CN114695040A - Scanning transmission imaging device in scanning electron microscope - Google Patents
Scanning transmission imaging device in scanning electron microscope Download PDFInfo
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- CN114695040A CN114695040A CN202210329055.1A CN202210329055A CN114695040A CN 114695040 A CN114695040 A CN 114695040A CN 202210329055 A CN202210329055 A CN 202210329055A CN 114695040 A CN114695040 A CN 114695040A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Abstract
The invention discloses a scanning transmission imaging device in a scanning electron microscope, which comprises a sample stage, a fixed seat, a supporting frame and a back scattering electron probe; the sample table is arranged at the top end of the supporting frame and used for fixing a sample to be observed; the back scattering electron probe is arranged on the fixed seat and used for receiving the transmission scattering electrons passing through the sample to be observed; the fixing seat is arranged in the supporting frame, is connected with the supporting frame and is used for adjusting the distance between the back scattering electron probe and the sample table. According to the invention, the backscattering electron probe of the scanning electron microscope is used as a transmission scattered electron signal detector, and a STEM accessory does not need to be purchased independently, so that the cost of upgrading the scanning transmission imaging function of the scanning electron microscope can be greatly reduced; the fixing seat can slide up and down in the supporting frame, so that the size of a transmission scattered electron receiving angle is changed, and the collection of high-angle and low-angle annular dark field images is realized. The invention can obviously reduce the damage of the electron beam to the sample to be observed and is suitable for the transmission analysis of the sample with poor electron beam irradiation resistance.
Description
Technical Field
The invention discloses a scanning transmission imaging device in a scanning electron microscope, and belongs to the technical field of scanning transmission electron microscopy.
Background
Scanning Transmission Electron Microscopy (STEM), which is an imaging technique for acquiring information on the microstructure of a sample inside by collecting Transmission Electron signals by focusing an Electron beam on the surface of a thin sample using a magnetic lens for Scanning, has become an indispensable instrument for characterizing the microstructure of a substance. STEM is an electron microscopy technology developed based on the requirement of high-resolution imaging, and in order to obtain higher resolution, the accelerating voltage of the STEM is generally 200-300 kV. Since the electron beam energy is high, it is not suitable for observing a sample having poor resistance to electron beam irradiation.
The accelerating voltage of a Scanning Electron Microscope (SEM) is low, generally not more than 30kV, and if a STEM device is installed in the SEM, damage of Electron beams to a sample can be significantly reduced, and the Scanning Electron microscope is particularly suitable for transmission analysis of soft material samples such as organic polymers, biology, and the like. The difference between the STEM and SEM is that the STEM uses a thin sample and a detector is mounted under the sample, when the electron beam scans a certain position of the sample, the detector will synchronously receive the signal and convert it into current intensity to be displayed on the computer screen, and each point on the sample corresponds to the generated image point one by one. In recent years, with the performance improvement of SEM and the popularization of field emission SEM, the demand for expanding STEM function on SEM is more and more urgent.
The method for implementing the STEM function on the scanning electron microscope generally includes installing a separately manufactured STEM accessory in the scanning electron microscope. The STEM accessory comprises a thin sample support and a detector arranged below the sample and used for receiving scanning transmission signals, the price of the STEM accessory is high, and the STEM accessory is about 10-30 ten thousand RMB, so that the cost of upgrading the scanning transmission imaging function of a scanning electron microscope is high, and the STEM accessory is not beneficial to large-scale popularization and application.
Disclosure of Invention
An object of the application is to provide a scanning transmission imaging device among scanning electron microscope to solve among the prior art the STEM annex that will make alone and install the scanning electron microscope that leads to in the scanning electron microscope technical problem that transformation cost is high that upgrades.
The invention provides a scanning transmission imaging device in a scanning electron microscope, which comprises a sample stage, a fixed seat, a supporting frame and a back scattering electron probe;
the sample table is arranged at the top end of the supporting frame and used for fixing a sample to be observed;
the back scattering electron probe is arranged on the fixed seat and used for receiving transmission scattering electrons passing through a sample to be observed;
the fixing seat is arranged in the supporting frame, is connected with the supporting frame and is used for adjusting the distance between the back scattering electron probe and the sample stage.
