CN206697444U - multifunctional sample table of scanning electron microscope - Google Patents
multifunctional sample table of scanning electron microscope Download PDFInfo
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- CN206697444U CN206697444U CN201720389693.7U CN201720389693U CN206697444U CN 206697444 U CN206697444 U CN 206697444U CN 201720389693 U CN201720389693 U CN 201720389693U CN 206697444 U CN206697444 U CN 206697444U
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- sample
- placement table
- pressing plate
- base
- conductive
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- 238000003825 pressing Methods 0.000 claims abstract description 33
- 229910052751 metal Inorganic materials 0.000 claims abstract description 22
- 239000002184 metal Substances 0.000 claims abstract description 21
- 238000012360 testing method Methods 0.000 claims description 45
- 238000002389 environmental scanning electron microscopy Methods 0.000 claims description 21
- 239000004020 conductor Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 abstract description 4
- 238000000576 coating method Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 239000000047 product Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 235000019082 Osmanthus Nutrition 0.000 description 1
- 241000333181 Osmanthus Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- Sampling And Sample Adjustment (AREA)
Abstract
The utility model relates to a multifunctional sample stage of a scanning electron microscope, which comprises a base, a sample placing table and a conductive pressing plate. The base can be installed on the tray of scanning electron microscope to be connected with the tray electrically conductive. The sample placing table is fixed on the base, is in conductive connection with the base and is used for placing a sample to be tested. One end of the conductive pressure plate is pressed on one side of the sample to be measured, which is provided with the metal coating, and the other end of the conductive pressure plate is connected on the sample placing table and is in conductive connection with the sample placing table. The sample placing table is bent into an L shape by a plate, a first side surface of the sample placing table is horizontally fixed on the base, and a second side surface is vertically upward; the sample to be measured is placed on the first side surface of the sample placing table, and the side with the metal coating faces upwards; the conductive pressure plate is slidably connected to the second side of the sample rest. The utility model discloses can play electrically conductive effect when fixed sample that awaits measuring, can not destroy the metallic coating on sample surface that awaits measuring.
Description
Technical field
The utility model is on a kind of parts of ESEM, more particularly to a kind of multifunctional sample of ESEM
Platform.
Background technology
Exist it is well known that the operation principle of ESEM discharges a large amount of electronics for filament (Flied emission filament or tungsten filament)
Accelerate in the presence of magnetic field and electric field, bombardment testing sample surface, be allowed to produce secondary electron or backscattered electron, from into
Picture.When substantial amounts of electronics bombards nonconducting testing sample surface under upper state, easily produce charge accumulation and electric discharge is existing
As so that High brightness characteristics are presented in image local area.Therefore researcher is in sample non-conductive with sem test
Obtaining clearly image can be before testing with plated film instrument in testing sample surface plating last layer conductive metal elements (such as Au, Cr
Deng), other faces of testing sample are still non-conductive, then by testing sample bundled fixed and connect surface to be measured with conducting adhesive cloth
With metal-like sample platform, it is allowed to export unnecessary electric charge and avoids electric discharge phenomena, is dissipated so as to obtain clearly secondary electron image or the back of the body
Radio subgraph (China State Bureau of Quality and Technical Supervision, GB/T 18295-2001 oil and gas reservoir sample of sandstone SEM point
Analysis method, p.1-8,2001).This method that binding testing sample is pasted using conducting adhesive cloth is easily destroyed the gold-plated of tested surface
Layer, it is unfavorable for secondary supplement test in future.
Researcher consider how sample stages clamping testing sample and solve when designing and manufacturing sample platform of scanning electronic microscope more
Certainly rotatable function problem, such as Li Yan fine jades etc., sample platform of scanning electronic microscope, the patent No.：CN201520290865.6.Also there is portion
Point sample stage is designed for solving the problems, such as how more setting-out product numbers are so as to improving testing efficiency, such as Cheng Jin etc., one kind
Awkward silence at a meeting ESEM multifunctional sample platform, the patent No.：CN201620194696.0；And osmanthus dawn dew etc., scanning electron microscope electron
Back scattering multifunctional sample platform, the patent No.：CN201520820847.4.Current yet there are no setting for sample stage in the prior art
Meter manufacture is specific to electric discharge and conductivity issues.
Thus, the present inventor relies on experience and the practice for being engaged in relevant industries for many years, proposes a kind of more work(of ESEM
Can sample stage, the defects of to overcome prior art.
Utility model content
The purpose of this utility model is the multifunctional sample platform for providing a kind of ESEM, in the same of fixed testing sample
When can play electric action, the coat of metal on testing sample surface will not be destroyed.
The purpose of this utility model is achieved in that a kind of multifunctional sample platform of ESEM, the one of testing sample
There is the coat of metal side, and the multifunctional sample platform of the ESEM includes：
It base, can be installed on the pallet of the ESEM, and be conductively connected with the pallet；
Sample placement table, it is fixed on the base, and is conductively connected with the base, for places testing sample；With
And
Conductive pressing plate, one end of the conductive pressing plate are pressed on the side on the testing sample with the coat of metal, separately
One end is connected on the sample placement table and is conductively connected with the sample placement table.
The coat of metal on testing sample surface and sample placement table are conductively connected by conductive pressing plate, so as to electric with scanning
The pallet of mirror is conductively connected；Also testing sample is fixed for conductive pressing plate simultaneously, will not destroy the metal on testing sample surface
Coating.
In a better embodiment of the present utility model, the conductive pressing plate sample placement table can slide relatively
It is connected on the sample placement table.Conductive plate may move, and adapt to the testing sample of different height or width.
In a better embodiment of the present utility model, the sample placement table is bent L-shaped, the sample by sheet material
The first side of placement table is horizontally fixed on the base, and second side is straight up；The testing sample is placed on described
The first side of sample placement table, there is the side of the coat of metal upward；The conductive pressing plate is slidably connected at the sample and put
Put the second side of platform.There is baffle plate vertically upward on one side of sample placement table, and other three sides are open space, so unlimited
System puts testing sample specification and size.
In a better embodiment of the present utility model, the conductive pressing plate is L-shaped, the first side of the conductive pressing plate
Elongated slot is opened up on wall；Trip bolt is threadedly coupled in the second side of the sample placement table, the trip bolt is positioned at described
In elongated slot, the conductive pressing plate can be slided in vertical direction and fixed by the trip bolt；Second side of the conductive pressing plate
Wall protrudes horizontally up, for being pressed on the coat of metal of the testing sample.Conductive plate moving up and down is set using " L " shape
Meter, testing sample can be not only fixed, and for the conduction on surface to be measured.
In a better embodiment of the present utility model, the nut of the trip bolt is pinched provided with outwardly hand
Hold portion.The outwardly setting of nut of trip bolt, it is easy to hand to twist and fixes, it is simple and convenient.
In a better embodiment of the present utility model, the base, the sample placement table and the conductive pressing plate
Made using conductive material.
From the above mentioned, multifunctional sample platform of the present utility model has advantages below：1st, test sample will be treated by conductive pressing plate
The coat of metal on product surface is conductively connected with sample placement table, so as to which the pallet with ESEM is conductively connected；Conductive pressure simultaneously
Also testing sample is fixed for plate, will not destroy the coat of metal on testing sample surface.2nd, one side of sample placement table has vertical
Straight upward baffle plate, other three sides are open space, do not limit put testing sample specification and size so.3rd, can on move down
Dynamic conductive plate is designed using " L " shape, can not only fix testing sample, and for the conduction on surface to be measured.4th, conductive plate
It can move up and down, adapt to the testing sample of different height.5th, the outwardly setting of the nut of trip bolt, it is easy to hand to twist solid
It is fixed, it is simple and convenient.
Brief description of the drawings
The following drawings is only intended to, in doing the utility model schematic illustration and explanation, not limit model of the present utility model
Enclose.Wherein：
Fig. 1：For the structural representation of the utility model multifunctional sample platform.
Embodiment
In order to which the technical characteristics of the utility model, purpose and effect are more clearly understood, now control illustrates
Specific embodiment of the present utility model.In the utility model described " connection ", both including being joined directly together between two parts,
Also include by least one intermediate member being connected between two parts.The noun of locality employed in the utility model is (as above,
Under, it is forward and backward etc.) be intended merely to reference to the clearer statement technology contents of accompanying drawing, not to the tool of technical solutions of the utility model
Body limits.
