CN206460939U - Height-adjustable sample platform of scanning electronic microscope - Google Patents
Height-adjustable sample platform of scanning electronic microscope Download PDFInfo
- Publication number
- CN206460939U CN206460939U CN201720070522.8U CN201720070522U CN206460939U CN 206460939 U CN206460939 U CN 206460939U CN 201720070522 U CN201720070522 U CN 201720070522U CN 206460939 U CN206460939 U CN 206460939U
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- China
- Prior art keywords
- screw
- shell
- height
- objective table
- standing groove
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Abstract
The utility model is related to a kind of height-adjustable sample platform of scanning electronic microscope, including shell, base, some objective tables, some side screws, some lower screws, the base is arranged on below shell and is connected with shell with support housing, standing groove is provided with the shell, some objective tables are arranged at intervals with the standing groove, the placement trench bottom is provided with some screw A, the shell front-rear side walls are provided with some screw B, described lower screws one end is connected through screw A and with objective table, lower screws are threadedly coupled with screw A, objective table can drive groove oscilaltion staggered relatively through lower screws, described side screw one end is through screw B and stretches into standing groove and directly over objective table, side screw is threadedly coupled with screw B, the utility model is simple in construction, it is easy to operate, versatility is high, disposably it can at most put multiple samples, improve the speed of sweep test, not only improve quality of scanning but also improve scan efficiency.
Description
Technical field
The utility model is related to a kind of height-adjustable sample platform of scanning electronic microscope, belongs to ESEM consumptive material field.
Background technology
SEM abbreviation ESEM, is a kind of using beam bombardment sample, collects sample surfaces signal
So as to the electronic optical instrument of imaging.Because it has, sample preparation is simple, multiplication factor adjustable extent is wide, image resolution ratio is high, scape
Deep big the features such as, through being widely used in the multi-field research such as material, chemistry, biology, microelectronics and industrial production.
It is commercial at present during sem test, in morphology analysis, it is desirable to which electron beam is vertical with the surface observed
Sample platform of scanning electronic microscope function it is single, the height of sample can not be adjusted, to the shape and finite thickness system of sample, testing efficiency
It is low, it significantly limit the effect of material microscopic sdIBM-2+2q.p.approach.
The content of the invention
The purpose of this utility model is that there is provided a kind of height-adjustable scanning electron microscope example for above weak point
Platform.
The utility model solves the scheme that is used of technical problem, a kind of height-adjustable sample platform of scanning electronic microscope,
Including shell, base, some objective tables, some side screws, some lower screws, the base be arranged on below shell and with
Shell is connected with support housing, is provided with the shell in standing groove, the standing groove and is arranged at intervals with some loadings
Platform, the placement trench bottom is provided with some screw A, and the shell front-rear side walls are provided with some screw B, the lower screws
One end is connected through screw A and with objective table, and lower screws are threadedly coupled with screw A, and objective table can drive through lower screws
Groove oscilaltion staggered relatively, described side screw one end is through screw B and stretches into standing groove and directly over objective table,
Side screw is threadedly coupled with screw B.
Further, the objective table includes support board, is provided with foundation in the middle part of support board bottom surface, lower screws upper end with
Foundation rotates connection.
Further, circular hole is provided with the foundation, lower screws upper end is stretched into circular hole.
Further, the gap between the objective table front and back sides and cell body front-rear side walls is no more than 0.5mm.
Further, two standing grooves are symmetrically arranged with the shell, before the side screw of shell front side is stretched into
In the standing groove of side, the side screw on rear side of shell is stretched into the standing groove of rear side.
Further, 5 objective tables are arranged at intervals in each standing groove.
Further, it is coated with conducting resinl on the objective table.
Further, the shell, base, objective table are aluminum alloy material.
Compared with prior art, the utility model has the advantages that：It is simple in construction, it is reasonable in design, it is easy to operate,
Regular cuboid, irregular blocks and laminar sample can be placed, versatility is high, disposably can at most put multiple samples, keep away
The operation such as vacuum, dress sample exempted from frequently to put, have vacuumized, having improved the speed of sweep test, not only improved quality of scanning but also carried
Scan efficiency is risen.
