CN206225315U - ESEM Multifunctional nonstandard sample stage - Google Patents
ESEM Multifunctional nonstandard sample stage Download PDFInfo
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- CN206225315U CN206225315U CN201621129066.1U CN201621129066U CN206225315U CN 206225315 U CN206225315 U CN 206225315U CN 201621129066 U CN201621129066 U CN 201621129066U CN 206225315 U CN206225315 U CN 206225315U
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- sample
- pedestal
- adjustable plate
- esem
- multifunctional
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The utility model is related to a kind of ESEM Multifunctional nonstandard sample stage, including pedestal, it is characterized in that：Multiple screwed holes for placing sample or sample sample platform are set on the pedestal；The adjustable plate that can be lifted and be translated with opposite base is installed in the side of the pedestal, is the gap for clamping sample between adjustable plate and pedestal.The base bottom is connected with the motor in electron microscopic sample storehouse.Side on the adjustable plate away from pedestal sets translation screw rod, and the bottom of adjustable plate sets lifting screw.The pedestal is shaped as rectangle.Sample stage described in the utility model can not only meet the placement of conventional sample, and uneven for bottom, the especially placement of ultra-thin sample more can be advantageous, while all kinds, the sample of various height can be placed, save the pumpdown time, improve detection efficiency.
Description
Technical field
The utility model is related to a kind of ESEM sample stage, especially a kind of ESEM Multifunctional nonstandard sample
Platform.
Background technology
ESEM is a kind of important analytical instrument in material analysis and detection.SEM utilizes electronics
With the interaction of material, sample various physics, the information of chemical property in itself, such as pattern, composition, crystalline substance can be obtained
Body structure, electronic structure and internal electric field or magnetic field etc..Sample room is the important component of electron beam system, except placing
Outside sample, also various signal sensors are laid in correct position.And sample stage therein, it is the group of a complexity and precision
Part, being driven by motor can realize X, Y, the step-by-step movement movement of Z-direction and rotate, and should be able to reliably carry or clamp sample, and
The action such as enable sample to realize translating, incline and rotate, to be divided each ad-hoc location or particular orientation on sample
Analysis.It is different because the sample type of scanning electron microscopic observation is various, or some ultra-thin samples uneven for some bottoms,
Can not stand and put sample, it is impossible to sample is fixed on sample stage with two-sided conductive tape, so as to sample stage can not be realized
Mobile or rotation, inconvenience is caused to scanning electron microscope analysis；Simultaneously for needing to detect various types of samples, because it is high
Degree is inconsistent, it is to avoid when relatively low sample is observed, sample higher can encounter detector, often divide different batches to be surveyed
Examination, places sample and is required for spending many times to go to vacuumize every time, reduces detection efficiency.
The content of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, there is provided a kind of ESEM is with multi-functional non-
Standard specimen sample platform, the sample stage can not only meet the placement of conventional sample, uneven for bottom, the especially placement of ultra-thin sample
More can be advantageous, while all kinds, the sample of various height can be placed, the pumpdown time is saved, improve detection efficiency.
According to the technical scheme that the utility model is provided, ESEM Multifunctional nonstandard sample stage, including pedestal,
It is characterized in that：Multiple screwed holes for placing sample or sample sample platform are set on the pedestal；Pacify in the side of the pedestal
Dress can lift the adjustable plate translated with opposite base, be the gap for clamping sample between adjustable plate and pedestal.
Further, the base bottom is connected with the motor in electron microscopic sample storehouse.
Further, the base bottom is connected by U-type groove with the motor in electron microscopic sample storehouse.
Further, the side on the adjustable plate away from pedestal sets translation screw rod, and the bottom of adjustable plate sets lifting
Screw rod.
Further, the pedestal is shaped as rectangle.
Further, the size of the pedestal is 70mm × 50mm × 8mm, a diameter of 3mm of pedestal upper screwed hole；It is described
Adjustable plate uses metallic plate, and size is 70mm × 50mm × 8mm, and the range of adjustable plate is more than pedestal 0~8mm, translation
Scope is 0~10mm of pedestal side.
Further, the material of the U-type groove of the base bottom is copper alloy.
The utility model has advantages below：
（1）Sample stage can not only meet the placement of conventional sample, uneven for bottom, the especially placement of ultra-thin sample
More can be advantageous；
（2）Sample stage described in the utility model can place all kinds, the sample of various height, when saving is vacuumized
Between, improve detection efficiency.
Brief description of the drawings
Fig. 1 is the structural representation of ESEM Multifunctional nonstandard sample stage described in the utility model.
Fig. 2 is the schematic diagram of the sample stage base bottom U-type groove.
Specific embodiment
With reference to specific accompanying drawing, the utility model is described in further detail.
As shown in Fig. 1~Fig. 2：The ESEM includes pedestal 1, screwed hole 2, adjustable plate with Multifunctional nonstandard sample stage
3rd, translation screw rod 4, lifting screw 5, U-type groove 6 etc..
As shown in figure 1, ESEM described in the utility model Multifunctional nonstandard sample stage, including pedestal 1, the bottom of pedestal 1
Portion center sets U-type groove 6, and pedestal 1 is connected by U-type groove 6 with the motor in electron microscopic sample storehouse；6 are set on the pedestal 1
Individual screwed hole 2, screwed hole 2 can be used for placing sample or sample sample platform.
The adjustable plate 3 that can be lifted and be translated with opposite base 1 is installed in the side of the pedestal 1；It is remote on the adjustable plate 3
Translation screw rod 4 is set from the side of pedestal 1, for realizing moving horizontally between the opposite base 1 of adjustable plate 3；The adjustable plate 3
Bottom set lifting screw 5, be used to realize the lifting action of adjustable plate 3.
The pedestal 1 is shaped as rectangle, and size is 70mm × 50mm × 8mm, the upper screwed hole 2 of pedestal 1 it is a diameter of
3mm；The adjustable plate 3 uses metallic plate, and size is 70mm × 50mm × 8mm, and the range of adjustable plate 3 is pedestal more than 10
~8mm, range of translation is the 0~10mm of side of pedestal 1；The material of U-type groove 6 of the bottom of the pedestal 1 is copper alloy.
The course of work of the present utility model is as follows：The utility model is applied to place sample when ESEM is detected, specifically
Applicable cases are as follows：
After sample finishes pretreatment, it is positioned on pedestal 1 or to install sample sample platform in the screwed hole 2 of pedestal 1, will tries
Sample is positioned in sample sample platform.The sample uneven for bottom is high by adjusting lifting of the lifting screw 5 to realize adjustable plate 3
Degree, makes the high unity of sample.For ultra-thin sample, by adjusting the water between translation screw rod 4 adjustment adjustable plate 3 and pedestal 1
Prosposition is put, the gap by ultra-thin sample clamping between adjustable plate 3 and pedestal 1, during sample bench moves and be inclined not
Can slide, and the sample of different height can be placed, improve detection efficiency.
Sample room vacuumizes, and after reaching level of vacuum needed for equipment, making alive carries out sample observation.
Claims (7)
1. a kind of ESEM Multifunctional nonstandard sample stage, including pedestal（1）, it is characterized in that：In the pedestal（1）Upper setting
Multiple places the screwed hole of sample or sample sample platform（2）；In the pedestal（1）Side install can lift and opposite base
（1）The adjustable plate of translation（3）, adjustable plate（3）And pedestal（1）Between be gap for clamping sample.
2. ESEM as claimed in claim 1 Multifunctional nonstandard sample stage, it is characterized in that：The pedestal（1）Bottom with
Motor in electron microscopic sample storehouse is connected.
3. ESEM as claimed in claim 1 Multifunctional nonstandard sample stage, it is characterized in that：The pedestal（1）Bottom leads to
Cross U-type groove（6）It is connected with the motor in electron microscopic sample storehouse.
4. ESEM as claimed in claim 1 Multifunctional nonstandard sample stage, it is characterized in that：The adjustable plate（3）It is upper remote
From pedestal（1）Side set translation screw rod（4）, adjustable plate（3）Bottom set lifting screw（5）.
5. ESEM as claimed in claim 1 Multifunctional nonstandard sample stage, it is characterized in that：The pedestal（1）Shape
It is rectangle.
6. ESEM as claimed in claim 1 Multifunctional nonstandard sample stage, it is characterized in that：The pedestal（1）Size
It is 70mm × 50mm × 8mm, pedestal（1）Upper screwed hole（2）A diameter of 3mm；The adjustable plate（3）Using metallic plate, size
It is 70mm × 50mm × 8mm, adjustable plate（3）Range be pedestal（1）0~8mm of the above, range of translation is pedestal（1）Side
0~10mm of face.
7. ESEM as claimed in claim 3 Multifunctional nonstandard sample stage, it is characterized in that：The pedestal（1）The U of bottom
Type groove（6）Material be copper alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621129066.1U CN206225315U (en) | 2016-10-17 | 2016-10-17 | ESEM Multifunctional nonstandard sample stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621129066.1U CN206225315U (en) | 2016-10-17 | 2016-10-17 | ESEM Multifunctional nonstandard sample stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206225315U true CN206225315U (en) | 2017-06-06 |
Family
ID=58788089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621129066.1U Active CN206225315U (en) | 2016-10-17 | 2016-10-17 | ESEM Multifunctional nonstandard sample stage |
Country Status (1)
| Country | Link |
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| CN (1) | CN206225315U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117804872A (en) * | 2024-02-28 | 2024-04-02 | 广州智达实验室科技有限公司 | Electronic microscope sample preparation system and control method |
-
2016
- 2016-10-17 CN CN201621129066.1U patent/CN206225315U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117804872A (en) * | 2024-02-28 | 2024-04-02 | 广州智达实验室科技有限公司 | Electronic microscope sample preparation system and control method |
| CN117804872B (en) * | 2024-02-28 | 2024-05-28 | 广州智达实验室科技有限公司 | Electronic microscope sample preparation system and control method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221117 Address after: 214101 No. 8, Dongting Chunxin East Road, Xishan District, Wuxi City, Jiangsu Province Patentee after: Wuxi inspection and Certification Institute Address before: 214101 No. 8, Dongting Chunxin East Road, Xishan District, Wuxi City, Jiangsu Province Patentee before: WUXI PRODUCT QUALITY SUPERVISION AND INSPECTION INSTITUTE |
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| TR01 | Transfer of patent right |