CN214097222U - Multifunctional sample table for analysis and test of scanning electron microscope - Google Patents
Multifunctional sample table for analysis and test of scanning electron microscope Download PDFInfo
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- CN214097222U CN214097222U CN202023343497.7U CN202023343497U CN214097222U CN 214097222 U CN214097222 U CN 214097222U CN 202023343497 U CN202023343497 U CN 202023343497U CN 214097222 U CN214097222 U CN 214097222U
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Abstract
The utility model discloses a multi-functional sample platform of scanning electron microscope analysis and test belongs to scanning electron microscope equipment technical field. This multi-functional sample platform of scanning electron microscope analysis and test includes support and objective table, and the support has two at least connecting holes, and the quantity of objective table is more than or equal to 2 and does not exceed the quantity of connecting hole, and every objective table corresponds can dismantle to connect in a connecting hole. The object stage is selected from an EBSD test object stage, a TKD test object stage, an EDS test object stage or a section high-power appearance test object stage. This multi-functional sample platform of scanning electron microscope analysis and test can be surveyd a plurality of samples simultaneously, has avoided EBSD, TKD, EDS or high multiple appearance observation sample drift problem, avoids changing the sample, has improved efficiency of software testing.
Description
Technical Field
The utility model relates to a scanning electron microscope equipment field particularly, relates to a scanning electron microscope analysis and test multifunctional sample platform.
Background
The scanning electron microscope emits an electron beam (the diameter is about 50um) from an electron gun, the electron beam is converged through a magnetic lens system under the action of accelerating voltage to form an electron beam with the diameter of 5nm, the electron beam is focused on the surface of a sample, under the action of a deflection coil between a second condenser lens and an objective lens, the electron beam performs raster-like scanning on the sample, and the electron and the sample interact to generate signal electrons. The signal electrons are collected by a detector and converted into photons, and the photons are amplified by an electric signal amplifier and finally imaged on a display system. The small sample vibration and drift can cause the large-amplitude vibration of the image, especially the stability of the testing area is important when high-resolution morphology observation and energy spectrum quantitative analysis are carried out, and the testing requirement of the TKD micro area is higher.
At present, when a researcher tests a non-conductive sample by using a scanning electron microscope, in order to obtain a clear image, a layer of conductive metal elements (such as Au, Cr and the like) is plated on the surface of the sample to be tested by using a film plating instrument before the test, the other surface of the sample to be tested is still non-conductive, and then the sample to be tested is bound and fixed by using a conductive adhesive tape and is communicated with the surface to be tested and a metal sample table, so that redundant electric charges are led out to avoid a discharge phenomenon, and a clear secondary electron image or a back scattering electron image is obtained. The method for binding the sample to be tested by using the conductive adhesive tape is easy to damage the gold-plated layer of the surface to be tested, and is not beneficial to secondary supplementary test in the future. More importantly, the problem that the sample cannot drift is solved by adopting the physical connection of the carbon conductive adhesive for fixing the sample and the sample stage, the sample stage and the electron microscope base, the testing efficiency and accuracy cannot be guaranteed, the sample surface is easily polluted and damaged, and the secondary supplement testing is not facilitated.
In view of this, the present application is specifically made.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a multi-functional sample platform of scanning electron microscope analysis and test, it can be observed a plurality of samples simultaneously, has avoided EBSD, TKD, EDS or high multiple appearance observation sample problem of drifting, avoids changing the sample, has improved efficiency of software testing.
The embodiment of the utility model is realized like this:
first aspect, the utility model provides a multi-functional sample platform of scanning electron microscope analysis and test, including support and objective table, the support has two at least connecting holes, and the quantity of objective table is more than or equal to 2 and is not more than the quantity of connecting hole, and every objective table corresponds to dismantle to connect in a connecting hole.
The object stage is selected from an EBSD test object stage, a TKD test object stage, an EDS test object stage or a section high-power appearance test object stage.
In an alternative embodiment, the object table is screwed or snapped into the attachment hole.
In an optional embodiment, the multifunctional sample stage for analysis and test of the scanning electron microscope further comprises a screw and a nut matched with the screw, a threaded hole is formed in the center of the support, one end of the screw is connected with the support through the threaded hole, and the other end of the screw is inserted into the base of the electron microscope; the nut is used for strengthening the fixation of the objective table at one end of the screw rod close to the objective table.
