CN210897190U - Adjust convenient scanning electron microscope sample platform - Google Patents
Adjust convenient scanning electron microscope sample platform Download PDFInfo
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- CN210897190U CN210897190U CN201922450509.7U CN201922450509U CN210897190U CN 210897190 U CN210897190 U CN 210897190U CN 201922450509 U CN201922450509 U CN 201922450509U CN 210897190 U CN210897190 U CN 210897190U
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Abstract
The utility model provides an adjust convenient scanning electron microscope sample platform, it includes sample platform and base station, the base station includes two at least base station units, a circular or regular polygon is constituteed to two at least base station units, leave the clearance between two at least base station units, be equipped with first regulation hole in every base station unit, the lateral wall of every base station unit is equipped with the second regulation hole, the spiro union has the bolt in the second regulation hole, the sample bench is provided with the spout that corresponds the base station unit, be equipped with the jackscrew in the spout, the jackscrew extends and gets into first regulation hole, the bolt supports the jackscrew. The utility model discloses compare in prior art and can solve the unable stable orderly problem of fixing at the sample bench with the angular adjustment is inconvenient of sample effectively to reach the purpose that improves shooting efficiency.
Description
Technical Field
The utility model relates to a scanning electron microscope technical field particularly, relates to an adjust convenient scanning electron microscope sample platform.
Background
The scanning electron microscope is a test analysis device applied to the fields of microscopic structure analysis, nano-size research, surface morphology exploration and the like, and is widely applied to the fields of materials science, botany, physics and the like at present, wherein a sample stage is one of core components of the scanning electron microscope, and the sample stage plays a role in placing a sample, assisting in transferring electrons and the like in the scanning electron microscope. When observing the sample, the sample needs to be fixed on the sample table in a manner suitable for observation by using a conductive adhesive tape or conductive glue.
Most of the existing sample stages of scanning electron microscopes are planar structures for observing surface appearance or microstructure, so that when the sections or the cross sections of diaphragm type and other sheet type samples are observed, the samples cannot be stably and regularly fixed on the sample stages. Even some novel electron microscope models have the functions of rotation and inclination, in the test process, the instrument can be damaged by large-angle inclination or rotation, and the sample can fall off. In addition, in the current test, the majority of sample stages which can be used for observing the cross section are found to be poor in sample imaging caused by the fact that electrons on a sample cannot be transferred in time due to the poor position of the conductive adhesive additionally arranged on the sample stages. Meanwhile, the problem of observation angle exists in part of the existing sample stages, so that the samples cannot be observed at a wide viewing angle, the samples need to be frequently replaced, time is wasted, and the vacuum degree of an electron microscope is influenced. Finally, all the sample stages have the problem of blurring when observing cross-section samples at present, and because on a microscopic level, the height difference of a few micrometers seriously influences the focusing imaging of an electron microscope, the imaging is blurred. The above problems have been present and have not been solved in a definite manner.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides an adjust convenient scanning electron microscope sample platform, it can solve the unable stable orderly problem of fixing at the sample bench with the angular adjustment is inconvenient effectively to reach the purpose that improves shooting efficiency.
Therefore, the utility model provides an adjust convenient scanning electron microscope sample platform, it includes sample platform and base station, the base station includes two at least base station units, a circular or regular polygon is constituteed to two at least base station units, leave the clearance between two at least base station units, be equipped with first regulation hole in every base station unit, the lateral wall of every base station unit is equipped with the second regulation hole, the spiro union has the bolt in the second regulation hole, the sample bench is provided with the spout that corresponds the base station unit, be equipped with the jackscrew in the spout, the jackscrew extends and gets into first regulation hole, the bolt supports the jackscrew.
Further, the base station comprises four base station units, and the base station units are quarter circles.
Furthermore, four sliding grooves are formed in the sample table and form an X shape.
Further, the length of the sliding groove is 0mm-20 mm.
Further, the height of the base is 0-20 mm.
Furthermore, the base is made of a conductive material.
