CN114577126B - Non-contact double-layer composite quartz crucible wall thickness detection method - Google Patents
Non-contact double-layer composite quartz crucible wall thickness detection method Download PDFInfo
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- CN114577126B CN114577126B CN202210462191.8A CN202210462191A CN114577126B CN 114577126 B CN114577126 B CN 114577126B CN 202210462191 A CN202210462191 A CN 202210462191A CN 114577126 B CN114577126 B CN 114577126B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/60—Analysis of geometric attributes
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/10—Image acquisition modality
- G06T2207/10016—Video; Image sequence
Abstract
The invention discloses a non-contact double-layer composite quartz crucible wall thickness detection method, which comprises the following steps: firstly, laying grating detection points on a double-layer composite quartz crucible; secondly, collecting a video image when the grating detection point moves; thirdly, selecting an effective video segment of the information video to be extracted; selecting a frame of image with the highest image quality of the inner stripe grating patch and the outer stripe grating patch in the effective video band; and fifthly, calculating the thickness of the crucible to be detected at the current grating detection point according to the shooting time difference of the frame of image with the highest image quality of the inner fringe grating patch and the outer fringe grating patch and the moving speed of the crucible to be detected. The method for detecting the wall thickness of the double-layer composite quartz crucible based on image recognition is high in detection speed and detection precision, the video is reserved at each grating detection point, so that the tracing is facilitated, the detection precision can be adjusted according to actual requirements, the detection cost is greatly reduced, and the detection efficiency is improved.
Description
Technical Field
The invention belongs to the technical field of wall thickness measurement of double-layer composite quartz crucibles, and particularly relates to a non-contact double-layer composite quartz crucible wall thickness detection method.
Background
The single crystal silicon is drawn by using a double-layer composite quartz crucible which is used as a consumable utensil, the appearance requirement of the double-layer composite quartz crucible is very strict, the parameters such as the size, the appearance and the like of the double-layer composite quartz crucible are strictly checked before leaving a factory, and the production quality of the single crystal silicon is seriously influenced.
As the demand for single crystal silicon in the semiconductor industry has increased, the demand for double layer composite quartz crucibles has also increased significantly. The double-layer structure of the double-layer composite quartz crucible is a transparent layer and a bubble layer, and the bubble layer contains more bubbles, so that the control of the thickness of the double-layer composite quartz crucible is extremely important for ensuring the quality and the performance of the double-layer composite quartz crucible. The traditional method for manually checking the side wall thickness of the double-layer composite quartz crucible cannot meet the requirement of large-scale high-efficiency production, the manual detection speed is low, the detection precision is unstable due to human factors, the detection process is difficult to record, and the source tracing is difficult once problems occur in the later period. Therefore, a non-contact double-layer composite quartz crucible wall thickness detection method is needed to solve the above problems.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a non-contact double-layer composite quartz crucible wall thickness detection method aiming at the defects in the prior art, the detection of the double-layer composite quartz crucible wall thickness is carried out based on image identification, the detection speed is high, the detection precision is high, video is reserved on each grating detection point, the tracing is convenient, the detection precision can be adjusted according to actual requirements, the detection cost is greatly reduced, and the detection efficiency is improved.
In order to solve the technical problems, the invention adopts the technical scheme that: a non-contact double-layer composite quartz crucible wall thickness detection method is characterized in that: the method comprises the following steps:
step one, laying grating detection points on a double-layer composite quartz crucible:
step 101, uniformly distributing a plurality of grating detection points on the circumferential side wall of the double-layer composite quartz crucible, wherein each grating detection point comprises an inner detection point arranged on the inner side wall of the double-layer composite quartz crucible and an outer detection point arranged on the outer side wall of the double-layer composite quartz crucible and corresponding to the inner detection point;
102, pasting an inner stripe grating patch on the inner detection point, wherein the center of the inner stripe grating patch is superposed with the inner detection point, pasting an outer stripe grating patch on the outer detection point, and the center of the outer stripe grating patch is superposed with the outer detection point, and marking the double-layer composite quartz crucible pasted with the inner stripe grating patch and the outer stripe grating patch as a crucible to be detected; wherein, the inner stripe grating patch and the outer stripe grating patch are orthogonally arranged;
step two, collecting a video image when the grating detection point moves:
the method for acquiring the video image when any one of the grating detection points moves is the same, and the specific steps for acquiring the video image when the jth grating detection point moves are as follows:
step 201, enabling an outer detection point of a jth grating detection point on a crucible to be detected to be over against the center of a fixed-focus camera lens; wherein j =1,2,.., i, i is the number of the grating detection points;
step 202, controlling the crucible to be detected to horizontally and linearly move from the direction close to the fixed focus camera to the direction far away from the fixed focus camera, continuously acquiring videos of an inner stripe grating patch and an outer stripe grating patch on a jth grating detection point when the crucible to be detected moves by using the fixed focus camera in the moving process of the crucible to be detected, stopping moving when the moving distance of the crucible to be detected is greater than the focal length of the fixed focus camera, stopping acquiring images by the fixed focus camera at the moment, and recording the videos of the inner stripe grating patch and the outer stripe grating patch on the jth grating detection point as information to-be-extracted videos of the jth grating detection point when the crucible to be detected continuously acquired by the fixed focus camera moves;
selecting and intercepting an effective video segment of the information to-be-extracted video;
selecting a frame of image with the highest quality of the internal fringe grating patch image in the effective video segment and recording the frame of image as an internal grating effective image, and selecting a frame of image with the highest quality of the external fringe grating patch image in the effective video segment and recording the frame of image as an external grating effective image;
and step five, calculating the thickness of the crucible to be detected at the jth grating detection point according to the shooting time difference of the inner grating effective image and the outer grating effective image and the moving speed of the crucible to be detected.
The wall thickness detection method of the non-contact double-layer composite quartz crucible is characterized by comprising the following steps: in the second step, the specific step of aligning the outer detection point of the jth grating detection point on the crucible to be detected to the center of the fixed-focus camera lens is as follows: adsorbing a crucible to be detected on a negative pressure rotary installation seat, wherein the negative pressure rotary installation seat is installed on a movable detection platform, and adjusting the height of the movable detection platform and the angle of the negative pressure rotary installation seat to enable an outer detection point of a jth grating detection point to be over against the center of a fixed focus camera lens;
the mobile detection table comprises a table top, a lifting support frame for supporting the table top and a screw rod guide rail sliding table arranged on the table top, and the negative pressure rotary mounting seat is arranged on a sliding seat of the screw rod guide rail sliding table; a light supplement lamp extending into the crucible to be detected is arranged on the sliding seat;
the negative pressure rotary mounting seat comprises a rotary drive arranged at the top of the sliding seat and a negative pressure adsorption platform arranged at the top of the rotary drive, and a negative pressure channel communicated with an air suction nozzle of a vacuum pump is formed in the top of the negative pressure adsorption platform; the inner ring of the rotary drive is connected with the sliding seat, and the outer ring of the rotary drive is connected with the negative pressure adsorption platform.
The non-contact double-layer composite quartz crucible wall thickness detection method is characterized in that: the third step comprises the following specific steps:
301, according to the formula T1=(S/V)-σ、T2= (S/V) + sigma and sigma = (1000/FPS) × 50, starting time point T of effective video segment in information to be extracted video is calculated1In ms and the end time T of the active video segment in the information video to be extracted2In ms; the method comprises the following steps that S is the distance from the central point of an outer stripe grating patch on the jth grating detection point to the focus f of a fixed focus camera before a crucible to be detected moves; v is the moving speed of the crucible to be measured, and FPS is the number of frames transmitted by the fixed-focus camera per second;
step 302, intercepting the Tth information of the video to be extracted1Time point to the T < th >2The video segments between the time points are used as the effective video segments of the j raster detection point.
The wall thickness detection method of the non-contact double-layer composite quartz crucible is characterized by comprising the following steps: before the fourth step is executed, the areas where the inner stripe grating patch and the outer stripe grating patch are located in each frame image of the effective video segment are cut respectively, the cut area image is amplified to be an image with the size of 200 pixels by 200 pixels, the cut and amplified image is subjected to gray scale and noise reduction in sequence, the processed image is recorded as an image to be evaluated, and then the fourth step is executed.
The non-contact double-layer composite quartz crucible wall thickness detection method is characterized in that: the fourth step comprises the following specific steps:
step 401, cutting a first designated area at the same position in each frame of image to be evaluated of the effective video segment, wherein the first designated area only comprises one complete grating stripe in the grating patch of the inner stripe, marking the cut image as the image to be evaluated of the inner stripe,
performing Tenengrad gradient function calculation on the image to be evaluated of the inner stripes to obtain a Tenengrad gradient value of the image to be evaluated of the inner stripes, and selecting the image to be evaluated corresponding to the image to be evaluated of the stripes in one frame with the largest Tenengrad gradient value as an effective image of the inner grating;
step 402, cutting a second designated area at the same position in each frame of image to be evaluated of the effective video segment, wherein the second designated area only comprises one complete grating stripe in the grating patch with the outer stripe, marking the cut image as the image to be evaluated with the outer stripe,
and performing Tenengrad gradient function calculation on the image to be evaluated of the outer fringe to obtain a Tenengrad gradient value of the image to be evaluated of the outer fringe, and selecting the image to be evaluated corresponding to the image to be evaluated of the outer fringe of the frame with the largest Tenengrad gradient value as an effective image of the outer grating.