Brief description of the drawings
The utility model patent is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is the structural representation one of the utility model；
Fig. 2 is the structural representation two of the utility model；
Fig. 3 is the structural representation three of the utility model.
In figure：
1- shells；2- bases；3- objective tables；4- sides screw；5- lower screws；6- standing grooves.
Embodiment
The utility model is further illustrated with reference to the accompanying drawings and detailed description.
As Figure 1-3, a kind of height-adjustable sample platform of scanning electronic microscope, including shell 1, base 2, some objective tables
3rd, some side screws 4, some lower screws 5, the base 2 are arranged on the lower section of shell 1 and are connected outer to support with shell 1
It is provided with shell 1, the shell 1 in standing groove 6, the standing groove 6 and is arranged at intervals with some objective tables 3, the standing groove 6
Bottom is provided with some screw A, and the front-rear side walls of shell 1 are provided with some screw B, and spiral shell is run through in described one end of lower screws 5
Hole A is simultaneously connected with objective table 3, and lower screws 5 are threadedly coupled with screw A, and objective table 3 can drive relative put through lower screws 5
The oscilaltion of groove 6 is put, described one end of side screw 4 is through screw B and stretches into standing groove 6 and directly over objective table 3, side
Square screw 4 is threadedly coupled with screw B, and sample first is placed on into the upper surface of objective table 3 when using, and adjusting each lower screws 5 makes
Sample, is fixed in standing groove 6, due to objective table by the sample upper surface flush that lattice objective table 3 is finally by side screw 4
Sample on 3 can be fixed by side screw 4, and this device can substitute the use of conducting resinl, can also be controlled by lower screws 5
The height of objective table 3, it is ensured that all samples on whole sample stage are highly basically identical.
In the present embodiment, the objective table 3 includes being provided with foundation, lower screws 5 in the middle part of support board, support board bottom surface
Upper end rotates with foundation and is connected.
In the present embodiment, circular hole is provided with the foundation, the upper end of lower screws 5 is stretched into circular hole.
In the present embodiment, the gap between the front and back sides of objective table 3 and cell body front-rear side walls is no more than 0.5mm.
In the present embodiment, two standing grooves 6 are symmetrically arranged with the shell 1, the side screw positioned at the front side of shell 1
4 are stretched into the standing groove 6 of front side, and the side screw 4 positioned at the rear side of shell 1 is stretched into the standing groove 6 of rear side.
In the present embodiment, 5 objective tables 3 are arranged at intervals in each standing groove 6, when using can batch experiment, it is simple easily
Operation.
In the present embodiment, it is coated with conducting resinl on the objective table 3.
In the present embodiment, it can select using conducting resinl or be fixed by side screw 4 as needed, during scanning not
The phenomenon that sample is rocked occurs, sweep test quality is effectively improved
In the present embodiment, the shell 1, base 2, objective table 3 are aluminum alloy material, dramatically reduce sample stage
The quality of itself, and electric conductivity is good under ESEM, uses more easily, and aluminium alloy wear-proof, extend sample
The service life of platform.
In the present embodiment, it can revolve lower screws 5 to adjust the height of object upper surface, adjustment mode by direct hand
Simply, the effect for reducing sweep test error is reached.
The utility model is applicable to regular cuboid, irregular blocks and laminar sample, with common AZ31 magnesium
Exemplified by alloy：
For regular cuboid sample, when carrying out electron-microscope scanning, sample is placed on objective table 3, hand rotation lower screws 5
Height of specimen is adjusted, afterwards object is clamped by turn side screw 4（Or be adhered directly to sample by conducting resinl to carry
On thing platform 3, revolve lower screws 5 to adjust height of specimen by hand）.
For irregular blocks sample, sample is adhesive on objective table 3 with conduction, by hand revolve lower screws 5 come
Adjust height of specimen.
