CN103700562A - Height adjustment type scanning electron microscope sampler holder - Google Patents
Height adjustment type scanning electron microscope sampler holder Download PDFInfo
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- CN103700562A CN103700562A CN201310727245.XA CN201310727245A CN103700562A CN 103700562 A CN103700562 A CN 103700562A CN 201310727245 A CN201310727245 A CN 201310727245A CN 103700562 A CN103700562 A CN 103700562A
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- scanning electron
- electron microscope
- sleeve
- spring
- type scanning
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Abstract
The invention relates to a height adjustment type scanning electron microscope sample holder. The height adjustment type scanning electron microscope sample holder comprises a rotary base for placing samples and adjusting the positions of the samples, a sleeve and a spring which are fixed on the sample holder, wherein the lower bottom surface of the rotary base is convexly provided with a central shaft; the spring is sleeved on the central shaft; the lower end of the central shaft is connected with the sleeve through screw threads in a rotating manner; the upper end of the spring abuts against the lower bottom surface of the rotary base; the lower end of the spring abuts against the upper top surface of the sleeve. Samples at different heights can be tested at the same time, and the positions of the samples can be flexibly adjusted before testing, so that the surfaces to be tested of the samples are close to the same height, and the testing quality and efficiency of the samples are improved.
Description
Technical field
The present invention relates to a kind of height adjustable type scanning electron microscope example seat.
Background technology
ESEM is a kind of electron optics video picture instrument, adopt superfine electron beam to scan at sample surfaces, the reciprocation of high energy electron beam and material produces various signals, after these signals receive via suitable detector, through amplifier, amplify, then deliver to imaging on picture tube, there is the features such as sample preparation is simple, multiplication factor adjustable extent resolution wide, image is high, the depth of field is large.
During with scanning electron microscopic observation sample, should utilize the good sample clamp of conductivity that sample is fastened in sample room, if sample is fixing bad, under the irradiation of electron beam, will make image that microcosmic drift occurs, the poor sample of conductivity is particularly serious, thereby can affect observation analysis, can cause especially the error of fixed point Microanalysis.
At present, general used scanning electron microscope example seat is highly fixing, for the sample of differing heights, can not test simultaneously, must just can complete by repeatedly changing sample test, has greatly affected sem test efficiency and testing cost.
Summary of the invention
The object of the invention is to overcome the deficiency that prior art exists, a kind of height adjustable type scanning electron microscope example seat is provided, be intended to solve the problem that differing heights sample is tested simultaneously.
Object of the present invention is achieved through the following technical solutions:
Height adjustable type scanning electron microscope example seat, feature is: comprise for place sample and adjust sample position rotating basis, be fixed on sleeve and spring on sample stage, the bottom surface of described rotating basis convexes with central shaft, on central shaft, be equipped with spring, the lower end of central shaft spins mutually by screw thread and sleeve, the upper end of spring and the bottom surface of rotating basis connect, and the upper end face of the lower end of spring and sleeve connects.
Further, above-mentioned height adjustable type scanning electron microscope example seat, the upper end of described sleeve convexes with step.
Further, above-mentioned height adjustable type scanning electron microscope example seat, is radially provided with clamp groove on described rotating basis.
The substantive distinguishing features that technical solution of the present invention is outstanding and significant progressive being mainly reflected in:
Scanning electron microscope example seat of the present invention, it is simple in structure, easy to operate, can to the sample of differing heights, test simultaneously, before test, can to sample position, adjust flexibly, make to be detected of sample approach sustained height, improved detection quality and the efficiency of sample.Adopt adjustable for height mode, can easyly at any time the height and position of sample be adjusted flexibly, meet the requirement that differing heights sample is tested simultaneously.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, technical solution of the present invention is described further:
Fig. 1: structural representation of the present invention.
Embodiment
As shown in Figure 1, height adjustable type scanning electron microscope example seat, comprise for place sample and adjust sample position rotating basis 1, be fixed on sleeve 2 and spring 3 on sample stage, the bottom surface of rotating basis 1 convexes with central shaft, on central shaft, be equipped with spring 3, the lower end of central shaft spins with sleeve 2 mutually by screw thread C, the axis of sleeve 2 and the axis coaxle of central shaft, the bottom surface of the upper end of spring 3 and rotating basis 1 connects, and the upper end face of the lower end of spring 3 and sleeve 2 connects.The upper end of sleeve 2 convexes with step B, and step B is convenient to specimen holder and is located on sample stage.On rotating basis 1, be radially provided with clamp groove A, be convenient to fixture, specimen holder is installed on instrument sample stage.When rotating basis is worked up or down, loosen or extrusion spring 3, make to have appropriate spring force between rotating basis 1 and sleeve 2 and stablize.
