CN206460940U - A kind of multi-angle sample platform of scanning electronic microscope - Google Patents
A kind of multi-angle sample platform of scanning electronic microscope Download PDFInfo
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- CN206460940U CN206460940U CN201720091955.1U CN201720091955U CN206460940U CN 206460940 U CN206460940 U CN 206460940U CN 201720091955 U CN201720091955 U CN 201720091955U CN 206460940 U CN206460940 U CN 206460940U
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- triangular prism
- fixed plate
- baffle plate
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Abstract
The utility model discloses a kind of sample platform of scanning electronic microscope of multi-angle, it includes triangular prism, two block length cube baffle plates, fixed plate, base, fixing screws, triangular prism plays a part of to lay sample and changes sample angle, triangular prism is connected by screw the cuboid baffle plate of both sides, fixed below baffle plate with fixed plate by screw, fixed plate and base lean on mode connects for screw, there are some equidistant parallel lines on triangular prism sample stage, and indicate sequence number in parallel line front end, by the side of sample close to parallel lines when using, it is ensured that sample keeps level in the same side.The present apparatus can change the angle of sample stage, morphology analysis and EBSD analyses are met on same estrade, the sample stage also can once load multiple EBSD samples simultaneously, realize that once multiple sample dress samples carry out the function of EBSD signs simultaneously, so as to improve testing efficiency, sample stage has the advantages that cheap, easy to make, simple to operate, applicability is wide and is easy to measure multiple samples and can change the angle of sample stage.
Description
Technical field
The utility model is related to a kind of multi-angle sample platform of scanning electronic microscope.For sample shape and the much the same sample of size
Product, design a kind of objective table, can meet multiple samples while being loaded on objective table, and realize verting for multi-angle, meet general
Logical ESEM morphology analysis and EBSD phenetic analysis.
Background technology
SEM abbreviation ESEM, is a kind of using beam bombardment sample, collects sample surfaces signal
So as to the electronic optical instrument of imaging.Because it has, sample preparation is simple, multiplication factor adjustable extent is wide, image resolution ratio is high, scape
Deep big the features such as, through being widely used in the multi-field research such as material, chemistry, biology, microelectronics and industrial production.
In recent years, it is assemblied in SEM（SEM）On EBSD style（Electron Back-
Scattering Patterns, abbreviation EBSP）Crystal microcell is orientated and the analytical technology of crystal structure achieves large development,
The technology is also referred to as EBSD（Electron Backscatter Diffraction, abbreviation EBSD）Or orientation
It is imaged microtechnic（Orientation Imaging Microscopy, abbreviation OIM）Etc., as research material deformation, extensive
The effective means of multiple and recrystallization process.During sem test, in morphology analysis, it is desirable to electron beam and observation
Surface is vertical, and when EBSD is characterized, then the angle for requiring electron beam and sightingpiston normal is 70 °, and different test contents will
Corresponding sample stage is asked to load sample.Sample stage function common at present is single, can only typically meet one of which test work(
Can, same sample carries out needing a kind of sample stage during morphology analysis, carries out then needing to change another sample stage during EBSD analyses, this
Outside, current EBSD sample stages can only load a sample every time, when there is multiple sample tests, frequently repeat to put true
Sky-dress sample-such as vacuumizes at the operation, cumbersome and time consuming, gives Electronic Speculum calibration tape to carry out great inconvenience.
The content of the invention
The problem of the utility model exists for above-mentioned prior art makes improvement, i.e., skill to be solved in the utility model
Art problem is to provide a kind of Multi-functional scanning electron microscopic sample platform, and it can change the angle of sample stage, is met on same estrade
Morphology analysis and EBSD analyses, while the sample stage also can once load multiple EBSD samples, realize once multiple sample dress samples
The function of EBSD signs is carried out simultaneously, so as to improve testing efficiency.
In order to solve the above-mentioned technical problem, the technical solution of the utility model is：A kind of multi-angle sample platform of scanning electronic microscope
Triangular prism, two block length cube baffle plates, fixed plate, base and fixing screws including loading sample, triangular prism are straight triangular prism, its
Gore is right angled triangle, and the acute interior angle of right angled triangle is equal in 70 ° and 20 °, three rectangular surfaces of triangular prism
A plurality of equidistant parallel lines are set, and indicate in parallel line front end sequence number, a triangle of one piece of baffle plate setting in triangular prism
Shape surface side, another piece of baffle plate setting is in another triangle surface side of triangular prism, by fixing screws by baffle plate and triangular prism phase
Connection, fixed plate is rectangular thin plate, and one piece of baffle plate is fixedly installed on a broadside of the rectangular surfaces of fixed plate, another piece of baffle plate
Be fixedly installed on another broadside of the rectangular surfaces of fixed plate, fixed plate bottom central part position is fixedly connected with base, base by
The different cylinder of two diameters is vertically superimposed composition, and the big cylinder of diameter is disposed over, and its top surface, which is fixed, to be connected
It is connected on fixed plate bottom surface.