In an alternative embodiment, the carrier comprises a carrier body and at least one sample chamber, which is arranged on a side of the carrier body facing away from the holder.
In an alternative embodiment, the number of sample chambers is greater than or equal to 2 and equally spaced along the circumference of the stage body.
In an alternative embodiment, the object table comprises an object table body, and a boss is arranged on one side of the object table body, which faces away from the support.
In an alternative embodiment, the boss is disposed along a diameter of the stage body and has a length equal to the diameter of the stage body.
In an optional embodiment, the object stage has opposite first and second faces, the first face has first section and second section that links to each other, the distance of first section and second face equals, the distance of second section and second face reduces from the one end that is close to the first section to the one end of keeping away from the first section gradually, and first section and second section junction form first step, and the one end that the first section was kept away from to the second section forms the second step with the second face.
In optional embodiment, the objective table includes the objective table body, the objective table body has relative first face and second face, first face has first section and second section, first section equals with the distance of second face, the distance of second section and second face reduces to the one end of keeping away from first section by the one end that is close to first section gradually, be connected with the draw-in groove of concave setting to the second face between first section and the second section, the junction of first section and draw-in groove forms first step, the one end and the second face formation second step of first section are kept away from to the second section.
In optional implementation, the objective table further comprises a first clamping piece and a second clamping piece, one end of the first clamping piece is provided with a positioning groove in a shape like a 'Y', the other end of the first clamping piece is provided with a protruding part, the protruding part is used for being matched with a clamping groove concavely arranged on the second surface, the second clamping piece is in a shape like a 'Y' and is correspondingly connected to the positioning groove of the first clamping piece, the depth of the clamping groove is smaller than the thickness of the first clamping piece, and the length of the positioning groove of the first clamping piece is larger than that of the second clamping piece so that a gap is formed between the end part of the second clamping piece and the clamping groove of the first clamping piece for placing a sample.
The utility model discloses beneficial effect includes:
the object stage is provided with at least one connecting hole on the support, and the number of the object stages is less than or equal to that of the connecting holes, and each object stage is correspondingly detachably connected with one connecting hole. The multifunctional sample stage for the analysis and test of the scanning electron microscope can observe a plurality of samples simultaneously, avoids the problem of sample drift in EBSD, TKD, EDS or high-multiple morphology observation, avoids changing the samples, and improves the test efficiency.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a support at a first viewing angle according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of the support at a second viewing angle according to the embodiment of the present invention;
fig. 3 is a first structural schematic diagram of an object stage according to an embodiment of the present invention;
fig. 4 is a second structural diagram of the objective table according to the embodiment of the present invention;
fig. 5 is a schematic structural diagram of a third structure of an object stage according to an embodiment of the present invention at a first viewing angle;
fig. 6 is a schematic structural diagram of a third structure of the object stage according to an embodiment of the present invention at a second viewing angle;
fig. 7 is a schematic structural view of a stage body in a fourth structure of the stage according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a first clip of a fourth structure of an embodiment of an object stage of the present invention;
fig. 9 is a schematic structural diagram of the second clamping piece in the fourth structure of the object stage according to the embodiment of the present invention.
Icon: 10-a support; 11-a connection hole; 20-an object stage; 30-screw rod; 40-a nut; 21-stage body; 22-a sample chamber; 23-a first fixation hole; 24-a second fixation hole; 25-a boss; 261-a first side; 262-a second face; 263-first section; 264-second section; 265 — first step; 266-a second step; 267-a third fixing hole; 268-a fourth fixation hole; 269-card slot; 27-a first clip; 28-a second clip; 271-positioning groove; 272-a projection; 273-fifth fixing hole; 281-sixth fixation hole.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which the products of the present invention are conventionally placed when in use, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless explicitly stated or limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Examples
The embodiment provides a multifunctional sample stage for analysis and test of a scanning electron microscope, which comprises a support 10 (shown in fig. 1 and 2) and object stages 20 (shown in fig. 3 to 9), wherein the support 10 is provided with at least two connecting holes 11, the number of the object stages 20 is greater than or equal to 2 and is not greater than the number of the connecting holes 11, and each object stage 20 is correspondingly detachably connected to one connecting hole 11. In alternative embodiments, the number of connection holes 11 may be 2, 3, 4, 6 or more. When the number of the connecting holes 11 is 2, the number of the object stages 20 is equal to 2, and the 2 object stages 20 are respectively detachably connected to the 2 connecting holes 11. When the number of the connecting holes 11 is 3, the number of the object stage 20 can be 2 or 3, and when the number of the object stage 20 is only 2, the object stage can be selectively and detachably connected with any 2 of the 3 connecting holes 11; when the number of the stages 20 is 3, the 3 stages 20 are detachably coupled to the 3 coupling holes 11, respectively. When the number of the connecting holes 11 is 4, the number of the object stage 20 can be 2, 3 or 4, and when the number of the object stage 20 is only 2, the object stage can be selectively detachably connected to any 2 of the 4 connecting holes 11; when the number of the object stage 20 is 3, it can be selectively detachably connected to any 3 of the 4 connecting holes 11; when the number of the stages 20 is 4, the 4 stages 20 are detachably coupled to the 4 coupling holes 11, respectively.
Optionally, the stage 20 is selected from an EBSD test stage 20, a TKD test stage 20, an EDS test stage 20, or a high-profile test stage 20. Specifically, the plurality of object stages 20 may be the same type of test object stage 20 or different types of test object stages 20 according to the test requirement. Therefore, a plurality of samples can be observed simultaneously, the problem of sample drift of EBSD, TKD, EDS or high-multiple morphology observation is avoided, the samples are prevented from being replaced, and the testing efficiency is improved.
In alternative embodiments, the object stage 20 may be screwed or snapped into the attachment hole 11, and may be attached to the attachment hole 11 in other ways.
The connection hole 11 may be a blind hole or a through hole. The diameter of the connection hole 11 may be 3.5 mm.
In reference, the connecting holes 11 are uniformly distributed along the circumferential direction of the support 10 at intervals, that is, the connecting line distance of the hole centers of the adjacent 2 connecting holes 11 is equal. It can be understood that, taking the clockwise direction as an example, when the number of the connecting holes 11 is 3, the connecting line of the hole centers of the adjacent 2 connecting holes 11 is a regular triangle. When the number of the connecting holes 11 is 4, the centers of the connecting holes 11 are connected into a square, when the number of the connecting holes 11 is 5, the centers of the connecting holes 11 are connected into a regular pentagon, and when the number of the connecting holes 11 is other values, the rest can be done by analogy.
Further, the multifunctional sample stage for the analysis and test of the scanning electron microscope further comprises a screw 30, a threaded hole is formed in the center of the support 10, one end of the screw 30 is connected with the support 10 through the threaded hole, and the other end of the screw is used for being inserted into an electron microscope base.
Further, the multifunctional sample stage for analysis and test of the scanning electron microscope further comprises a nut 40, the nut 40 is matched with the screw 30 for use, the nut 40 moves up and down along the length direction of the screw 30, and when the nut 40 moves to one end, connected with the object stage 20, of the screw 30, the nut can play a role in strengthening and fixing the object stage 20.
In this embodiment, the cross-sectional shape of the support 10 may be circular or square, or may be other shapes. Preferably, the support 10 can be modified from a cylinder (as shown in fig. 2). Specific references may be made to: taking a circle with a cross section of 46mm as an example, taking the diameter as a symmetry axis, cutting and removing partial areas on two symmetrical sides in the same way along the directions parallel to the diameter, so that two symmetrical side edges are straight lines, and the vertical distance from the center of the circle to the straight lines on the two sides is 20.7 mm. The thickness of the stage 20 may be 6 mm.
In an alternative embodiment, referring to fig. 3, the object stage 20 comprises an object stage body 21 and at least one sample chamber 22, wherein the sample chamber 22 is disposed on a side (defined as an upper surface) of the object stage body 21 facing away from the support 10. The sample chamber 22 is formed by vertically recessing the upper surface to the lower surface of the stage body 21.