The wall thickness detection method of the non-contact double-layer composite quartz crucible is characterized by comprising the following steps: the concrete steps of the fifth step are as follows: and calculating the thickness Dj of the crucible to be measured at the j-th grating detection point according to a formula Dj = V × Sj, wherein Sj is the shooting time difference of the effective image of the inner grating and the effective image of the outer grating at the j-th grating detection point, and V is the moving speed of the crucible to be measured.
Compared with the prior art, the invention has the following advantages:
1. according to the invention, the two grating patches which are orthogonally arranged are correspondingly adhered to the inside and the outside of the side wall of the double-layer composite quartz crucible, so that the inside and the outside surfaces of the side wall can be rapidly and clearly distinguished in the image processing process, and the distance between the inside and the outside surfaces of the side wall, namely the side wall thickness of the double-layer composite quartz crucible, can be judged.
2. The invention utilizes the fixed-focus camera to collect the video when the grating detection points move, thereby obtaining the image frames of the two grating patches when the two grating patches are respectively focused, calculating the side wall thickness of the double-layer composite quartz crucible according to the time difference between the image frames, having clear calculation logic and being convenient for carrying out the later-stage video tracing on the wall thickness data of each grating detection point.
3. According to the invention, the effective video segment is captured from the information to-be-extracted video, so that the number of post image processing is reduced, and the detection speed is increased.
4. The number and the arrangement positions of the grating detection points can be adjusted according to actual detection requirements, the arrangement of the detection point positions is flexible and reliable, and the detection device is convenient for meeting the requirements of double-layer composite quartz crucibles with different types and sizes for wall thickness detection.
In conclusion, the wall thickness of the double-layer composite quartz crucible is detected based on image recognition, the detection speed is high, the detection precision is high, the video is reserved at each grating detection point, the tracing is convenient, the detection precision can be adjusted according to actual requirements, the detection cost is greatly reduced, and the detection efficiency is improved.
The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.
Drawings
Fig. 1 is a schematic structural diagram of a negative pressure rotary mounting seat and a mobile detection table adopted by the invention.
Fig. 2 is an enlarged view of fig. 1 at a.
FIG. 3 is a flow chart of the method of the present invention.
Description of reference numerals:
1-1-inner stripe grating patch; 1-2-external stripe grating patch; 2-a crucible to be tested;
3-fixed focus camera; 4-a table top; 5-a lead screw guide rail sliding table;
6, a sliding seat; 7-lifting the supporting frame; 8-a light supplement lamp;
9-rotation driving; 10-negative pressure adsorption stage; 11-a vacuum pump;
12-a negative pressure channel; 13-triangular support.
Detailed Description
As shown in FIG. 3, the method for detecting the wall thickness of the non-contact double-layer composite quartz crucible of the present invention comprises the following steps:
step one, laying grating detection points on a double-layer composite quartz crucible:
step 101, uniformly distributing a plurality of grating detection points on the circumferential side wall of a double-layer composite quartz crucible, wherein each grating detection point comprises an inner detection point arranged on the inner side wall of the double-layer composite quartz crucible and an outer detection point which is arranged on the outer side wall of the double-layer composite quartz crucible and corresponds to the inner detection point;
102, pasting an inner stripe grating patch 1-1 on the inner detection point, enabling the center of the inner stripe grating patch 1-1 to coincide with the inner detection point, pasting an outer stripe grating patch 1-2 on the outer detection point, enabling the center of the outer stripe grating patch 1-2 to coincide with the outer detection point, and marking the double-layer composite quartz crucible pasted with the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 as a crucible 2 to be detected; wherein, the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 are orthogonally arranged;
in this embodiment, the inner and outer surfaces of the double-layer composite quartz crucible are purged before the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 are adhered, the air pressure of the purging machine is not greater than 0.01Mpa, dust and fine particle foreign matters on the surface of the double-layer composite quartz crucible are removed, the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 are firmly adhered, and the dust and the fine particle foreign matters are prevented from affecting the distance between the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2.