Further, baffle plate is used be fixedly connected mode, the fixed plate of fixed plate with the mode that is fixedly connected of base
Mode connects for screw.
Further, the fixed form for loading sample is conducting resinl.
Preferably, sample stage selects aluminium alloy.
Preferably, a length of 30mm of the rib of triangular prism, the size of baffle plate is long 20mm, width 5mm, high 6mm, the size of fixed plate
For long 40mm, width 20mm, high 2mm, a diameter of 2mm screwed hole, firm banking, in fixed plate two are set at fixed plate center
Side is all provided with a diameter of 2mm screwed hole, fixed dam, and base is by a diameter of high 15mm of 10mm cylinder and another
Individual a diameter of 3mm, high 8mm cylinder composition, the big cylinder upper center of diameter have a diameter of 2mm, deep 3mm screw thread
Hole, fixing screws are diameter 2mm, long 12mm screw.
First, sample stage is adjusted to the rectangular surfaces where the hypotenuse of following state, i.e. triangular prism and fitted
The top surface of fixed plate, is connected with fixing screws and gear, and sample one is loaded in the right angled triangle long right-angle side institute of triangular prism
Rectangular surfaces, sample two is loaded in the rectangular surfaces where the right angled triangle short right-angle side of triangular prism, the sightingpiston of sample one
The angle of the Vertical electron beam of normal and ESEM is 70 °；The angle of the sightingpiston normal and Vertical electron beam of sample two is
20 °, therefore, sample stage can measure the sample of 20 ° and 70 ° in this case, and the EBSD that can carry out respective sample plane is characterized.
After being measured, the direction that fixing screws change triangular prism sample stage is screwed out, sample stage is kept following state, i.e.,
The right angled triangle of triangular prism 1 is in level compared with the rectangular surfaces where long right-angle side, and sample is loaded in the rectangular surfaces, sample
The angle of the Vertical electron beam of sightingpiston and ESEM is 90 °, can carry out common morphology characterization.
Compared with prior art, the utility model has the advantages that：Triangular prism, which rises, lays sample and change sample
There are some equidistant parallel lines on the effect of angle, triangular prism sample stage, and sequence number is indicated in parallel line front end, use
When by the side of sample close to parallel lines, it is ensured that sample keeps level in the same side, and the present apparatus can change the angle of sample stage,
Morphology analysis and EBSD analyses are met on same estrade, while the sample stage also can once load multiple EBSD samples, is realized
Once multiple sample dress samples carry out the function of EBSD signs simultaneously, so that testing efficiency is improved, in addition, sample stage has low cost
Honest and clean, easy to make, simple to operate, applicability is wide and is easy to the advantage of angle for measuring multiple samples and can changing sample stage.
The utility model is described in more detail with reference to the accompanying drawings and detailed description.
Brief description of the drawings
Fig. 1 is the structure drawing of device that the utility model sample stage measures 20 ° and 70 ° samples；
Fig. 2 is that the utility model Fig. 1 loads the structure drawing of device after sample；
Fig. 3 is the structure drawing of device of the utility model sample stage morphology analysis.
In figure：1- triangular prisms；2- baffle plates；3- fixed plates；4- bases；5- fixing screws；6- samples one；7- samples two.