The stage 20 may have a diameter of 81mm and a thickness of 13 mm. Correspondingly, the center of the object stage 20 is provided with a first fixing hole 23 to match with the connecting hole 11 of the support 10, and the diameter of the first fixing hole 23 is also 3.5 mm. The first fixing hole 23 is a through hole.
In alternative embodiments, the number of sample chambers 22 may be only 1, or may be greater than 2. When it is larger than 2, it is arranged at equal intervals in the circumferential direction of the stage body 21.
By reference, the diameter of sample chamber 22 may be 31mm, and the depth of sample chamber 22 is 10 mm.
Taking 4 sample chambers 22 as an example, the 4 sample chambers 22 are uniformly distributed on the upper surface of the stage body 21 along the circumferential direction of the stage 20, that is, the distance from the hole center of the first fixing hole 23 of the stage 20 to the hole center of each sample chamber 22 is equal, and may be 23 mm.
Preferably, the side surface of the stage body 21 is provided with a second fixing hole 24 along a radial direction parallel to the stage body 21, and the second fixing hole 24 is used for fixing the position of the sample chamber 22 under the action of a fixing member. The fixing part can be a part which is commonly used in the prior art and can play a corresponding fixing role, and redundant description is not repeated herein.
The stage 20 can be used as a sample stage for cross-sectional profile testing.
In another embodiment, referring to fig. 4, the stage 20 includes a stage body 21, and a side (upper surface) of the stage body 21 facing away from the support 10 is provided with a boss 25.
The stage body 21 may have a circular cross-sectional shape, and the stage body 21 may have a diameter of 50mm and a thickness of 4 mm.
In an alternative embodiment, the boss 25 is disposed along a diameter of the stage body 21. The height of the boss 25 may be 15mm, the length of the boss 25 is also the diameter of the stage body 21, and the width of the boss 25 may be 10 mm.
The center of the stage 20 is also provided with a first fixing hole 23 (not shown) to be engaged with the coupling hole 11 of the stand 10. The first fixing hole 23 is a blind hole with a depth of 9 mm.
The stage 20 can be used as a sample stage for a planar topography test.
In another embodiment, referring to fig. 5 and 6, the stage body 21 has a first surface 261 (left side surface) and a second surface 262 (right side surface) opposite to each other, the first surface 261 has a first section 263 and a second section 264 connected to each other, the first section 263 and the second surface 262 are equidistant (i.e., the first section 263 and the second surface 262 are parallel), the second section 264 and the second surface 262 are gradually distant from one end close to the first section 263 to one end far from the first section 263 (i.e., the second section 264 is a slope), a first step 265 is formed at the connection of the first section 263 and the second section 264, and a second step 266 is formed at one end of the second section 264 far from the first section 263 and the second surface 262.
The length of the first section 263 may be 10mm, the height difference between the first section 263 and the second section 264 may be 3mm, the length of the second section 264 may be 20mm, and the length of the second surface 262 may be 30 mm. The distance between the second section 264 and the second face 262 may be set according to the desired angle of inclination.
The second section 264 of the stage 20 is provided with a plurality of third fixing holes 267 for fixing the sample on the stage 20, and in particular, the sample may be placed on the upper surface of an additional sample holder, and the lower surface of the sample holder is provided with insertion rods to be inserted into the third fixing holes 267. Further, the other two sides of the object stage 20 are further opened with fourth fixing holes 268 for fixing the inserting rods inserted into the third fixing holes 267.
The third fixing hole 267 is disposed in a direction perpendicular to the inclined surface. Referring to this, the number of the third fixing holes 267 may be 2, one of which is disposed at a distance of 6.51mm from the edge of the second section 264 away from the first section 263, and the distance between the centers of the two third fixing holes 267 is 8.22 mm. The number of the fourth fixing holes 268 is 2, and the hole centers of the two fourth fixing holes 268 are respectively 5.24mm and 3.82mm from the second face 262.
In addition, the number and the positions of the third fixing holes 267 and the fourth fixing holes 268 may be set in other manners as needed, and are not described herein.
The center of the stage 20 is also provided with a first fixing hole 23 to be engaged with the coupling hole 11 of the stand 10.
