CN206460941U - A kind of multistation ESEM EBSD sample stages - Google Patents
A kind of multistation ESEM EBSD sample stages Download PDFInfo
- Publication number
- CN206460941U CN206460941U CN201720092546.3U CN201720092546U CN206460941U CN 206460941 U CN206460941 U CN 206460941U CN 201720092546 U CN201720092546 U CN 201720092546U CN 206460941 U CN206460941 U CN 206460941U
- Authority
- CN
- China
- Prior art keywords
- sample
- grooving
- platform
- bench
- esem
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model is related to a kind of multistation ESEM EBSD sample stages, can with the multiple samples of fashionable dress ESEM EBSD sample stages, this sample stage is by a base, multiple platforms, a grooving sample bench composition.Base plays a part of to fix 70 degree of angles, the combination of platform and grooving sample bench can individually control the height of each sample, so as to realize the measurement in same level, measurable another surface of sample in grooving sample bench side, this utility model focus on solve carry out EBSD tests when multiple sample shapes, size and variable thickness sample sample surfaces characterize the problem of, and the height of the adjustable grooving sample bench of cooperation of grooving sample bench and base, you can the height of integrally-regulated all samples.Sample stage has the advantages that cheap, easy to make, simple to operate, applicability is wide, is hardly damaged, while characterizing multiple sample surfaces.
Description
Technical field
The utility model is related to a kind of multistation ESEM EBSD sample stages.
Background technology
SEM abbreviation ESEM, is a kind of using beam bombardment sample, collects sample surfaces signal
So as to the electronic optical instrument of imaging.Because it has, sample preparation is simple, multiplication factor adjustable extent is wide, image resolution ratio is high, scape
Deep big the features such as, through being widely used in the multi-field research such as material, chemistry, biology, microelectronics and industrial production.
In recent years, it is assemblied in SEM（SEM）On EBSD style（Electron Back-
Scattering Patterns, abbreviation EBSP）Crystal microcell is orientated and the analytical technology of crystal structure achieves large development,
The technology is also referred to as EBSD（Electron Backscatter Diffraction, abbreviation EBSD）Or orientation
It is imaged microtechnic（Orientation Imaging Microscopy, abbreviation OIM）Etc., as research material deformation, extensive
The effective means of multiple and recrystallization process.EBSD tests need the angle of sample characterization face and horizontal plane to be 70 ° when characterizing.At present
Commercial EBSD sample stage functions are single, typically can only once load a sample and be tested, when there is multiple sample tests,
The operation such as frequently to repeat to put vacuum, dress sample, vacuumize, it is cumbersome and time consuming, give Electronic Speculum calibration tape to carry out great inconvenience.
The content of the invention
The problem of the utility model exists for above-mentioned prior art makes improvement, i.e., skill to be solved in the utility model
Art problem is to provide a kind of sample stage that EBSD tests are carried out for multiple samples, and the sample stage can load multiple samples simultaneously
Product, realize and measure simultaneously, be greatly enhanced testing efficiency.
In order to solve the above-mentioned technical problem, the technical solution of the utility model is：A kind of multistation ESEM EBSD samples
Sample platform, including base and dress sampling device, dress sampling device include the platform and grooving sample bench of multiple placement samples, and base is bottom surface
For the cuboid of square, with chamfer from its center line of top surface one along 20 degree of faces the rectangular surfaces one to be formed and from top surface should
Otch chamfers the rectangular surfaces two to be formed along 70 degree of faces of relative direction, and a screwed hole and and spiral shell are set in the middle part of rectangular surfaces one
Nail one coordinates, in one cylindrical hole one of the middle part of rectangular surfaces two setting, and on the screwed hole and rectangular surfaces two in rectangular surfaces one
Cylindrical hole one communicate；Platform is rectangular thin plate, and a cylinder two is welded in the rectangular bottom surface of each platform；Grooving sample
Platform is a cuboid, is provided with the multiple grooves for being capable of mounting plate and the circle coordinated with cylinder two is provided with groove
Post holes two, be provided with the bottom surface adjacent with the face that grooving sample bench is slotted multiple screwed holes and with the cooperation of screw two, grooving
Screwed hole on sample bench is communicated with the cylindrical hole two of its relevant position, is welded on the face relative with the face that grooving sample bench is slotted
A cylinder one is connect, the cylinder one is engaged with the cylindrical hole one in rectangular surfaces two, wherein, groove on grooving sample bench,
Cylindrical hole two, screwed hole, screw two number it is identical with the number of platform.
Preferably, the device includes 4 platforms.