Embodiment
As Figure 1-3, in the utility model preferred embodiment, the device include load sample triangular prism 1, two pieces
Cuboid baffle plate 2, fixed plate 3, base 4 and fixing screws 5, triangular prism 1 are straight triangular prism, and its gore is right angle trigonometry
Shape, and the acute interior angle of right angled triangle is 70 ° and 20 °, a plurality of equidistant put down is respectively provided with three rectangular surfaces of triangular prism 1
Line, and sequence number is indicated in parallel line front end, one piece of baffle plate 2 is arranged on a triangle surface side of triangular prism 1, another piece of baffle plate
2 are arranged on another triangle surface side of triangular prism 1, and baffle plate 2 is connected with triangular prism 1 by fixing screws 5, fixed plate 3
For rectangular thin plate, one piece of baffle plate 2 is fixedly installed on a broadside of the rectangular surfaces of fixed plate 3, and another piece of baffle plate 2 is fixedly installed
On another broadside of the rectangular surfaces of fixed plate 3, the bottom central part of fixed plate 3 position is fixedly connected with base 4, and base 4 is by two
The different cylinder of diameter is vertically superimposed composition, and the big cylinder of diameter is disposed over, and its top surface is fixedly connected on
The bottom surface of fixed plate 3.
Baffle plate 2 is connected be fixedly connected mode, the fixed plate 3 of fixed plate 3 with the mode that is fixedly connected of base 4 using screw
Connect.
In order to reduce material and processing cost, this sample stage uses aluminium alloy for material, dramatically reduces the sample playscript with stage directions
The quality of body, electric conductivity is good, directly sample can be fixed using conducting resinl and is loaded on sample stage.
Preferably, a length of 30mm of the rib of triangular prism 1, the size of baffle plate 2 is long 20mm, width 5mm, high 6mm, fixed plate 2
Size is long 40mm, width 20mm, high 2mm, and a diameter of 2mm screwed hole, firm banking 4, solid are set at the center of fixed plate 2
The both sides of fixed board 2 are all provided with a diameter of 2mm screwed hole, fixed dam 2, base 4 by an a diameter of high 15mm of 10mm circle
Cylinder and another a diameter of 3mm, high 8mm cylinder composition, the big cylinder upper center of diameter has a diameter of 2mm, deep
3mm screwed hole, fixing screws 5 are diameter 2mm, long 12mm screw.
First, the sample stage of triangular prism is adjusted to such as Fig. 1 state, where the hypotenuse of triangular prism 1
The top surface of rectangular surfaces laminating fixed plate 3, is connected with fixing screws 5 and gear 2, sample such as Fig. 2 is fixed on into sample with conducting resinl
In sample platform, sample 1 is loaded in the rectangular surfaces where the right angled triangle long right-angle side of triangular prism 1, and sample 27 is loaded in Rhizoma Sparganii
Rectangular surfaces where the right angled triangle short right-angle side of post 1, the sightingpiston normal of sample 1 and the Vertical electron beam of ESEM
Angle be 70 °；The sightingpiston normal of sample 27 and the angle of Vertical electron beam are 20 °, and therefore, sample stage is in this case
The sample of 20 ° and 70 ° can be measured, the EBSD that can carry out respective sample plane is characterized.
After being measured, the direction that fixing screws 5 change triangular prism sample stage is screwed out, sample stage is kept the shape such as Fig. 3
State, the right angled triangle of triangular prism 1 is in level compared with the rectangular surfaces where long right-angle side, and sample is loaded in the rectangular surfaces, sample
The angle of the sightingpiston of product and the Vertical electron beam of ESEM is 90 °, can carry out common morphology characterization.
The foregoing is only preferred embodiment of the present utility model, it is all according to present utility model application the scope of the claims done it is equal
Deng change and modification, it should all belong to covering scope of the present utility model.
Claims (7)
1. a kind of multi-angle sample platform of scanning electronic microscope, it is characterised in that：It includes loading the triangular prism of sample（1）, two block length sides
Body baffle plate（2）, fixed plate（3）, base（4）And fixing screws（5）, triangular prism（1）For straight triangular prism, its gore is right angle
Triangle, and the acute interior angle of right angled triangle is 70 ° and 20 °, triangular prism（1）Three rectangular surfaces on be respectively provided with it is a plurality of equidistant
From parallel lines, and indicate in parallel line front end sequence number, one piece of baffle plate（2）It is arranged on triangular prism（1）A triangle surface side,
Another piece of baffle plate（2）It is arranged on triangular prism（1）Another triangle surface side, pass through fixing screws（5）By baffle plate（2）And Rhizoma Sparganii
Post（1）It is connected, fixed plate（3）For rectangular thin plate, one piece of baffle plate（2）It is fixedly installed on fixed plate（3）One of rectangular surfaces
On broadside, another piece of baffle plate（2）It is fixedly installed on fixed plate（3）The rectangular surfaces another broadside on, fixed plate（3）In bottom surface
Centre position is fixedly connected with base（4）, base（4）Vertically it is superimposed and is constituted by two different cylinders of diameter, diameter is big
Cylinder be disposed over, its top surface is fixedly connected on fixed plate（3）Bottom surface.
2. multi-angle sample platform of scanning electronic microscope according to claim 1, it is characterised in that：Baffle plate（2）With fixed plate（3）'s
It is fixedly connected with mode, fixed plate（3）With base（4）Be fixedly connected mode use mode connects for screw.
3. multi-angle sample platform of scanning electronic microscope according to claim 2, it is characterised in that：Load sample fixed form be
Conducting resinl.
4. multi-angle sample platform of scanning electronic microscope according to claim 2, it is characterised in that：Sample stage selects aluminium alloy.
5. multi-angle sample platform of scanning electronic microscope according to claim 2, it is characterised in that：Triangular prism（1）Rib it is a length of
30mm, baffle plate（2）Size be long 20mm, width 5mm, high 6mm, fixed plate（3）Size be long 40mm, width 20mm, high 2mm,
In fixed plate（3）Center sets a diameter of 2mm screwed hole, firm banking（4）, in fixed plate（3）Both sides are all provided with one directly
Footpath is 2mm screwed hole, fixed dam（2）, base（4）By an a diameter of high 15mm of 10mm cylinder and another diameter
Constituted for 3mm, high 8mm cylinder, the big cylinder upper center of diameter has a diameter of 2mm, deep 3mm screwed hole is fixed
Screw（5）For diameter 2mm, long 12mm screw.
6. the multi-angle sample platform of scanning electronic microscope according to one of claim 1-5, it is characterised in that：Triangular prism（1）It is straight
Rectangular surfaces laminating fixed plate where the hypotenuse of angle（3）Top surface, sample one（6）It is loaded in triangular prism（1）Right angle three
Rectangular surfaces where angular long right-angle side, sample two（7）It is loaded in triangular prism（1）Right angled triangle short right-angle side where square
Shape face, sample one（6）Sightingpiston normal and the angle of Vertical electron beam of ESEM be 70 °；Sample two（7）Sightingpiston
The angle of normal and Vertical electron beam is 20 °.
7. the multi-angle sample platform of scanning electronic microscope according to one of claim 1-5, it is characterised in that：Triangular prism（1）It is straight
Angle triangle is in level compared with the rectangular surfaces where long right-angle side, and sample is loaded in the rectangular surfaces, and the sightingpiston of sample is with sweeping
The angle for retouching the Vertical electron beam of Electronic Speculum is 90 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720091955.1U CN206460940U (en) | 2017-01-24 | 2017-01-24 | A kind of multi-angle sample platform of scanning electronic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720091955.1U CN206460940U (en) | 2017-01-24 | 2017-01-24 | A kind of multi-angle sample platform of scanning electronic microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206460940U true CN206460940U (en) | 2017-09-01 |
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ID=59699265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720091955.1U Expired - Fee Related CN206460940U (en) | 2017-01-24 | 2017-01-24 | A kind of multi-angle sample platform of scanning electronic microscope |
Country Status (1)
| Country | Link |
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| CN (1) | CN206460940U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110071029A (en) * | 2019-05-20 | 2019-07-30 | 天合光能股份有限公司 | Scanning electron microscope sample stage |
| CN112397365A (en) * | 2019-08-14 | 2021-02-23 | 中国科学院上海硅酸盐研究所 | Sample table suitable for TIC3X three-ion-beam cutting instrument |
| CN115394620A (en) * | 2022-10-27 | 2022-11-25 | 中铝材料应用研究院有限公司 | Scanning electron microscope sample stage |
-
2017
- 2017-01-24 CN CN201720091955.1U patent/CN206460940U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110071029A (en) * | 2019-05-20 | 2019-07-30 | 天合光能股份有限公司 | Scanning electron microscope sample stage |
| CN112397365A (en) * | 2019-08-14 | 2021-02-23 | 中国科学院上海硅酸盐研究所 | Sample table suitable for TIC3X three-ion-beam cutting instrument |
| CN112397365B (en) * | 2019-08-14 | 2022-06-14 | 中国科学院上海硅酸盐研究所 | Sample table suitable for TIC3X three-ion-beam cutting instrument |
| CN115394620A (en) * | 2022-10-27 | 2022-11-25 | 中铝材料应用研究院有限公司 | Scanning electron microscope sample stage |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170901 Termination date: 20200124 |