CN207528662U - EBSD test sample platforms - Google Patents
EBSD test sample platforms Download PDFInfo
- Publication number
- CN207528662U CN207528662U CN201721647956.6U CN201721647956U CN207528662U CN 207528662 U CN207528662 U CN 207528662U CN 201721647956 U CN201721647956 U CN 201721647956U CN 207528662 U CN207528662 U CN 207528662U
- Authority
- CN
- China
- Prior art keywords
- plane
- sample
- sample stage
- model
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model is related to investigation of materials and inspection technology field, especially a kind of EBSD test samples platform.This EBSD test samples platform, including sample stage, horizontal plane is provided on the sample stage, the left end of horizontal plane is connected with to inclined first inclined-plane of upper left, the left end on the first inclined-plane is connected with inclined second inclined-plane in direction to left down, and the first inclined-plane and the second inclined-plane are vertically arranged；Angle α between the horizontal plane and the first inclined-plane is 100~120 °.The utility model is simple in structure, and sampling is convenient, it is only necessary to and a side of sample and test surfaces is vertical, convenient for cutting sample；Sample stage carries 70 ° of angles, without big angle rotary, without adjusting sample stage angle repeatedly when replacing test-types, it is only necessary to replace sample stage；Sample is pasted onto the first inclined-plane or the second inclined-plane by conducting resinl, is installed convenient for sample, and sample easily fixes.
Description
Technical field
The utility model is related to investigation of materials and inspection technology field, especially one kind to be used to carry out electricity in scanning electron microscope
The EBSD test sample platforms that sub- back scattering diffraction measures.
Background technology
In being examined to the electron-microscopic analysis of metal targets material, EBSD technologies is needed to carry out the crystalline substance of analysis of metallic materials
Grain orientation.According to EBSD theories, when EBSD tests are carried out in scanning electron microscope, sample test face normal direction must be with entering radio
Beamlet is into 70 ° of angle, so requiring SEM sample stages that must carry out high angle inclination.
When directly carrying out EBSD measurements with sample platform of scanning electronic microscope, need sample test face parallel with the back side.The sample back side
It is pasted onto on sample stage and is fixed with conductive tape, sample stage is then rotated 70 °.
There are 2 major defects for test job in this way：
1), sample preparation is laborious, needs test surfaces and reverse side grinding and polishing into parallel surface, and sample preparation difficulty is high.When not parallel, cause
70 ° of angles are not allowed, and cause measurement error；
2), sample is not easy fix tightly.The drift of image when loosely, can cause to measure is fixed, influences the standard of measurement result
True property.
Utility model content
The technical problems to be solved in the utility model is：Overcome deficiency in the prior art, a kind of EBSD tests are provided and are used
Sample stage.
Technical solution is used by the utility model solves its technical problem：A kind of EBSD test samples platform, including
Sample stage is provided with horizontal plane on the sample stage, and the left end of horizontal plane is connected with to inclined first inclined-plane of upper left, and
The left end on one inclined-plane is connected with inclined second inclined-plane in direction to left down, and the first inclined-plane and the second inclined-plane are vertically arranged；The water
Angle α between plane and the first inclined-plane is 100~120 °.
Further, the angle α between the horizontal plane and the first inclined-plane is 110 °.
Further, the sample stage bottom end is connected with the pedestal being connect with SEM specimen holders.
The beneficial effects of the utility model are：The utility model is simple in structure, has the following advantages：
(1), sampling is convenient, it is only necessary to and a side of sample and test surfaces is vertical, convenient for cutting sample；
(2), sample stage carries 70 ° of angles, without big angle rotary, without adjusting sample stage repeatedly when replacing test-types
Angle, it is only necessary to replace sample stage；
(3), sample is pasted onto the first inclined-plane or the second inclined-plane by conducting resinl, is installed convenient for sample, and sample is easy
It is fixed.
Description of the drawings
The utility model is further illustrated with embodiment below in conjunction with the accompanying drawings.
Fig. 1 is the structure diagram of the utility model.
1. pedestal in figure, 2. sample stages, 3. horizontal planes, 4. first inclined-planes, 5. second inclined-planes.
Specific embodiment
The utility model is further described presently in connection with attached drawing.These attached drawings are simplified schematic diagram only to show
Meaning mode illustrates the basic structure of the utility model, therefore it only shows the composition related with the utility model.
EBSD test sample platforms as shown in Figure 1, including sample stage 2, are provided with horizontal plane 3, horizontal plane on sample stage 2
3 left end is connected with to inclined first inclined-plane 4 of upper left, and it is inclined that the left end on the first inclined-plane 4 is connected with direction to left down
Second inclined-plane 5, the first inclined-plane 4 and the second inclined-plane 5 are vertically arranged；Angle α between 3 and first inclined-plane 4 of horizontal plane is
110 °, 2 bottom end of sample stage is connected with the pedestal 1 being connect with SEM specimen holders.
During test, thicker sample is pasted onto by conducting resinl on the second inclined-plane 5, and sheet sample is pasted onto by conducting resinl
On first inclined-plane 4, then SEM carries out EBSD tests to sample.
This EBSD test samples platform is simple in structure, has the following advantages：
(1), sampling is convenient, it is only necessary to and a side of sample and test surfaces is vertical, convenient for cutting sample；
(2), sample stage 2 carries 70 ° of angles, without big angle rotary, without adjusting sample repeatedly when replacing test-types
Corner of table degree, it is only necessary to replace sample stage 2；
(3), sample is pasted onto the first inclined-plane 4 or the second inclined-plane 5 by conducting resinl, is installed convenient for sample, and sample holds
It is fixed easily.
The above embodiment is only the technical concepts and features for illustrating the utility model, and its object is to allow be familiar with this skill
The personage of art can understand the content of the utility model and be implemented, and the protection model of the utility model can not be limited with this
It encloses, all equivalent change or modifications substantially made according to the spirit of the present invention should all cover the protection model in the utility model
In enclosing.
Claims (3)
1. a kind of EBSD test samples platform, it is characterised in that：Including sample stage (2), level is provided on the sample stage (2)
Face (3), the left end of horizontal plane (3) are connected with to inclined first inclined-plane (4) of upper left, and the left end of the first inclined-plane (4) connects
Oriented inclined second inclined-plane (5) of lower left, the first inclined-plane (4) and the second inclined-plane (5) are vertically arranged；The horizontal plane (3)
Angle α between the first inclined-plane (4) is 100~120 °.
2. EBSD test samples platform according to claim 1, it is characterised in that：The horizontal plane (3) is oblique with first
Angle α between face (4) is 110 °.
3. EBSD test samples platform according to claim 1, it is characterised in that：Sample stage (2) bottom end connection
There is the pedestal (1) being connect with SEM specimen holders.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721647956.6U CN207528662U (en) | 2017-11-30 | 2017-11-30 | EBSD test sample platforms |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721647956.6U CN207528662U (en) | 2017-11-30 | 2017-11-30 | EBSD test sample platforms |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207528662U true CN207528662U (en) | 2018-06-22 |
Family
ID=62577505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721647956.6U Active CN207528662U (en) | 2017-11-30 | 2017-11-30 | EBSD test sample platforms |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207528662U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110118791A (en) * | 2019-05-21 | 2019-08-13 | 山东省分析测试中心 | For obtaining crackle/crystal boundary three-dimensional information EBSD equipment sample platform and method |
| CN110398508A (en) * | 2019-07-05 | 2019-11-01 | 山东省分析测试中心 | Inlaying samples EBSD detection sample stage, production method and detection device |
| CN111521627A (en) * | 2020-04-30 | 2020-08-11 | 中国航发成都发动机有限公司 | EBSD test sample platform |
-
2017
- 2017-11-30 CN CN201721647956.6U patent/CN207528662U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110118791A (en) * | 2019-05-21 | 2019-08-13 | 山东省分析测试中心 | For obtaining crackle/crystal boundary three-dimensional information EBSD equipment sample platform and method |
| CN110118791B (en) * | 2019-05-21 | 2020-03-03 | 山东省分析测试中心 | EBSD equipment sample stage and method for acquiring crack/grain boundary three-dimensional information |
| CN110398508A (en) * | 2019-07-05 | 2019-11-01 | 山东省分析测试中心 | Inlaying samples EBSD detection sample stage, production method and detection device |
| CN111521627A (en) * | 2020-04-30 | 2020-08-11 | 中国航发成都发动机有限公司 | EBSD test sample platform |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207528662U (en) | EBSD test sample platforms | |
| CN201556600U (en) | Scanning electronic microscope electronic backscatter diffraction test sample stand | |
| CN104183453B (en) | Sample stage and microscopic system | |
| CN210465317U (en) | Sample seat suitable for EBSD test | |
| CN106935464A (en) | Instrument and diffraction image imaging method for transmitted electron back scattering diffraction | |
| CN113933328A (en) | PCB surface thin layer quality analysis method | |
| CN205580318U (en) | Measuring device | |
| CN103017692A (en) | Composite type calibration guide sample and composite type calibration method | |
| CN207133209U (en) | A kind of EBSD instrument sample stage | |
| CN219590244U (en) | Jig for ultrasonic detection and ultrasonic detection device | |
| CN105527307B (en) | A kind of specimen holder suitable for metal quality analyzer sample | |
| CN210742166U (en) | Electronic probe sample table | |
| CN201936840U (en) | Specimen holder for analysis of scanning electron microscope | |
| CN105606635B (en) | Sampling test platform for EBSD tests | |
| CN209822591U (en) | Scanning electron microscope sample stage for non-conductive block sample | |
| CN103499319A (en) | Method for measuring thickness of inner rust layer of weather resistant steel | |
| CN208383994U (en) | A kind of radiation test macro | |
| CN208140499U (en) | Cable impression measured material | |
| CN206804563U (en) | A kind of device for EBSD tests | |
| CN208654068U (en) | Electron backscatter diffraction sample fixture | |
| CN206864432U (en) | A kind of Multi-functional scanning electron microscopic sample platform | |
| CN107290377B (en) | Sample tray positioning device of total reflection X fluorescence spectrometer | |
| Fraczkiewicz et al. | 3D high resolution imaging for microelectronics: A multi-technique survey on copper pillars | |
| CN214408749U (en) | Electronic probe sample table for analyzing large-size sample tissue | |
| CN111812139A (en) | Chip internal structure analysis method and sample bearing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |