CN108592844A - A kind of device and method of automatic measurement crucible transparent layer thickness - Google Patents
A kind of device and method of automatic measurement crucible transparent layer thickness Download PDFInfo
- Publication number
- CN108592844A CN108592844A CN201810366007.3A CN201810366007A CN108592844A CN 108592844 A CN108592844 A CN 108592844A CN 201810366007 A CN201810366007 A CN 201810366007A CN 108592844 A CN108592844 A CN 108592844A
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- Prior art keywords
- crucible
- measurement
- transparent layer
- layer thickness
- rack
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a kind of devices of automatic measurement crucible transparent layer thickness, it is characterized in that, including rack, the conveyer mechanism, elevating mechanism, the mechanism that reforms in the rack and the measuring mechanism inside crucible, the elevating mechanism is for holding up crucible to the reference plane of setting；The mechanism that reforms is that the machinery moved synchronously being arranged along transmission direction both sides is reformed mechanism；The measuring mechanism includes the measurement axis with lifting and translation functions, and the laser sensor and ultrasonic sensor for measuring the datum mark being arranged on axis and equidistantly being concentrated to inner surface of crucible, all automatic measurement crucible transparent layer thickness, without manually carrying, high degree of automation, manipulation is simple, highly practical without any pollution, measurement efficiency is high, precision is high, it disclosure satisfy that industrial needs, measured without smashing crucible, measurement point can be also freely set, it effectively prevent can't detect position, measurement cost is low.
Description
Technical field
The present invention relates to crucible transparent layer thickness field of measuring technique, especially a kind of automatic measurement crucible transparent layer thickness
Device and method.
Background technology
Measuring the universal method of crucible transparent layer thickness at present is after smashing crucible, by section permeability or adding water,
Then from side hyaline layer thickness, be used in combination slide calliper rule or the microscope with test function etc. manually to take one by one and measure,
It is low that there are measurement efficiencies, and time-consuming, and measurement error is big, the low defect of the degree of automation, and belongs to the test of damage type, with earthenware
The increase of crucible size, production capacity demand increase, and the difficulty that hand breaking measures also gradually increases, and measurement cost is high, can only inspect by random samples,
It cannot be satisfied industrial needs.
Invention content
The object of the present invention is to provide a kind of measurement efficiency height, take short, high certainty of measurement, high degree of automation, and nothing connects
The device and method for the automatic measurement crucible transparent layer thickness that crucible measures need not be broken by touching.
To achieve the goals above, the device of a kind of automatic measurement crucible transparent layer thickness provided by the invention, feature
It is, including rack, conveyer mechanism, elevating mechanism, the mechanism that reforms in the rack and inside crucible
Measuring mechanism, the elevating mechanism is for holding up crucible to the reference plane of setting；The mechanism that reforms is along transmission direction two
The machinery of side setting moved synchronously is reformed mechanism；The measuring mechanism includes the measurement axis with lifting and translation functions, with
And the laser sensor and ultrasonic sensor for measuring the datum mark being arranged on axis and equidistantly being concentrated to inner surface of crucible.
Preferably, the elevating mechanism includes the carrying roller on the roller rack and the linear bearing for guiding, described
Roller rack and carrying roller are driven by the cylinder.
Preferably, the mechanism that reforms further includes being located at crucible to measure the synchronization arranged along vertical transfer direction above position
Band, synchronous pulley, and the gear with synchronous pulley coaxial arrangement thereunder, the synchronous belt drive the synchronous belt
Wheel and gear rotation, gear driving and the machinery are reformed the rack movement that mechanism is connected, and the machinery is driven to reform machine
Structure is clamped and is opened, and realization is reformed.
Preferably, the synchronous belt is driven by two reform cylinders, and machinery described in the rack drives reforms mechanism along peace
Sliding rail movement in the rack.
Preferably, the machinery reform mechanism be symmetricly set on crucible measure position both sides holding claw of reforming.
Preferably, the measurement axis include two be connected respectively along the setting of parallel crucible lifting direction and transmission direction it is straight
Line module.
Preferably, rotary shaft is additionally provided on the measurement axis, and the driving rotary shaft drives the laser sensor
With the motor of ultrasonic sensor rotation.
Preferably, the conveyer mechanism includes several synchronous drivings and spaced conveyer belt, the elevator
Structure is located in the conveyer belt bottom interval.