In this embodiment, as shown in fig. 2, the sizes of the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 are both 1cm × 1cm, the stripe line widths of the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 are both 1mm, the grid distances of the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 are both 1mm, and the thicknesses of the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 are negligible; the inner fringe grating patch 1-1 and the outer fringe grating patch 1-2 with smaller sizes can reduce the calculation error caused by the radian of the side wall of the double-layer composite quartz crucible, so that the measurement precision meets the requirement.
In this embodiment, each of the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 has five grating stripes, a central grating stripe of the inner stripe grating patch 1-1 and a central grating stripe of the outer stripe grating patch 1-2 are combined to form a cross line, and the intersection point of the cross line coincides with the inner and outer detection points, which can ensure that the center of the inner stripe grating patch 1-1 coincides with the inner detection point and the center of the outer stripe grating patch 1-2 coincides with the outer detection point.
It should be noted that, two orthogonally arranged inner stripe grating patches 1-1 and outer stripe grating patches 1-2 are correspondingly pasted inside and outside the side wall of the double-layer composite quartz crucible, that is, if the inner stripe grating patches 1-1 are horizontal stripe gratings, the outer stripe grating patches 1-2 are vertical stripe gratings; if the inner stripe grating patch 1-1 is a vertical stripe grating, the outer stripe grating patch 1-2 is a horizontal stripe grating; the inner surface and the outer surface of the side wall can be rapidly and clearly distinguished in the image processing process, so that the distance between the inner surface and the outer surface of the side wall, namely the side wall thickness of the double-layer composite quartz crucible, can be judged.
Step two, collecting a video image when the grating detection point moves:
the method for acquiring the video image when any one of the grating detection points moves is the same, and the specific steps for acquiring the video image when the jth grating detection point moves are as follows:
step 201, an outer detection point of a jth grating detection point on the crucible 2 to be detected is opposite to the center of a lens of the fixed-focus camera 3; wherein j =1,2,.., i, i is the number of the grating detection points;
it should be noted that, when the lens of the fixed focus camera 3 is actually operated, the position of the cross line formed by the combination of the central grating stripe of the inner stripe grating patch 1-1 and the central grating stripe of the outer stripe grating patch 1-2 in the display screen of the fixed focus camera 3 is adjusted, so that the cross line coincides with the central cross line of the display screen of the fixed focus camera 3, and at this time, it is considered that the grating detection point is directly opposite to the lens of the fixed focus camera 3.
In this embodiment, i is a positive integer not less than 4.
In this embodiment, a triangular support frame 13 is disposed at the bottom of the fixed-focus camera 3.
It should be noted that, by aligning the grating detection point to the lens of the fixed focus camera 3, the influence of the distortion of the fixed focus camera 3 on the video image shot at the grating detection point can be reduced, so as to improve the accuracy of the subsequent data processing and improve the measurement precision.
202, controlling the crucible 2 to be detected to horizontally and linearly move from the direction close to the fixed focus camera 3 to the direction far away from the fixed focus camera 3, in the moving process of the crucible 2 to be detected, continuously acquiring videos of an inner stripe grating patch 1-1 and an outer stripe grating patch 1-2 at the jth grating detection point when the crucible 2 to be detected moves by using the fixed focus camera 3, stopping moving when the moving distance of the crucible 2 to be detected is greater than the focal distance of the fixed focus camera 3, stopping acquiring images by using the fixed focus camera 3 at the moment, and recording the videos of the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 at the jth grating detection point as information of the jth grating detection point to be extracted videos, which are continuously acquired by using the fixed focus camera 3 and are obtained when the crucible 2 to be detected moves;
it should be noted that the inner fringe grating patch 1-1 and the outer fringe grating patch 1-2 in the video to be extracted from the information sequentially exhibit the whole processes of defocusing, focusing and then defocusing, and the central positions of the inner fringe grating patch 1-1 and the outer fringe grating patch 1-2 in the video to be extracted from the information are not changed, but only the size and the definition are changed.
It should be noted that, control to await measuring crucible 2 by the direction that is close to the fixed focus camera 3 to the horizontal linear motion of the direction of keeping away from the fixed focus camera 3, rely on lead screw guide rail slip table 5 to realize, await measuring crucible 2 adsorbs platform 10 to install on the slide 6 of lead screw guide rail slip table 5 through the negative pressure, during initial condition, slide 6 is located the one end that lead screw guide rail slip table 5 is closest to fixed focus camera 3, slide 6 drives the crucible 2 that await measuring to the one end uniform motion that lead screw guide rail slip table 5 keeps away from fixed focus camera 3 farthest away from afterwards. In this embodiment, the maximum moving distance of the slide carriage 6 is 30cm to 45cm, the moving speed of the slide carriage 6 is not more than 0.05mm/ms, and correspondingly, the focal length of the fixed-focus camera 3 is 10cm to 20cm, and the larger the maximum moving distance of the slide carriage 6 is, the larger the focal length of the fixed-focus camera 3 can be set.
To improve the detection accuracy, video capture of the fixed-focus camera 3 at different carriage 6 movement speeds and at a higher frame rate may be attempted. For example: the fixed-focus camera 3 shoots at a frame rate of 60fps, the time length of each frame is 16.7ms, and the length interval between two adjacent frames of images is 0.835mm on the assumption that the moving speed of the sliding seat 6 is 0.05mm/ms, so that the detection precision of the wall thickness of the double-layer composite quartz crucible can reach 100 mu m;
selecting and intercepting an effective video segment of the information to-be-extracted video;
selecting a frame of image with the highest image quality of the inner stripe grating patch 1-1 in the effective video band and recording the frame of image as an inner grating effective image, and selecting a frame of image with the highest image quality of the outer stripe grating patch 1-2 in the effective video band and recording the frame of image as an outer grating effective image;
and step five, calculating the thickness of the crucible to be detected at the jth grating detection point according to the shooting time difference of the inner grating effective image and the outer grating effective image and the moving speed of the crucible to be detected.
It should be noted that, by correspondingly pasting two orthogonally arranged inner stripe grating patches 1-1 and outer stripe grating patches 1-2 inside and outside the side wall of the double-layer composite quartz crucible, the inner and outer surfaces of the side wall can be rapidly and clearly distinguished in the process of image processing, so as to judge the distance between the inner and outer surfaces of the side wall, namely the side wall thickness of the double-layer composite quartz crucible;
acquiring a video of the crucible 2 to be detected during movement by using a fixed-focus camera 3, thereby acquiring image frames of the inner fringe grating patch 1-1 and the outer fringe grating patch 1-2 during respective focusing, converting the side wall thickness of the double-layer composite quartz crucible according to the time difference between the image frames, calculating the logic clearness, and facilitating the later-stage video tracing of the wall thickness data of each grating detection point;
by intercepting effective video segments from the information to-be-extracted video, the number of post image processing is reduced, and the detection speed is increased;
the number and the arrangement positions of the grating detection points can be adjusted according to actual detection requirements, the detection point positions are flexibly and reliably arranged, and the requirement of wall thickness detection of double-layer composite quartz crucibles with different models and sizes is conveniently met;
in conclusion, the wall thickness of the double-layer composite quartz crucible is detected based on image recognition, the detection speed is high, the detection precision is high, the video is reserved at each grating detection point, the tracing is convenient, the detection precision can be adjusted according to actual requirements, the detection cost is greatly reduced, and the detection efficiency is improved.
In this embodiment, as shown in fig. 1, in the second step, the specific step of aligning the outer detection point of the jth grating detection point on the crucible 2 to be measured with the center of the fixed focus camera 3 lens is as follows: adsorbing a crucible 2 to be detected on a negative pressure rotary installation seat, installing the negative pressure rotary installation seat on a movable detection platform, and adjusting the height of the movable detection platform and the angle of the negative pressure rotary installation seat to enable an outer detection point of a jth grating detection point to be over against the center of a lens of a fixed focus camera 3;
the mobile detection table comprises a table top 4, a lifting support frame 7 for supporting the table top 4 and a screw rod guide rail sliding table 5 arranged on the table top 4, and the negative pressure rotary mounting seat is arranged on a sliding seat 6 of the screw rod guide rail sliding table 5; a light supplementing lamp 8 extending into the crucible 2 to be detected is arranged on the sliding seat 6;
the negative pressure rotary mounting seat comprises a rotary drive 9 arranged at the top of the sliding seat 6 and a negative pressure adsorption platform 10 arranged at the top of the rotary drive 9, and a negative pressure channel 12 communicated with an air suction nozzle of a vacuum pump 11 is formed in the top of the negative pressure adsorption platform 10; the inner ring of the rotary drive 9 is connected with the sliding base 6, and the outer ring of the rotary drive 9 is connected with the negative pressure adsorption platform 10.