For laminar sample, to scan its surface, then directly sample is adhesive on objective table 3 by conduction, hand
The adjustment height of lower screws 5 is revolved, so that tested surface level height is higher than the surface of shell 1, you can be scanned；Break to scan it
Face, the then inwall that sample is directly close to the standing groove 6 on shell 1 is placed, and is screwed with side screw 4, you can be scanned.
When to carry out multiple sample batch scannings, dynamic one of bottom land is unscrewed in device sample remote holder, will be carried
Thing platform 3 is above carried to appropriate height, then screws side screw 4, during other samples dress sample, using first sample as level height mark
Standard, makes all samples tested surface highly flush by the corresponding bottom land of turn.
Especially, this sample stage when in use, with advantages below：1. multiple sample batch scannings are realized；2. realize
The controllability of height of specimen；3. the use of conducting resinl is reduced；4. it is adaptable to the sample of various shapes.This sample stage structure
Simply, with versatility, quality of scanning had not only been improved but also had improved scan efficiency.
Above-listed preferred embodiment, the purpose of this utility model, technical scheme and advantage are further described,
It should be understood that and the foregoing is only preferred embodiment of the present utility model, it is all not to limit the utility model
Within spirit of the present utility model and principle, any modification, equivalent substitution and improvements made etc. should be included in this practicality
Within new protection domain.
Claims (8)
1. a kind of height-adjustable sample platform of scanning electronic microscope, it is characterised in that：Including shell, base, some objective tables, some
Side screw, some lower screws, the base are arranged on below shell and are connected with shell with support housing, the shell
Inside it is provided with standing groove, the standing groove and is arranged at intervals with some objective tables, the placement trench bottom is provided with some screws
A, the shell front-rear side walls are provided with some screw B, and described lower screws one end is connected through screw A and with objective table,
Lower screws are threadedly coupled with screw A, and objective table can drive groove oscilaltion staggered relatively, the side screw through lower screws
One end is through screw B and stretches into standing groove and directly over objective table, and side screw is threadedly coupled with screw B.
2. height-adjustable sample platform of scanning electronic microscope according to claim 1, it is characterised in that：The objective table includes
Foundation is provided with the middle part of support board, support board bottom surface, lower screws upper end rotates with foundation and is connected.
3. height-adjustable sample platform of scanning electronic microscope according to claim 2, it is characterised in that：Set in the foundation
There is circular hole, lower screws upper end is stretched into circular hole.
4. height-adjustable sample platform of scanning electronic microscope according to claim 2, it is characterised in that：Before and after the objective table
Gap between side and cell body front-rear side walls is no more than 0.5mm.
5. height-adjustable sample platform of scanning electronic microscope according to claim 4, it is characterised in that：It is symmetrical in the shell
Two standing grooves are provided with, the side screw positioned at shell front side is stretched into the standing groove of front side, the side on rear side of shell
Screw is stretched into the standing groove of rear side.
6. height-adjustable sample platform of scanning electronic microscope according to claim 5, it is characterised in that：Between in each standing groove
Every 5 objective tables of setting.
7. the height-adjustable sample platform of scanning electronic microscope according to claim 1-6 any one, it is characterised in that：It is described
Conducting resinl is coated with objective table.
8. the height-adjustable sample platform of scanning electronic microscope according to claim 1-6 any one, it is characterised in that：It is described
Shell, base, objective table are aluminum alloy material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720070522.8U CN206460939U (en) | 2017-01-20 | 2017-01-20 | Height-adjustable sample platform of scanning electronic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720070522.8U CN206460939U (en) | 2017-01-20 | 2017-01-20 | Height-adjustable sample platform of scanning electronic microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206460939U true CN206460939U (en) | 2017-09-01 |
Family
ID=59696399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720070522.8U Expired - Fee Related CN206460939U (en) | 2017-01-20 | 2017-01-20 | Height-adjustable sample platform of scanning electronic microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206460939U (en) |
-
2017
- 2017-01-20 CN CN201720070522.8U patent/CN206460939U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170901 Termination date: 20200120 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |