CN209822591U - Scanning electron microscope sample stage for non-conductive block sample - Google Patents
Scanning electron microscope sample stage for non-conductive block sample Download PDFInfo
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- CN209822591U CN209822591U CN201920526862.6U CN201920526862U CN209822591U CN 209822591 U CN209822591 U CN 209822591U CN 201920526862 U CN201920526862 U CN 201920526862U CN 209822591 U CN209822591 U CN 209822591U
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Abstract
The utility model relates to a non-conducting block is scanning electron microscope sample platform for sample, including base and round platform, the surface of round platform is provided with the centre gripping subassembly that is used for the centre gripping sample, the centre gripping subassembly is whole to be made by the copper product, the centre gripping subassembly is including consecutive horizontal connecting portion, hunch high portion and clamping part, the through-hole has been seted up on the horizontal connecting portion, horizontal connecting portion through pass through the through-hole bolt fastening on the round platform and with round platform surface contact, hunch high portion is used for providing accommodation space for the sample, the clamping part is along hunch high portion peak downward sloping setting, the bolt, round platform and base are made by the aluminium material. The utility model discloses can pass through the effectual way of leading of copper centre gripping subassembly, aluminium matter round platform and aluminium matter base to the electric charge on sample surface, still have the function of fixed sample simultaneously, conveniently load and unload the sample to can not harm and pollute the sample surface, improve work efficiency moreover greatly, be fit for popularizing and applying.
Description
Technical Field
The utility model relates to a semiconductor manufacturing auxiliary assembly technical field, in particular to non-conducting block is scanning electron microscope sample platform for sample.
Background
Under the rapid development of science and technology, a scanning electron microscope is widely applied in various fields due to the characteristics of simplicity, high efficiency, high resolution and the like. Scanning electron microscopy is one of the most widely used material characterization devices. The device has the imaging capability of larger depth of field, wider amplification range and nanoscale or even sub-nanoscale high resolution, can be used for imaging and size measurement of complex and rough surface morphology, and can be used for analyzing the component distribution of some materials by matching with a back scattering electron probe.
When a non-conductive sample such as sapphire, quartz and other materials is observed under a scanning electron microscope, a serious charge phenomenon occurs, so that the appearance of the sample cannot be accurately observed. The current common solution is to stick a conductive tape between the sample surface and the sample stage to conduct away the charges on the sample surface, but the conductive tape is not very conductive and often damages or contaminates the sample surface when taken off.
Disclosure of Invention
The utility model discloses a solve the technical problem that exists among the well-known technique and provide a non-conducting block body scanning electron microscope sample platform for sample, this sample platform can be with the effectual electric charge of sample surface lead away, fixed sample that simultaneously can be fine, and convenient loading and unloading can not harm and pollute the sample surface.
The utility model discloses a solve the technical scheme that technical problem that exists among the well-known technique took and be:
the utility model provides a non-conducting block is scanning electron microscope sample platform for sample, includes base and round platform, the surface of round platform is provided with the centre gripping subassembly that is used for the centre gripping sample, the centre gripping subassembly is whole to be made by the copper product, the centre gripping subassembly includes consecutive horizontal connecting portion, hunch high portion and clamping part, the through-hole has been seted up on the horizontal connecting portion, horizontal connecting portion through pass through the through-hole bolt fastening on the round platform and with round platform surface contact, hunch high portion is used for providing the accommodation space for the sample, the clamping part sets up along hunch high portion peak downward sloping, bolt, round platform and base are made by the aluminium material.
In the above technical solution, preferably, the clamping assembly is a sheet structure.
In the above technical solution, preferably, the horizontal connecting portion and the joint of the arch portion and the clamping portion are arranged at obtuse angles.
In the above technical solution, it is further preferable that the horizontal connecting portion and the arch portion and the clamping portion connecting portion are all arc transitional connections.
In the above technical solution, preferably, the number of the clamping assemblies is plural.
In the above technical solution, it is further preferable that the holding members are arranged in a matrix.
In the above technical solution, it is further preferable that the clamping assemblies are uniformly distributed along the circumferential direction of the circular truncated cone.
In the above-described aspect, preferably, the horizontal connecting portion, the arch portion, and the clamping portion are integrally manufactured.