It should be noted that, because the double-layer structure of the crucible 2 to be measured has a bubble layer in addition to the transparent layer, the light supplement lamp 8 is arranged, the imaging definition of the inner stripe grating patch 1-1 in the fixed-focus camera 3 is improved, and the measurement accuracy is improved;
in addition, light filling lamp 8 is including the lamp pole that can buckle the deformation and set up the bulb on the ejector pin top, and when the not await measuring crucible 2 of model size detected, accessible buckle the deformation lamp pole and send into the bulb that awaits measuring in crucible 2, the position is nimble, convenient operation.
In this embodiment, the suction force of the vacuum pump 11 is selected according to the weight of the crucible 2 to be measured, and generally, the crucible 2 to be measured can be stably adsorbed on the negative pressure adsorption platform 10 by controlling the suction force of the vacuum pump 11 to be 0.1MPa to 0.2MPa, so that the crucible 2 to be measured is prevented from moving relative to the negative pressure adsorption platform 10 in the process of collecting video images.
In the embodiment, when the crucible 2 to be measured is adsorbed on the negative pressure rotary installation seat, the crucible 2 to be measured is ensured to be positioned in the center of the negative pressure adsorption platform 10, so that the subsequent measurement and calculation are facilitated;
in the embodiment, the plurality of grating detection points are located at the same height, so that when the wall thickness of the crucible 2 to be measured at other grating detection points needs to be measured, only the outer ring of the rotary drive 9 needs to be controlled to rotate, so that the crucible 2 to be measured is driven to rotate, and the next grating detection point is opposite to the lens of the fixed-focus camera 3, so that the subsequent video image acquisition process can be carried out;
if the plurality of grating detection points are located at different heights, the lifting support frame 7 is controlled to raise the table top 4 or lower the table top 4 besides controlling the rotation of the outer ring of the rotary drive 9, the whole process is clear and controllable, and the alignment precision is high.
In this embodiment, the third step includes the following specific steps:
301, according to the formula T1=(S/V)-σ、T2= (S/V) + sigma and sigma = (1000/FPS) × 50, starting time point T of effective video segment in information to be extracted video is calculated1In ms, and the termination time point T of the active video segment in the information-to-be-extracted video2In ms; wherein S is the distance between the central point of the outer fringe grating patch 1-2 on the jth grating detection point before the crucible 2 to be detected moves and the focus f of the fixed focus camera 3; v is the moving speed of the crucible 2 to be measured, and FPS is the number of frames transmitted by the fixed-focus camera 3 per second;
step 302, intercepting the Tth information of the video to be extracted1Time point to the T < th >2The video segments between the time points are used as the effective video segments of the j raster detection point.
It should be noted that the practical significance of selecting the effective video segment of the video to be extracted is to reduce the number of post-image processing and improve the detection speed; the meaning of sigma is the time length of a video band formed by 50 frames of images, so that the inner fringe grating patch 1-1 and the outer fringe grating patch 1-2 of the crucible 2 to be tested can present the process from defocusing to focusing and then defocusing in the effective video band.
In this embodiment, before the fourth step is executed, the regions where the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 are located in each frame image of the effective video segment need to be cut, the cut region image is enlarged to an image with a size of 200 pixels by 200 pixels, the cut and enlarged image is subjected to gray scale and noise reduction in sequence, the processed image is recorded as an image to be evaluated, and then the fourth step is executed.
It should be noted that, each frame image of the effective video segment is cut and amplified, and the positions of the stripes of the inner stripe grating patch 1-1 and the outer stripe grating patch 1-2 in the amplified multi-frame image are the same, and only the definition is different.
It should be noted that, by preprocessing each frame image in the effective video segment before executing step four, the data processing flow during image quality evaluation can be greatly reduced, and the accuracy of image quality evaluation can be greatly improved, so as to ensure the accuracy of crucible wall thickness detection.
In this embodiment, the fourth step includes the following specific steps:
step 401, a first designated area at the same position in each frame of image to be evaluated of the effective video segment is cut, the first designated area only comprises one complete grating stripe in the grating patch 1-1 with inner stripes, the cut image is marked as the image to be evaluated with inner stripes,
performing Tenengrad gradient function calculation on the image to be evaluated of the inner stripes to obtain a Tenengrad gradient value of the image to be evaluated of the inner stripes, and selecting the image to be evaluated corresponding to the image to be evaluated of the stripes in one frame with the largest Tenengrad gradient value as an effective image of the inner grating;
step 402, a second designated area at the same position in each frame of image to be evaluated of the effective video segment is cut, the second designated area only comprises one complete grating stripe in the outer stripe grating patch 1-2, the cut image is marked as the image to be evaluated of the outer stripe,
and performing Tenengrad gradient function calculation on the image to be evaluated of the outer fringe to obtain a Tenengrad gradient value of the image to be evaluated of the outer fringe, and selecting the image to be evaluated corresponding to the image to be evaluated of the outer fringe of one frame with the largest Tenengrad gradient value as an effective image of the outer grating.
