CN220271205U - Scanning electron microscope sample stage for observing surface and section of sample - Google Patents
Scanning electron microscope sample stage for observing surface and section of sample Download PDFInfo
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- CN220271205U CN220271205U CN202322160653.3U CN202322160653U CN220271205U CN 220271205 U CN220271205 U CN 220271205U CN 202322160653 U CN202322160653 U CN 202322160653U CN 220271205 U CN220271205 U CN 220271205U
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Abstract
The utility model belongs to the technical field of scanning electron microscope testing devices, and particularly relates to a scanning electron microscope sample table for observing the surface and the section of a sample, which solves the problems of low testing efficiency and high cost when testing more samples. The scanning electron microscope sample table for observing the surface and the section of a sample comprises a base, two sample seats in hexahedral shape are arranged above the base, the two sample seats are in a hexagonal prism shape after being horizontally moved and spliced, and a horizontal positioning mechanism capable of enabling the two sample seats to approach or be far away along the horizontal direction is arranged between the sample seats and the base. The device realizes the effects of multiple sample positions, high test efficiency and capability of fixedly observing the surface and the section of the sample.
Description
Technical Field
The utility model belongs to the technical field of scanning electron microscope testing devices, and particularly relates to a scanning electron microscope sample table for observing the surface and the section of a sample.
Background
Scanning Electron Microscope (SEM), which is a novel microscopic morphology observation instrument, has the advantages of high resolution, high magnification, long depth of field and the like, and is widely applied to the research fields of chemistry, biology, medicine, metallurgy, material, semiconductor manufacturing and the like. SEM can be used for observing the surface and the section microstructure of thin films, foil materials, powder materials and blocky objects, and has important effects on modification of lithium battery materials, research of mechanisms and optimization of systems.
At present, a sample platform for observing the surface and the section of a sample is independent, and when the sample quantity is large, the sample platform is repeatedly switched, so that the test efficiency is seriously affected. When sampling, vacuum pumping is needed to maintain the vacuum degree of the cabin, and if the material is not conductive, an ion sputtering instrument is also needed to perform metal spraying treatment, so that the waste of resources and the increase of cost are caused.
Disclosure of Invention
The utility model aims to solve the problems in the prior art and provides a scanning electron microscope sample stage which has high detection efficiency and can clamp a sample for section observation and is used for observing the surface and the section of the sample.
The aim of the utility model can be achieved by the following technical scheme: a scanning electron microscope sample platform for observing sample surface and cross-section, includes the base, the base top be equipped with two sample seats that are hexahedron shape, sample seat upper surface is the quadrangle, and is six prismatic after two sample seats horizontal migration amalgamations, is equipped with the horizontal positioning mechanism that can make two sample seats approach or keep away from along the horizontal direction between sample seat and base.
The utility model is provided with two sample seats which are hexahedral, the other surfaces except the bottom surface can be used as sample grades, the upper surface can be used for placing samples for surface observation, the side surface can be used for fixing the sample observation side surface or section through conductive adhesive, and at most ten sample positions can be arranged, the sample seats are mutually close to or far away from each other through a horizontal positioning mechanism, sample positions which can clamp and fix the samples are formed between the sample seats, samples with different thicknesses and sizes can be fixed without conductive adhesive, the samples are used for observing the section or the surface, the section of the sample is attached to the side surface of the sample seat, the fixing is firm, the observation effect is good, the upper surface of the sample seat is quadrilateral, the opposite surfaces between the sample seats are mutually parallel, the two sample seats can be mutually attached and spliced into a hexagonal prism, the upper surface of the hexagonal prism is a new large hexagonal sample grade, and the six side surfaces after the sample seats are spliced can be used as sample grades.
In the scanning electron microscope sample stage for observing the surface and the section of the sample, the horizontal positioning mechanism comprises two sliding rods which are arranged on the base, are parallel to each other and are suspended and fixed, and the sample seat is connected with the sliding rods through a sliding structure.
The sample seat is connected to the slide bar in a sliding manner through the sliding structure, samples with different thicknesses and sizes can be clamped and fixed between the sample seat and the slide bar through the approaching or separating of the sample seat, and the sample seat can be spliced into a hexagonal prism.
In the scanning electron microscope sample stage for observing the surface and the section of the sample, the sliding structure comprises a sliding sleeve sleeved on the sliding rod, and two sides of the sample seat are respectively connected with the sliding sleeve.
