CN206862927U - A kind of EBSD sample stages - Google Patents
A kind of EBSD sample stages Download PDFInfo
- Publication number
- CN206862927U CN206862927U CN201720523211.2U CN201720523211U CN206862927U CN 206862927 U CN206862927 U CN 206862927U CN 201720523211 U CN201720523211 U CN 201720523211U CN 206862927 U CN206862927 U CN 206862927U
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- Prior art keywords
- plane
- circular hole
- supporting table
- sample stages
- cylinder
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- 238000001887 electron backscatter diffraction Methods 0.000 title claims abstract description 20
- 239000000463 material Substances 0.000 abstract description 7
- 238000002389 environmental scanning electron microscopy Methods 0.000 abstract description 3
- 230000001788 irregular Effects 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 238000011835 investigation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000861 Mg alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- Sampling And Sample Adjustment (AREA)
Abstract
It the utility model is related to a kind of EBSD sample stages,Belong to ESEM consumptive material field,Including a supporting table and an objective table,The top side of the supporting table is provided with the first inclined-plane,The top opposite side of supporting table is provided with the second inclined-plane,Pass through between first inclined-plane and the second inclined-plane and be connected positioned at the first-class Wide Worktable face of supporting table upper end,It is longitudinally spaced on first inclined-plane to be provided with several first circular holes perpendicular with the first inclined-plane,Longitudinally spaced hang down is provided with screwed hole that is corresponding with the first circular hole and connecting in the flat surface,Lock screw is bolted with the screwed hole,It is longitudinally spaced on second inclined-plane to be provided with the second circular hole that is corresponding with screwed hole and connecting,Second circular hole and the second inclined-plane are perpendicular,Support connecting pole is connected with the lower surface of the supporting table vertically,The objective table includes a round platform,A connecting pole that can be inserted into the first circular hole and the second circular hole is connected with the lower surface of the round platform.The EBSD sample stages are not only simple in structure, and versatile.
Description
Technical field
A kind of EBSD sample stages are the utility model is related to, belong to ESEM consumptive material field.
Background technology
With the progress of science and technology, new material industry development is advanced by leaps and bounds, and has driven the technology in investigation of materials field to remove from office
Newly, the investigation of materials under microstructure is further frequent, and the achievement in research of material has also promoted it to develop.Under the conditions of EBSD,
The research that the heterogeneous microstructure of material and micro- texture characterize is the extremely important work of research worker.But mesh
Preceding EBSD sample stages are generally cylindric, can only load a sample every time.When there are multiple sample tests, continually to put
Vacuum-dress sample-such as vacuumizes at the operation, takes a substantial amount of time and energy, brings great inconvenience to electron-microscope scanning, simultaneously
Also it slow down the process of scientific research.There is an urgent need to one kind can disposably carry multiple samples by researcher, and by simple
Method makes the EBSD sample stages of sample stage angle adjustable, realizes the highest space availability ratio and practicality of sample stage.
The content of the invention
The purpose of this utility model is to provide a kind of EBSD sample stages, is not only simple in structure, and versatile.
The technical solution of the utility model is：A kind of EBSD sample stages, including a supporting table and an objective table, the branch
The top side of support platform is provided with the first inclined-plane, and the top opposite side of supporting table is provided with the second inclined-plane, first inclined-plane with
Pass through between second inclined-plane and be connected positioned at the first-class Wide Worktable face of supporting table upper end, longitudinally spaced setting on first inclined-plane
Have several first circular holes perpendicular with the first inclined-plane, in the flat surface it is longitudinally spaced hang down be provided with it is relative with the first circular hole
The screwed hole that should and connect, is bolted with lock screw in the screwed hole, on second inclined-plane it is longitudinally spaced be provided with
Screwed hole it is corresponding and connect the second circular hole, second circular hole and the second inclined-plane are perpendicular, the lower surface of the supporting table
On be connected with support connecting pole vertically, the objective table includes a round platform, be connected with the lower surface of the round platform one can be inserted into
The connecting pole of first circular hole and the second circular hole.
Further, the angle on first inclined-plane and horizontal plane is 20 °, and the angle on second inclined-plane and horizontal plane is
70°。
Further, 4 the first circular holes are arranged at intervals with first inclined-plane, 4 are arranged at intervals with the second inclined-plane
Second circular hole, 4 screwed holes are arranged at intervals with flat surface.
Further, the support connecting pole includes the first cylinder for being connected to supporting table lower end, first cylinder
Lower end is connected with the second cylinder that diameter is less than the first cylinder.
Further, a diameter of 15mm of first cylinder, it is highly 20mm, a diameter of 7mm of second cylinder,
Highly it is 3mm.
Further, the length on first inclined-plane and the second inclined-plane is 54mm, and width is 15mm；The flat surface
Length be 54mm, width 3mm.
