage of the application has good conductive property, and the processing difficulty is reduced
FIG. 2 is a schematic partial structural diagram of another sample stage for electron backscatter diffraction according to an embodiment of the present invention; as shown in fig. 2, optionally, a second vertical surface 11 is disposed on the sidewall of the first column 10, and the second vertical surface 11 and the vertical surface 23 are parallel to each other.
The sidewall of the first cylinder 10 is provided with a second vertical surface 11, the second vertical surface 11 is opposite to the first vertical surface 23, the second vertical surface 11 and the first vertical surface 23 are parallel to each other, when the second vertical surface 11 is used for fixing the first cylinder 10 on other platforms, the first cylinder 10 is more tightly connected with other platforms, so that the displacement of the sample to be detected arranged on the second cylinder 20 and the second cylinder 20 is reduced, that is, the possibility that the sample to be detected moves during scanning is reduced, no sawtooth is generated on the scanned high-resolution EBSD image, and the reliability of data is further improved.
Optionally, a thread is disposed on a side wall of the first cylinder 10, and a thread is disposed on a side wall of the first cylinder 10, so that when the first cylinder 10 is connected to another platform, the first cylinder 10 is connected to another platform by a thread, so that the first cylinder 10 is more tightly connected to another platform, and the displacement of the sample to be measured disposed on the second cylinder 20 and the second cylinder 20 is reduced, that is, the possibility that the sample to be measured moves during scanning is reduced, so that no sawtooth is generated on a high-resolution EBSD image obtained by scanning, and the reliability of data is further increased.
Optionally, the bolt 30 is a flat-ended set screw.
FIG. 3 is a schematic partial structural diagram of another sample stage for electron backscatter diffraction according to an embodiment of the present invention; FIG. 4 is a schematic partial structural diagram of another sample stage for electron backscatter diffraction according to an embodiment of the present invention; FIG. 5 is a schematic structural diagram of another sample stage for electron backscatter diffraction according to an embodiment of the present invention; as shown in fig. 3, 4 and 5, the screw hole 22 is optionally not threaded near one end of the first cylinder 10.
The end of the screw hole 22 close to the first column body is a smooth inner wall, so that a better force application interval exists in the process of screwing the bolt 3030 from bottom to top, and generally, the length of the screw hole 22 in the region provided with the threads is 11 mm.
The application provides a sample platform includes: a first cylinder 10, a second cylinder 20, and a bolt 30; the first column body 10 is connected with the second column body 20, a vertical surface 23 perpendicular to the top surface of the second column body 20 is arranged on the side wall of the second column body 20, a placing groove 21 is arranged on the side wall of the second column body 20 opposite to the vertical surface 23, the included angle between the plane of the bottom surface of the placing groove 21 and the vertical surface 23 is an acute angle, the side wall of the placing groove 21 close to the top surface of the second column body 20 is of a horn-shaped structure, the cross section of the horn-shaped structure close to one side of the first column body 10 is larger than that of the side far away from the first column body 10, the side wall of the placing groove 21 close to the first column body 10 is an arc surface, the center of the arc surface is located at one side of the placing groove 21 close to the first column body 10, a screw hole 22 is arranged on the side wall of the placing groove 21, one end of the screw hole 22 extends to the side wall of the second column body 20, the other end of the screw hole 22 extends to the bottom surface of the placing groove 21, and the axis of the screw hole 22 is arranged in the bottom surface of the placing groove 21, the axis of the screw hole 22 is vertical to the coincident line of the vertical surface 23 and the bottom surface of the object placing groove 21, and the bolt 30 is screwed in the screw hole 22; when a sample needs to be scanned, the surface of the bottom of the storage groove 21 is coated with conductive adhesive, the sample is arranged on the bottom surface of the storage groove 21, the bolt 30 is screwed to fix the sample in the storage groove 21 by the bolt 30, and the sample is difficult to move during scanning, so that no sawtooth is generated on a high-resolution EBSD image obtained by scanning, and the reliability of data is improved.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A sample stage for electron backscatter diffraction, the sample stage comprising: a first column, a second column and a bolt; the first cylinder is connected with the second cylinder, a vertical surface vertical to the top surface of the second cylinder is arranged on the side wall of the second cylinder, a storage groove is arranged at a position, opposite to the vertical surface, on the side wall of the second cylinder, a plane where the bottom surface of the storage groove is located and an included angle of the vertical surface are acute angles, the side wall of the storage groove, which is close to the top surface of the second cylinder, is of a horn-shaped structure, the cross section of the horn-shaped structure, which is close to one side of the first cylinder, is larger than the cross section, which is far away from one side of the first cylinder, the side wall of the storage groove, which is close to the first cylinder, is parallel to the top surface of the second cylinder, a screw hole is arranged on the side wall of the storage groove, one end of the screw hole extends to the side wall of the second cylinder, the other end of the screw hole extends to the bottom surface of the storage groove, and the axis of the screw hole is arranged in the bottom surface of the storage groove, and the axis of the screw hole is vertical to the vertical surface and the coincident line of the bottom surfaces of the object placing grooves, and the bolt is screwed in the screw hole.
2. The sample stage for electron backscatter diffraction of claim 1, wherein the first cylinder has a diameter of 3mm to 3.2mm and the second cylinder has a diameter of 12mm to 15 mm.
3. The sample stage for electron backscatter diffraction of claim 1, wherein the bottom surface of the storage slot has an angle of 70 degrees with the vertical plane.
4. The sample stage for electron backscatter diffraction of claim 1, wherein the material of the first and second pillars is a conductive material.
5. The sample stage for electron backscatter diffraction of claim 1, wherein the material of the first cylinder and the second cylinder is high purity brass.
6. The sample stage for electron backscatter diffraction of claim 1, wherein a second vertical surface is disposed on a sidewall of the first column, and the second vertical surface and the vertical surface are parallel to each other.
7. The sample stage for electron backscatter diffraction of claim 1, wherein the bolt is a flat-ended set screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110672363.XA CN113390907A (en) | 2021-06-17 | 2021-06-17 | Sample stage for electron back scattering diffraction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110672363.XA CN113390907A (en) | 2021-06-17 | 2021-06-17 | Sample stage for electron back scattering diffraction |
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|---|---|
| CN113390907A true CN113390907A (en) | 2021-09-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110672363.XA Pending CN113390907A (en) | 2021-06-17 | 2021-06-17 | Sample stage for electron back scattering diffraction |
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| CN (1) | CN113390907A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11996264B1 (en) | 2023-09-06 | 2024-05-28 | Honeywell Federal Manufacturing & Technologies, Llc | Sample mount for electron backscatter diffraction |
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| CN207199566U (en) * | 2017-08-23 | 2018-04-06 | 北京科技大学 | A kind of novel electron back scattering diffraction tests and analyzes sample stage |
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| CN201256139Y (en) * | 2008-08-01 | 2009-06-10 | 攀钢集团研究院有限公司 | Special fixture for scanning electronic microscope |
| CN202351191U (en) * | 2011-11-22 | 2012-07-25 | 南京钢铁股份有限公司 | Sample holder used for EBSD (electron back-scatter diffraction) of scanning electron microscope |
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| US11996264B1 (en) | 2023-09-06 | 2024-05-28 | Honeywell Federal Manufacturing & Technologies, Llc | Sample mount for electron backscatter diffraction |
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