Preferably, the supporting frame comprises a frame body, a sample table groove, a slide rail groove and a first fixing screw;
the sample table groove is formed in the top end of the frame body, a transmission through hole is formed in the sample table groove, and the sample table is arranged in the sample table groove;
the slide rail grooves are arranged on two opposite sides of the frame body;
the first fixing screw penetrates through the sliding rail groove to be connected with the fixing seat, and is used for fixing the fixing seat on the frame body.
Preferably, the support frame further comprises an elastic pressing sheet, and the elastic pressing sheet is arranged at the top end of the frame body;
one end of the elastic pressing sheet is fixedly connected with the top end of the frame body, and the other end of the elastic pressing sheet is arranged on the sample table and used for fixing the sample table in the groove of the sample table;
and the bottom end of the frame body is provided with a connecting hole connected with a sample stage base of a scanning electron microscope.
Preferably, the sample stage comprises a support piece and a cover piece;
a sample groove is formed in the first surface of the supporting sheet and is used for bearing the sample to be observed;
the cover plate is fixed on the support plate, and the first surface of the cover plate is connected with the sample to be observed and used for fixing the sample to be observed in the sample groove.
Preferably, the second surface of the support plate is provided with a first funnel-shaped groove, the first funnel-shaped groove is connected with the sample groove, and the diameter of the first funnel-shaped groove on the second surface of the support plate is larger than the diameter of the joint of the first funnel-shaped groove and the sample groove.
Preferably, the second surface of the cover plate is provided with a second funnel-shaped groove, and the diameter of the second funnel-shaped groove on the second surface of the cover plate is larger than that of the second funnel-shaped groove on the first surface of the cover plate.
Preferably, a fixing groove is formed in the fixing seat and used for fixing the back scattering electron probe;
the bosses on two opposite sides of the fixed groove are provided with first threaded holes;
the first fixing screws sequentially penetrate through the sliding rail grooves and the first threaded holes to fix the fixing seat on the frame body.
Preferably, the fixing groove is provided with a transmission hole, and an inner hole of the back scattering electron probe is matched with the transmission hole.
Preferably, the bosses on two opposite sides of the fixing groove are also provided with second threaded holes;
and a second fixing screw penetrates through the second threaded hole, is connected with the back scattering electron probe in the fixing groove and is used for fixing the back scattering electron probe.
Preferably, the fixed seat is made of plastic;
the sample platform with the material of carriage is the aluminum alloy.
Compared with the prior art, the scanning transmission imaging device in the scanning electron microscope has the following beneficial effects:
according to the scanning transmission imaging device in the scanning electron microscope, the back scattering electron probe carried by the scanning electron microscope is used as a transmission scattering electron signal detector, and a STEM accessory does not need to be purchased independently, so that the cost for upgrading the scanning transmission imaging function of the scanning electron microscope can be greatly reduced. The scanning transmission imaging device in the scanning electron microscope can obviously reduce the damage of electron beams to a sample to be observed, and is particularly suitable for the transmission analysis of soft material samples such as organic polymers, biology and the like.
The fixing seat of the back scattering electron probe can slide up and down in the supporting frame, the size of a transmission scattering electron receiving Angle can be changed by adjusting the distance between the back scattering electron probe and the sample stage, and further, the collection of a High-Angle Annular Dark Field image (HAADF) and a Low-Angle Annular Dark Field image (LAADF) is realized, so that the obtained image can more accurately reflect the structure and component information of a sample to be observed.
The sample stage can be flexibly disassembled and assembled, and a sample can be fixed on the supporting frame after being replaced outside the electron microscope, so that the time for replacing the sample can be greatly shortened.
The upper surface and the lower surface of the sample table are funnel-shaped grooves, so that the transmission electronic signals and the secondary electronic signals cannot be shielded, and the scanning transmission images and the secondary electronic images of the sample to be observed can be acquired simultaneously.
The back scattering electron probe is of an annular structure, the diameter of an inner hole of the back scattering electron probe is slightly larger than that of a sample, transmission scattering electrons with smaller scattering angles can pass through the inner hole, and transmission scattering electrons with larger scattering angles can be collected by the annular probe to form an annular dark-Field image (ADF). Because the transmission scattered electrons with smaller scattering angles can not directly irradiate on the signal detection surface of the back scattered electron probe, the problem of supersaturation of signals can be avoided.
Drawings
FIG. 1 is a perspective view of an exemplary scanning electron microscope device with one angle;
FIG. 2 is a perspective view of another scanning transmission imaging device in a scanning electron microscope according to an embodiment of the invention;
FIG. 3 is a half sectional view of a scanning transmission imaging device in a scanning electron microscope according to an embodiment of the invention;
FIG. 4 is a front view of a support frame in an embodiment of the present invention;
FIG. 5 is a schematic sectional view taken along line A-A in FIG. 4;
FIG. 6 is a right side view of a support frame in an embodiment of the present invention;
FIG. 7 is a front view of a support sheet in an embodiment of the present invention;
fig. 8 is a top view of a support sheet in an embodiment of the present invention;
FIG. 9 is a front view of a cover plate in an embodiment of the present invention;
FIG. 10 is a top view of a cover sheet in an embodiment of the present invention;
FIG. 11 is a schematic view of a fixing base according to an embodiment of the present invention;
fig. 12 is a schematic sectional view taken along line B-B in fig. 11.
List of parts and reference numerals:
1 is a sample stage; 11 is a supporting sheet; 111 is a sample groove; 112 is a first funnel-shaped recess; 12 is a cover plate; 121 is a second funnel-shaped recess; 2 is a fixed seat; 21 is a fixed groove; 22 is a first threaded hole; 23 is a transmission hole; 24 is a second threaded hole; 25 is a boss; 3 is a supporting frame; 31 is a frame body; 32 is a sample table groove; 33 is a slide rail groove; 34 is a first fixing screw; 35 is an elastic pressing sheet; 36 is a connecting hole; and 37 is a transmission through hole.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth, such as particular system structures, techniques, etc. in order to provide a thorough understanding of the embodiments of the invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
As shown in fig. 1 to fig. 3, the scanning transmission imaging device in a scanning electron microscope according to an embodiment of the present invention includes a sample stage 1, a fixing base 2, a supporting frame 3, and a backscattered electron probe (not shown in the drawings).
The sample table 1 is arranged at the top end of the support frame 3 and used for fixing a sample to be observed;
the back scattering electron probe is arranged on the fixed seat 2 and is used for receiving transmission scattering electrons passing through a sample to be observed;
the fixing seat 2 is arranged in the supporting frame 3, is connected with the supporting frame 3 and is used for adjusting the distance between the back scattering electron probe and the sample table 1.
In the embodiment of the invention, the sample to be observed is a thin sample, generally a phi 3mm thin sample; the connection mode of the fixed seat 2 and the supporting frame 3 can be sliding connection, clamping connection and the like.
According to the scanning transmission imaging device in the scanning electron microscope, the back scattering electron probe carried by the scanning electron microscope is used as a transmission scattering electron signal detector, and a STEM accessory does not need to be purchased independently, so that the cost for upgrading the scanning transmission imaging function of the scanning electron microscope can be greatly reduced. Meanwhile, the scanning transmission imaging device in the scanning electron microscope can obviously reduce the damage of the electron beam to the sample to be observed, and is particularly suitable for the transmission analysis of soft material samples such as organic polymers, biology and the like.
The fixing seat 2 of the back scattering electron probe is connected with the supporting frame 3, and the distance between the back scattering electron probe and the sample table 1 can be adjusted according to needs, so that the size of a transmission scattering electron receiving Angle is changed, and further, the collection of a High-Angle Annular Dark Field image (HAADF) and a Low-Angle Annular Dark Field image (LAADF) is realized, and the obtained image can more accurately reflect the structure and component information of a sample to be observed.
Further, the structure of the supporting frame 3 of the present invention is shown in fig. 4 to 6, and includes a frame body 31, a sample stage groove 32, a slide rail groove 33, and a first fixing screw 34.
The sample table groove 32 is formed in the top end of the frame body 31, a transmission through hole 37 is formed in the sample table groove 32, and a sample to be observed is arranged in the sample table groove 32;
the slide rail grooves 33 are provided on opposite sides of the frame body 31;
the first fixing screw 34 passes through the slide rail groove 33 and is connected with the fixing base 2, and is used for fixing the fixing base 2 on the frame 31.