Further, the diameter of first circular hole and the second circular hole is respectively 3.2mm, and depth is respectively 7mm, the lock
The length for determining screw is 9.1mm.
Further, a diameter of 12mm of the round platform, thickness 3mm, a diameter of 3.2mm of the connecting pole, highly it is
7mm。
Compared with prior art, the utility model has advantages below：This sample stage versatility is high, can be suitably used for a variety of
The sample of shape, can place regular cuboid, irregular blocks and laminar sample, directly be fixed sample by conducting resinl
On objective table, the practicality of sample platform of scanning electronic microscope is improved；This sample stage can disposably place multiple samples, avoid frequency
Vacuum-dress sample-is put numerously and the operation such as vacuumizes, and is realized multiple sample batch scannings, is improved the speed of sweep test；It is real
The controllability of sample angle is showed, this sample stage is simple to operate during placement sample, adjustment angle；This sample stage is
Aluminum alloy material, the quality of sample stage in itself is dramatically reduced, and electric conductivity is good under ESEM.
Brief description of the drawings
Fig. 1 is the structural representation of supporting table of the present utility model；
Fig. 2 is the structural representation of objective table of the present utility model；
In figure：The second inclined-planes of 12- 13- flat surfaces the first circular holes of 14- 15- in the first inclined-planes of 10- supporting tables 11- locks spiral shell
Follow closely 16- the second circular hole 17- the first cylinder 18- the second cylinder 20- objective table 21- round platform 22- connecting poles.
Embodiment
For features described above and advantage of the present utility model can be become apparent, special embodiment below, and coordinate accompanying drawing,
It is described in detail below, but the utility model is not limited to this.
With reference to figure 1 and Fig. 2
A kind of EBSD sample stages, including a supporting table 10 and an objective table 20, the top side of the supporting table are provided with
The first inclined-plane 11 that angle with horizontal plane is 20 °, it is 70 ° that the top opposite side of supporting table, which is provided with the angle of horizontal plane,
Second inclined-plane 12, pass through between first inclined-plane and the second inclined-plane and be connected positioned at the first-class Wide Worktable face 13 of supporting table upper end,
It is longitudinally spaced on first inclined-plane to be provided with several first circular holes 14 perpendicular with the first inclined-plane, in the flat surface
Longitudinally spaced hang down is provided with screwed hole that is corresponding with the first circular hole and connecting, and lock screw 15 is bolted with the screwed hole,
On second inclined-plane it is longitudinally spaced be provided with it is corresponding with screwed hole and connect the second circular hole 16, second circular hole with
Second inclined-plane is perpendicular, is connected with support connecting pole on the lower surface of the supporting table vertically, and the objective table is used for including one
The round platform 21 of sample is placed, a connecting pole that can be inserted into the first circular hole and the second circular hole is connected with the lower surface of the round platform
22, to realize that objective table is connected with supporting table, and fixation is tightened by the lock screw in flat surface, so as to which one can be realized
It is secondary to determine multiple samples.Change the position of objective table again, make it on different inclined-planes, then 20 °, 70 ° directions can be achieved
Scanning.
In the present embodiment, the length on first inclined-plane and the second inclined-plane is 54mm, and width is 15mm；The platform
The length in face is 54mm, width 3mm.4 the first circular holes are arranged at intervals with first inclined-plane, is spaced and sets on the second inclined-plane
4 the second circular holes are equipped with, 4 screwed holes are arranged at intervals with flat surface；Two the first circular holes and supporting table positioned at front and rear side
The distance of front and rear side is 6mm, and the distance between adjacent two first circular hole is 14mm；First circular hole and the second circular hole are to each tiltedly
The distance on the base in face is 9mm.
In the present embodiment, the support connecting pole includes the first cylinder 17 for being connected to supporting table lower end, first post
The lower end of body is connected with the second cylinder 18 that diameter is less than the first cylinder, avoids the second cylinder gravity excessive because bearing sample stage
And deform.A diameter of 15mm of first cylinder, it is highly 20mm, a diameter of 7mm of second cylinder, is highly 3mm.
In the present embodiment, the diameter of first circular hole and the second circular hole is respectively 3.2mm, and depth is respectively 7mm, described
The length of lock screw is 9.1mm.The a diameter of 12mm of round platform, thickness 3mm, a diameter of 3.2mm of the connecting pole are high
Spend for 7mm.
The EBSD sample stages are applicable to regular cuboid, irregular blocks and laminar sample and carry out 20 °, 70 ° of sides
To scanning, by taking common AZ31 magnesium alloys as an example：
Sample is adhered directly to loading by the sample of irregular blocks when carrying out 20 ° of electron-microscope scanning by conducting resinl
On the round platform of platform, the connecting pole under objective table is inserted into the first circular hole on 20 ° of first inclined-plane of supporting table, and by flat
Lock screw on platform is screwed down fixed objective table；
Sample is adhered directly to loading by the sample of irregular blocks when carrying out 70 ° of electron-microscope scanning by conducting resinl
On the round platform of platform, the connecting pole under objective table is inserted into the second circular hole on 70 ° of second inclined-plane of supporting table, and by flat
Lock screw E on platform is screwed down fixed objective table.
The foregoing is only preferred embodiment of the present utility model, it is all done according to present utility model application the scope of the claims it is equal
Deng change and modification, it should all belong to covering scope of the present utility model.
Claims (8)
1. a kind of EBSD sample stages, including a supporting table and an objective table, it is characterised in that the top side of the supporting table is set
The first inclined-plane is equipped with, the top opposite side of supporting table is provided with the second inclined-plane, through position between first inclined-plane and the second inclined-plane
Be connected in the first-class Wide Worktable face of supporting table upper end, on first inclined-plane it is longitudinally spaced be provided with several with it is first oblique
The first perpendicular circular hole of face, longitudinally spaced hang down is provided with screw thread that is corresponding with the first circular hole and connecting in the flat surface
Hole, is bolted with lock screw in the screwed hole, on second inclined-plane it is longitudinally spaced be provided with it is corresponding with screwed hole simultaneously
Second circular hole of connection, second circular hole and the second inclined-plane are perpendicular, are connected with branch on the lower surface of the supporting table vertically
Connecting pole is supportted, the objective table includes a round platform, and one is connected with the lower surface of the round platform and can be inserted into the first circular hole and second
The connecting pole of circular hole.
A kind of 2. EBSD sample stages according to claim 1, it is characterised in that the angle on first inclined-plane and horizontal plane
For 20 °, the angle on second inclined-plane and horizontal plane is 70 °.
3. a kind of EBSD sample stages according to claim 1 or 2, it is characterised in that be arranged at intervals on first inclined-plane
There are 4 the first circular holes, 4 the second circular holes are arranged at intervals with the second inclined-plane, 4 screwed holes are arranged at intervals with flat surface.
4. a kind of EBSD sample stages according to claim 1 or 2, it is characterised in that the support connecting pole includes connection
The first cylinder in supporting table lower end, the lower end of first cylinder are connected with the second cylinder that diameter is less than the first cylinder.
A kind of 5. EBSD sample stages according to claim 4, it is characterised in that a diameter of 15mm of first cylinder,
Highly it is 20mm, a diameter of 7mm of second cylinder, is highly 3mm.
A kind of 6. EBSD sample stages according to claim 1, it is characterised in that the length on first inclined-plane and the second inclined-plane
Degree is 54mm, and width is 15mm；The length of the flat surface is 54mm, width 3mm.
7. a kind of EBSD sample stages according to claim 1 or 6, it is characterised in that first circular hole and the second circular hole
Diameter be respectively 3.2mm, depth is respectively 7mm, and the length of the lock screw is 9.1mm.
8. a kind of EBSD sample stages according to claim 7, it is characterised in that a diameter of 12mm of round platform, thickness are
3mm, a diameter of 3.2mm of the connecting pole, it is highly 7mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720523211.2U CN206862927U (en) | 2017-05-12 | 2017-05-12 | A kind of EBSD sample stages |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720523211.2U CN206862927U (en) | 2017-05-12 | 2017-05-12 | A kind of EBSD sample stages |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206862927U true CN206862927U (en) | 2018-01-09 |
Family
ID=60823174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720523211.2U Expired - Fee Related CN206862927U (en) | 2017-05-12 | 2017-05-12 | A kind of EBSD sample stages |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206862927U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109342475A (en) * | 2018-11-22 | 2019-02-15 | 上海华力集成电路制造有限公司 | FIB specimen holder |
| CN110118791A (en) * | 2019-05-21 | 2019-08-13 | 山东省分析测试中心 | For obtaining crackle/crystal boundary three-dimensional information EBSD equipment sample platform and method |
| CN113552159A (en) * | 2021-09-22 | 2021-10-26 | 常州欣盛半导体技术股份有限公司 | Sample objective table for COF carrier tape inspection and use method thereof |
-
2017
- 2017-05-12 CN CN201720523211.2U patent/CN206862927U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109342475A (en) * | 2018-11-22 | 2019-02-15 | 上海华力集成电路制造有限公司 | FIB specimen holder |
| CN110118791A (en) * | 2019-05-21 | 2019-08-13 | 山东省分析测试中心 | For obtaining crackle/crystal boundary three-dimensional information EBSD equipment sample platform and method |
| CN110118791B (en) * | 2019-05-21 | 2020-03-03 | 山东省分析测试中心 | EBSD equipment sample stage and method for acquiring crack/grain boundary three-dimensional information |
| CN113552159A (en) * | 2021-09-22 | 2021-10-26 | 常州欣盛半导体技术股份有限公司 | Sample objective table for COF carrier tape inspection and use method thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180109 |