The utility model provides an adjust convenient scanning electron microscope sample platform has mainly set up sample platform and base station, the base station includes two at least base station units, a circular or regular polygon is constituteed to two at least base station units, leave the clearance between two at least base station units, be equipped with first regulation hole in every base station unit, the lateral wall of every base station unit is equipped with the second regulation hole, the spiro union has the bolt in the second regulation hole, the sample bench is provided with the spout that corresponds the base station unit, be equipped with the jackscrew in the spout, the jackscrew extends and gets into first regulation hole, the bolt supports the jackscrew. The working principle is as follows: the cross section of the sample is upward, the sample is vertically fixed in any gap between 1 and 4 positions by using the conductive adhesive tape or the conductive glue, if the cross section of the sample is not in a horizontal state, the jackscrew below the base station can be adjusted to enable the cross section to be in the horizontal state, so that the focusing imaging of an electron microscope is convenient for subsequent observation, if the surface appearance or structure of the sample needs to be observed simultaneously, the prepared sample can be adhered to the surface of the base station, and marks are made to facilitate the subsequent observation. Finally, when the sample table is used for preparing a sample, the sticking position of the conductive adhesive tape (water) is free, and electrons accumulated on the surface of the sample can be fully led out. 4 jackscrews are used for adjusting the base station angle, and the bolt on the base station outer wall is used for adjusting the interval between the base station to just in time fixing the sample.
Therefore, the utility model provides a adjust convenient scanning electron microscope sample platform and compare in prior art and have following advantage:
1. the method can be applied to some electron microscopes with smaller inclination adjustment amplitude, and can observe samples at different angles, so that the focusing imaging of the section is clearer on the original basis;
2. the surface appearance and the section state can be observed simultaneously, and the simultaneous observation of a plurality of sections and the surface of the sample is supported;
3. compared with the traditional sample table, the method can more effectively eliminate electrons accumulated on the surface of the sample during observation, eliminate charge effect and improve imaging rate;
4. improve electron microscope photo and shoot efficiency, will reduce to minimum the influence to the instrument vacuum when saving time, the later maintenance of being convenient for is used.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
fig. 1 is a schematic structural diagram of a scanning electron microscope sample stage provided by an embodiment of the present invention, which is convenient to adjust;
fig. 2 is a schematic structural diagram of a sample stage in a scanning electron microscope sample stage provided by an embodiment of the present invention, which is convenient to adjust;
fig. 3 is a schematic structural diagram of a base station unit in a scanning electron microscope sample stage, provided by the third embodiment of the present invention, and convenient for adjustment.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
The first embodiment is as follows:
referring to fig. 1 to 3, the present embodiment provides a scanning electron microscope sample stage convenient to adjust, which mainly includes a sample stage 1 and a base stage 2, the base stage 2 includes at least two base stage units 21, at least two base stage units 21 form a circular or regular polygon, a gap is left between at least two base stage units 21, the gap is used for fixing a sample and observing a cross section or a cross section of the sample, a first adjusting hole 211 is provided in each base stage unit 21, a second adjusting hole 212 is provided on a side wall of each base stage unit 21, a bolt 3 is screwed in the second adjusting hole 212, a chute 11 corresponding to the base stage unit 21 is provided on the sample stage 1, a jackscrew 12 is provided in the chute 11, the jackscrew 12 extends into the first adjusting hole 211, and the bolt 3 butts against the jackscrew 12.
Referring to fig. 1 to 3, four sliding grooves 11 are formed on the sample stage 1, and the four sliding grooves 11 form an X shape.
Referring to fig. 1 to 3, the length of the chute 11 is 0mm to 20 mm.
Referring to fig. 1 to 3, the height of the abutment is 0 to 20 mm.
The utility model provides an adjust convenient scanning electron microscope sample platform has mainly set up sample platform and base station, the base station includes two at least base station units, a circular or regular polygon is constituteed to two at least base station units, leave the clearance between two at least base station units, be equipped with first regulation hole in every base station unit, the lateral wall of every base station unit is equipped with the second regulation hole, the spiro union has the bolt in the second regulation hole, the sample bench is provided with the spout that corresponds the base station unit, be equipped with the jackscrew in the spout, the jackscrew extends and gets into first regulation hole, the bolt supports the jackscrew. The working principle is as follows: the cross section of the sample is upward, the sample is vertically fixed in any gap between 1 and 4 positions by using the conductive adhesive tape or the conductive glue, if the cross section of the sample is not in a horizontal state, the jackscrew below the base station can be adjusted to enable the cross section to be in the horizontal state, so that the focusing imaging of an electron microscope is convenient for subsequent observation, if the surface appearance or structure of the sample needs to be observed simultaneously, the prepared sample can be adhered to the surface of the base station, and marks are made to facilitate the subsequent observation. Finally, when the sample table is used for preparing a sample, the sticking position of the conductive adhesive tape (water) is free, and electrons accumulated on the surface of the sample can be fully led out. 4 jackscrews can reciprocate at first regulation hole to adjust the height of sample platform, the bolt can be that the jackscrew removes at the spout simultaneously, with the distance between the regulation base station unit, can also lock the jackscrew simultaneously.
