CN203312255U - Scanning electron microscope sample table easy to fix and adjust samples - Google Patents

Scanning electron microscope sample table easy to fix and adjust samples Download PDF

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Publication number
CN203312255U
CN203312255U CN2013201477324U CN201320147732U CN203312255U CN 203312255 U CN203312255 U CN 203312255U CN 2013201477324 U CN2013201477324 U CN 2013201477324U CN 201320147732 U CN201320147732 U CN 201320147732U CN 203312255 U CN203312255 U CN 203312255U
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CN
China
Prior art keywords
sample
samples
ascending
descending
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2013201477324U
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Chinese (zh)
Inventor
王志奋
陈士华
吴立新
周运武
欧阳珉路
刘敏
王俊霖
黄海娥
马家艳
周元贵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan Iron and Steel Co Ltd
Original Assignee
Wuhan Iron and Steel Group Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan Iron and Steel Group Corp filed Critical Wuhan Iron and Steel Group Corp
Priority to CN2013201477324U priority Critical patent/CN203312255U/en
Application granted granted Critical
Publication of CN203312255U publication Critical patent/CN203312255U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a scanning electron microscope sample table easy to fix and adjust samples in the field of metal physical analysis to solve the problem that irregular big samples cannot be fixed and angles of the samples cannot be adjusted on the prior sample tables. The sample table includes a circular base which is connected with a mechanical part of a scanning electron microscope through center screws. Three baffles capable of ascending and descending are annularly arranged around the circular base. The bottom parts of the baffles capable of ascending and descending are connected with the base respectively through screws and realize ascending and descending respectively and an ascending and descending range of the baffles capable of ascending and descending is 0-10mm above the base. Through adjusting height of each baffle capable of ascending and descending respectively, the scanning electron microscope sample table easy to fix and adjust the samples supports the irregular samples so that the samples do not slide in a moving and inclining process of the sample table. Moreover, the irregular samples can be adjusted to a best viewing angle so that observation quality of the scanning electron microscope is improved.

Description

A kind of sample platform of scanning electronic microscope that is easy to fix and adjust sample
Technical field
The utility model relates to a kind of sample platform of scanning electronic microscope that is easy to fix and adjust sample of metal physics analysis field.
Background technology
ESEM is utilize static or at sample surfaces, do the electron beam of a branch of fine focus of raster scan, and the bombardment sample surfaces produces various signals, utilizes the electromagnetic lens system imaging, the instrument that solid material is analyzed.Sample stage is the important component part of ESEM, is to carry out sample to observe essential carrying and adjustment means.By it, can realize the motion of sample in all directions, thereby obtain suitable sample observation place.Usually the sample stage of ESEM is the flat base of a circle, and ESEM is controlled by the computer control system pair mechanical part be connected with round base, realizes movement and the inclination of sample stage at different directions.Some problems but conventional sample stage exists in observing sample below:
1, when specimen size is large and profile when irregular, usually need some auxiliary materials to support sample, sample can be positioned on sample stage more reposefully.Place like this sample in the observation process, along with sample stage moves, the supplemental support material may produce loosening, thereby causes sample to move, and the quality of image is observed in impact, may fall down sample stage when serious, the damage ESEM.
2, when large dimension specimen need to carry out oblique view, even be fixed on sample stage by conducting resinl, angle of inclination can not be too large, otherwise sample is easily from the sample stage landing.
The utility model content
The purpose of this utility model is to overcome the prior art defect, and a kind of sample platform of scanning electronic microscope fixing and the adjustment sample that is easy to is provided.
The technical solution of the utility model is achieved in that a kind of sample platform of scanning electronic microscope fixing and the adjustment sample that is easy to, and comprises pedestal, and it is, around pedestal, is equipped with the liftable baffle plate.
Preferably, the liftable baffle plate has two at least, is separately fixed at around pedestal.
Preferably, the liftable baffle plate is provided with three, is separately fixed at around pedestal ringwise.
Preferably, liftable baffle plate bottom is connected with pedestal by screw and realizes separately lifting.
Preferably, the range of liftable baffle plate is the above 0~10mm of pedestal.
The utility model is by regulating respectively the height of each adjustable end stop, can support irregular sample, sample bench move and the process that tilts in can not slide, and can access the optimal viewing angle of irregular sample, improve the observation quality of ESEM.
The accompanying drawing explanation
Fig. 1 is the utility model structure vertical view.
In figure, the 1-pedestal; 2-liftable baffle plate; The 3-screw.
Embodiment
Below in conjunction with accompanying drawing, be further described:
As shown in Figure 1, a kind of sample platform of scanning electronic microscope that is easy to fix and adjust sample, comprise the round base 1 be connected with the mechanical part of ESEM by center bolt 3, it is, three liftable baffle plates 2 have been circular layout around round base 1, liftable baffle plate 2 bottoms are connected with pedestal respectively by screw 3 and can realize separately lifting, and according to practical experience, the range of liftable baffle plate 2 is that the above 0~10mm of pedestal can meet the demands.
The utility model is mainly to be applicable to for the irregular sample design of large scale, and main operational steps is as follows:
1, by screw 3, pedestal 1 center is connected with the mechanical part of ESEM;
2, after sample is finished to preliminary treatment, place on sample stage, by the screw 3 of regulating liftable baffle plate 2 bottoms, determine the height of each liftable baffle plate 2, the sample sightingpiston is horizontal; As needs, sample bench is carried out to oblique view, can support sample with liftable baffle plate 2 sides, by regulating other two liftable baffle plates 2, the sample sightingpiston is horizontal;
3, after sample was placed, sample room vacuumized processing, and after the required level of vacuum of the equipment that reaches, making alive carries out the sample observation.

Claims (5)

1. one kind is easy to sample platform of scanning electronic microscope fixing and the adjustment sample, comprises pedestal, it is characterized in that: around pedestal, be equipped with the liftable baffle plate.
2. according to claim 1ly a kind ofly be easy to fixing and adjust the sample platform of scanning electronic microscope of sample, it is characterized in that: the liftable baffle plate has two at least, is separately fixed at around pedestal.
3. according to claim 2ly a kind ofly be easy to fixing and adjust the sample platform of scanning electronic microscope of sample, it is characterized in that: the liftable baffle plate is provided with three, is separately fixed at around pedestal ringwise.
4. according to claim 1,2 or 3 described a kind of sample platform of scanning electronic microscope fixing and the adjustment sample that are easy to, it is characterized in that: liftable baffle plate bottom is connected with pedestal by screw and realizes separately lifting.
5. according to the described a kind of sample platform of scanning electronic microscope fixing and the adjustment sample that is easy to of claim 1 or 3, it is characterized in that: the range of liftable baffle plate is the above 0~10mm of pedestal.
CN2013201477324U 2013-03-28 2013-03-28 Scanning electron microscope sample table easy to fix and adjust samples Expired - Fee Related CN203312255U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2013201477324U CN203312255U (en) 2013-03-28 2013-03-28 Scanning electron microscope sample table easy to fix and adjust samples

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2013201477324U CN203312255U (en) 2013-03-28 2013-03-28 Scanning electron microscope sample table easy to fix and adjust samples

Publications (1)

Publication Number Publication Date
CN203312255U true CN203312255U (en) 2013-11-27

Family

ID=49618442

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2013201477324U Expired - Fee Related CN203312255U (en) 2013-03-28 2013-03-28 Scanning electron microscope sample table easy to fix and adjust samples

Country Status (1)

Country Link
CN (1) CN203312255U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106876234A (en) * 2017-04-17 2017-06-20 南京大学 A kind of sample stage for the analysis of mineral facies automatic identification
CN110857925A (en) * 2018-08-17 2020-03-03 河南中镜科仪科技有限公司 Adjustable wide mouthful of sample centre gripping platform

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106876234A (en) * 2017-04-17 2017-06-20 南京大学 A kind of sample stage for the analysis of mineral facies automatic identification
CN106876234B (en) * 2017-04-17 2018-06-26 南京大学 A kind of sample stage for the analysis of mineral facies automatic identification
CN110857925A (en) * 2018-08-17 2020-03-03 河南中镜科仪科技有限公司 Adjustable wide mouthful of sample centre gripping platform

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20170717

Address after: 430083, Gate No. 2, Qingshan District, Hubei, Wuhan

Patentee after: Wuhan iron and Steel Company Limited

Address before: 430080 Wuhan, Hubei Friendship Road, No. 999, Wuchang

Patentee before: Wuhan Iron & Steel (Group) Corp.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20131127

Termination date: 20180328