CN105606635B - Sampling test platform for EBSD tests - Google Patents
Sampling test platform for EBSD tests Download PDFInfo
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- CN105606635B CN105606635B CN201511022163.0A CN201511022163A CN105606635B CN 105606635 B CN105606635 B CN 105606635B CN 201511022163 A CN201511022163 A CN 201511022163A CN 105606635 B CN105606635 B CN 105606635B
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- Prior art keywords
- guide rail
- sliding block
- test platform
- sampling test
- pedestal
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/203—Measuring back scattering
Abstract
For the sampling test platform of EBSD tests, it is related to a kind of sampling test platform.The present invention, which is solved, to be adhesive in sample on sampling test platform with conduction and will appear movement during the test, and picture position is easy to happen change, and back scattering region shifts, and leads to the problem of test result inaccuracy.Guide rail inclination is packed on the upper surface of pedestal, it is machined with dovetail groove on the upper surface of guide rail, angle between the length direction and vertical direction of the dovetail groove of guide rail is 70 °, the top of sliding block is rectangular shape, the lower part of sliding block is swallowtail shape, the lower part of sliding block is located in the dovetail groove of guide rail and the two is slidably connected, angle between the upper surface and vertical direction of sliding block is 70 °, the lower part of limiting plate and the lower part of guide rail are detachably connected, jackscrew is provided in the middle part of limiting plate, one end of jackscrew is in contact with sliding block.The present invention is tested for EBSD.
Description
Technical field
The present invention relates to a kind of sampling test platforms, and in particular to a kind of sampling test platform for EBSD tests.
Background technology
In scanning electron microscope (SEM), the electron beam and the sample effect that are incident on sample generate several different effects
It answers, one of them is exactly to generate diffraction on lattice plane regularly arranged in each crystal or crystal grain.From all atomic planes
The diffraction composition " diffraction pattern " of generation, this can be regarded as the angular relationship figure between atomic plane in a crystal.20th century 90
Since age, the electron backscattered style (Electron Back-scattering Patterns, the abbreviation that are assemblied on SEM
EBSP) crystal microcell is orientated and the analytical technology of crystal structure achieves larger development, and in microstructure
And extensive use in micro- texture characterization.The technology is also referred to as electron backscatter diffraction (Electron Backscattered
Diffraction, abbreviation EBSD) or orientation mapping microtechnic (Orientation Imaging Microscopy, referred to as
OIM).EBSD's is mainly characterized by progress spatial resolution sub-micron while retaining the conventional feature of scanning electron microscope
The diffraction (data for providing crystallography) of grade.
EBSD is currently used material characterization means, and sample need to tilt 70 ° in vertical direction in test process, Er Qieyao
Ask sample that cannot tilt in the horizontal direction.It is that sample is sticked to sampling test platform with conducting resinl (or elargol) in test process at present
On.For the small sample of weight, need sample levels direction is parallel with probe as possible.And for heavier sample, by
Then 70 ° are tilted, with traditional method, sample will appear movement during the test, and picture position is easy to happen change, and the back of the body dissipates
It penetrates region to shift, keeps test result inaccurate, lead to test failure.
Invention content
The present invention is adhesive in sample on sampling test platform with conduction for solution and will appear movement, image position during the test
It sets and is easy to happen change, back scattering region shifts, and leads to the problem of test result inaccuracy, and then provides one kind and be used for
The sampling test platform of EBSD tests.
The present invention adopts the technical scheme that solve above-mentioned technical problem：
The sampling test platform for EBSD tests of the present invention includes sliding block, guide rail, pedestal, limiting plate and jackscrew, guide rail
Inclination is packed on the upper surface of pedestal, is machined with dovetail groove on the upper surface of guide rail, the length direction of the dovetail groove of guide rail with
Angle between vertical direction is 70 °, and the top of sliding block is rectangular shape, and the lower part of sliding block is swallowtail shape, under sliding block
Portion is located in the dovetail groove of guide rail and the two is slidably connected, and the angle between the upper surface and vertical direction of sliding block is 70 °, limit
The lower part of plate and the lower part of guide rail are detachably connected, and jackscrew is provided in the middle part of limiting plate, and one end of jackscrew is in contact with sliding block.