Before test, clamp rotating basis 1 upper groove A sleeve 2 is inserted in sem test platform jack by tweezers, the step B by sleeve upper end locates it, then regulates rotating basis 1 by sample stage, several are tested sample test surfaces and adjust to approaching height.
As fully visible, scanning electron microscope example seat of the present invention, it is simple in structure, easy to operate, can to the sample of differing heights, test simultaneously, before test, can to sample position, adjust flexibly, make to be detected of sample approach sustained height, improve detection quality and the efficiency of sample.Adopt adjustable for height mode, can easyly at any time the height and position of sample be adjusted flexibly, meet the requirement that differing heights sample is tested simultaneously.
It is to be understood that: the above is only the preferred embodiment of the present invention; for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (3)
1. height adjustable type scanning electron microscope example seat, it is characterized in that: comprise for place sample and adjust sample position rotating basis, be fixed on sleeve and spring on sample stage, the bottom surface of described rotating basis convexes with central shaft, on central shaft, be equipped with spring, the lower end of central shaft spins mutually by screw thread and sleeve, the upper end of spring and the bottom surface of rotating basis connect, and the upper end face of the lower end of spring and sleeve connects.
2. height adjustable type scanning electron microscope example seat according to claim 1, is characterized in that: the upper end of described sleeve convexes with step.
3. height adjustable type scanning electron microscope example seat according to claim 1, is characterized in that: on described rotating basis, be radially provided with clamp groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310727245.XA CN103700562A (en) | 2013-12-25 | 2013-12-25 | Height adjustment type scanning electron microscope sampler holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310727245.XA CN103700562A (en) | 2013-12-25 | 2013-12-25 | Height adjustment type scanning electron microscope sampler holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103700562A true CN103700562A (en) | 2014-04-02 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310727245.XA Pending CN103700562A (en) | 2013-12-25 | 2013-12-25 | Height adjustment type scanning electron microscope sampler holder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103700562A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018077950A (en) * | 2016-11-07 | 2018-05-17 | 日本電子株式会社 | Sample base support |
| CN108896595A (en) * | 2018-06-15 | 2018-11-27 | 昆明理工大学 | A kind of scanning electron microscope sample table of protection probe |
| WO2022246884A1 (en) * | 2021-05-27 | 2022-12-01 | 中科晶源微电子技术（北京）有限公司 | Deflector mechanism capable of reducing phase difference, and scanning electron microscope |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050002462A (en) * | 2003-06-30 | 2005-01-07 | 삼성전자주식회사 | Revolution controller of sem |
| CN101030518A (en) * | 2006-03-02 | 2007-09-05 | 中芯国际集成电路制造(上海)有限公司 | Fixer andits scanning electronic microscope for testing sample |
| JP2008027602A (en) * | 2006-07-18 | 2008-02-07 | Fujifilm Corp | Holder device and processing observation method |
| CN101127293A (en) * | 2006-08-15 | 2008-02-20 | 中芯国际集成电路制造(上海)有限公司 | Sample supporter for scanning electronic microscope |
| CN203171388U (en) * | 2013-03-27 | 2013-09-04 | 鞍钢股份有限公司 | Device for preparing transmission electron microscope film sample |
| CN203690251U (en) * | 2013-12-25 | 2014-07-02 | 苏州新锐合金工具股份有限公司 | Height adjustable type SEM sample base |
-
2013
- 2013-12-25 CN CN201310727245.XA patent/CN103700562A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050002462A (en) * | 2003-06-30 | 2005-01-07 | 삼성전자주식회사 | Revolution controller of sem |
| CN101030518A (en) * | 2006-03-02 | 2007-09-05 | 中芯国际集成电路制造(上海)有限公司 | Fixer andits scanning electronic microscope for testing sample |
| JP2008027602A (en) * | 2006-07-18 | 2008-02-07 | Fujifilm Corp | Holder device and processing observation method |
| CN101127293A (en) * | 2006-08-15 | 2008-02-20 | 中芯国际集成电路制造(上海)有限公司 | Sample supporter for scanning electronic microscope |
| CN203171388U (en) * | 2013-03-27 | 2013-09-04 | 鞍钢股份有限公司 | Device for preparing transmission electron microscope film sample |
| CN203690251U (en) * | 2013-12-25 | 2014-07-02 | 苏州新锐合金工具股份有限公司 | Height adjustable type SEM sample base |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018077950A (en) * | 2016-11-07 | 2018-05-17 | 日本電子株式会社 | Sample base support |
| CN108896595A (en) * | 2018-06-15 | 2018-11-27 | 昆明理工大学 | A kind of scanning electron microscope sample table of protection probe |
| WO2022246884A1 (en) * | 2021-05-27 | 2022-12-01 | 中科晶源微电子技术（北京）有限公司 | Deflector mechanism capable of reducing phase difference, and scanning electron microscope |
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| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140402 |