Use the method for the device of the automatic measurement crucible transparent layer thickness：Crucible is passed automatically from feed entrance point first
It send to preset measurement position, is adopted by the laser sensor inside crucible and the ultrasonic sensor
Collect the data of several measurement points, the measurement point includes at least three points for being located at crucible vertical wall section, crucible bottom orthodrome
A point and vertex are respectively taken with small arc-shaped part, when measurement, are measured from the laser and are sensed using the laser sensor
Device datum mark is measured from the ultrasonic sensor using the ultrasonic sensor and is measured to the distance M of non transparent layer
For datum mark to the distance m of inner surface of crucible, then the thickness of crucible hyaline layer is M-m, and is carried out automatically to measuring and calculating data
Statistics and analysis transports crucible after measurement from unloading position.
The device and method of the automatic measurement crucible transparent layer thickness provided by the invention, has the advantages that：
1. all automatic measurement crucible transparent layer thickness is carried without artificial, high degree of automation, manipulation is simple, without any
Pollution, highly practical, measurement efficiency is high, and precision is high, disclosure satisfy that industrial needs.
2. holding claw of reforming described in energy Automatic-clamping and opening are reformed crucible, it is ensured that crucible is along parallel and vertical transfer (before i.e.
Left and right afterwards) direction reforms to the preset measurement position, ensure measurement accuracy.
3. being measured without smashing crucible, measurement point can be also freely set, crucible local transparent layer thickness is effectively prevent
Unevenness can't detect position, and measurement cost is low.
Description of the drawings
Fig. 1 is the device overall structure diagram of automatic measurement crucible transparent layer thickness of the present invention；
Fig. 2 is the structural schematic diagram of the elevating mechanism；
Fig. 3 is the structural schematic diagram of the mechanism that reforms；
Fig. 4 is the structural schematic diagram of the measuring mechanism；
Fig. 5 is the schematic diagram of the ultrasonic sensor and the laser sensor and bushing position relationship；
In figure：
1. 3. elevating mechanism of rack 2. conveyer mechanism, 21. feed entrance point, 22. unloading position, 31. cylinder 32. is straight
Spool holds 33. roller rack, 34. carrying roller, 4. measuring mechanism, 41. laser sensor, 42. ultrasonic sensor, 43. rotary shaft
The mechanism 51. that reforms of 44.Y axis 45.X axis 5. reforms 62. synchronous pulley of holding claw 6. synchronous belt, 61. reform cylinder, 63. gear
64. rack 7. measures 8. hyaline layer of position, 9. non transparent layer.
Specific implementation mode
As shown in Figure 1, a kind of device of automatic measurement crucible transparent layer thickness, including rack 1, in the rack 1
Conveyer mechanism 2, elevating mechanism 3, the mechanism that reforms 5 and the measuring mechanism 4 inside crucible, the conveyer mechanism 2 wrap
Several synchronous drivings and spaced conveyer belt are included, the elevating mechanism 3 is located in the conveyer belt bottom interval, structure
It is compact；The elevating mechanism 3 is for holding up crucible to the reference plane of setting；The mechanism 5 that reforms is along transmission direction both sides
The machinery moved synchronously being arranged is reformed mechanism；The measuring mechanism 4 includes the measurement axis with lifting and translation functions, and
The laser sensor 41 and ultrasonic sensor that the datum mark being arranged on the measurement axis is equidistantly concentrated to inner surface of crucible
42。
As shown in Fig. 2, the elevating mechanism 3 includes the carrying roller 34 on roller rack 33 and the linear axis for guiding
32 are held, the roller rack 33 and carrying roller 34 are driven by cylinder 31, ensure steady accurately crucible up and down.
As shown in figure 3, the mechanism 5 that reforms further includes being located at crucible to measure 7 top of position along vertical transfer direction arrangement
Synchronous belt 6, synchronous pulley 62, and with the coaxial arrangement of the synchronous pulley 62 gear 63 thereunder, the machinery returns
Positive mechanism is the holding claw 51 of reforming for being symmetricly set on crucible and measuring 7 both sides of position, and the synchronous belt 6 is opposite by two directions of motion
Reform cylinder 61 (being not drawn into another figure) driving, the synchronous belt 6 drives the synchronous pulley 62 and gear 63 to rotate,
The gear 63 drives the rack 64 being connected with the holding claw 51 of reforming to move, and the rack 64 drives 51 edge of holding claw of reforming
Sliding rail in the rack 1 moves, and holding claw 51 of reforming described in drive clamps and opens crucible, and realization is reformed, it is ensured that earthenware
Crucible is reformed along parallel and vertical transfer (i.e. all around) direction to the preset measurement position 7, ensures measurement accuracy.