The utility model has the advantages and positive effects that:
the utility model discloses a by the centre gripping subassembly that clamping part, hunch high portion and horizontal connecting portion constitute, and adopt the centre gripping subassembly of making by the copper product, can effectively lead away the electric charge on sample surface through copper clamping subassembly, aluminium matter round platform and aluminium matter base, still have the function of fixed sample simultaneously, need not use the electrically conductive sticky tape to fix at the sample bottom, conveniently load and unload the sample, and can not damage and pollute the sample surface; the clamping assembly can be conveniently adjusted by fixing the clamping assembly through the bolt, so that a sample can be conveniently fixed and observed; the utility model discloses the structural design is ingenious, and convenient to use is convenient for operate, has not only solved conductive adhesive tape and can not lead away the electric charge on sample surface is whole and the sample often can damage or pollute the problem on sample surface when taking off, has improved work efficiency moreover greatly, has very big demand in material and biological research field, is fit for popularizing and applying.
Drawings
Fig. 1 is a schematic structural diagram of a sample stage according to a preferred embodiment of the present invention;
fig. 2 is a top view of a sample stage according to a preferred embodiment of the present invention;
fig. 3 is a front view of a clamping assembly provided by a preferred embodiment of the present invention;
fig. 4 is a top view of fig. 3.
In the figure: 1. a circular truncated cone; 2. a clamping assembly; 2-1, a horizontal connecting part; 2-2, a raised part; 2-3, a clamping part; 2-4, through holes; 3. a bolt; 4. a base; 4-1, dovetail mounting groove.
Detailed Description
For further understanding of the contents, features and effects of the present invention, the following embodiments are exemplified and will be described in detail with reference to the accompanying drawings:
in the description of the present invention, it is to be understood that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are merely for convenience of description of the present invention and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1 to 4, the present embodiment provides a sample stage for a scanning electron microscope for a non-conductive block sample, including a base 4 and a circular table 1, wherein a surface of the circular table 1 is provided with a clamping assembly 2 for clamping a sample, the clamping assembly 2 is entirely made of a copper material, the clamping assembly 2 includes a horizontal connecting portion 2-1, an arch portion 2-2 and a clamping portion 2-3, which are connected in sequence, the horizontal connecting portion 2-1 is provided with a through hole 2-4, the horizontal connecting portion 2-1 is fixed on the circular table 1 by a bolt 3 penetrating through the through hole 2-4 and is in surface contact with a surface of the circular table 1, the arch portion 2-2 is used for providing a containing space for the sample, the arch portion is obliquely arranged along an upper side of a side connected with the horizontal connecting portion, the arch portion can be changed according to a size of the sample, the clamping portion 2-3 is obliquely, the bolt 3, the round table 1 and the base 4 are all made of aluminum materials. When the device is used, one end of the clamping part of the copper clamping assembly is connected to the surface of a sample to be observed, and one end of the horizontal connecting part is fixed on the aluminum round table through an aluminum bolt penetrating through the through hole.
In order to increase the contact area between the clamping assembly and the sample surface and more effectively conduct away all charges on the sample surface, the clamping assembly 2 is a sheet structure.
As a preferred embodiment, in order to facilitate the manufacture, use and form a good clamping force for the sample, the connection between the horizontal connecting portion 2-1 and the raised portion 2-2 and the connection between the raised portion 2-2 and the clamping portion 2-3 are arranged at obtuse angles.
As a further preferred embodiment, the joint of the horizontal connecting part 2-1 and the arch part 2-2 and the joint of the arch part 2-2 and the clamping part 2-3 are all arc transition connections, so that the transition of the joints is smoother and spontaneous combustion is realized, and the surface of a sample or an operator is prevented from being scratched during operation.
As the preferred embodiment, the clamping assembly 2 is multiple, a plurality of samples can be observed simultaneously, and the working efficiency is greatly improved. The sample stage of this embodiment can place four samples simultaneously.
As a further preferred embodiment, the clamping assemblies 2 are arranged in a matrix or uniformly distributed along the circumferential direction of the circular truncated cone, and can be reasonably selected according to the number of the actual observation samples.
As a preferred embodiment, the horizontal connecting part 2-1, the arch part 2-2 and the clamping part 2-3 are manufactured integrally, and the manufacturing is more convenient.
