CN207133208U - A kind of transmission-type EBSD sample stage - Google Patents
A kind of transmission-type EBSD sample stage Download PDFInfo
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- CN207133208U CN207133208U CN201720447598.8U CN201720447598U CN207133208U CN 207133208 U CN207133208 U CN 207133208U CN 201720447598 U CN201720447598 U CN 201720447598U CN 207133208 U CN207133208 U CN 207133208U
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Abstract
It the utility model is related to a kind of transmission-type EBSD sample stage, including base, lower holding piece, pad, upper holding piece, fixed screw.Base is the bicylindrical for being provided with inclined-plane and screw, and inclined-plane is 60 ° with horizontal plane angle.Lower holding piece rear portion is provided with through hole, is engaged with the screw on base inclined-plane, is fastened by fixed screw and base；Front medial location is provided with diameter 2mm sample peephole, and the groove that the upper surface in hole is provided with diameter 3mm, depth 0.2mm above puts pad to place sample.Groove both sides are provided with screw, are engaged with the through hole on upper holding piece, are fastened by fixed screw and upper holding piece, so as to which sample be completely fixed.Upper holding piece is provided with diameter 2mm sample well, and its upper end is provided with 45 ° of chamferings.The utility model is designed reasonably, simple in construction, sample clamping stability is good, carries out transmission-type EBSD experiment available for transmission sample, obtains good diffraction pattern.
Description
Technical field
EBSD sample stage is the utility model is related to, more particularly to a kind of ESEM carries out the transmission-type back of the body and dissipated
The sample stage that the sub- diffraction experiment of radio uses.
Background technology
EBSD technologies have been widely used for various crystal structure materials, including steel, nonferrous metal and alloy, pottery at present
Porcelain, semiconductor, ore etc., study the forming core of its heat treatment process and grow up phenomenon, deformation twinning in plastic history and
Dislocation movement by slip, microcell texture and orientation analysis, the identification of phases etc..Traditional EBSD systems use bounce technique, the pole that can reach
It is about 100nm to limit resolution ratio.But characterized for large plastometric set sample, nanoscale grain size material and fine structure, pass
The lack of resolution for EBSD systems of uniting is, it is necessary to use new transmission-type EBSD (T-EBSD) method.New method makes
T-EBSD signs are carried out in ESEM with example of transmission electron microscope, sample diameter 3mm, thickness is typically in 50~100 μ
M, penetration of electrons thickness of sample is thin, and energy loss is small, and spatial resolution is up to 10~12nm.Typical reflection method EBSD experiment samples
Sample platform mainly has two kinds, respectively plain scan Electronic Speculum sample stage and 70 ° of EBSD pre-dumping platforms.In patent CN 204575570U
Scanning electron microscope electron disclosed in disclosed scanning electron microscope electron back scattering diffraction sample sample stage, patent CN 201556600U
It is used for the multi-functional of EBSD measurement disclosed in back scattering diffraction sample sample stage, patent CN 201697885U
In a kind of sample stage for EBSD tests disclosed in sample stage and patent CN 204694653U, EBSD sample stages belong to normal
Bounce technique EBSD sample stages are advised, are not suitable for the experiment of transmission-type EBSD.Disclosed in patent CN 203824939U thoroughly
T-EBSD experiments, but sample clamping branch can be carried out with transmission beam method EBSD sample stages in sample stage by penetrating the experiment of formula EBSD
Frame is complicated, and the non-chamfering of tabletting, sample diffraction style may be blocked, so as to influence EBSD demarcation rates.
Utility model content
Technical problem to be solved in the utility model is overcome the deficiencies in the prior art, there is provided a kind of simple in construction, sample
Product clamping stability is good, diffraction pattern blocks the small transmission-type EBSD laboratory sample platform of possibility.