In order to ensure that the sample to be observed cannot move in the test process, the support frame 3 of the embodiment of the invention further comprises an elastic pressing sheet 35, wherein the elastic pressing sheet 35 is arranged at the top end of the frame body 31;
one end of the elastic pressing sheet 35 is fixedly connected with the top end of the frame body 31, and the other end is arranged on the sample table 1 and used for fixing the sample table 1 in the sample table groove 32. In the embodiment of the present invention, one end of the elastic pressing piece 35 is fixedly connected to the frame 31 by using a screw.
In order to ensure the conductivity and stability of the sample stage 1, in the embodiment of the present invention, a connection hole 36 connected to the sample stage base of the scanning electron microscope is further formed at the bottom end of the frame 31.
In order to facilitate the flexible assembly and disassembly of the sample stage 1, the embodiment of the present invention sets the sample stage 1 to a structure including a support piece 11 and a cover piece 12, as shown in fig. 7 to 10.
Wherein, a sample groove 111 is arranged on the first surface of the support sheet 11, and the sample groove 111 is used for bearing a sample to be observed;
the cover plate 12 is fixed on the support plate 11, and a first surface of the cover plate 12 is connected with a sample to be observed and used for fixing the sample to be observed in the sample groove 111. In the embodiment of the present invention, the first surface of the cover sheet 12 is a flat surface.
The sample platform 1 with the structure can realize the replacement of the sample outside the electron microscope, and the sample platform 1 is fixed on the supporting frame 3 after the replacement, so that the time for replacing the sample can be greatly shortened.
In order to achieve the purpose of simultaneously acquiring the scanning transmission image and the secondary electron image of the sample to be observed, in the embodiment of the invention, the first funnel-shaped groove 112 is formed on the second surface of the supporting sheet 11, the first funnel-shaped groove 112 is connected with the sample groove 111, and the diameter of the first funnel-shaped groove 112 on the second surface of the supporting sheet 11 is larger than the diameter of the connection part of the first funnel-shaped groove 112 and the sample groove 111.
The embodiment of the present invention further provides a second funnel-shaped groove 121 on the second surface of the lid plate 12, and the diameter of the second funnel-shaped groove 121 on the second surface of the lid plate 12 is larger than the diameter of the second funnel-shaped groove 121 on the first surface of the lid plate 12.
The upper surface and the lower surface of the sample table 1 are funnel-shaped grooves, so that the transmission electronic signals and the secondary electronic signals cannot be shielded, and the purpose of simultaneously collecting the scanning transmission images and the secondary electronic images of the sample to be observed can be achieved.
In the embodiment of the present invention, the structure of the fixing base 2 is as shown in fig. 11 and 12, a fixing groove 21 is formed on the fixing base 2, and the fixing groove 21 is used for fixing a back-scattered electron probe;
the bosses 25 on two opposite sides of the fixed groove 21 are provided with first threaded holes 22;
the first fixing screw 34 passes through the slide rail groove 33 and the first threaded hole 22 in sequence, and fixes the fixing base 2 to the frame 31.
Wherein, the fixed groove 21 is provided with a transmission hole 23, the inner hole of the back scattering electron probe is matched with the transmission hole 23, in particular, the inner hole of the back scattering electron probe has the same size and the corresponding position with the transmission hole 23.
In the embodiment of the invention, a backscatter electron probe carried by a scanning electron microscope is used as a transmission and scatter electron signal detector, the backscatter electron probe is annular, the diameter of an inner hole is slightly larger than the diameter (phi 3mm) of a sample, transmission electrons with smaller scatter angles can pass through the inner hole, and transmission electrons with larger scatter angles can be collected by the annular probe to form an annular dark-Field image (ADF). Since the transmitted electrons with smaller scattering angles do not directly impinge on the signal detection surface, the problem of over-saturation of the signal can be avoided.
In order to further fix the back scattering electron probe, the bosses 25 on two opposite sides of the fixing groove 21 are further provided with second threaded holes 24;
and the second fixing screw passes through the second threaded hole 24 and is connected with the back scattering electron probe in the fixing groove 21 for fixing the back scattering electron probe.
The fixing seat 2 of the embodiment of the invention is made of plastic with better insulating property, so that the back scattering electron probe is insulated from the supporting frame, and the problems that the back scattering electron probe feeds back a touch signal to cause the locking shaft of the base of the sample stage of the scanning electron microscope and the normal operation of the electron microscope cannot be realized are solved.
The sample table 1 and the supporting frame 3 are made of aluminum alloy, so that the scanning transmission imaging device in the scanning electron microscope prepared by the scanning transmission imaging device has the advantages of light weight, high strength, good conductivity, low cost and the like, and is small in compression on a base of the sample table of the scanning electron microscope, long in service life and low in cost.
The invention can realize the purpose of adjusting the distance between the back scattering electron probe and the sample stage by combining the fixing seat and the supporting frame, and further realize the function of receiving transmission scattering electron signals by using the back scattering electron probe of the scanning electron microscope. The invention can obviously reduce the damage of the electron beam to the sample to be observed and is suitable for the transmission analysis of the sample with poor electron beam irradiation resistance.
The invention takes an FEI Quanta 650FEG scanning electron microscope as an example to explain the use method of the device of the invention:
(1) opening the sample chamber of the scanning electron microscope, taking down the sample table fixing disc, placing the supporting frame 3 on the sample table base, aligning the connecting hole 36 at the bottom end of the supporting frame 3 with the threaded hole on the sample table base, and fixing the supporting frame 3 on the scanning electron microscope sample table base by using a screw to penetrate through the connecting hole 36.
(2) The scanning electron microscope backscattered electron probe is placed in the fixing groove 21 of the fixing seat 2, so that the signal detection surface of the backscattered electron probe faces outwards, the central hole is aligned with the transmission hole 23 of the fixing seat 2, and the backscattered electron probe is fixed by second fixing screws in bosses 25 on two sides of the fixing seat 2.
(3) The fixing seat 2 with the assembled probe is placed in the supporting frame 3, the signal detection surface of the back scattering electron probe faces upwards, the first threaded hole 22 of the fixing seat 2 is aligned with the slide rail groove 33 of the supporting frame 3, and a first fixing screw 34 penetrates through the slide rail groove 33 of the supporting frame 3 and the first threaded hole 22 in the fixing seat 2, so that the fixing seat 2 is connected with the supporting frame 3.
(4) The distance between the signal detection surface of the backscatter electron probe and the transmission through hole 37 of the support frame 3 is measured, and the fixing base 2 is fixed on the support frame 3 by the first fixing screw 34 in the slide rail groove 33 of the support frame 3, wherein the distance between the signal detection surface of the backscatter electron probe and the transmission through hole 37 is 12mm in this embodiment.
(5) The sample to be observed is placed in the sample groove 111 of the support sheet 11, pressed with the first surface of the cover sheet 12, and screwed into the threaded hole of the support sheet 11 through the through hole of the cover sheet 12 with a screw, and the sample to be observed is held between the support sheet 11 and the cover sheet 12. The sample to be observed in this example was a Φ 3mm thin sample.
(6) The assembled sample table 1 is placed in the sample table groove 32 at the top end of the supporting frame 3, and the sample table 1 is fixed in the sample table groove 32 by the elastic pressing sheet 35 at the top end of the supporting frame 3.
(7) The scanning electron microscope sample chamber is closed, the sample chamber can be observed after being vacuumized, a scanning transmission annular dark field (STEM-ADF) image and a Secondary Electron (SE) image can be displayed simultaneously in the observation process, and imaging can be realized only by selecting a BSED probe in the scanning electron microscope operation interface.
(8) And after the test is finished, the sample chamber of the scanning electron microscope is deflated, and the sample can be replaced or the scanning transmission imaging device can be taken down by opening the sample chamber.
Although the present application has been described with reference to a few embodiments, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the application as defined by the appended claims.
