CN217484224U

CN217484224U - Fixing mechanism for scanning electron microscope test sample

Info

Publication number: CN217484224U
Application number: CN202221366225.5U
Authority: CN
Inventors: 杨修波; 刘峰; 丁莹; 高翔宇; 许建军
Original assignee: Northwestern Polytechnical University
Current assignee: Northwestern Polytechnical University
Priority date: 2022-06-02
Filing date: 2022-06-02
Publication date: 2022-09-23
Anticipated expiration: 2032-06-02

Abstract

The utility model discloses a fixing mechanism for a scanning electron microscope test sample, which comprises a clamping piece, a driving mechanism, a reference piece and a base, wherein the clamping piece is connected with the driving mechanism; the driving mechanism comprises a supporting piece and a movable piece, the supporting piece is fixed on the base, and one end of the movable piece is rotatably connected with the clamping piece; the base part is fixed on the base, an angle mark is arranged on one surface of the base part, which faces the clamping part, and the clamping part and the base part enclose to form a clamping space; the bottom of the base is provided with a butt joint groove. The beneficial effects of the above technical scheme are: the clamping piece moves towards the reference piece under the action of the driving mechanism, and then the sample is clamped. The clamping piece can rotate relative to the movable piece to adjust the angle, so that the clamping piece can tightly press the sample on the reference piece at a preset angle. The conductive piece can ensure the electric connection between the fixing mechanism and the sample, so that the test can be normally carried out.

Description

Fixing mechanism for scanning electron microscope test sample

Technical Field

The utility model relates to a fixed technical field of electronic speculum test sample, concretely relates to scanning electron microscope test sample fixed establishment.

Background

Scanning electron microscopy plays a very important role in the observation of the microstructure of a material. The incident electron beam probe is used to observe the surface of the sample and emit secondary electrons, back scattered electrons, X-rays and other signals. Signals are respectively collected by the secondary electron probe, the back scattering electron probe and the X-ray energy spectrum probe, so that the morphological characteristics of the surface of the sample, the internal crystal structure information and the surface component information can be obtained.

Because the electrons are incident to the surface of the sample to generate charge accumulation, white and bright stripes appear on the secondary electron image of scanning electrons, image shooting is influenced, and the sample to be observed is required to be conductive. Or spraying other substances on the surface to increase the conductivity of the alloy, and the common method is ion sputtering evaporation gold plating, platinum or carbon and the like. Some metal materials are good electric conductors, but before observation, a hot embedding method or a cold embedding method is needed to fix a sample, and the surface of the sample is polished on a polishing machine, so that the sample and a clamping device are directly isolated by inlaid bakelite powder or epoxy resin and the like, and the electric conductivity is lost. The conventional method of connecting the sample and the holder with a carbon conductive adhesive or a copper conductive adhesive has the disadvantage of requiring a high cost of the conductive adhesive.

When a cylindrical stretched sample is observed, the fixation with a conductive adhesive is not easy to stabilize. Especially, long time is required for shooting a back scattering electron diffraction image, and the fixing ability of the conductive adhesive is poor. And also, it is necessary to remove the conductive paste with a lot of effort after the image capturing is finished.

The inclination angle of the sample for obtaining the optimum diffraction pattern by electron back scattering diffraction is generally 70 degrees, so that the sample stage is required to be inclined at such a large angle and to be able to correspond to the value of the angle more accurately. Some samples were not parallel in top and bottom surfaces, and thus the conductive adhesive could not be used to attach the bottom, resulting in a top plane that was not 70 degrees.

The observed samples are sometimes large, with the conventional size being on the scale of 0.5-4cm, so a relatively flexible scale jig is required.

Related documents in the prior art realize part of the functions and improvements. The patent with application number 202110282390.6 adopts the base that matches with standard inlay mould shape, a plurality of supporters of distribution on the base, and the method of conducting resin is pasted on outside surface, has alleviateed the electric charge effect of sample greatly, but need destroy the inlaid material at every turn and just can carry out new sample preparation, and the use is troublesome. The patent with application number 201822259589.3 adopts a method of a central column and a peripheral slide block, which can hold an irregularly-shaped sample, but cannot be properly inclined to expose the sample stage, so that the method is suitable for the electron back-scattering diffraction or transmission diffraction mode.

Therefore, a sample fixing mechanism for convenient and fast observation by a scanning electron microscope, which can timely match and shoot a non-conductive cylindrical mosaic sample, a tensile sample, a sheet sample, a large sample, an electron back scattering inclination angle of 70 degrees or other angles and a transmission diffraction mode, is lacked up to now.

