CN206804563U - A kind of device for EBSD tests - Google Patents
A kind of device for EBSD tests Download PDFInfo
- Publication number
- CN206804563U CN206804563U CN201720712386.8U CN201720712386U CN206804563U CN 206804563 U CN206804563 U CN 206804563U CN 201720712386 U CN201720712386 U CN 201720712386U CN 206804563 U CN206804563 U CN 206804563U
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- screw
- sample
- ebsd
- support column
- loading
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Abstract
It the utility model is related to a kind of device for EBSD tests, including base, support column and objective table, the side of base is provided with the edge platform to match with microscope, the opposite side of base and one end of support column connect, the other end of support column is provided with loading end, objective table bottom surface is connected with loading end, and objective table is provided with loading groove, and the both sides of loading groove are respectively equipped with clamping device；Use technical scheme provided by the utility model, sample need to be only put into loading groove, sample is fastened using the bolt of loading groove two sides, further, continuing surface is additionally provided with loading groove, fix sample reliable, sample is avoided to drop, overcome the problem of traditional bonding method is difficult to control sample water Pingdu and perpendicularity, the viscose glue contaminated samples outer surface on adhesive plaster is it also avoid, reuses sample, sample is fixed reliable, reduce the time expended needed for EBSD tests, improve EBSD testing efficiencies.
Description
Technical field
It the utility model is related to EBSD test technology equipment fields, more particularly to a kind of device for EBSD tests.
Background technology
At present, in the electron-microscopic analysis and research to ferrous materials, electron backscattered style crystal microcell orientation
With the analytical technology of crystal structure, referred to as EBSD technologies, application is increasingly extensive, and EBSD technologies are mainly characterized by sweeping in reservation
The diffraction of spatial resolution submicron order is carried out while retouching the conventional feature of electron microscope, and provides the number of crystallography
According to according to electron backscattered theory, when EBSD measurements are carried out in ESEM, sample normal direction must be with incident beam into 70
The angle of degree, so requiring sample platform of scanning electronic microscope to carry out high inclination, while also to ensure that sample will not be in sample
Sliding is produced on platform, when so directly carrying out EBSD measurements with sample platform of scanning electronic microscope, the sample fixation on sample stage and sample again
Verting for sample platform causes the very big inconvenience of EBSD measurement early-stage preparations.Meanwhile if sample fixation is insecure, it can also cause to survey
The drift of image during amount, so as to influence the accuracy of measurement, in the prior art, typically sample is adhesively fixed to branch by adhesive plaster
On cushion cap face, but this method, sample tend not to firm pasting, easily come off, and using sample surfaces easily by glue
Cloth pollutes and is difficult to clean out, and have impact on the precision of EBSD measurements.
Utility model content
In order to solve the above technical problems, the utility model provides a kind of device for EBSD tests.
The utility model provides a kind of device for EBSD tests, including base, support column and objective table, the bottom
The side of seat is provided with the edge platform to match with microscope, and the opposite side of the base is connected with one end of the support column, the branch
The other end of platen is provided with loading end, and the objective table bottom surface is connected with the loading end, and the objective table is provided with loading groove, institute
The both sides for stating loading groove are respectively equipped with clamping device.
Continuing surface is additionally provided with below the loading groove.
The clamping device includes screw A and screw B, screw A and screw B respectively by the two of screw thread and the loading groove
Side connects.
The screw A overlaps with the central axis of the screw B.
The bottom surface of the objective table is provided with support rod, and the loading end is provided with through hole, and support rod is sleeved in through hole.
The support column end face is provided with screw A and screw C, and screw A intersects with the through hole, and screw C is screwed in screw A
Interior, screw C end face compresses the support rod.
The support rod is provided with pressure-bearing surface.
The pressure-bearing surface overlaps with the central axis of the support rod.
The material of the support column is copper or copper alloy.
The base is cylinder, and the end face of the base is provided with several screwed holes B, screwed hole B and the edge platform
Connection, the lower end of the support column are provided with screw rod, and screw rod is screwed in screwed hole B.
The beneficial effects of the utility model are：
It is described using the device provided by the utility model for EBSD tests, including base, support column and objective table
The side of base is provided with the edge platform to match with microscope, and the opposite side of the base is connected with one end of the support column, described
The other end of support column is provided with loading end, and the objective table bottom surface is connected with the loading end, and the objective table is provided with loading groove,
The both sides of the loading groove are respectively equipped with screw A and screw B；, only need to be by sample using technical scheme provided by the utility model
It is put into loading groove, sample is fastened using the bolt of loading groove two sides, further, is additionally provided with loading groove
Continuing surface, fix sample reliable, avoid sample and drop, overcome traditional bonding method and be difficult to control sample water Pingdu and hang down
Straight the problem of spending, the viscose glue contaminated samples outer surface on adhesive plaster is it also avoid, reuses sample, sample is fixed can
Lean on, reduce the time expended needed for EBSD tests, improve EBSD testing efficiencies.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is left view of the present utility model；
Fig. 3 is the structural representation of the utility model support column；
Fig. 4 is the top view of the utility model objective table；
Fig. 5 is the left view of the utility model objective table.