Preferably, the square length of side in the side of base is 7mm, high 36mm, a length of 15mm of platform, a width of 15mm, a height of
1mm, a diameter of 3mm of cylinder two, a length of 10mm of the rectangular bottom surface welding of platform, the flute length set on grooving sample bench is
The a diameter of 3mm of cylindrical hole two that is set on 15mm, a width of 15mm, a height of 1mm, grooving sample bench, hole depth are 4mm, grooving sample
The a diameter of 3mm of screwed hole that is set on platform, hole depth are 6mm.
Preferably, when sample is filled on platform, fixed form is conducting resinl.
Preferably, sample stage selects aluminium alloy.
Further, sample is AZ31 magnesium alloys.
The cooperation of cylinder one by being welded on the cylindrical hole one in adjusting base rectangular surfaces two and grooving sample bench is long
Degree realizes the lifting of grooving sample bench, that is, realizes the integral elevating of multiple samples, pass through a pair of grooving sample bench of lock-screw
Locking is highly realized, the connection of locking grooving sample bench and 70 degree of angle bases so as to realize the measurement at 70 degree of angles, and is expanded
Height of specimen adjusting range.
For sample shape and sample in different size, the laminar sample for the different-thickness that is particularly suitable for use in, by adjusting
The length of fit for saving the cylindrical hole two on the cylinder two being welded on platform and grooving sample bench in groove realizes the lifting of platform,
By lock-screw two to podium level realize lock, can be achieved multiple samples same level height so that sample shape and
Multiple samples in different size are realized and measured simultaneously, are met ESEM EBSD signs, are reduced complicated in measurement process
Maneuvering sequence.
For the sample that sample shape and size are basically identical, in the groove that platform is directly fitted to grooving sample bench, use
Conducting resinl is fixed on the position of platform, while measuring the surface of multiple samples, meets ESEM EBSD signs.
Compared with prior art, the utility model has the advantages that：Play a part of to fix 70 degree of angles by base,
The combination of platform and grooving sample bench can individually control the height of multiple samples, so that the measurement in same level is realized,
Solve the problem of multiple sample shapes, size, the sample surfaces of variable thickness sample are characterized when carrying out EBSD tests, and grooving
The height of the adjustable grooving sample bench of cooperation of measurable another surface of sample in sample bench side, grooving sample bench and base,
Can integrally-regulated all samples height, expand height of specimen adjustable range, in addition, sample stage have it is cheap, make
Convenient, simple to operate, applicability is wide, be hardly damaged, while characterizing the advantage of multiple sample surfaces.
The utility model is described in more detail with reference to the accompanying drawings and detailed description.
Brief description of the drawings
Fig. 1 is the device overall structure figure of the utility model embodiment；
Fig. 2 is the understructure figure of the utility model embodiment；
Fig. 3 is the platform and grooving sample platform attachment structure figure of the utility model embodiment；
Fig. 4 is the device schematic cross-section of the utility model embodiment.
In figure：1- bases；2- platforms；3- grooving sample bench；4- rectangular surfaces one；5- rectangular surfaces two；6- screws one；7- cylinders
Kong Yi；8- cylindrical holes two；9- screws two；10- cylinders one；11- cylinders two.
Embodiment
As Figure 1-3, in the utility model preferred embodiment, the present apparatus includes base 1 and dress sampling device, dress sample dress
Putting includes the platforms 2 and grooving sample bench 3 of 4 placement samples, and base 1 is the cuboid that bottom surface is square, with from Qi Ding
The center line of face one chamfers the rectangular surfaces 1 to be formed along 20 degree of faces and chamfers shapes from the otch of top surface along 70 degree of faces of relative direction
Into rectangular surfaces 25, the middle part of rectangular surfaces 1 set a screwed hole and with screw 1 coordinate, in rectangular surfaces 25
Between position one cylindrical hole 1 is set, and screwed hole in rectangular surfaces 1 is communicated with the cylindrical hole 1 in rectangular surfaces 25；It is flat
Platform 2 is rectangular thin plate, and a cylinder 2 11 is welded in the rectangular bottom surface of each platform 2；Grooving sample bench 3 is one rectangular
Body, is provided with 4 grooves for being capable of mounting plate 2 and the cylindrical hole 28 coordinated with cylinder 2 11 is provided with groove,
4 screwed holes are provided with the bottom surface adjacent with the face that grooving sample bench 3 is slotted and are coordinated with screw 29, grooving sample bench 3
On screwed hole communicated with the cylindrical hole 28 of its relevant position, weld one on the face relative with the face that grooving sample bench 3 is slotted
Individual cylinder 1, the cylinder 1 is engaged with the cylindrical hole 1 in rectangular surfaces 25, wherein, on grooving sample bench 3
Groove, cylindrical hole 28, screwed hole, screw 29 number it is identical with the number of platform 2, be 4.
