CN213957199U

CN213957199U - Sample table for large-area EBSD (Electron Back scattered diffraction) sample of scanning electron microscope

Info

Publication number: CN213957199U
Application number: CN202022757171.2U
Authority: CN
Inventors: 左玉婷; 张丽民; 马会娜; 张智慧; 黄玉生; 李聪
Original assignee: Guobiao Beijing Testing & Certification Co ltd; China United Test & Certification Co ltd
Current assignee: Guobiao Beijing Testing & Certification Co ltd; China United Test & Certification Co ltd
Priority date: 2020-11-25
Filing date: 2020-11-25
Publication date: 2021-08-13
Anticipated expiration: 2030-11-25

Abstract

The utility model relates to a scanning electron microscope large tracts of land EBSD sample is with sample platform belongs to scanning electron microscope technical field. The sample stage for the large-area EBSD sample of the scanning electron microscope comprises a cylindrical base, a clamp with a groove and a plurality of screws, wherein the clamp with the groove consists of a bottom plate and two baffles, and a threaded hole is formed in one of the baffles; the screw passes through the threaded hole to secure the sample placed in the fixture between the screw and the baffle without the threaded hole. The utility model discloses sample platform's simple structure, convenient operation, mechanical fixation is firm, is difficult for drifting, can measure large tracts of land EBSD sample, or simultaneously measures a plurality of samples of inlaying, very big improvement detection quality and efficiency.

Description

Sample table for large-area EBSD (Electron Back scattered diffraction) sample of scanning electron microscope

Technical Field

The utility model belongs to the technical field of the scanning electron microscope, especially, relate to a scanning electron microscope large tracts of land EBSD sample is with sample platform.

Background

The EBSD (Electron back scattered Diffraction) technique is a microstructure analysis method that is currently increasingly widely used. The EBSD probe of the scanning electron microscope is used for receiving the diffraction pattern excited by the point-by-point scanning of the electron beam, and can acquire abundant microstructure information of the sample micro-area, such as grain orientation, phase structure, poor orientation, grain boundary characteristics and the like.

The EBSD test requires the sample to be tilted 70 degrees so that the probe receives the diffraction pattern. The sample testing surface can be generally placed into the sample seat in a horizontal manner, and the sample seat is rotated by 70 degrees in an electron microscope to meet the inclination requirement; another method is to fix the sample by using a sample stage with a preset inclination angle of 70 degrees.

The conventional EBSD sample platform mainly has three problems: 1) in order to reduce the collision risk between the sample seat and the pole shoe and between the sample seat and the EBSD probe, the sample platform is designed to be small in size, most of the sample platform is within 20mm in diameter, and large samples and embedded samples cannot be tested, particularly large-area EBSD samples with the size of more than 30 mm. 2) The internal sample holder of a scanning electron microscope of a part of models has a large volume, and the sample holder extends into the EBSD probe under the condition of not inclining, so that collision can occur, and a sample table with a preset inclination angle cannot be used; 3) part of the samples are fixed by means of adhesion of the conductive adhesive tape, and when the EBSD test is carried out, the conductive adhesive tape is deformed under the action of the gravity of the samples, so that the samples drift, and the authenticity of a test result is influenced.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that, overcome prior art's shortcoming, provide a simple structure, use convenient scanning electron microscope electron sample platform for backscatter diffraction, can measure large tracts of land EBSD sample, or measure a plurality of mosaics samples simultaneously, mechanical fastening is firm simultaneously, is difficult for drifting, very big improvement detection efficiency.

In order to solve the technical problem, the utility model discloses a following technical scheme:

a sample table for a large-area EBSD sample of a scanning electron microscope comprises a cylindrical base, a clamp with a groove and a plurality of screws, wherein the clamp with the groove consists of a bottom plate and two baffles, and a threaded hole is formed in one of the baffles; the screw passes through the threaded hole to fix the sample placed in the clamp between the screw and the baffle plate without the threaded hole.

The size of the cylindrical base is matched with that of the scanning electron microscope sample base, and the cylindrical base can be placed into the scanning electron microscope sample base to be mechanically fixed, so that the stability of the whole sample table is guaranteed.

The screw passes through the threaded hole of the baffle plate, one side of a sample placed on the bottom plate of the clamp is fixed and tightly attached to the other baffle plate without the threaded hole, and the sample can be firmly fixed by rotating the screw according to the width of the placed sample. The number of the threaded holes is 3-6.

The two baffles are respectively fixed at two opposite ends of the bottom plate to obtain the fixture with the groove, the length of the fixture with the groove is 30-75 mm, the width of the fixture is 15-35 mm, the height of the fixture is 6-10 mm, the maximum size range of a sample to be detected by a scanning electron microscope is furthest exerted in the length direction, and the sample table moves along the length direction without collision risk when an EBSD test is carried out.

The utility model has the advantages that:

(1) simple structure, convenient operation, the sample is stable, the test is accurate, has solved the fixed sample of conductive adhesive tape and has leaded to the problem of test drift.

(2) The utility model discloses sample platform satisfies the EBSD test demand of bold sample concatenation, and the maximum dimension length and width that can put into the sample can reach 75mm x 30mm x 10 mm.

(3) The utility model discloses sample platform can place 3 diameter 25 mm's the sample of inlaying simultaneously, or 14 individual 10mm x 10 mm's block sample, and the test of many samples has been practiced thrift and has frequently been taken out and put the vacuum, and the time of exchanging the sample has improved detection efficiency.

Drawings

Fig. 1 is a schematic structural diagram of the sample stage of the present invention.

1 cylindrical base 2 with groove clamp

3 bottom plate 4 baffle plate one

5 baffle two 6 screw

Detailed Description

The present invention will be further described with reference to the accompanying drawings and specific embodiments.

The embodiment provides a sample stage for scanning electron microscope electron backscatter diffraction, which has a structure shown in fig. 1 and comprises a cylindrical base 1, a clamp 2 with a groove and a plurality of screws 6; the fixture 2 with the groove consists of a bottom plate 3, a first baffle plate 4 without a threaded hole and a second baffle plate 5 with a threaded hole, wherein the first baffle plate 4 and the second baffle plate 5 are respectively arranged at two opposite ends of the bottom plate 3 to form a U-shaped groove; the sample is placed on the bottom plate 3 in the clamp, the screw 6 is arranged in the threaded hole, the position can be adjusted according to the size of the sample, and the sample is fixed between the screw 6 and the baffle plate 4 without the threaded hole. The screw 6 passes through the screw hole of the second baffle 5, one side of the sample is attached to the first baffle 4, and the sample can be fixed firmly by rotating the screw 6. The second baffle 5 of the embodiment is provided with 5 threaded holes. The cylindrical base 1 can be placed into a scanning electron microscope sample stage for mechanical fixation, and the stability of the sample holder is ensured. The length of the clamp 2 with the groove is 30mm-75mm, the width is 15mm-35m, and the height is 6mm-10 mm.

When a large-area EBSD sample is tested, the test surface of the sample is horizontally placed in the clamp 2 with the groove, one side of the sample is tightly attached to the first baffle 4, the screw 6 is screwed into the threaded hole of the second baffle 5, and the screw 6 is screwed until the sample is firmly fixed. And then the cylindrical base 1 is inserted into a sample holder of the scanning electron microscope for fixing. And (5) placing the sample into a scanning electron microscope after the sample is fixed, and performing EBSD test.

When the sample was inlayed in the test, put into 3 samples in proper order according to analysis position and order in taking recess anchor clamps 2, the sample test face keeps the level, inlays sample and pastes tight baffle 4 and place, screws 6 screw in the screw of baffle two 5 with a plurality of screws, screws 6, until the sample is fixed firmly. And then the cylindrical base 6 is inserted into the sample holder of the scanning electron microscope and fixed. And (5) placing the sample into a scanning electron microscope after the sample is fixed, and performing EBSD test.

When a plurality of small samples are tested, the samples are sequentially placed into the fixture 2 with the grooves according to the analysis position and the analysis sequence, one side of each sample is attached to the first baffle 4, a plurality of screws 6 are screwed into the screw holes of the second baffle 5, and the screws 6 are screwed until the samples are fixed firmly. And (5) placing the sample into a scanning electron microscope after the sample is fixed, and performing EBSD test.

The utility model discloses a scanning electron microscope large tracts of land EBSD sample platform for sample, scanning electron microscope sample platform mechanical fixation can be put into to the cylinder base, and the screw passes the screw hole of baffle two, pastes tight baffle one with sample one side, and according to the width of placing the sample, rotatory screw can be fixed firmly with the sample. The clamp with the groove furthest exerts the size range of the sample which can be detected by a scanning electron microscope in the length direction, and when the EBSD test is carried out, the sample table moves along the length direction without collision risk. The utility model discloses sample platform's simple structure, convenient operation, mechanical fixation is firm, is difficult for drifting, can measure large tracts of land EBSD sample, or simultaneously measures a plurality of samples of inlaying, very big improvement detection quality and efficiency.

In addition to the above embodiments, the present invention can be implemented in other ways. All the technical solutions formed by adopting equivalent substitutions or equivalent transformations fall within the protection scope claimed by the present invention.

Claims

1. The utility model provides a scanning electron microscope large tracts of land EBSD sample is with sample platform which characterized in that: the fixture with the groove consists of a bottom plate and two baffle plates, wherein one baffle plate is provided with a threaded hole; the screw passes through the threaded hole to fix the sample placed in the clamp between the screw and the baffle plate without the threaded hole.

2. The sample stage for scanning electron microscope large-area EBSD samples according to claim 1, characterized in that: the size of the cylindrical base is matched with that of the scanning electron microscope sample seat, and the cylindrical base can be placed into the scanning electron microscope sample seat to be mechanically fixed.

3. The sample stage for scanning electron microscope large-area EBSD samples according to claim 1, characterized in that: the screw penetrates through the threaded hole of the baffle plate, and one side of the sample placed on the bottom plate of the clamp is fixed and tightly attached to the other baffle plate without the threaded hole.

4. The sample stage for scanning electron microscope large-area EBSD samples according to claim 1, characterized in that: the number of the threaded holes is 3-6.

5. The sample stage for scanning electron microscope large-area EBSD samples according to claim 1, characterized in that: the length of the clamp with the groove is 30mm-75mm, the width is 15mm-35mm, and the height is 6mm-10 mm.