Therefore, the utility model provides a adjust convenient scanning electron microscope sample platform and compare in prior art and have following advantage:
1. the method can be applied to some electron microscopes with smaller inclination adjustment amplitude, and can observe samples at different angles, so that the focusing imaging of the section is clearer on the original basis;
2. the surface appearance and the section state can be observed simultaneously, and the simultaneous observation of a plurality of sections and the surface of the sample is supported;
3. compared with the traditional sample table, the method can more effectively eliminate electrons accumulated on the surface of the sample during observation, eliminate charge effect and improve imaging rate;
4. improve electron microscope photo and shoot efficiency, will reduce to minimum the influence to the instrument vacuum when saving time, the later maintenance of being convenient for is used.
Example two:
referring to fig. 1 to fig. 3, a scanning electron microscope sample stage provided by the second embodiment of the present invention is shown in the drawings, and the present embodiment further makes the following technical solutions as improvements on the basis of the above embodiments: the base 2 includes four base units 21, and the base units 21 are quarter circles. The base unit is not limited to four, and may be a plurality of base units, and the plurality of base units form a circle or a regular polygon. Therefore, a plurality of samples can be placed on one sample table to be observed (including the surfaces of the samples and the cross sections of the samples), the cross sections and the surface appearances of the samples can be observed simultaneously, the operation steps are simplified, and the time is saved.
Example three:
referring to fig. 1 to fig. 3, a scanning electron microscope sample stage provided by a third embodiment of the present invention is shown in the drawings, and the present embodiment further makes the following technical solutions as improvements on the basis of the above embodiments: the base 2 is made of conductive materials, specifically, aluminum alloy, copper, aluminum, iron and the like, so that even some samples which are not conductive or have poor conductive performance can obtain better imaging definition.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (6)
1. The utility model provides a adjust convenient scanning electron microscope sample platform, its characterized in that, includes sample platform (1) and base station (2), base station (2) include two at least base station units (21), a circular or regular polygon is constituteed to two at least base station units (21), leave the clearance between two at least base station units (21), the clearance is used for fixed sample and observes the cross-section or the section of sample, be equipped with first regulation hole (211) in every base station unit (21), the lateral wall of every base station unit (21) is equipped with second regulation hole (212), bolt (3) have been screwed in second regulation hole (212), be provided with on sample platform (1) and correspond spout (11) of base station unit (21), be equipped with jackscrew (12) in spout (11), jackscrew (12) extend into first regulation hole (211), the bolt (3) abuts against the jackscrew (12).
2. Scanning electron microscope sample stage with convenient adjustment according to claim 1, characterized in that the base (2) comprises four base units (21), and the base units (21) are quarter circles.
3. The scanning electron microscope sample stage convenient to adjust as claimed in claim 1, wherein the sample stage (1) is provided with four sliding grooves (11), and the four sliding grooves (11) form an X shape.
4. The scanning electron microscope sample stage convenient to adjust as claimed in claim 1, wherein the length of the sliding chute (11) is 0mm-20 mm.
5. A scanning electron microscope sample stage convenient to adjust as claimed in claim 1, wherein the height of the base stage is 0-20 mm.
6. The scanning electron microscope sample stage convenient to adjust as claimed in claim 1, wherein the base stage (2) is made of a conductive material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922450509.7U CN210897190U (en) | 2019-12-30 | 2019-12-30 | Adjust convenient scanning electron microscope sample platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922450509.7U CN210897190U (en) | 2019-12-30 | 2019-12-30 | Adjust convenient scanning electron microscope sample platform |
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| CN210897190U true CN210897190U (en) | 2020-06-30 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114944317A (en) * | 2022-04-15 | 2022-08-26 | 北京理工大学 | Electron microscope imaging method |
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- 2019-12-30 CN CN201922450509.7U patent/CN210897190U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114944317A (en) * | 2022-04-15 | 2022-08-26 | 北京理工大学 | Electron microscope imaging method |
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