The square length of side in the side of base 1 is 7mm, high 36mm, and a length of 15mm, a width of 15mm, a height of 1mm of platform 2 are put down
The a diameter of 3mm of cylinder 2 11, a length of 10mm of the rectangular bottom surface welding of platform 2, the flute length set on grooving sample bench 3 is
The a diameter of 3mm of cylindrical hole 28 that is set on 15mm, a width of 15mm, a height of 1mm, grooving sample bench 3, hole depth are 4mm, grooving examination
The a diameter of 3mm of screwed hole that is set on sample platform 3, hole depth are 6mm.
The present apparatus is applicable to the metallographic sample preparation of bulk sample, such as common AZ31 magnesium alloys realize that multiple samples are same
When be loaded into row EBSD test.When sample is filled on platform 2, fixed form is conducting resinl, conducting resinl be in order to fix sample,
It is set to be connected generation electric action with sample platform.
In order to reduce material and processing cost, sample stage uses common aluminium alloy for material, carries out linear cutter, energy
Preferable required precision is reached, the quality of sample stage in itself is dramatically reduced, makes dress sample process lighter, and aluminium alloy is resistance to
Mill, extends the service life of this sample stage.
Pass through the cylinder 1 that is welded on the cylindrical hole 1 in the rectangular surfaces 25 of adjusting base 1 and grooving sample bench 3
Length of fit degree realizes the lifting of grooving sample bench 3, that is, realizes the integral elevating of multiple samples, passes through one 6 pairs of diggings of lock-screw
The height of groove sample bench 3 realizes locking, the connection of locking grooving sample bench 3 and 70 degree of angle bases 1, so as to realize the survey at 70 degree of angles
Amount, and expand height of specimen adjusting range.
For sample shape and sample in different size, the laminar sample for the different-thickness that is particularly suitable for use in, by adjusting
The length of fit for saving the cylinder 2 11 and the cylindrical hole 28 in groove on grooving sample bench 3 that are welded on platform 2 realizes platform 2
Lifting, highly realize locking by 25 pairs of platforms 2 of lock-screw, can be achieved multiple samples same level height so that sample
Product shape, size, multiple samples of variable thickness sample are realized and measured simultaneously, are met ESEM EBSD signs, are reduced measurement
During complicated maneuvering sequence.
For sample shape and the much the same sample of size, in the groove that platform 2 is directly fitted to grooving sample bench 3, use
Conducting resinl is fixed on the position of platform 2, while measuring the surface of multiple samples, meets ESEM EBSD signs.
The foregoing is only preferred embodiment of the present utility model, it is all according to present utility model application the scope of the claims done it is equal
Deng change and modification, it should all belong to covering scope of the present utility model.
Claims (6)
1. a kind of multistation ESEM EBSD sample stages, it is characterised in that：It includes base（1）With dress sampling device, dress sample dress
Putting includes the platform of multiple placement samples（2）With grooving sample bench（3）, base（1）For the cuboid that bottom surface is square, have
The rectangular surfaces one to be formed are chamfer from its center line of top surface one along 20 degree of faces（4）And from the otch of top surface along 70 degree of relative direction
Face chamfers the rectangular surfaces two to be formed（5）, in rectangular surfaces one（4）Middle part set a screwed hole and with screw one（6）Coordinate,
In rectangular surfaces two（5）Middle part sets a cylindrical hole one（7）, and rectangular surfaces one（4）On screwed hole and rectangular surfaces two（5）
On cylindrical hole one（7）Communicate；Platform（2）For rectangular thin plate, in each platform（2）Rectangular bottom surface weld a cylinder
Two（11）；Grooving sample bench（3）For a cuboid, being provided with being capable of mounting plate（2）Multiple grooves and set in groove
It is equipped with and cylinder two（11）The cylindrical hole two of cooperation（8）, with grooving sample bench（3）The face of fluting is set on adjacent bottom surface
Have multiple screwed holes and with screw two（9）Coordinate, grooving sample bench（3）On screwed hole and its relevant position cylindrical hole two
（8）Communicate, with grooving sample bench（3）The face of fluting weld a cylinder one on relative face（10）, the cylinder one
（10）With rectangular surfaces two（5）On cylindrical hole one（7）It is engaged, wherein, grooving sample bench（3）On groove, cylindrical hole two（8）、
Screwed hole, screw two（9）Number and platform（2）Number it is identical.