The present invention has the advantages that compared with prior art：
The sliding block of the sampling test platform for EBSD tests of the present invention is fixed on the dovetail of guide rail by the dovetail of lower part
It in slot, can only be slided along the length direction of guide rail to limit sliding block, and the length direction of the dovetail groove of guide rail and vertical side
Angle between is 70 °, ensure that the angle between the upper surface of sliding block and vertical direction is 70 °, during experiment, even if
It is heavier sample it is also ensured that the direction of sample is parallel with probe orientation, to ensure that the stability of experiment；
Weight will not impact test to the sampling test platform for EBSD tests of the present invention at the trial, ensure that
Angle between the upper surface and vertical direction of sliding block is 70 °, is adhesive in sample on sampling test platform with existing with conduction and exists
Will appear movement in test process to compare, sample stage need not vert, and ensure that sample will not shift under gravity,
To ensure that the stability of test result.
Description of the drawings
Fig. 1 is the main sectional view of the sampling test platform for EBSD tests of the present invention；
Fig. 2 is the front view of sliding block 1 in the specific embodiment of the invention one；
Fig. 3 is the right view of sliding block 1 in the specific embodiment of the invention one；
Fig. 4 is the vertical view of sliding block 1 in the specific embodiment of the invention one；
Fig. 5 is the front view of one middle guide 2 and pedestal 3 of the specific embodiment of the invention；
Fig. 6 is the left view of one middle guide 2 and pedestal 3 of the specific embodiment of the invention；
Fig. 7 is the vertical view of one middle guide 2 and pedestal 3 of the specific embodiment of the invention.
Specific implementation mode
Specific implementation mode one：As shown in Fig. 1~7, the sampling test platform for EBSD tests of present embodiment includes
Sliding block 1, guide rail 2, pedestal 3, limiting plate 4 and jackscrew 5, the inclination of guide rail 2 are packed on the upper surface of pedestal 3, the upper surface of guide rail 2
On be machined with dovetail groove 2-1, the angle between the length direction and vertical direction of the dovetail groove 2-1 of guide rail 2 is 70 °, sliding block 1
Top is rectangular shape, and the lower part of sliding block 1 is swallowtail shape, and the dovetail groove 2-1 that the lower part of sliding block 1 is located at guide rail 2 is interior and two
Person is slidably connected, and the angle between the upper surface and vertical direction of sliding block 1 is 70 °, the lower part of the lower part and guide rail 2 of limiting plate 4
It is detachably connected, the middle part of limiting plate 4 is provided with jackscrew 5, and one end of jackscrew 5 is in contact with sliding block 1.
The present invention when in use by sample installation on the slider 1, to ensure in test process the inclined direction of sample with
Vertical direction tilts 70 °, pushes sliding block 1 to be slided along the inclined direction of the dovetail groove of guide rail 2 using jackscrew 5.
Specific implementation mode two：As shown in Fig. 1,5 and 6, stud is provided in the middle part of the lower face of present embodiment pedestal 3
3-1.Facilitate the fixation of sampling test platform.Other compositions and connection relation are same as the specific embodiment one.
Specific implementation mode three：As shown in Figure 1, the lower part of present embodiment limiting plate 4 and the lower part of guide rail 2 pass through two
Connection bolt is detachably connected.So design, dismounting are easy for installation.Other compositions and connection relation and specific implementation mode one or
Two is identical.
Specific implementation mode four：As shown in Fig. 1,5 and 6, present embodiment pedestal 3 is revolving body pedestal.So design, surely
It is qualitative good.Other compositions and connection relation are the same as the specific implementation mode 3.
Specific implementation mode five：As shown in Fig. 1,5 and 6, present embodiment pedestal 3 is approximate round estrade.So design, surely
It is qualitative good.Other compositions and connection relation are identical as specific implementation mode four.
Claims (5)
1. a kind of sampling test platform for EBSD tests, it is characterised in that：The sampling test platform includes sliding block (1), guide rail
(2), pedestal (3), limiting plate (4) and jackscrew (5), guide rail (2) inclination be packed on the upper surface of pedestal (3), guide rail (2) it is upper
Dovetail groove (2-1) is machined on end face, the angle between the length direction and vertical direction of the dovetail groove (2-1) of guide rail (2) is
70 °, the top of sliding block (1) is rectangular shape, and the lower part of sliding block (1) is swallowtail shape, and the lower part of sliding block (1) is located at guide rail
(2) in dovetail groove (2-1) and the two is slidably connected, and the angle between the upper surface and vertical direction of sliding block (1) is 70 °, limit
The lower part and the lower part of guide rail (2) of position plate (4) are detachably connected, and jackscrew (5) is provided in the middle part of limiting plate (4), jackscrew (5)
One end is in contact with sliding block (1).
2. the sampling test platform according to claim 1 for EBSD tests, it is characterised in that：The lower face of pedestal (3)
Middle part be provided with stud (3-1).
