CN211043432U - Fixing device and nanoprobe detection device - Google Patents
Fixing device and nanoprobe detection device Download PDFInfo
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- CN211043432U CN211043432U CN201921866200.XU CN201921866200U CN211043432U CN 211043432 U CN211043432 U CN 211043432U CN 201921866200 U CN201921866200 U CN 201921866200U CN 211043432 U CN211043432 U CN 211043432U
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- mounting hole
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- fixer
- auxiliary base
- connecting rod
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Abstract
The utility model provides a fixing device and nanoprobe detection device, wherein fixing device is used for fixed sample, including auxiliary base, fixer and adjusting bolt, mounting hole and screw hole have in the auxiliary base, the mounting hole with the screw hole is all followed auxiliary base's surface extends into in the auxiliary base, the mounting hole with screw hole mutually perpendicular and intercommunication each other, the one end of fixer stretches into in the mounting hole, the other end exposes the mounting hole is with fixing the sample, adjusting bolt stretches into from the screw hole with fixed in the mounting hole the fixer. It is right through auxiliary base and adjusting bolt the fixer carries on spacingly, prevents the fixer rocks at the fixed in-process of sample, thereby guarantees the sample is at the stability of test procedure to, when collecting the sample, make adjusting bolt remove towards the direction of keeping away from the connecting rod, can be easily take out the fixer, be difficult to cause the damage to the fixer.
Description
Technical Field
The utility model relates to a semiconductor manufacturing technology field especially relates to a fixing device and nanoprobe detection device.
Background
The nanometer probe station is a nanometer probe system integrated with a Scanning Electron Microscope (SEM), and can perform nanometer failure analysis on devices in an integrated circuit chip, such as electrical characteristic parameter measurement, nanometer open circuit and short circuit failure positioning, high and low temperature characteristic measurement and the like. When a sample is detected by using the nanoprobe stage, the sample is usually fixed by an auxiliary base and a holder. Specifically, one end of a fixer is inserted into a mounting hole of the auxiliary base, then a sample is placed at the other end of the fixer, the peripheral edge of the sample is pressed by substances such as copper glue and the like to fix the sample, then the sample fixed on the fixer and the fixer are taken out of the auxiliary base and placed on a workbench of the nano probe table, so that the sample is located between the chip carrying table and the probe card, and finally the sample is detected by the probe card.
Fig. 1 is a schematic structural diagram of an auxiliary base in the prior art, the auxiliary base includes a base 10 and a boss 20, the base 10 has a groove thereon, the boss 20 is located at the center of the groove, and the height of the boss 20 in the vertical direction is smaller than the depth of the groove in the vertical direction, the boss 20 has a mounting hole, the mounting hole penetrates through the boss 20 and extends to the bottom of the groove, when a test is needed, one end of the fixer extends into the mounting hole through a metal forceps to fix the fixer, after the test is finished, the fixer is pulled out through the metal forceps, because the auxiliary base is made of plastic material, the mounting hole is easy to be damaged by inserting and pulling the fixer for many times, the mounting hole cannot play a role in fixing after being damaged, and the stability of a sample in the testing process is further influenced under a serious condition; meanwhile, as the fixator is fastened, the metal tweezers can scratch the extending end of the fixator due to stress in the taking and placing process. Moreover, the auxiliary base belongs to a customized product which is prepared by a random table, a manufacturer does not provide purchase, a substitute product is difficult to find in the market, the quantity is limited, and the auxiliary base is difficult to maintain.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a fixing device and nanoprobe detection device is not only convenient for fix the sample, makes the fixer easily get in addition and puts, avoids causing the damage to the fixer, influences the stability of sample at the testing process.
In order to achieve the above object, the utility model provides a fixing device, including auxiliary base, fixer and adjusting bolt, mounting hole and screw hole have in the auxiliary base, the mounting hole with the screw hole is all followed the surface extension of auxiliary base advances in the auxiliary base, the mounting hole with screw hole mutually perpendicular and mutual intercommunication, the one end of fixer stretches into in the mounting hole, the other end exposes the mounting hole is in order to fix the sample, adjusting bolt stretches into from the screw hole in the mounting hole with fixed the fixer.
Optionally, the fixer includes interconnect's plummer and connecting rod, the connecting rod stretches into in the mounting hole, the plummer exposes the mounting hole, the sample is fixed in on the upper surface of plummer.
Optionally, the connecting rod and the bearing platform are of an integrally formed structure.
Optionally, the diameter of the mounting hole is larger than the diameter of the connecting rod, so that the mounting hole and the connecting rod are in clearance fit.
Optionally, a gap between the inner wall of the mounting hole and the outer wall of the connecting rod is between 0.1mm and 0.2 mm.
Optionally, the sample is fixed on the bearing table through copper cement.
Optionally, the copper paste is arranged around the sample and compresses the sample.
Optionally, the auxiliary base is made of metal.
Based on this, the utility model also provides a nanometer probe detection device, reach including nanometer probe platform fixing device, nanometer probe platform includes workstation and probe card, the fixer has been placed on the workstation, just the fixer is located between workstation and the probe card, the probe card is followed and is close to the direction of workstation removes with the contact the sample.
Optionally, the sample is a wafer or a chip.
The utility model provides a fixing device for fixed sample, including auxiliary base, fixer and adjusting bolt, mounting hole and screw hole have in the auxiliary base, the mounting hole with the screw hole all follows the surface extension of auxiliary base advances in the auxiliary base, the mounting hole with screw hole mutually perpendicular and mutual intercommunication, the one end of fixer stretches into in the mounting hole, the other end exposes the mounting hole is with fixed the sample, adjusting bolt stretches into from the screw hole in the mounting hole with fixed the fixer. It is right through auxiliary base and adjusting bolt the fixer carries on spacingly, prevents the fixer rocks at the fixed in-process of sample, thereby guarantees the sample is at the stability of test procedure to, when collecting the sample, make adjusting bolt remove towards the direction of keeping away from the connecting rod, can be easily take out the fixer, be difficult to cause the damage to the fixer, whole device simple structure, convenient operation.
Drawings
FIG. 1 is a schematic structural diagram of an auxiliary base in the prior art;
fig. 2 is a schematic structural view of a fixing device according to an embodiment of the present invention;
fig. 3 is a top view of a fixing device according to an embodiment of the present invention;
wherein the reference numerals are:
10-a base; 20-boss;
100-an auxiliary base; 200-a holder; 210-a carrier stage; 220-a connecting rod; 300-adjusting the bolt.
Detailed Description
The following description of the embodiments of the present invention will be described in more detail with reference to the drawings. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.
As shown in fig. 2 and fig. 3, the present embodiment provides a fixing device for fixing a sample, including an auxiliary base 100, a fixing device 200, and an adjusting bolt 300, where the auxiliary base 100 has a mounting hole and a threaded hole therein, the mounting hole and the threaded hole both extend into the auxiliary base 100 from a surface of the auxiliary base 100, the mounting hole and the threaded hole are perpendicular to each other and are communicated with each other, one end of the fixing device 200 extends into the mounting hole, the other end of the fixing device is exposed out of the mounting hole to fix the sample, and the adjusting bolt 300 extends into the mounting hole from the threaded hole to fix the fixing device 200.
Specifically, the fixing device 200 includes a supporting platform 210 and a connecting rod 220 connected to each other, the connecting rod 220 extends into the mounting hole, the supporting platform 210 is exposed out of the mounting hole, and the sample is fixed on the upper surface of the supporting platform 210. The fixing device 200 may be an integrally formed structure, for example, a bottom surface of the bearing platform 210 is welded to one end of the connecting rod 220, or the bearing platform 210 and the connecting rod 220 may be detachably connected, for example, by a threaded connection, which is not limited in this application.
The shape of the carrier 210 is, for example, a square or a disc, which is not limited in the present application, in this embodiment, the carrier 210 is a disc, and the surface area of the carrier 210 is larger than the area of the sample, so as to better fix the sample. The diameter of the carrier 210 is larger than that of the mounting hole, so that the bottom surface of the carrier 210 contacts the surface of the auxiliary base 100 to support the carrier 210.
With continued reference to fig. 2, the diameter of the mounting hole is larger than the diameter of the connecting rod 220, so that the mounting hole and the connecting rod 220 are in clearance fit. It can be understood that the connecting rod 220 with have the clearance between the inner wall of mounting hole, so that the connecting rod 220 can pass the mounting hole realizes getting of fixer 200 and puts, prevents to damage the surface of connecting rod 220, of course, the diameter of connecting rod 220 slightly is less than the aperture of mounting hole can, if the aperture of mounting hole is too big, then connecting rod 220 rocks easily to slope easily when fixed, be unfavorable for the stability and the test of sample. In this embodiment, the gap between the connecting rod 220 and the mounting hole ranges from 0.1mm to 0.2 mm.
In this embodiment, the sample is, for example, a wafer, a chip, or other devices to be tested, and this application is not limited thereto. The sample and the holding stage 210 are fixed by gluing to avoid damaging the surface of the sample, and the sample is easily taken down by gluing. The adhesive comprises but is not limited to carbon adhesive or copper adhesive, the carbon adhesive has a relatively large adhesion ratio and is relatively good in flexibility, the copper adhesive has poor strength but relatively good conductivity, and the copper adhesive can be selected according to specific requirements. When the copper adhesive is used for adhering a sample, the sample is firstly placed on the bearing table 210, and then the copper adhesive is adhered to the peripheral edge of the sample and is compressed, so that the sample is prevented from micro drifting under the action of an electric field in the testing process, and further the detection result is influenced.
The auxiliary base 100 is disposed on a workbench of a detection apparatus, and is shaped like a rectangular parallelepiped or a cylinder, for example, which is not limited in this application. In this embodiment, the bottom surface of the sub-base 100 is a rectangle having a length of 45mm and a width of 28mm, and the diameter of the mounting hole is 5mm in consideration of the size of the conventional anchor 200, and the height of the entire sub-base is 10mm to 15mm for convenience of use.
Referring to fig. 2, a groove is formed at the bottom of the auxiliary base 100, and the mounting hole extends from the upper surface of the auxiliary base 100 to the groove, so that the manufacturing material of the auxiliary base 100 can be saved by forming the groove, and the weight of the auxiliary base 100 can be reduced, thereby facilitating the taking and placing. In addition, the installation hole is easier to penetrate through the auxiliary base 100 from the upper surface of the auxiliary base 100 by providing the groove, so as to fix the connection rod 220 better, and the connection rod 220 does not touch the bottom surface of the auxiliary base 100, so as to prevent the connection rod 200 from being damaged.
Optionally, the material of auxiliary base 100 is the metal, and the metal material is great for conventional plastics material intensity, is difficult to damage, does not need frequent maintenance or change, can used repeatedly, great extension auxiliary base 100's life, simultaneously, the metal is materials such as alloy, steel, can select according to the demand of experiment.
Referring to fig. 2 and 3, the adjusting bolt 300 is connected to the threaded hole, and the adjusting bolt 300 is rotated to make the screw of the adjusting bolt 300 contact with or separate from the fixing device 200. Utilize adjusting bolt 300 to right the connecting rod 220 carries on spacingly, prevents the connecting rod 220 rocks in the sample test process. It can be understood that, be provided with in the screw hole with adjusting bolt 300 assorted internal thread, through fasteners such as screwdriver rotatory towards the positive direction (for example clockwise) when adjusting bolt 300's the head of screwing in, adjusting bolt 300's screw rod is followed the screw hole moves towards the direction that is close to the mounting hole, supports after removing a distance connecting rod 220 of fixer 200, makes to be located in the mounting hole connecting rod 220 can't remove to fix fixer 200 guarantees the stability of sample in the testing process. When a sample is taken out after the test is finished, the screwing head of the adjusting bolt 300 is rotated in the opposite direction through a fastening piece such as a screwdriver, so that the screw rod of the adjusting bolt 300 moves along the threaded hole in the direction away from the mounting hole, the screw rod is separated from the connecting rod 220, the fixator 200 can move, and the fixator 200 can be easily taken out.
In this embodiment, the axial length of the screw of the adjusting bolt 300 is greater than the axial length of the threaded hole, so that the adjusting bolt 300 can abut against the connecting rod 220 after being screwed, and the connecting rod 220 can be fixed. Preferably, the position of the threaded hole is adapted to the position of the mounting hole, so that the adjusting bolt 300 can abut against the middle position of the connecting rod 220, and thus the fixing member 200 is not prone to generate too large inclination to affect the test of the sample.
The number of the adjusting bolts 300 may also be multiple, for example, four, and the four adjusting bolts 300 may be respectively disposed on four side surfaces of the auxiliary base 100, so that the advantage of the design is that the fixing device 200 can be limited from different angles, and the limiting effect is better. Of course, other screw connection methods such as bolt connection may be adopted, and the present application is not limited thereto.
Based on this, this application still provides a nanometer probe detecting system, including nanometer probe platform and fixing device, nanometer probe platform includes workstation and probe card, place the fixer on the workstation, and the fixer is located between workstation and the probe card, the probe card is along being close to the direction of workstation removes in order to contact the sample. In the embodiment, the sample is fixed on the fixer through the auxiliary base, and then the sample fixed on the fixer and the fixer are taken out of the auxiliary base and placed on the workbench of the nano probe station, so that the problem that the sample is not convenient to fix in the preparation process is solved, and the detection efficiency and precision are improved.
To sum up, the embodiment of the utility model provides a fixing device for fixed sample, including auxiliary base, fixer and adjusting bolt, mounting hole and screw hole have in the auxiliary base, the mounting hole with the screw hole is all followed auxiliary base's surface extends into in the auxiliary base, the mounting hole with screw hole mutually perpendicular and intercommunication each other, the one end of fixer stretches into in the mounting hole, the other end exposes the mounting hole is with fixed the sample, adjusting bolt stretches into from the screw hole with fixed in the mounting hole the fixer. It is right through auxiliary base and adjusting bolt the fixer carries on spacingly, prevents the fixer rocks at the fixed in-process of sample, thereby guarantees the sample is at the stability of test procedure to, when collecting the sample, make adjusting bolt remove towards the direction of keeping away from the connecting rod, can be easily take out the fixer, be difficult to cause the damage to the fixer, whole device simple structure, convenient operation.
The above description is only for the preferred embodiment of the present invention, and does not limit the present invention. Any technical personnel who belongs to the technical field, in the scope that does not deviate from the technical scheme of the utility model, to the technical scheme and the technical content that the utility model discloses expose do the change such as the equivalent replacement of any form or modification, all belong to the content that does not break away from the technical scheme of the utility model, still belong to within the scope of protection of the utility model.
Claims (10)
1. The utility model provides a fixing device for fixed sample, its characterized in that, includes auxiliary base, fixer and adjusting bolt, mounting hole and screw hole have in the auxiliary base, the mounting hole with the screw hole is all followed the surface of auxiliary base extends into in the auxiliary base, the mounting hole with screw hole mutually perpendicular and intercommunication each other, the one end of fixer stretches into in the mounting hole, the other end exposes the mounting hole is with fixed the sample, adjusting bolt stretches into from the screw hole in the mounting hole with fixed the fixer.
2. The fixture of claim 1, wherein the holder comprises a platform and a connecting rod connected to each other, the connecting rod extending into the mounting hole, the platform exposing the mounting hole, the sample being secured to an upper surface of the platform.
3. The fixture apparatus of claim 2, wherein the connecting bar is integrally formed with the carrier.
4. The fastening device of claim 2, wherein the diameter of the mounting hole is larger than the diameter of the connecting rod so that the mounting hole and the connecting rod are in a clearance fit.
5. The fastening device of claim 3, wherein the gap between the inner wall of the mounting hole and the outer wall of the connecting rod is between 0.1mm and 0.2 mm.
6. The fixture of claim 2, wherein the sample is secured to the carrier by a cupper glue.
7. The fixture of claim 6, wherein the copper cement is disposed around the sample and compresses the sample.
8. The fixture apparatus of claim 1, wherein the auxiliary base is made of metal.
9. A nanoprobe testing apparatus comprising a nanoprobe stage and the fixture of any one of claims 1 to 8, wherein the nanoprobe stage comprises a stage on which a fixture is placed and a probe card, the fixture is located between the stage and the probe card, and the probe card moves in a direction close to the stage to contact the sample.
10. The nanoprobe detection apparatus of claim 9, wherein the sample is a wafer or a chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921866200.XU CN211043432U (en) | 2019-10-30 | 2019-10-30 | Fixing device and nanoprobe detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921866200.XU CN211043432U (en) | 2019-10-30 | 2019-10-30 | Fixing device and nanoprobe detection device |
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| Publication Number | Publication Date |
|---|---|
| CN211043432U true CN211043432U (en) | 2020-07-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201921866200.XU Active CN211043432U (en) | 2019-10-30 | 2019-10-30 | Fixing device and nanoprobe detection device |
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| CN (1) | CN211043432U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112129973A (en) * | 2020-09-25 | 2020-12-25 | 上海华力微电子有限公司 | Auxiliary fixing device |
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2019
- 2019-10-30 CN CN201921866200.XU patent/CN211043432U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112129973A (en) * | 2020-09-25 | 2020-12-25 | 上海华力微电子有限公司 | Auxiliary fixing device |
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