SUMMERY OF THE UTILITY MODEL

To the defect among the prior art, the utility model provides a scanning electron microscope test sample fixed establishment makes things convenient for angle regulation, and can guarantee good electric conductivity.

The utility model provides a technical scheme be: a fixing mechanism for a scanning electron microscope test sample comprises:

the clamping piece is connected with the driving mechanism, one side, facing the reference piece, of the clamping piece is provided with a positioning groove, and the top of the clamping piece is provided with a conductive piece in an adjustable mode;

the driving mechanism comprises a supporting piece and a moving piece, the supporting piece is fixed on the base, the moving piece is movably arranged on the supporting piece, and one end of the moving piece is rotatably connected with the clamping piece;

the datum part is fixed on the base, an angle mark is arranged on one surface of the datum part facing the clamping part, and the clamping part and the datum part enclose to form a clamping space; and (c) a second step of,

the base, the bottom of base is provided with the butt joint groove.

The beneficial effects of the above technical scheme are: the clamping piece moves towards the reference piece under the action of the driving mechanism, and then the sample is clamped. The clamping piece can rotate relative to the movable piece to adjust the angle, so that the clamping piece can tightly press the sample on the reference piece at a preset angle. The conductive piece can ensure the electric connection between the fixing mechanism and the sample, so that the test can be normally carried out.

Furthermore, the clamping piece is a clamping block, one surface of the clamping block, facing the reference piece, is a clamping plane, the positioning groove is formed in the clamping plane, and a connecting hole connected with the moving piece is formed in one side, deviating from the clamping plane, of the clamping block.

Furthermore, the cross section of the positioning groove is V-shaped, and the center line of the positioning groove is superposed with the center point of the connecting hole. The V-shaped positioning groove is convenient for positioning the sample.

Further, a screw hole facing the reference member is formed in the supporting member, the moving member is a bolt, the bolt is screwed in the screw hole, and one end of the bolt is inserted into the connecting hole to be connected with the clamping member. When the bolt moves in the screw hole, the clamping piece is pushed to move, and the bolt is connected with the connecting hole, so that the clamping piece cannot deviate from a preset angle along with the rotation of the bolt when being pushed.

Furthermore, two fastening pieces are arranged at the top of the clamping block at intervals, the conductive piece comprises a conductive piece, a strip-shaped hole is formed in the conductive piece, and the fastening pieces penetrate through the strip-shaped hole to lock the conductive piece. The strip-shaped holes enable the angle of the conducting strips and the lap length of the conducting strips on the sample to be adjustable.

Furthermore, the position that is close to the avris on the base is provided with the first fixed orifices of fixing the benchmark piece, still be provided with at least a set of second fixed orifices that is used for fixing support piece on the base.

Furthermore, one end of the conducting strip is provided with a saw-toothed protrusion. The saw-tooth shaped protrusions can enhance the performance of the electrical connection.

Furthermore, one side of the clamping piece, which is deviated from the positioning groove, is provided with a horizontal indicating groove.

Further, the angle markings include a horizontal reference near the top of the reference piece and a fan angle marking below the horizontal reference, the fan angle marking having a minimum division of 10 °. When the angle of the clamping piece is adjusted, the angle can be marked according to the fan-shaped angle, so that the angle is more accurate.

Further, the upper end of the reference part, which is far away from the surface of the angle mark, is provided with an inclined surface, and the included angle between the inclined surface and the horizontal plane is 70 degrees. Conventional electron backscatter diffraction testing is facilitated.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.

Fig. 1 is a schematic structural view of an angle according to an embodiment of the present invention;

fig. 2 is a schematic structural view of another angle according to the embodiment of the present invention;

FIG. 3 is a schematic view of an assembly of a base member and a support member according to an embodiment of the present invention;

FIG. 4 is a schematic view of an embodiment of the present invention clamping a mounted sample;

fig. 5 is a schematic view of a clamping and stretching cylindrical sample according to an embodiment of the present invention;

FIG. 6 is a schematic diagram of a sample block held by an embodiment of the present invention;

fig. 7 is a schematic diagram of an embodiment of the present invention for holding a transmissive thin sample.

Reference numerals: the base 100, the butt joint groove 110, the first fixing hole 120, the second fixing hole 130, the reference member 200, the inclined surface 210, the horizontal reference 220, the fan-shaped angle mark 221, the clamping block 300, the positioning groove 310, the connecting hole 320, the conductive member 330, the strip-shaped hole 331, the sawtooth-shaped protrusion 332, the fastening member 333, the horizontal indicating groove 340, the supporting member 400, the movable member 410, and the screw hole 411.

Detailed Description

Embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and therefore are only examples, and the protection scope of the present invention is not limited thereby.

It is to be noted that unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which the present invention belongs.

As shown in fig. 1 to 7, the present embodiment provides a fixing mechanism for a test sample of a scanning electron microscope, including a clamping member, a driving mechanism, a reference member 200, and a base 100, wherein the clamping member is connected to the driving mechanism, a positioning slot 310 is provided on one side of the clamping member facing the reference member 200, and a conductive member 330 is adjustably provided on the top of the clamping member; the driving mechanism comprises a supporting piece 400 and a movable piece 410, wherein the supporting piece 400 is fixed on the base 100, the movable piece 410 is movably arranged on the supporting piece 400, and one end of the movable piece 410 is rotatably connected with the clamping piece; the reference piece 200 is fixed on the base 100, an angle mark is arranged on one surface of the reference piece 200 facing the clamping piece, and the clamping piece and the reference piece 200 enclose a clamping space; the bottom of the base 100 is provided with a butt joint groove 110, and the butt joint groove 110 is a dovetail groove and is adapted to a Zeiss Sigma series scanning electron microscope test sample table mechanism.

When in use: the clamping member is arranged to move towards the reference member 200 under the action of the drive mechanism, thereby clamping the sample. The clamp member can be rotated relative to the movable member 410 to adjust the angle so that the clamp member can press the sample against the reference member 200 at a predetermined angle. The conductive member 330 is provided to ensure electrical connection between the fixing mechanism and the sample, so that the test can be performed normally. The conductive device 330 can conduct electricity, and can also be used as a fixing device for fixing the sheet sample, and the angle can be selected from 70 degrees, which is commonly used, when the clamping device is tightly pressed on the reference device 200, adjusted and fixed by the movable element 410. The conductive member 330 is then loosened, the sheet sample is placed on top of the clamping members, and the conductive member 330 is secured, thereby compressing the sheet sample for viewing.

The clamping member is a clamping block 300, one surface of the clamping block 300 facing the reference member 200 is a clamping plane, the positioning groove 310 is formed in the clamping plane, and a connecting hole 320 connected with the movable member 410 is formed in one side of the clamping block 300 facing away from the clamping plane. The cross-section of the positioning groove 310 is preferably V-shaped, and the center line of the positioning groove 310 coincides with the center point of the connection hole 320. The V-shaped positioning groove 310 facilitates positioning of the sample.

The movable member 410 needs to be locked after being moved to ensure that the clamping member can be fixed, and for this reason, a screw hole 411 facing the reference member 200 is provided on the support member 400, the movable member 410 is a bolt, the bolt is screwed into the screw hole 411, and one end of the bolt is inserted into the connecting hole 320 to connect with the clamping member. The clamping member is pushed to move when the bolt moves in the screw hole 411, and the connection of the bolt and the connection hole 320 is such that the clamping member does not deviate from a predetermined angle following the rotation of the bolt when pushed.

In order to adjust the conductive sheet, two fastening members 333 are spaced apart from each other on the top of the clamping block 300, the fastening members 333 may be screws, bolts, or the like, the conductive member 330 includes a conductive sheet, a strip-shaped hole 331 is formed in the conductive sheet, and the fastening members 333 pass through the strip-shaped hole 331 to fasten the conductive member 330. The strip-shaped holes 331 enable the angle of the conducting strip and the overlapping length of the conducting strip on the sample to be adjusted. One end of the conductive sheet is also provided with a serration 332. The serrations 332 enhance the electrical connection performance.

In order to fix the reference member 200 and the support member 400, a first fixing hole 120 for fixing the reference member 200 is provided on the base 100 at a position near the edge side, the base 100 is further provided with at least one set of second fixing holes 130 for fixing the supporting member 400, the relative positions of the second fixing holes 130 and the first fixing holes 120 determine the distance between the supporting member 400 and the reference member 200, that is, the size of the space for holding the object, in order to adjust the space for holding the object, a plurality of sets of second fixing holes 130 having different pitches from the first fixing holes 120 may be provided on the base 100, when the size of the space for holding the object needs to be changed, the supporting member 400 is removed and fixed to the corresponding second fixing hole 130, for stability of the connection, the support 400 and the reference member 200 are each connected to the base 100 by bolts.

In order to adjust the angle of the clamping member more precisely, a horizontal indicating groove 340 is provided on the side of the clamping member facing away from the positioning groove 310. The angle markings include a horizontal reference 220 and a fan angle marking 221, the horizontal reference 220 being near the top of the reference piece 200, the fan angle marking 221 being located below the horizontal reference 220, the fan angle marking 221 having a minimum division of 10 °. When adjusting the angle of the clamp, it is possible to proceed against the fan angle mark 221, making the angle more accurate. The upper end of the reference member 200, which faces away from the angle mark, is provided with an inclined surface 210, and an included angle between the inclined surface 210 and the horizontal plane is 70 °. Conventional electron backscatter diffraction testing is facilitated.

Referring to fig. 4-7, the fixture is capable of holding a mounted sample, a stretched cylindrical sample, a bulk sample, and a transmissive thin sample, respectively.

In the description of the present application, it is to be understood that the terminology used herein is for the purpose of description only and is not intended to be interpreted as indicating or implying relative importance or to imply that the number of technical features indicated is significant. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "connected," "secured," and the like are to be construed broadly and encompass, for example, both fixedly connected and detachably connected, or integrally formed; may be an electrical connection; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

In the specification of the present invention, a large number of specific details are explained. It is understood, however, that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, systems, and techniques have not been shown in detail in order not to obscure an understanding of this description.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the scope of the embodiments of the present invention, and are intended to be covered by the claims and the specification.

Claims

1. The utility model provides a scanning electron microscope test sample fixed establishment which characterized in that includes:

the clamping element is connected with the driving mechanism, a positioning groove (310) is formed in one side, facing the reference element (200), of the clamping element, and a conductive element (330) is adjustably arranged at the top of the clamping element;

the driving mechanism comprises a supporting piece (400) and a movable piece (410), the supporting piece (400) is fixed on the base (100), the movable piece (410) is movably arranged on the supporting piece (400), and one end of the movable piece (410) is rotatably connected with the clamping piece;

the datum part (200), the datum part (200) is fixed on the base (100), an angle mark is arranged on one surface of the datum part (200) facing the clamping part, and the clamping part and the datum part (200) enclose to form a clamping space; and (c) a second step of,

the base (100) is provided with a butt joint groove (110) at the bottom of the base (100).

2. The fixing mechanism for the test sample of the scanning electron microscope according to claim 1, wherein the clamping member is a clamping block (300), one surface of the clamping block (300) facing the reference member (200) is a clamping plane, the positioning groove (310) is opened on the clamping plane, and a connecting hole (320) connected with the movable member (410) is arranged on one side of the clamping block (300) facing away from the clamping plane.

3. The fixing mechanism for the scanning electron microscope test sample according to claim 2, wherein the cross section of the positioning groove (310) is V-shaped, and the center line of the positioning groove (310) coincides with the center point of the connecting hole (320).

4. The fixing mechanism for the test sample of the scanning electron microscope according to claim 2 or 3, wherein the supporting member (400) is provided with a screw hole (411) facing the reference member (200), the movable member (410) is a bolt, the bolt is screwed in the screw hole (411), and one end of the bolt is inserted into the connecting hole (320) to be connected with the clamping member.

5. The fixing mechanism for the SEM test sample according to claim 2 or 3, wherein two fastening members (333) are arranged at intervals on the top of the clamping block (300), the conductive member (330) comprises a conductive sheet, a strip-shaped hole (331) is formed in the conductive sheet, and the fastening members (333) penetrate through the strip-shaped hole (331) to fasten the conductive member (330).

6. A fixing mechanism for a scanning electron microscope test sample according to any one of claims 1 to 3, characterized in that a first fixing hole (120) for fixing the reference member (200) is provided on the base (100) near the side, and at least one set of second fixing holes (130) for fixing the support member (400) is further provided on the base (100).

7. A fixing mechanism for a scanning electron microscope test sample according to claim 5, characterized in that one end of the conducting strip is provided with a sawtooth-shaped protrusion (332).

8. A sem test sample holding mechanism according to any one of claims 1-3, wherein a horizontal indicating groove (340) is provided on a side of the clamping member facing away from the positioning groove (310).

9. A sem test sample holding mechanism according to claim 1, wherein said angular markings include a horizontal reference (220) and a fan angle marking (221), said horizontal reference (220) being located near the top of said reference member (200), said fan angle marking (221) being located below said horizontal reference (220), said fan angle marking (221) having a minimum pitch of 10 °.

10. The fixing mechanism for the test sample of the scanning electron microscope according to claim 1, characterized in that an inclined surface (210) is provided at an upper end of a surface of the reference member (200) facing away from the angle mark, and the inclined surface (210) forms an angle of 70 ° with a horizontal plane.