Furthermore, the utility model discloses a mounting groove can be seted up as required to 4 bottoms of base to can be firm install on the electronic speculum, for example work as the utility model discloses a sample platform when installing on the electric speculum of cai si GeminiSEM 500, the bottom of sample platform base can be opened and be equipped with the interior base matched with dovetail mounting groove 4-1 of electronic speculum sample room.
The utility model discloses a concrete application method as follows:
1. first, the bolt 3 fixed to the circular truncated cone 1 is loosened to rotate the clamp assembly 2 to one side.
2. And putting a sample to be observed at a proper position on the circular truncated cone 1.
3. And rotating the clamping component 2, and lightly placing the clamping component on the surface of the sample to be observed while avoiding the observation area.
4. And screwing the bolt 3, fixing the sample to be observed, and placing the sample into an electron microscope for observation.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any form, and all the changes and modifications equivalent to any simple modification made by the technical entity of the present invention to the above embodiments are within the scope of the technical solution of the present invention.
Claims (8)
1. The utility model provides a non-conductive block is scanning electron microscope sample platform for sample, includes base and round platform, its characterized in that: the surface of round platform is provided with the centre gripping subassembly that is used for the centre gripping sample, the centre gripping subassembly is whole to be made by the copper product, the centre gripping subassembly includes consecutive horizontal connecting portion, hunch high portion and clamping part, the through-hole has been seted up on the horizontal connecting portion, horizontal connecting portion through the bolt fastening who passes the through-hole on the round platform and with round platform surface contact, hunch high portion is used for providing accommodation space for the sample, the clamping part sets up along hunch high portion peak downward sloping, bolt, round platform and base are made by the aluminium material.
2. The scanning electron microscope sample stage for the non-conductive block sample according to claim 1, characterized in that: the clamping assembly is of a sheet structure.
3. The scanning electron microscope sample stage for the non-conductive block sample according to claim 2, characterized in that: the horizontal connecting part and the joint of the arch-shaped high part and the clamping part are arranged in an obtuse angle.
4. A scanning electron microscope sample stage for a non-conductive block sample according to claim 3, characterized in that: and the joints of the horizontal connecting part and the arch height part and the joints of the arch height part and the clamping part are in arc transition connection.
5. A scanning electron microscope sample stage for a non-conductive block sample according to any one of claims 1 to 4, characterized in that: the clamping component is a plurality of.
6. A scanning electron microscope sample stage for a non-conductive block sample according to claim 5, characterized in that: the clamping assemblies are arranged in a matrix.
7. A scanning electron microscope sample stage for a non-conductive block sample according to claim 5, characterized in that: the clamping assemblies are uniformly distributed along the circumferential direction of the circular truncated cone.
8. The scanning electron microscope sample stage for the non-conductive block sample according to claim 1, characterized in that: the horizontal connecting part, the arch-shaped part and the clamping part are manufactured integrally.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920526862.6U CN209822591U (en) | 2019-04-17 | 2019-04-17 | Scanning electron microscope sample stage for non-conductive block sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920526862.6U CN209822591U (en) | 2019-04-17 | 2019-04-17 | Scanning electron microscope sample stage for non-conductive block sample |
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| Publication Number | Publication Date |
|---|---|
| CN209822591U true CN209822591U (en) | 2019-12-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920526862.6U Active CN209822591U (en) | 2019-04-17 | 2019-04-17 | Scanning electron microscope sample stage for non-conductive block sample |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112147167A (en) * | 2020-11-05 | 2020-12-29 | 中国科学院地质与地球物理研究所 | Scanning electron microscope's geological sample fixing device |
| CN113945599A (en) * | 2021-10-19 | 2022-01-18 | 北京工业大学 | Method for removing non-conductive sample charge effect in scanning electron microscope |
-
2019
- 2019-04-17 CN CN201920526862.6U patent/CN209822591U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112147167A (en) * | 2020-11-05 | 2020-12-29 | 中国科学院地质与地球物理研究所 | Scanning electron microscope's geological sample fixing device |
| CN112147167B (en) * | 2020-11-05 | 2021-07-13 | 中国科学院地质与地球物理研究所 | Scanning electron microscope's geological sample fixing device |
| CN113945599A (en) * | 2021-10-19 | 2022-01-18 | 北京工业大学 | Method for removing non-conductive sample charge effect in scanning electron microscope |
| CN113945599B (en) * | 2021-10-19 | 2024-03-29 | 北京工业大学 | Method for removing charge effect of non-conductive sample in scanning electron microscope |
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