In order to solve the above technical problems, the utility model uses following technical scheme：
A kind of transmission-type EBSD sample stage, including base, lower holding piece, pad, upper holding piece, fixed spiral shell
Silk；Base is the bicylindrical for being provided with inclined-plane and screw；Lower holding piece rear portion is provided with through hole, matches with the screw on base inclined-plane
Close, be fixed on by fixed screw on base；Lower holding piece front medial location is provided with sample peephole, sample peephole it is upper
End is provided with chamfering, and the upper surface of sample peephole is provided with groove to place sample, above puts pad；Groove both sides are provided with screw, with
The through hole of upper holding piece both sides is engaged, and is completely fixed sample by fixed screw.
Preferably, the inclined-plane of the base of described transmission-type EBSD sample stage and horizontal plane angle are 60 °,
Material is advisable with light-alloy.
Preferably, the sample observation bore dia 2mm of described transmission-type EBSD sample stage, positioned at lower clamping
Piece front medial location, the groove diameter 3mm of its upper surface, depth 0.2mm, 45 ° of chamfer on sample peephole.
Preferably, the size of the annular gasket of described transmission-type EBSD sample stage is external diameter 3mm, interior
Footpath 2.5mm, thickness 0.18mm；Upper holding piece thickness is 1mm.
Compared with prior art, the utility model at least has the advantages that：
(1) the utility model is designed reasonably, it is simple in construction, it is easy to operate, directly carry out T-EBSD available for transmission sample
Experiment；
(2) sample aids in clamping through pad, and stability is good, it is ensured that sample does not shift in experimentation；
(3) holding piece sample well upper end is provided with chamfering on, greatly reduces the probability that diffraction pattern is blocked, and diffraction pattern is distinguished
It is clear to know, and significantly improves EBSD system calibrating rates.
Brief description of the drawings
Fig. 1 is transmission-type EBSD sample stage schematic diagram；
Fig. 2 is understructure schematic diagram of the present utility model；
Fig. 3 is sample clamping partial schematic diagram of the present utility model.
Embodiment
The utility model is described in further detail below in conjunction with Figure of description and specific embodiment, but the embodiment
It should not be construed as to limitation of the present utility model.
Fig. 1 is a kind of embodiment of the present utility model, and transmission-type EBSD sample stage includes base 1, lower folder
Hold piece 2-1, pad 2-2, upper holding piece 2-3 and fixed screw 3.Illustrate with reference to Fig. 2, the material selection aluminium alloy of base 1, base
Bottom is cylindrical type, is adapted to be placed in " 12.5mm " standard sample sample platform of JEOL companies.The upper inclined surface 8 of base 1 and horizontal plane
Angle be 60 °, two screws 7 are provided with inclined-plane, for being fixed by two root long fixed screws 3 and lower holding piece 2-1.With reference to
Fig. 3 illustrates that lower holding piece 2-1 rear portions thickness is 2mm, and is provided with two diameter 3mm through hole 4, position of opening and the inclined-plane of base 1
Screw 7 on 8 is engaged；Lower holding piece 2-1 front part sides are provided with two screws, logical with upper holding piece 2-3 both sides diameter 3mm
Hole 4 is engaged, for being fixed by two short fixed screw 3 with upper holding piece 2-3.Sample can be reduced from short fixed screw
Platform overall height, sample is set to use smaller WD parameters when testing close to pole shoe, T-EBSD as far as possible.Lower clamping
Piece 2-1 front medial locations are provided with diameter 2mm sample peephole 5, pass through for electron beam.The upper surface of sample peephole 5
Diameter 3mm, depth 0.2mm groove 6 are provided with to place transmission sample, pad 2-2 is placed on sample, passes through the screw that is tightened
3 clamp upper and lower holding piece, so as to which transmission sample be completely fixed.Pad 2-2 is annular, and its size is external diameter 3mm, internal diameter
2.5mm, thickness 0.18mm.Upper holding piece 2-3 thickness is 1mm, and the upper end of sample peephole 5 is provided with 45 ° of chamferings, it is possible to reduce spreads out
The possibility that style is blocked is penetrated, so as to obtain good diffraction pattern, so as to improve EBSD system calibrating rates.Use this sample
Platform, unobstructed EBSD style can be obtained in the range of larger vert, by Optimal Experimental parameter, obtained
The T-EBSD characterization results of higher demarcation rate.