In this embodiment, the inner stripe grating patch 1-1 is a horizontal stripe grating, the outer stripe grating patch 1-2 is a vertical stripe grating, the inner stripe grating patch 1-1 has five horizontal grating stripes, and the outer stripe grating patch 1-2 has five vertical grating stripes;
in this embodiment, the first designated area only includes the third complete horizontal grating stripe from top to bottom in the inner stripe grating patch 1-1, and the third complete horizontal grating stripe is located in the central area of the inner stripe grating patch 1-1, and can better represent the inner stripe grating patch 1-1;
the second designated area only comprises a third complete vertical grating stripe counted from left to right in the outer stripe grating patch 1-2, and the third complete vertical grating stripe is located in the center area of the outer stripe grating patch 1-2 and can better represent the outer stripe grating patch 1-2.
In this embodiment, the fifth step includes the following specific steps: and calculating the thickness Dj of the crucible 2 to be measured at the j-th raster detection point according to a formula Dj = V × Sj, wherein Sj is the shooting time difference between the effective image of the inner raster and the effective image of the outer raster at the j-th raster detection point, and V is the moving speed of the crucible 2 to be measured.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and all simple modifications, changes and equivalent structural changes made to the above embodiment according to the technical spirit of the present invention still fall within the protection scope of the technical solution of the present invention.
Claims (6)
1. A non-contact double-layer composite quartz crucible wall thickness detection method is characterized by comprising the following steps:
step one, laying grating detection points on a double-layer composite quartz crucible:
step 101, uniformly distributing a plurality of grating detection points on the circumferential side wall of the double-layer composite quartz crucible, wherein each grating detection point comprises an inner detection point arranged on the inner side wall of the double-layer composite quartz crucible and an outer detection point arranged on the outer side wall of the double-layer composite quartz crucible and corresponding to the inner detection point;
102, pasting an inner stripe grating patch (1-1) on the inner detection point, enabling the center of the inner stripe grating patch (1-1) to coincide with the inner detection point, pasting an outer stripe grating patch (1-2) on the outer detection point, enabling the center of the outer stripe grating patch (1-2) to coincide with the outer detection point, and marking the double-layer composite quartz crucible pasted with the inner stripe grating patch (1-1) and the outer stripe grating patch (1-2) as a crucible (2) to be detected; wherein the inner stripe grating patch (1-1) and the outer stripe grating patch (1-2) are orthogonally arranged;
step two, collecting a video image when the grating detection point moves:
the method for acquiring the video image when any one of the grating detection points moves is the same, and the specific steps for acquiring the video image when the jth grating detection point moves are as follows:
step 201, an outer detection point of a jth grating detection point on a crucible (2) to be detected is opposite to the center of a lens of a fixed-focus camera (3); wherein j =1,2,. and i, i is the number of the grating detection points;
step 202, controlling the crucible (2) to be tested to horizontally and linearly move from the direction close to the fixed-focus camera (3) to the direction far away from the fixed-focus camera (3), in the moving process of the crucible (2) to be detected, a fixed focus camera (3) is used for continuously collecting the videos of the inner stripe grating patch (1-1) and the outer stripe grating patch (1-2) on the jth grating detection point when the crucible (2) to be detected moves, when the moving distance of the crucible (2) to be measured is larger than the focal length of the fixed-focus camera (3), the fixed-focus camera (3) stops collecting images, recording videos of the inner stripe grating patch (1-1) and the outer stripe grating patch (1-2) on the jth grating detection point when the crucible to be detected (2) moves, which are continuously collected by the fixed-focus camera (3), as information of the jth grating detection point to be extracted;
step three, selecting and intercepting an effective video segment of the information video to be extracted;
selecting a frame of image with the highest image quality of the inner stripe grating patch (1-1) in the effective video band and recording the frame of image as an inner grating effective image, and selecting a frame of image with the highest image quality of the outer stripe grating patch (1-2) in the effective video band and recording the frame of image as an outer grating effective image;
and step five, calculating the thickness of the crucible to be detected at the jth grating detection point according to the shooting time difference of the inner grating effective image and the outer grating effective image and the moving speed of the crucible to be detected.