3. the sampling test platform according to claim 1 or 2 for EBSD tests, it is characterised in that：Under limiting plate (4)
Portion connect bolt by two with the lower part of guide rail (2) and is detachably connected.
4. the sampling test platform according to claim 3 for EBSD tests, it is characterised in that：Pedestal (3) is revolving body
Pedestal.
5. the sampling test platform according to claim 4 for EBSD tests, it is characterised in that：Pedestal (3) is approximate circle
Stage body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511022163.0A CN105606635B (en) | 2015-12-29 | 2015-12-29 | Sampling test platform for EBSD tests |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511022163.0A CN105606635B (en) | 2015-12-29 | 2015-12-29 | Sampling test platform for EBSD tests |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105606635A CN105606635A (en) | 2016-05-25 |
| CN105606635B true CN105606635B (en) | 2018-10-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511022163.0A Active CN105606635B (en) | 2015-12-29 | 2015-12-29 | Sampling test platform for EBSD tests |
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| Country | Link |
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| CN (1) | CN105606635B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106644545A (en) * | 2016-12-28 | 2017-05-10 | 中国电力科学研究院 | Self-locking device reliability testing equipment |
| CN111982943B (en) * | 2020-08-05 | 2021-07-06 | 上海大学 | EBSD test sample platform and application thereof |
| CN114134478A (en) * | 2021-11-26 | 2022-03-04 | 上海大学 | Fast-cooling film coating sample stage device and application thereof |
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| CN201141821Y (en) * | 2007-11-16 | 2008-10-29 | 山东理工大学 | Special sample seat for electron back scattering diffraction |
| CN201342557Y (en) * | 2008-12-29 | 2009-11-11 | 宁波信虹精密机械有限公司 | Deslagging device for wheel bonding pad |
| CN201556600U (en) * | 2009-09-17 | 2010-08-18 | 宝山钢铁股份有限公司 | Scanning electronic microscope electronic backscatter diffraction test sample stand |
| CN201697885U (en) * | 2010-06-13 | 2011-01-05 | 武汉钢铁(集团)公司 | Multifunctional sample stage for measuring electron back scattered diffraction (EBSD) |
| CN202351191U (en) * | 2011-11-22 | 2012-07-25 | 南京钢铁股份有限公司 | Sample holder used for EBSD (electron back-scatter diffraction) of scanning electron microscope |
| CN203404328U (en) * | 2013-07-23 | 2014-01-22 | 浙江万向精工有限公司 | Integrated EPB driving device for parking braking |
| CN203534991U (en) * | 2013-09-09 | 2014-04-09 | 武汉钢铁(集团)公司 | Sheet test piece fixture used for scanning electron microscope (SEM) |
| CN203824939U (en) * | 2013-12-19 | 2014-09-10 | 江苏省沙钢钢铁研究院有限公司 | Transmission-type sample table for electron back scattering diffraction (EBSD) experiment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6229183B2 (en) * | 2013-07-11 | 2017-11-15 | 国立研究開発法人物質・材料研究機構 | Electron backscatter diffraction measurement system |
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2015
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| CN201141821Y (en) * | 2007-11-16 | 2008-10-29 | 山东理工大学 | Special sample seat for electron back scattering diffraction |
| CN201342557Y (en) * | 2008-12-29 | 2009-11-11 | 宁波信虹精密机械有限公司 | Deslagging device for wheel bonding pad |
| CN201556600U (en) * | 2009-09-17 | 2010-08-18 | 宝山钢铁股份有限公司 | Scanning electronic microscope electronic backscatter diffraction test sample stand |
| CN201697885U (en) * | 2010-06-13 | 2011-01-05 | 武汉钢铁(集团)公司 | Multifunctional sample stage for measuring electron back scattered diffraction (EBSD) |
| CN202351191U (en) * | 2011-11-22 | 2012-07-25 | 南京钢铁股份有限公司 | Sample holder used for EBSD (electron back-scatter diffraction) of scanning electron microscope |
| CN203404328U (en) * | 2013-07-23 | 2014-01-22 | 浙江万向精工有限公司 | Integrated EPB driving device for parking braking |
| CN203534991U (en) * | 2013-09-09 | 2014-04-09 | 武汉钢铁(集团)公司 | Sheet test piece fixture used for scanning electron microscope (SEM) |
| CN203824939U (en) * | 2013-12-19 | 2014-09-10 | 江苏省沙钢钢铁研究院有限公司 | Transmission-type sample table for electron back scattering diffraction (EBSD) experiment |
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| CN105606635A (en) | 2016-05-25 |
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