Claims (10)
1. A scanning transmission imaging device in a scanning electron microscope is characterized by comprising a sample stage, a fixed seat, a supporting frame and a back scattering electron probe;
the sample table is arranged at the top end of the supporting frame and used for fixing a sample to be observed;
the back scattering electron probe is arranged on the fixed seat and is used for receiving transmission scattering electrons passing through a sample to be observed;
the fixing seat is arranged in the supporting frame, is connected with the supporting frame and is used for adjusting the distance between the back scattering electron probe and the sample stage.
2. The scanning transmission imaging device in the scanning electron microscope according to claim 1, wherein the support frame includes a frame body, a sample stage groove, a slide rail groove and a first fixing screw;
the sample table groove is formed in the top end of the frame body, a transmission through hole is formed in the sample table groove, and the sample table is arranged in the sample table groove;
the sliding rail grooves are arranged on two opposite sides of the frame body;
the first fixing screw penetrates through the sliding rail groove to be connected with the fixing seat, and is used for fixing the fixing seat on the frame body.
3. The scanning transmission imaging device in the scanning electron microscope as claimed in claim 2, wherein the supporting frame further comprises an elastic pressing sheet, and the elastic pressing sheet is arranged at the top end of the frame body;
one end of the elastic pressing sheet is fixedly connected with the top end of the frame body, and the other end of the elastic pressing sheet is arranged on the sample table and used for fixing the sample table in the groove of the sample table;
and the bottom end of the frame body is provided with a connecting hole connected with a sample stage base of a scanning electron microscope.
4. A scanning transmission imaging device in a scanning electron microscope according to any one of claims 1 to 3, characterized in that the sample stage comprises a support sheet and a cover sheet;
a sample groove is formed in the first surface of the supporting sheet and is used for bearing the sample to be observed;
the cover plate is fixed on the support plate, and the first surface of the cover plate is connected with the sample to be observed and used for fixing the sample to be observed in the sample groove.
5. The device as claimed in claim 4, wherein the second surface of the supporting plate has a first funnel-shaped groove, the first funnel-shaped groove is connected to the sample groove, and a diameter of the first funnel-shaped groove on the second surface of the supporting plate is larger than a diameter of a connection point of the first funnel-shaped groove and the sample groove.
6. The scanning transmission imaging device in the scanning electron microscope as claimed in claim 4, wherein the second surface of the cover plate is opened with a second funnel-shaped groove, and the diameter of the second funnel-shaped groove on the second surface of the cover plate is larger than the diameter of the second funnel-shaped groove on the first surface of the cover plate.
7. The scanning transmission imaging device in a scanning electron microscope according to claim 2, wherein the fixing seat is provided with a fixing groove for fixing the backscattered electron probe;
the bosses on two opposite sides of the fixed groove are provided with first threaded holes;
the first fixing screws sequentially penetrate through the sliding rail grooves and the first threaded holes to fix the fixing seat on the frame body.
8. A scanning transmission imaging device in a scanning electron microscope according to claim 7, characterized in that the fixing groove is provided with a transmission hole, and an inner hole of the backscattered electron probe is matched with the transmission hole.
9. The scanning transmission imaging device in the scanning electron microscope as claimed in claim 7, wherein the bosses on two opposite sides of the fixing groove are further provided with second threaded holes;
and a second fixing screw penetrates through the second threaded hole, is connected with the back scattering electron probe in the fixing groove and is used for fixing the back scattering electron probe.
10. The scanning transmission imaging device in the scanning electron microscope as claimed in claim 1, wherein the fixing seat is made of plastic;
the sample platform with the material of carriage is the aluminum alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210329055.1A CN114695040A (en) | 2022-03-31 | 2022-03-31 | Scanning transmission imaging device in scanning electron microscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210329055.1A CN114695040A (en) | 2022-03-31 | 2022-03-31 | Scanning transmission imaging device in scanning electron microscope |
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| CN114695040A true CN114695040A (en) | 2022-07-01 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115763200A (en) * | 2022-12-09 | 2023-03-07 | 内蒙古工业大学 | Multi-station scanning transmission bright field image imaging device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115763200A (en) * | 2022-12-09 | 2023-03-07 | 内蒙古工业大学 | Multi-station scanning transmission bright field image imaging device |
| CN115763200B (en) * | 2022-12-09 | 2023-11-07 | 内蒙古工业大学 | Multi-station scanning transmission bright field image imaging device |
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