The utility model has illustrated as above, to be not limited to the utility model with a kind of embodiment.This reality is not being departed from
In the case of with new technique aspects, when making many to technical solutions of the utility model using above-mentioned technology contents
Possible modification and variation, or change into the equivalent embodiment of equivalent variations.But these are without departing from technical solutions of the utility model
Content, any simple modification made according to the utility model technical spirit to it, equivalent variations, belong to the utility model
The protection domain of technical scheme.If there is the content not being described in detail in this specification, those skilled in the art are should be
Technology that is known or should knowing, here is omitted.
Claims (4)
1. a kind of transmission-type EBSD sample stage, including base (1), lower holding piece (2-1), pad (2-2), upper folder
Hold piece (2-3) and fixed screw (3)；It is characterized in that：Base (1) is the bicylindrical for being provided with inclined-plane (8) and screw (7)；Lower folder
Hold piece (2-1) rear portion and be provided with through hole (4), be engaged with the screw (7) on base (1) inclined-plane (8), it is solid by fixed screw (3)
It is scheduled on base (1)；Lower holding piece (2-1) front medial location is provided with sample peephole (5), the upper end of sample peephole (5)
Chamfering is provided with, the upper surface of sample peephole (5) is provided with groove (6) to place sample, above puts pad (2-2)；Groove (6) both sides
Screw (7) is provided with, is engaged with the through hole (4) of upper holding piece (2-3) both sides, is completely fixed sample by fixed screw (3).
2. transmission-type EBSD sample stage according to claim 1, it is characterised in that：Described base (1)
Inclined-plane (8) and horizontal plane angle be 60 °, material is advisable with light-alloy.
3. transmission-type EBSD sample stage according to claim 1, it is characterised in that：Described sample observation
Hole (5) diameter 2mm, positioned at lower holding piece (2-1) front medial location, groove (6) diameter 3mm of its upper surface, depth
0.2mm, 45 ° of chamfer on sample peephole (5).
4. transmission-type EBSD sample stage according to claim 1, it is characterised in that：Described pad (2-
2) it is annular, its size is external diameter 3mm, internal diameter 2.5mm, thickness 0.18mm；Upper holding piece (2-3) thickness is 1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720447598.8U CN207133208U (en) | 2017-04-26 | 2017-04-26 | A kind of transmission-type EBSD sample stage |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720447598.8U CN207133208U (en) | 2017-04-26 | 2017-04-26 | A kind of transmission-type EBSD sample stage |
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| Publication Number | Publication Date |
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| CN207133208U true CN207133208U (en) | 2018-03-23 |
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| CN201720447598.8U Active CN207133208U (en) | 2017-04-26 | 2017-04-26 | A kind of transmission-type EBSD sample stage |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109709121A (en) * | 2019-03-06 | 2019-05-03 | 内蒙古科技大学 | Sample stage and transmission mode electron backscatter diffraction (T-EBSD) system and method |
| CN115128109A (en) * | 2022-09-02 | 2022-09-30 | 北京化工大学 | EBSD sample stage based on orientation calibration and correction and image acquisition method |
-
2017
- 2017-04-26 CN CN201720447598.8U patent/CN207133208U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109709121A (en) * | 2019-03-06 | 2019-05-03 | 内蒙古科技大学 | Sample stage and transmission mode electron backscatter diffraction (T-EBSD) system and method |
| CN115128109A (en) * | 2022-09-02 | 2022-09-30 | 北京化工大学 | EBSD sample stage based on orientation calibration and correction and image acquisition method |
| CN115128109B (en) * | 2022-09-02 | 2022-11-25 | 北京化工大学 | EBSD sample stage based on orientation calibration and correction and image acquisition method |
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