In figure：1- bases, 2- support columns, 3- objective tables, 4- edge platforms, 5- screws A, 6- screw B, 7- screw C, 11- screw thread
Hole B, 21- loading end, 24- through holes, 25- screws A, 26- screw rod, 31- loading grooves, 32- continuing surfaces, 33- support rods, 34- pressure-bearings
Face.
Embodiment
The technical solution of the utility model is described further below in conjunction with accompanying drawing, but required protection domain is not
It is confined to described；
The utility model provides a kind of device for EBSD tests, as shown in Figure 1 and Figure 2, including base 1, support column
2 and objective table 3, the side of base 1 is provided with the edge platform 4 to match with microscope, and the opposite side of base 1 connects with one end of support column 2
Connecing, the other end of support column 2 is provided with loading end 21, and the bottom surface of objective table 3 is connected with loading end 21, and objective table 3 is provided with loading groove 31,
The both sides of loading groove 31 are respectively equipped with clamping device.Using technical scheme provided by the utility model, sample only need to be put into load
In thing groove, sample is fastened using the clamping device of loading groove two sides, fixes sample reliable, overcomes tradition
Bonding method is difficult to control the problem of sample water Pingdu and perpendicularity, it also avoid the viscose glue contaminated samples outer surface on adhesive plaster,
Reuse sample, sample, which is fixed, reliably, reduces the time expended needed for EBSD tests, improves EBSD tests and imitates
Rate.
The lower section of loading groove 31 is additionally provided with continuing surface 32., only need to be by sample using technical scheme provided by the utility model
It is put into loading groove, due to being provided with continuing surface below loading groove, makes the fixation of sample relatively reliable, avoid sample and drop,
The problem of traditional bonding method is difficult to control sample water Pingdu and perpendicularity is overcome, it also avoid the viscose glue pollution sample on adhesive plaster
Product outer surface, reuses sample, and sample, which is fixed, reliably, reduces the time expended needed for EBSD tests, improves
EBSD testing efficiencies.
Clamping device includes screw A5 and screw B6, screw A5 and screw B6 respectively by the both sides of screw thread and loading groove 31
Connection.Using technical scheme provided by the utility model, screw A and screw B constitutes clamping device, in use, sample is put
Enter in objective table, screw screw A and screw B respectively, you can the clamping of complete paired samples, and can be as needed to sample institute
The position at place is adjusted, and during regulation, only need to screw or screw out screw A and screw B, the spacing between screw A and screw B
The full-size of sample is determined, therefore, the present apparatus is applicable to the EBSD tests of several samples, has a wide range of application, operation side
Just.
Screw A5 overlaps with screw B6 central axis., only need to be by sample using technical scheme provided by the utility model
It is put into loading groove, sample is fastened using the bolt of loading groove two sides, the screw A and screw of loading groove both sides
B central axis overlaps, and is advantageous to further fix sample, and stress more balances when fixing sample, improves what sample was fixed
Reliability, and fixed using screw A and screw B, it is not only simple in structure, and further, continuing surface is additionally provided with loading groove,
Fix sample reliable, avoid sample and drop, overcome traditional bonding method and be difficult to control sample water Pingdu and perpendicularity
Problem, the viscose glue contaminated samples outer surface on adhesive plaster is it also avoid, reuses sample, sample fixes reliable, reduction
The time expended needed for EBSD tests, improve EBSD testing efficiencies.
Loading end 21 intersects with the end face of support column 2, and its angle of cut α is 70 degree.Use the technical solution of the utility model, root
Provided according to relevant standard, when EBSD measurements are carried out in ESEM, sample normal direction must be with incident beam into 70 degree of angle
Degree, and the manufacture of the inclined plane of support column is easy to process, therefore, the flatness of the inclined plane is higher, and roughness is relatively low, is advantageous to carry
High EBSD measuring accuracies.
The bottom surface of objective table 3 is provided with support rod 33, and loading end 21 is provided with through hole 24, and support rod 33 is sleeved on through hole 24
It is interior.Using the technical solution of the utility model, the installation of objective table is very convenient, and need not be fixed using bolt, has saved
Early-stage preparations time when row EBSD is tested, and Stability Analysis of Structures, when support rod is linked within through hole 24 completely, then objective table
70 degree are remained with the angle of horizontal plane, has met national relevant regulations, has improved measuring accuracy.
The end face of support column 2 is provided with screw A25 and screw C7, and screw A25 intersects with through hole 24, and screw C7 is screwed in screw
In A25, screw C7 end face compresses support rod 33.Using the technical solution of the utility model, sample passes through screw A25 and spiral shell
Nail C7 clamping makes sample be firmly secured in objective table, and further, screw A25 and screw C7 be plane, screw A25 with
Screw C7 screw thread is less than 1 millimeter of screw thread from pitch, further increases EBSD measuring accuracies, and Stability Analysis of Structures, will be few
The probability that surrounding environment pollutes to sample, avoids the situation for making sample come off because of vibrations.
Support rod 33 is provided with pressure-bearing surface 34.New technical scheme is used using this, further, makes screw 7 and branch
Fitting between strut is that the mode of leading surface contact is bonded, and is advantageous to make objective table 3 be securely fixed in support rod.
Pressure-bearing surface 34 overlaps with the central axis of support rod 33.New technical scheme is used using this, further, branch
The cross section for holding bar is semicircle, i.e. the diameter of pressure-bearing surface 34 reaches maximum, is advantageous to make screw 7 further reliably by loading
Platform 3 is fixed in support rod.
The material of support column 2 is copper or copper alloy.Copper or copper alloy have excellent electric conductivity, thus make to come from electricity
The microscopical detection signal of son can pass through support rod and that inlays platform is transferred to display device, so as to improve EBSD test behaviour
The convenience of work, on the other hand, copper or copper alloy also have preferable mechanical performance, have stable structural strength, so as to have
Beneficial to making objective table be securely fixed on support column, the influence of vibration is avoided, improves measurement accuracy.
Base 1 is cylinder, and the end face of base 1 is provided with several screwed holes B11, screwed hole B11 and is connected with edge platform 4,
The lower end of support column 2 is provided with screw rod 26, and screw rod 26 is screwed in screwed hole B11.Using the technical solution of the utility model, enter
One step place, edge platform are also manufactured using copper or copper alloy, the detection signal for coming from electron microscope is passed through support rod
And edge platform is transferred to display device, so as to improving the convenience of EBSD test operations, on the other hand, EBSD surveys are being carried out
During examination, multiple support columns and objective table can be once set on base, while multiple samples are tested, improve effect
Rate.
Claims (10)
- A kind of 1. device for EBSD tests, it is characterised in that：It is described including base (1), support column (2) and objective table (3) The side of base (1) is provided with the edge platform (4) to match with microscope, the opposite side of the base (1) and the one of the support column (2) End connection, the other end of the support column (2) are provided with loading end (21), objective table (3) bottom surface and the loading end (21) Connection, the objective table (3) are provided with loading groove (31), and the both sides of the loading groove (31) are respectively equipped with clamping device.
- A kind of 2. device for EBSD tests as claimed in claim 1, it is characterised in that：The lower section of the loading groove (31) It is additionally provided with continuing surface (32).
- A kind of 3. device for EBSD tests as claimed in claim 1, it is characterised in that：The clamping device includes screw A (5) and screw B (6), screw A (5) and screw B (6) are connected by screw thread with the both sides of the loading groove (31) respectively.
- A kind of 4. device for EBSD tests as claimed in claim 3, it is characterised in that：The screw A (5) and the spiral shell The central axis for following closely B (6) overlaps.
- A kind of 5. device for EBSD tests as claimed in claim 1, it is characterised in that：The bottom surface of the objective table (3) Provided with support rod (33), the loading end (21) is provided with through hole (24), and support rod (33) is sleeved in through hole (24).
- A kind of 6. device for EBSD tests as claimed in claim 5, it is characterised in that：Support column (2) end face is set There are screw A (25) and screw C (7), screw A (25) intersects with the through hole (24), and screw C (7) is screwed in screw A (25), Screw C (7) end face compresses the support rod (33).
- A kind of 7. device for EBSD tests as claimed in claim 5, it is characterised in that：The support rod (33) is provided with Pressure-bearing surface (34).
- A kind of 8. device for EBSD tests as claimed in claim 7, it is characterised in that：The pressure-bearing surface (34) with it is described The central axis of support rod (33) overlaps.
- A kind of 9. device for EBSD tests as claimed in claim 1, it is characterised in that：The material of the support column (2) It is copper or copper alloy.
- A kind of 10. device for EBSD tests as claimed in claim 1, it is characterised in that：The base (1) is cylinder Shape, the end face of the base (1) are provided with several screwed holes B (11), and screwed hole B (11) is connected with the edge platform (4), described The lower end of support column (2) is provided with screw rod (26), and screw rod (26) is screwed in screwed hole B (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720712386.8U CN206804563U (en) | 2017-06-19 | 2017-06-19 | A kind of device for EBSD tests |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720712386.8U CN206804563U (en) | 2017-06-19 | 2017-06-19 | A kind of device for EBSD tests |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206804563U true CN206804563U (en) | 2017-12-26 |
Family
ID=60747791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720712386.8U Expired - Fee Related CN206804563U (en) | 2017-06-19 | 2017-06-19 | A kind of device for EBSD tests |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206804563U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110398508A (en) * | 2019-07-05 | 2019-11-01 | 山东省分析测试中心 | Inlaying samples EBSD detection sample stage, production method and detection device |
| CN111982943A (en) * | 2020-08-05 | 2020-11-24 | 上海大学 | EBSD test sample platform and application thereof |
-
2017
- 2017-06-19 CN CN201720712386.8U patent/CN206804563U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110398508A (en) * | 2019-07-05 | 2019-11-01 | 山东省分析测试中心 | Inlaying samples EBSD detection sample stage, production method and detection device |
| CN111982943A (en) * | 2020-08-05 | 2020-11-24 | 上海大学 | EBSD test sample platform and application thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171226 Termination date: 20190619 |