The stage 20 may be used as a sample stage for TKD test.
In another embodiment, referring to fig. 7, the object stage 20 includes an object stage body 21, the object stage 20 has a first surface 261 (left side surface) and a second surface 262 (right side surface) opposite to each other, the first surface 261 has a first section 263 and a second section 264, the first section 263 and the second surface 262 are equidistant (i.e., the first section 263 and the second surface 262 are parallel), the distance between the second section 264 and the second surface 262 gradually decreases from one end close to the first section 263 to one end away from the first section 263 (i.e., the second section 264 is a slope), a slot 269 recessed toward the second surface 262 is connected between the first section 263 and the second section 264, a first step 265 is formed at a connection position of the first section 263 and the slot 269, and a second step 266 is formed at one end of the second section 264 away from the first section 263 and the second surface 262.
The length of the first section 263 may be 10mm, the length of the second section 264 may be 6mm, the length of the locking groove 269 may be 2mm, the depth of the locking groove 269 may be 2mm, and the length of the second surface 262 may be 25.81 mm. The distance between the second section 264 and the second face 262 may be set according to the desired angle of inclination.
The second section 264 of the stage 20 is provided with at least one third fixing hole 267 for fixing a clip. The center of the stage 20 is also provided with a first fixing hole 23 to be engaged with the coupling hole 11 of the stand 10.
Further, referring to fig. 8 and 9, the stage 20 further includes a first clamping piece 27 and a second clamping piece 28. One end of the first clamping piece 27 is provided with a Y-shaped positioning groove 271, the other end of the first clamping piece 27 is provided with a protruding part 272, the protruding part 272 is used for being matched with a clamping groove 269 concavely arranged on the second surface 262, the second clamping piece 28 is Y-shaped and correspondingly connected in the positioning groove 271 of the first clamping piece 27, the depth of the clamping groove 269 is smaller than the thickness of the first clamping piece 27, and the length of the positioning groove 271 of the first clamping piece 27 is larger than that of the second clamping piece 28, so that a gap is formed between the end part of the second clamping piece 28 and the clamping groove 269 of the first clamping piece 27 for placing a sample.
The end of the first clip 27 close to the protrusion 272 is further provided with a fourth fixing hole 268 to connect with the third fixing hole 267 through a fixing member, a fifth fixing hole 273 is provided at a position corresponding to the positioning groove 271 of the first clip 27, and a sixth fixing hole 281 is provided at an end of the second clip 28 to connect the second clip 28 with the first clip 27 by combining with the fifth fixing hole 273 under the action of the fixing member.
The diameters of the fourth fixing hole 268 and the fifth fixing hole 273 may be 1.5mm, and the length of the second clip 28 may be 8.5 mm.
The center of the stage 20 is also provided with a first fixing hole 23 to be engaged with the coupling hole 11 of the stand 10.
The stage 20 can be used as a sample stage for EBSD testing.
In this embodiment, the stage 20 is provided with an inclined surface, which can realize scanning of 40 ° inclination, 70 ° inclination, or other angles, while the stage 20 without the inclined surface can also realize scanning of a plane and a cross section.
It should be noted that reference herein to the use of the EBSD test stage 20, the TKD test stage 20, the EDS test stage 20, or the high power profile test stage 20 may be made to the prior art, or may be modified slightly as required for particular uses. The specific data disclosed in the above embodiments may also be adjusted as desired. In addition, the EBSD test object stage 20, the TKD test object stage 20, the EDS test object stage 20 or the high-power cross-section morphology test object stage 20 referred to in the present application may also be a corresponding object stage 20 commonly used in the prior art, and the structure and the using method thereof are not described herein in detail.
In conclusion, the multifunctional sample stage for analysis and test of the scanning electron microscope can observe a plurality of samples simultaneously, avoids the problem of sample drift in EBSD, TKD, EDS or high-multiple morphology observation, avoids changing the samples, and improves the test efficiency. And moreover, the device can also be used for tightly connecting the base of the electron microscope, the support 10, the objective table 20 and the sample without damaging the surface of the sample.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The multifunctional sample stage for the analysis and test of the scanning electron microscope is characterized by comprising a support and object stages, wherein the support is provided with at least two connecting holes, the number of the object stages is more than or equal to 2 and is not more than that of the connecting holes, and each object stage is correspondingly detachably connected with one connecting hole;
the object stage is selected from an EBSD test object stage, a TKD test object stage, an EDS test object stage or a section high-power appearance test object stage.