2. The method for detecting the wall thickness of the non-contact double-layer composite quartz crucible according to claim 1, wherein: in the second step, the specific step of aligning the outer detection point of the jth grating detection point on the crucible (2) to be detected to the center of the lens of the fixed-focus camera (3) is as follows: adsorbing a crucible (2) to be detected on a negative pressure rotary installation seat, wherein the negative pressure rotary installation seat is installed on a movable detection platform, and adjusting the height of the movable detection platform and the angle of the negative pressure rotary installation seat to enable an outer detection point of a j-th grating detection point to be opposite to the center of a lens of a fixed-focus camera (3);
the mobile detection table comprises a table top (4), a lifting support frame (7) for supporting the table top (4) and a screw rod guide rail sliding table (5) arranged on the table top (4), and the negative pressure rotary mounting seat is arranged on a sliding seat (6) of the screw rod guide rail sliding table (5); a light supplement lamp (8) extending into the crucible (2) to be tested is arranged on the sliding seat (6);
the negative pressure rotary mounting seat comprises a rotary drive (9) arranged at the top of the sliding seat (6) and a negative pressure adsorption platform (10) arranged at the top of the rotary drive (9), and a negative pressure channel (12) communicated with an air suction nozzle of a vacuum pump (11) is formed in the top of the negative pressure adsorption platform (10); the inner ring of the rotary drive (9) is connected with the sliding seat (6), and the outer ring of the rotary drive (9) is connected with the negative pressure adsorption platform (10).
3. The method for detecting the wall thickness of the non-contact double-layer composite quartz crucible according to claim 1, wherein: the third step comprises the following specific steps:
301, according to the formula T1=(S/V)-σ、T2= (S/V) + sigma and sigma = (1000/FPS) × 50, calculating the starting time point T of the effective video segment in the video from which the information is to be extracted1In ms and the end time T of the active video segment in the information video to be extracted2In ms; wherein S is the distance between the central point of the outer fringe grating patch (1-2) on the jth grating detection point before the crucible (2) to be detected moves and the focus f of the fixed-focus camera (3); v is the moving speed of the crucible (2) to be measured, and FPS is the number of frames transmitted by the fixed-focus camera (3) per second;
step 302, intercepting the Tth video of the information to be extracted1Time point to Tth2The video segments between the time points are used as the effective video segments of the j raster detection point.
4. The method for detecting the wall thickness of the non-contact double-layer composite quartz crucible according to claim 1, wherein: before the fourth step is executed, the regions where the inner stripe grating patch (1-1) and the outer stripe grating patch (1-2) are located in each frame image of the effective video segment are cut respectively, the cut region images are amplified to be images with the size of 200 pixels by 200 pixels, the cut and amplified images are subjected to gray scale and noise reduction processing in sequence, the processed images are recorded as images to be evaluated, and then the fourth step is executed.
5. The method for detecting the wall thickness of the non-contact double-layer composite quartz crucible according to claim 4, wherein: the fourth step comprises the following specific steps:
step 401, a first designated area at the same position in each frame of image to be evaluated of the effective video segment is cut, the first designated area only comprises one complete grating stripe in the grating patch (1-1) with inner stripes, the cut image is marked as the image to be evaluated with inner stripes,
performing Tenengrad gradient function calculation on the image to be evaluated of the inner stripes to obtain a Tenengrad gradient value of the image to be evaluated of the inner stripes, and selecting the image to be evaluated corresponding to the image to be evaluated of the stripes in one frame with the largest Tenengrad gradient value as an effective image of the inner grating;
step 402, a second designated area at the same position in each frame of image to be evaluated of the effective video segment is cut, the second designated area only comprises a complete grating stripe in the grating patch (1-2) with the outer stripe, the cut image is marked as the image to be evaluated with the outer stripe,
and performing Tenengrad gradient function calculation on the image to be evaluated of the outer fringe to obtain a Tenengrad gradient value of the image to be evaluated of the outer fringe, and selecting the image to be evaluated corresponding to the image to be evaluated of the outer fringe of the frame with the largest Tenengrad gradient value as an effective image of the outer grating.
6. The method for detecting the wall thickness of the non-contact double-layer composite quartz crucible as claimed in claim 1, wherein: the concrete steps of the fifth step are as follows: and calculating the thickness Dj of the crucible (2) to be measured at the j-th raster detection point according to a formula Dj = V Sj, wherein Sj is the shooting time difference of the effective image of the inner raster and the effective image of the outer raster at the j-th raster detection point, and V is the moving speed of the crucible (2) to be measured.
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