2. multistation ESEM EBSD sample stages according to claim 1, it is characterised in that：Including 4 platforms（2）.
3. multistation ESEM EBSD sample stages according to claim 1 or 2, it is characterised in that：Base（1）Side
The square length of side is 7mm, high 36mm, platform（2）A length of 15mm, a width of 15mm, a height of 1mm, platform（2）Rectangular bottom surface weldering
The cylinder two connect（11）A diameter of 3mm, a length of 10mm, grooving sample bench（3）The flute length of upper setting be 15mm, a width of 15mm,
A height of 1mm, grooving sample bench（3）The cylindrical hole two of upper setting（8）A diameter of 3mm, hole depth are 4mm, grooving sample bench（3）On set
The a diameter of 3mm of screwed hole that puts, hole depth are 6mm.
4. multistation ESEM EBSD sample stages according to claim 1 or 2, it is characterised in that：Sample is filled to flat
Platform（2）When upper, fixed form is conducting resinl.
5. multistation ESEM EBSD sample stages according to claim 1 or 2, it is characterised in that：Sample stage aluminium
Alloy.
6. multistation ESEM EBSD sample stages according to claim 1 or 2, it is characterised in that：Sample is AZ31 magnesium
Alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720092546.3U CN206460941U (en) | 2017-01-24 | 2017-01-24 | A kind of multistation ESEM EBSD sample stages |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720092546.3U CN206460941U (en) | 2017-01-24 | 2017-01-24 | A kind of multistation ESEM EBSD sample stages |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206460941U true CN206460941U (en) | 2017-09-01 |
Family
ID=59696088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720092546.3U Expired - Fee Related CN206460941U (en) | 2017-01-24 | 2017-01-24 | A kind of multistation ESEM EBSD sample stages |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206460941U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110265280A (en) * | 2019-05-29 | 2019-09-20 | 厦门超新芯科技有限公司 | A kind of multistation sample stage of scanning electron microscope home position Electrochemical Detection chip |
-
2017
- 2017-01-24 CN CN201720092546.3U patent/CN206460941U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110265280A (en) * | 2019-05-29 | 2019-09-20 | 厦门超新芯科技有限公司 | A kind of multistation sample stage of scanning electron microscope home position Electrochemical Detection chip |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Trimby et al. | Characterizing deformed ultrafine-grained and nanocrystalline materials using transmission Kikuchi diffraction in a scanning electron microscope | |
| CN101819113B (en) | Side bend test method | |
| CN201556600U (en) | Scanning electronic microscope electronic backscatter diffraction test sample stand | |
| CN206460941U (en) | A kind of multistation ESEM EBSD sample stages | |
| CN106935464A (en) | Instrument and diffraction image imaging method for transmitted electron back scattering diffraction | |
| CN206460940U (en) | A kind of multi-angle sample platform of scanning electronic microscope | |
| Schmidt et al. | Band positions used for on-line crystallographic orientation determination from electron back scattering patterns | |
| CN106970097A (en) | A kind of metal surface non-metallic coatings uniformity detecting method | |
| CN206697444U (en) | multifunctional sample table of scanning electron microscope | |
| CN103592323A (en) | Method for analyzing and detecting solid solubility of tungsten in cemented carbide binding phase | |
| CN210742166U (en) | Electronic probe sample table | |
| CN209335454U (en) | A kind of measuring device of turbine blade root two sides angle faces | |
| CN206892007U (en) | A kind of scanning electron microscope electron back scattering diffraction test sample platform | |
| CN201936840U (en) | Specimen holder for analysis of scanning electron microscope | |
| CN110986802A (en) | Method for measuring thickness of transmission electron microscope sample | |
| CN111721255A (en) | Flatness detection method and system | |
| CN207199566U (en) | A kind of novel electron back scattering diffraction tests and analyzes sample stage | |
| CN114184490B (en) | Mesoscale forming limit bending sample, preparation method and mechanical measurement method | |
| CN206864431U (en) | A kind of sample platform of scanning electronic microscope | |
| CN201177603Y (en) | Spectrometer analyzed test sample accurate positioning apparatus | |
| CN113484545B (en) | Multi-sample carrying net of transmission electron microscope and matched sample preparation table, preparation and use method thereof | |
| CN216525901U (en) | Test fixture for CLGA (chip-on-chip) packaged chip | |
| CN208654068U (en) | Electron backscatter diffraction sample fixture | |
| CN210718894U (en) | Rapid measurement tool based on virtual reference plane | |
| Samothrakitis et al. | The FALCON double-detector Laue diffractometer add-on for grain mapping at POLDI |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170901 Termination date: 20200124 |