2. The multifunctional sample stage for scanning electron microscope analysis and test according to claim 1, wherein the object stage is in threaded connection or clamped connection with the connecting hole.
3. The multifunctional sample stage for analytical testing of scanning electron microscopes according to claim 1, further comprising a screw rod and a nut matched with the screw rod, wherein the center of the support is provided with a threaded hole, one end of the screw rod is connected with the support through the threaded hole, and the other end of the screw rod is inserted into a base of an electron microscope; the nut is used for strengthening the fixation of the object stage at one end of the screw rod close to the object stage.
4. The multifunctional sample stage for scanning electron microscope analysis and test according to any one of claims 1 to 3, wherein the stage comprises a stage body and at least one sample chamber, and the sample chamber is arranged on one side of the stage body, which is far away from the support.
5. The multifunctional sample stage for scanning electron microscope analysis and test according to claim 4, wherein the number of the sample chambers is greater than or equal to 2 and the sample chambers are arranged at equal intervals along the circumferential direction of the stage body.
6. The multifunctional sample stage for scanning electron microscope analysis and test according to any one of claims 1 to 3, wherein the stage comprises a stage body, and a boss is arranged on one side of the stage body, which is away from the support.
7. The multifunctional sample stage for scanning electron microscope analysis and test according to claim 6, wherein the boss is arranged along the diameter direction of the stage body and the length of the boss is equal to the diameter of the stage body.
8. The multifunctional sample stage for scanning electron microscope analysis testing according to any one of claims 1 to 3, wherein the stage has a first face and a second face opposite to each other, the first face has a first section and a second section connected to each other, the first section and the second face are at the same distance, the second section and the second face are at a distance gradually decreasing from one end close to the first section to one end far away from the first section, a first step is formed at the joint of the first section and the second section, and a second step is formed at one end far away from the first section and the second face of the second section.
9. The multifunctional sample stage for scanning electron microscope analysis and test according to any one of claims 1 to 3, wherein the stage comprises a stage body, the stage body has a first surface and a second surface which are opposite to each other, the first surface has a first section and a second section, the distance between the first section and the second surface is equal, the distance between the second section and the second surface is gradually reduced from one end close to the first section to one end far away from the first section, a clamping groove which is concavely arranged towards the second surface is connected between the first section and the second section, a first step is formed at the joint of the first section and the clamping groove, and a second step is formed between one end of the second section far away from the first section and the second surface.
10. The multifunctional sample stage for scanning electron microscope analysis and test according to claim 9, wherein the stage further comprises a first clamping piece and a second clamping piece, wherein a positioning groove in a Y shape is formed in one end of the first clamping piece, a protruding portion is formed in the other end of the first clamping piece, the protruding portion is used for being matched with the clamping groove formed in the second surface in a concave mode, the second clamping piece is in a Y shape and is correspondingly connected to the positioning groove of the first clamping piece, the depth of the clamping groove is smaller than the thickness of the first clamping piece, and the length of the positioning groove of the first clamping piece is larger than that of the second clamping piece so that a gap is formed between the end portion of the second clamping piece and the clamping groove of the first clamping piece to place a sample.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202023343497.7U CN214097222U (en) | 2020-12-30 | 2020-12-30 | Multifunctional sample table for analysis and test of scanning electron microscope |
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| CN202023343497.7U CN214097222U (en) | 2020-12-30 | 2020-12-30 | Multifunctional sample table for analysis and test of scanning electron microscope |
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| CN214097222U true CN214097222U (en) | 2021-08-31 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113552159A (en) * | 2021-09-22 | 2021-10-26 | 常州欣盛半导体技术股份有限公司 | Sample objective table for COF carrier tape inspection and use method thereof |
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2020
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113552159A (en) * | 2021-09-22 | 2021-10-26 | 常州欣盛半导体技术股份有限公司 | Sample objective table for COF carrier tape inspection and use method thereof |
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