The sliding sleeve is arranged on the sliding rod, the sliding sleeve can freely slide on the sliding rod, and two sides of the sample seat are connected with the sliding sleeve, so that the sample seat has the capability of horizontally moving and can be mutually close to or far away from each other.
In the scanning electron microscope sample table for observing the surface and the section of the sample, the sample seat is provided with the support rods in a penetrating way, and two ends of the support rods are respectively connected with the sliding sleeves on the two sliding rods.
The support rod is fixedly connected with the sliding sleeve, and the sample seat is arranged on the support rod in a penetrating mode, so that the sample seat can slide.
In the scanning electron microscope sample table for observing the surface and the section of the sample, as a parallel scheme of the connection relationship between the sample seat and the support rods, the support rods are respectively arranged at two sides of the sample seat, and the outer ends of the support rods are connected with the sliding sleeve.
As another scheme, the support rods are fixed on two sides of the sample seat, and the other ends of the support rods are connected with the sliding sleeve to realize connection of the sample seat and the sliding sleeve.
In the scanning electron microscope sample stage for observing the surface and the section of the sample, a positioning structure is arranged between the sliding sleeve and the sliding rod.
The sliding sleeve can be limited by the positioning structure, and the sliding sleeve can be limited and fixed by the positioning structure when the clamping objects between the sample seats need to be fixed or are attached to form a hexagonal prism or the separation state is required to be kept normally, so that the effect of avoiding the horizontal movement of the sample seats is achieved.
In the scanning electron microscope sample stage for observing the surface and the section of the sample, the positioning structure comprises a positioning screw arranged on the sliding sleeve.
The positioning screw is screwed in to be propped against the sliding rod to realize limit, and the structure is simple and easy to operate.
In the scanning electron microscope sample stage for observing the surface and the section of the sample, a longitudinal positioning component is arranged between the support rod and the sample seat.
The longitudinal positioning component is used in a scheme that the sample holder can slide on the support rod and is used for limiting the sample holder relative to the support rod.
In the scanning electron microscope sample stage for observing the surface and the section of the sample, two ends of the sliding rod are respectively connected with the base through the supporting plates.
The two ends of the sliding rod are connected to the supporting plate to form the parallel and suspended effect.
In the scanning electron microscope sample stage for observing the surface and the section of the sample, the two end parts of the sliding rod share one supporting plate.
The end parts of the same side of the two slide bars are fixed on the same supporting plate, namely the two slide bars are fixed between the two supporting plates in parallel.
Compared with the prior art, the utility model is provided with two sample seats, the upper surfaces of which can be used for placing or fixing samples through conductive adhesive to observe the surfaces, the side surfaces can be used for fixing the samples through the conductive adhesive to observe the side surfaces or the sections, the samples with different thicknesses and sizes can be clamped and fixed between the sample seats without conductive adhesive to observe the side surfaces, the sections or the surfaces, in addition, the sample seats can be spliced into large hexagonal prisms, and the six side surfaces and the spliced large upper surfaces can be used as sample grades. Therefore, the utility model can be used for observing the surface and the section of the sample; the number of the sample bits is large, so that the efficiency is improved; the repeated sampling times are avoided, and the cost is saved; in the process of clamping the sample grade, the full contact between the tangential plane and the sample stage is improved, and the observation effect is improved.
Drawings
FIG. 1 is a schematic view of a scanning electron microscope sample stage for observing a surface and a section of a sample according to the present utility model (sample holder separated state);
fig. 2 is a schematic structural view of a scanning electron microscope sample stage for observing the surface and the section of a sample according to the present utility model (the sample holder is assembled).
In the figure, a base 1, a sample holder 2, a horizontal positioning mechanism 3, a slide bar 31, a sliding structure 32, a sliding sleeve 33, a support rod 4 and a support plate 5.
Detailed Description
The following are specific embodiments of the present utility model and the technical solutions of the present utility model will be further described with reference to the accompanying drawings, but the present utility model is not limited to these embodiments.
Example 1
As shown in fig. 1 and 2, the scanning electron microscope sample stage for observing the surface and the section of a sample comprises a base 1, two sample seats 2 in hexahedral shape are arranged above the base 1, the upper surface of each sample seat 2 is in an isosceles trapezoid shape, the two sample seats 2 are horizontally moved and spliced to form a hexagonal prism shape, and a horizontal positioning mechanism 3 which can enable the two sample seats 2 to approach or separate along the horizontal direction is arranged between the sample seats 2 and the base 1.
As a specific implementation scheme, the utility model is provided with two sample seats 2, the sample seats 2 are hexahedral, other surfaces except the bottom surface can be used as sample grades, the upper surface can be used for placing samples for surface observation, the side surfaces can be used for fixing sample observation side surfaces or cross sections through conductive adhesive, and at most ten sample positions can be arranged, the sample seats 2 are mutually close to or far away from each other through a horizontal positioning structure, sample positions capable of clamping and fixing samples are formed between the sample seats 2, samples with different thicknesses and sizes can be fixed without conductive adhesive, the sample seats are used for observation of the cross sections or the surfaces, the section of the sample seats 2 are attached to the side surfaces of the sample seats, the sample seats are fixed firmly, the observation effect is good, the upper surfaces of the sample seats 2 are isosceles trapezoid, the opposite surfaces between the sample seats 2 are parallel to each other, the two sample seats 2 can be attached to each other to be spliced into a new large sample grade, and the six side surfaces after the sample seats are spliced can be used as sample grades.
As shown in fig. 1 and 2, the horizontal positioning mechanism 3 comprises two parallel and suspended sliding rods 31 arranged on the base 1, the sample holder 2 is connected with the sliding rods 31 through a sliding structure 32, the sliding structure 32 comprises sliding sleeves 33 sleeved on the sliding rods 31, and two sides of the sample holder 2 are respectively connected with the sliding sleeves 33.
Specifically, the sample seat 2 is slidably connected to the slide rod 31 through the sliding structure 32, samples with different thicknesses and sizes can be clamped and fixed between the sample seat 2 and the slide rod 31 through the approach or the separation of the sample seat 2, the sample seat can also be spliced into a hexagonal prism, the slide rod 31 is provided with the sliding sleeve 33, the sliding sleeve 33 can freely slide on the slide rod 31, the sample seat 2 is arranged on the supporting rod 4 in a penetrating manner and is fixed, the supporting rod 4 is fixedly connected with the sliding sleeve 33, so that the sample seat 2 has the capability of horizontal movement, and the effect of being capable of approaching or separating from each other is realized.
A positioning structure is arranged between the sliding sleeve 33 and the sliding rod 31. The positioning structure includes a set screw (not shown) provided on the sliding sleeve 33.
Specifically, the positioning structure can limit the sliding sleeve 33, and when the clamping objects between the sample holders 2 need to be fixed or are attached to form a hexagonal prism or the separation state is required to be kept in a normal state, the sliding sleeve 33 can be limited and fixed through the positioning structure, so that the effect of avoiding the horizontal movement of the sample holders 2 is achieved, and in particular, the positioning structure is simple in structure and easy to operate, and the positioning structure is screwed and propped against the sliding rod 31 to realize limiting.
Both ends of the slide bar 31 are respectively connected with the base 1 through the supporting plates 5. The two slide bars 31 share a support plate 5 at their ends.
Specifically, two ends of the sliding rod 31 are connected to the supporting plates 5 to form an effect of being parallel to each other and suspended, and the ends of the same sides of the two sliding rods 31 are fixed to the same supporting plate 5, namely, the two sliding rods 31 are fixed between the two supporting plates 5 in parallel.
The specific working principle is as follows:
in the separated state of the sample seat 2, the positioning screw is screwed into the sliding sleeve 33 to prop against the sliding rod 31 for limiting and fixing, the sample is fixed on the upper surface through conductive adhesive so as to observe the surface, and the section or the side surface of the sample can be observed through the conductive adhesive on the side surface of the sample seat 2; when the sample needs to be clamped between the sample seats 2, the sample seats 2 are mutually close to each other to clamp the sample, and then the positioning screw is screwed in to limit and fix the sample, so that the clamping and fixing of the sample are realized; when a large sample needs to be placed, the sample seat 2 is attached to form a hexagonal prism, the hexagonal prism is screwed into the positioning screw for fixation, the large sample can be placed and fixed on the upper surface of the hexagonal prism, and the sample can be fixed on the six side surfaces through conductive adhesive.
Example 2
The specific working principle of this embodiment is basically the same as that of embodiment 1, except for the sample holder 2 and the support rod 4.
In this embodiment, the two sides of the sample holder 2 are respectively provided with a support rod 4, the outer ends of the support rods 4 are connected with the sliding sleeve 33, the two sides of the sample holder 2 are fixed with the support rods 4, the other ends of the support rods 4 are connected with the sliding sleeve 33, namely, one sample holder 2 is fixed between the two support rods 4, and the connection between the sample holder 2 and the sliding sleeve 33 is realized.
Example 3
The specific working principle of this embodiment is basically the same as that of embodiment 1, except for the sample holder 2 and the support rod 4.
In this embodiment, a longitudinal positioning component is disposed between the support rod 4 and the sample holder 2. The sample holder 2 of this embodiment is disposed on the slide bar 31 in a penetrating manner and can slide longitudinally, so that the fixing effect and fixing position of the sample can be better adjusted, the longitudinal positioning component is used for limiting between the sample holder 2 and the slide bar 31, after the sample holder 2 is adjusted to a required position, the sample holder 2 is fixed on the slide bar 31 by the longitudinal positioning component, and the longitudinal positioning component is not specifically developed in the prior art and is not shown in the figure.
The specific embodiments described herein are offered by way of example only to illustrate the spirit of the utility model. Those skilled in the art may make various modifications or additions to the described embodiments or substitutions thereof without departing from the spirit of the utility model or exceeding the scope of the utility model as defined in the accompanying claims.
Claims (10)
1. The scanning electron microscope sample table for observing the surface and the section of a sample comprises a base (1), and is characterized in that two sample seats (2) in a hexahedral shape are arranged above the base (1), the upper surface of each sample seat (2) is in a quadrilateral shape, the two sample seats (2) are horizontally moved and spliced to form a hexagonal prism shape, and a horizontal positioning mechanism (3) is arranged between each sample seat (2) and the base (1).
2. The scanning electron microscope sample stage for observing the surface and the section of a sample according to claim 1, wherein the horizontal positioning mechanism (3) comprises two sliding rods (31) which are arranged on the base (1) in parallel and are suspended and fixed, and the sample seat (2) is connected with the sliding rods (31) through a sliding structure (32).
3. The scanning electron microscope sample stage for observing the surface and the section of a sample according to claim 2, wherein the sliding structure (32) comprises a sliding sleeve (33) sleeved on the sliding rod (31), and two sides of the sample seat (2) are respectively connected with the sliding sleeve (33).
4. A scanning electron microscope sample stage for observing the surface and the section of a sample according to claim 3, wherein the sample holder (2) is provided with a support rod (4) in a penetrating way, and two ends of the support rod (4) are respectively connected with sliding sleeves (33) on two sliding rods (31).
5. A scanning electron microscope sample stage for observing the surface and the section of a sample according to claim 3, wherein the two sides of the sample holder (2) are respectively provided with a support rod (4), and the outer ends of the support rods (4) are connected with a sliding sleeve (33).
6. A scanning electron microscope sample stage for observing a surface and a section of a sample according to claim 3, characterized in that a positioning structure is provided between the sliding sleeve (33) and the sliding rod (31).
7. The scanning electron microscope stage for observing a surface and a cross section of a sample according to claim 6, wherein the positioning structure comprises a positioning screw provided on a sliding sleeve (33).
8. The scanning electron microscope sample stage for observing the surface and the section of a sample according to claim 4, wherein a longitudinal positioning component is arranged between the support rod (4) and the sample holder (2).
9. Scanning electron microscope sample stage for observing sample surfaces and cross sections according to any of claims 2-8, characterized in that the two ends of the slide bar (31) are connected to the base (1) by means of support plates (5), respectively.
10. Scanning electron microscope sample stage for observing sample surfaces and sections according to any of claims 2-8 characterized in that the two slide bar (31) ends share a support plate (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322160653.3U CN220271205U (en) | 2023-08-11 | 2023-08-11 | Scanning electron microscope sample stage for observing surface and section of sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322160653.3U CN220271205U (en) | 2023-08-11 | 2023-08-11 | Scanning electron microscope sample stage for observing surface and section of sample |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220271205U true CN220271205U (en) | 2023-12-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322160653.3U Active CN220271205U (en) | 2023-08-11 | 2023-08-11 | Scanning electron microscope sample stage for observing surface and section of sample |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220271205U (en) |
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- 2023-08-11 CN CN202322160653.3U patent/CN220271205U/en active Active
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