As shown in figure 4, the measurement axis includes two straight line module Y-axis 44 being arranged respectively along parallel crucible lifting direction
The straight line module X-axis 45 being connected is set with parallel transmission direction, the laser sensor 41 and ultrasonic wave are moved by motor driven belts
Sensor 42 is moved along parallel crucible lifting direction with parallel transmission direction respectively, facilitates the position of adjustment measurement point, the survey
It is additionally provided with rotary shaft 43 on amount axis, and the rotary shaft 43 is driven to drive the laser sensor 41 and ultrasonic sensor 42
The motor of rotation is convenient for measuring the transparent layer thickness of crucible bottom circular arc portion, need not break crucible and measure, measurement at
This is low, and measurement point can freely be arranged, crucible local transparent layer thickness unevenness is effectively prevent to can't detect position.
As shown in figure 5, the method for the device using the automatic measurement crucible transparent layer thickness：First by crucible from charging
Position 21 is automatically transmitted to preset measurement position 7, by the laser sensor 41 inside crucible and described
Ultrasonic sensor 42 acquires the data of several measurement points, and the measurement point, which includes at least, is located at three of crucible vertical wall section
Point, crucible bottom orthodrome and small arc-shaped part respectively take a point and vertex, when measurement, use the laser sensor 41
The distance M from 41 datum mark of the laser sensor to non transparent layer 9 is measured, is surveyed using the ultrasonic sensor 42
Measure the distance m from 42 datum mark of the ultrasonic sensor to inner surface of crucible, then the thickness of crucible hyaline layer 8 is M-m,
And statistics and analysis is carried out to measuring and calculating data automatically, crucible is transported from unloading position 22 after measurement, without artificial
It carries, it is pollution-free, crucible will not be damaged, measurement efficiency is high, and precision is high.
Specific case used herein elaborates inventive concept, the explanation of above example is only intended to
Help understands core of the invention thought.It should be pointed out that for those skilled in the art, not departing from this
Under the premise of inventive concept, any obvious modification, equivalent replacement or the other improvements made should be included in the present invention
Protection domain within.
Claims (9)
1. a kind of device of automatic measurement crucible transparent layer thickness, which is characterized in that including rack, be mounted in the rack
Conveyer mechanism, elevating mechanism, the mechanism that reforms and the measuring mechanism inside crucible, the elevating mechanism are used for crucible tray
It rises to the reference plane of setting；The mechanism that reforms is that the machinery moved synchronously being arranged along transmission direction both sides is reformed mechanism；Institute
It includes with the datum mark being arranged in lifting and the measurement axis of translation functions and the measurement axis to earthenware to state measuring mechanism
The laser sensor and ultrasonic sensor that crucible inner surface is equidistantly concentrated.
2. the device of automatic measurement crucible transparent layer thickness according to claim 1, which is characterized in that the elevating mechanism packet
The carrying roller on roller rack and the linear bearing for guiding are included, the roller rack and carrying roller are driven by the cylinder.
3. the device of automatic measurement crucible transparent layer thickness according to claim 1, which is characterized in that described to reform mechanism also
Include measuring the synchronous belt arranged along vertical transfer direction above position positioned at crucible, synchronous pulley, and with the synchronous belt
Wheel coaxial arrangement gear thereunder, the synchronous belt drive the synchronous pulley and gear rotation, the gear driving with
The machinery is reformed the connected rack movement of mechanism, and the machinery is driven to reform gear grips and opening, and realization is reformed.
4. the device of automatic measurement crucible transparent layer thickness according to claim 3, which is characterized in that the synchronous belt is by two
A reform cylinder drives, and the mechanism that machinery described in the rack drives reforms is moved along the sliding rail being mounted in the rack.
5. the device of automatic measurement crucible transparent layer thickness according to claim 1, which is characterized in that the machinery is reformed machine
Structure is the holding claw of reforming for being symmetricly set on crucible and measuring position both sides.
6. the device of automatic measurement crucible transparent layer thickness according to claim 1, which is characterized in that the measurement axis includes
Two are arranged the straight line module being connected along parallel crucible lifting direction with transmission direction respectively.
7. the device of automatic measurement crucible transparent layer thickness according to claim 6, which is characterized in that on the measurement axis also
The motor that the laser sensor and ultrasonic sensor rotate is driven equipped with rotary shaft, and the driving rotary shaft.
8. the device of automatic measurement crucible transparent layer thickness according to claim 1, which is characterized in that the conveyer mechanism
Including several synchronous drivings and spaced conveyer belt, the elevating mechanism is located in the conveyer belt bottom interval.