As shown in figure 1, the utility model provides a kind of multifunctional sample platform 10 of ESEM, the side of testing sample
There is the coat of metal, other sides are non-conductive, and beam bombardment is the side with the coat of metal, i.e., surface to be measured.It is described
The multifunctional sample platform 10 of ESEM includes base 1, sample placement table 2 and conductive pressing plate 3.Base 1 can be installed to described sweep
Retouch in the pallet (not shown) of Electronic Speculum, and be conductively connected with the pallet.The tool of base 1 is not limited in the utility model
Body form, illustrated with one of which specific embodiment, the main body of base 1 is round pie, its underpart circle centre position have one to
The thin cylindrical rod 11 of lower stretching is attached thereto, and its top is streamlined to be stretched out upwards, and the top of base 1 is fixed with sample placement table 2
It is connected.The main part of base 1 is thick 3mm, diameter 20mm cake, and the thin cylindrical rod 11 of its underpart circle centre position is about 8mm, directly
Footpath about 3mm.The thin cylindrical rod 11 is mainly used in the circular hole for the sample tray that interleave scan Electronic Speculum carries.
Sample placement table 2 is fixed on the base 1, and is conductively connected with the base 1, for placing testing sample.
The concrete form of unlimited random sample product placement table 2 in the utility model, in a preferable specific embodiment, the sample is shelved
Platform 2 is bent L-shaped by sheet material, or is dustpan shape.The first side 21 of the sample placement table 2 is horizontally fixed on the base
On 1, first side 21 is length of side 20mm square；Square center is connected as a single entity with base 1.Second side 22 is straight up
Stretch out, the width of second side 22 is identical with the length of side of first side 21, and the height stretched out upwards is 10mm.That is sample placement table 2
While with baffle plate vertically upward, other three sides are not blocked, and are formed open space, can be placed different size and the sample of size
Product.The lower section center of sample placement table 2 is fixed with base 1 and is connected as a single entity, non-dismountable.The testing sample is placed on the sample
The first side 21 of product placement table 2, in the present embodiment, side of the testing sample with the coat of metal upward, electron beam on to
Lower bombardment surface to be measured, other sides of testing sample are non-conductive.
One end of conductive pressing plate 3 is pressed on the side on the testing sample with the coat of metal, so as to by testing sample
It is fixed on sample placement table 2.The other end of conductive pressing plate 3 be connected on the sample placement table 2 and with the sample
Placement table 2 is conductively connected.The coat of metal and sample placement table 2 can be conductively connected by conductive pressing plate 3, so as to pass through base 1
Electrically connected with the pallet of ESEM, it is simultaneous to play a part of fixed testing sample.Conductive pressing plate 3 is not limited in the utility model yet
Concrete form, as long as above-mentioned effect can be realized.
In a preferred embodiment, the conductive pressing plate 3 is slidably connected at the second side 22 of the sample placement table 2
On.Specifically, the conductive pressing plate 3 is the L-shaped that flat part is bent into, the first side wall 31 is 30mm × 10mm rectangle；The
Two side walls 32 are length of side 10mm square.Elongated slot 33 is opened up on the first side wall 31 of the conductive pressing plate 3.The sample is shelved
There are screwed hole, screwed hole internal thread connection trip bolt 4 in the second side 22 of platform 2, the trip bolt 4 is located at the elongated slot
In 33, the groove width and the diameter of trip bolt 4 of elongated slot 33 are essentially identical, are allowed to move freely in elongated slot 33.Conduction pressure
The first side wall 31 of plate 3 is vertically arranged, and elongated slot 33 is enclosed on trip bolt 4, is slided in vertical direction and by the trip bolt 4
It is fixed.The second sidewall 32 of the conductive pressing plate 3 protrudes horizontally up, and for being pressed on the coat of metal of the testing sample, rises
To fixed and electric action.Conductive pressing plate 3 moves up and down the testing sample for adapting to different height.
Further, the trip bolt 4 includes screw rod and nut, and screw rod uses the horizontal tail self-tapping screw pattern of standard,
Nut is provided with outwardly hand grips, is easy to hand to twist and fixes.
In above-mentioned various embodiments, base 1, sample placement table 2 and conductive pressing plate 3 are made using conductive material, example
As used metal material, the multifunctional sample platform 10 of monolithic conductive is formed.
The schematical embodiment of the utility model is the foregoing is only, is not limited to model of the present utility model
Enclose.All combinations of illustrated feature are not necessarily the solution that the utility model is limited in embodiment, can be with
Understand that these additional construction features and operations improvement can be used alone or be combined with each other.It will therefore be appreciated that
The utility model is not limited to the combination of any specific feature or element, and any desired combinations of features described here is all
It can be carried out without departing from the scope of protection of the utility model, any those skilled in the art, not depart from the utility model
Design and principle on the premise of made equivalent variations and modification, the scope of the utility model protection all should be belonged to.
Claims (6)
1. there is the coat of metal a kind of multifunctional sample platform of ESEM, the side of testing sample, it is characterised in that the scanning
The multifunctional sample platform of Electronic Speculum includes：
It base, can be installed on the pallet of the ESEM, and be conductively connected with the pallet；
Sample placement table, it is fixed on the base, and is conductively connected with the base, for places testing sample；And
Conductive pressing plate, one end of the conductive pressing plate are pressed on the side on the testing sample with the coat of metal, the other end
It is connected on the sample placement table and is conductively connected with the sample placement table.
2. the multifunctional sample platform of ESEM as claimed in claim 1, it is characterised in that the conductive pressing plate can relative institute
State being connected on the sample placement table for sample placement table slip.
3. the multifunctional sample platform of ESEM as claimed in claim 1, it is characterised in that the sample placement table is by sheet material
Bend L-shaped, the first side of the sample placement table is horizontally fixed on the base, and second side is straight up；It is described
Testing sample is placed on the first side of the sample placement table, has the side of the coat of metal upward；The conductive pressing plate is slided
The dynamic second side for being connected to the sample placement table.
4. the multifunctional sample platform of ESEM as claimed in claim 3, it is characterised in that the conductive pressing plate is L-shaped, institute
State and elongated slot is opened up on the first side wall of conductive pressing plate；Trip bolt is threadedly coupled in the second side of the sample placement table, institute
State trip bolt to be located in the elongated slot, the conductive pressing plate can be slided in vertical direction and fixed by the trip bolt；Institute
The second sidewall for stating conductive pressing plate protrudes horizontally up, for being pressed on the coat of metal of the testing sample.
5. the multifunctional sample platform of ESEM as claimed in claim 4, it is characterised in that on the nut of the trip bolt
Provided with outwardly hand grips.
6. the multifunctional sample platform of the ESEM as any one of claim 1-5, it is characterised in that the base,
The sample placement table and the conductive pressing plate are made using conductive material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720389693.7U CN206697444U (en) | 2017-04-14 | 2017-04-14 | multifunctional sample table of scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720389693.7U CN206697444U (en) | 2017-04-14 | 2017-04-14 | multifunctional sample table of scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206697444U true CN206697444U (en) | 2017-12-01 |
Family
ID=60444451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720389693.7U Active CN206697444U (en) | 2017-04-14 | 2017-04-14 | multifunctional sample table of scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206697444U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112397365A (en) * | 2019-08-14 | 2021-02-23 | 中国科学院上海硅酸盐研究所 | Sample table suitable for TIC3X three-ion-beam cutting instrument |
| CN115394620A (en) * | 2022-10-27 | 2022-11-25 | 中铝材料应用研究院有限公司 | Scanning electron microscope sample stage |
-
2017
- 2017-04-14 CN CN201720389693.7U patent/CN206697444U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112397365A (en) * | 2019-08-14 | 2021-02-23 | 中国科学院上海硅酸盐研究所 | Sample table suitable for TIC3X three-ion-beam cutting instrument |
| CN112397365B (en) * | 2019-08-14 | 2022-06-14 | 中国科学院上海硅酸盐研究所 | Sample table suitable for TIC3X three-ion-beam cutting instrument |
| CN115394620A (en) * | 2022-10-27 | 2022-11-25 | 中铝材料应用研究院有限公司 | Scanning electron microscope sample stage |
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