9. using the method for the device of automatic measurement crucible transparent layer thickness described in claim 1-8, which is characterized in that first will
Crucible is automatically transmitted to preset measurement position from feed entrance point, by the laser sensor inside crucible and
The ultrasonic sensor acquires the data of several measurement points, and the measurement point includes at least and be located at the three of crucible vertical wall section
A, crucible bottom orthodrome and small arc-shaped part respectively take a point and vertex, when measurement, use the laser sensor
Measure distance M from the laser sensor datum mark to non transparent layer, using the ultrasonic sensor measure from
For the ultrasonic sensor datum mark to the distance m of inner surface of crucible, then the thickness of crucible hyaline layer is M-m, and automatic
Statistics and analysis is carried out to measuring and calculating data, crucible is transported from unloading position after measurement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810366007.3A CN108592844A (en) | 2018-04-23 | 2018-04-23 | A kind of device and method of automatic measurement crucible transparent layer thickness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810366007.3A CN108592844A (en) | 2018-04-23 | 2018-04-23 | A kind of device and method of automatic measurement crucible transparent layer thickness |
Publications (1)
| Publication Number | Publication Date |
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| CN108592844A true CN108592844A (en) | 2018-09-28 |
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ID=63614668
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810366007.3A Pending CN108592844A (en) | 2018-04-23 | 2018-04-23 | A kind of device and method of automatic measurement crucible transparent layer thickness |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110329778A (en) * | 2019-08-09 | 2019-10-15 | 天津必利优科技发展有限公司 | A kind of silica crucible overturning inspection system |
| CN114577126A (en) * | 2022-04-29 | 2022-06-03 | 西安地山视聚科技有限公司 | Non-contact double-layer composite quartz crucible wall thickness detection method |
Citations (8)
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|---|---|---|---|---|
| JPH08208376A (en) * | 1995-02-06 | 1996-08-13 | Mitsubishi Materials Corp | Method for measuring crucible |
| JPH11160059A (en) * | 1997-11-26 | 1999-06-18 | Dainippon Screen Mfg Co Ltd | Measuring apparatus for film thickness |
| US20010029938A1 (en) * | 2000-04-14 | 2001-10-18 | Kazuhisa Arai | Semiconductor wafer cutting machine |
| CN1759297A (en) * | 2001-10-26 | 2006-04-12 | 自由度半导体公司 | Method and system for determining layer thickness |
| WO2006106402A2 (en) * | 2005-04-05 | 2006-10-12 | Ht-Idea S.R.L. | A device and method for measuring the thickness of a layer of a substance or material deposited on a section of road, and a monitoring system comprising said device |
| CN103542808A (en) * | 2012-07-17 | 2014-01-29 | 江苏华尔光电材料股份有限公司 | Outline dimension measuring device for quartz crucibles |
| CN104114976A (en) * | 2011-12-27 | 2014-10-22 | 株式会社Sumco | Method for measuring three-dimensional shape of silica glass crucible, and method for producing monocrystalline silicon |
| CN108398093A (en) * | 2017-02-07 | 2018-08-14 | 江苏华尔石英材料股份有限公司 | A kind of silica crucible wall thickness detecting system based on delivery section |
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2018
- 2018-04-23 CN CN201810366007.3A patent/CN108592844A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08208376A (en) * | 1995-02-06 | 1996-08-13 | Mitsubishi Materials Corp | Method for measuring crucible |
| JPH11160059A (en) * | 1997-11-26 | 1999-06-18 | Dainippon Screen Mfg Co Ltd | Measuring apparatus for film thickness |
| US20010029938A1 (en) * | 2000-04-14 | 2001-10-18 | Kazuhisa Arai | Semiconductor wafer cutting machine |
| CN1759297A (en) * | 2001-10-26 | 2006-04-12 | 自由度半导体公司 | Method and system for determining layer thickness |
| WO2006106402A2 (en) * | 2005-04-05 | 2006-10-12 | Ht-Idea S.R.L. | A device and method for measuring the thickness of a layer of a substance or material deposited on a section of road, and a monitoring system comprising said device |
| CN104114976A (en) * | 2011-12-27 | 2014-10-22 | 株式会社Sumco | Method for measuring three-dimensional shape of silica glass crucible, and method for producing monocrystalline silicon |
| CN103542808A (en) * | 2012-07-17 | 2014-01-29 | 江苏华尔光电材料股份有限公司 | Outline dimension measuring device for quartz crucibles |
| CN108398093A (en) * | 2017-02-07 | 2018-08-14 | 江苏华尔石英材料股份有限公司 | A kind of silica crucible wall thickness detecting system based on delivery section |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110329778A (en) * | 2019-08-09 | 2019-10-15 | 天津必利优科技发展有限公司 | A kind of silica crucible overturning inspection system |
| CN110329778B (en) * | 2019-08-09 | 2024-06-14 | 天津必利优科技发展有限公司 | Quartz crucible overturning inspection system |
| CN114577126A (en) * | 2022-04-29 | 2022-06-03 | 西安地山视聚科技有限公司 | Non-contact double-layer composite quartz crucible wall thickness detection method |
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Application publication date: 20180928 |