CN115763200B - Multi-station scanning transmission bright field image imaging device - Google Patents
Multi-station scanning transmission bright field image imaging device Download PDFInfo
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- CN115763200B CN115763200B CN202211576341.4A CN202211576341A CN115763200B CN 115763200 B CN115763200 B CN 115763200B CN 202211576341 A CN202211576341 A CN 202211576341A CN 115763200 B CN115763200 B CN 115763200B
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- 238000003384 imaging method Methods 0.000 title claims abstract description 80
- 230000005540 biological transmission Effects 0.000 title claims abstract description 67
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- 238000003825 pressing Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 238000001350 scanning transmission electron microscopy Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
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Abstract
The application discloses a multi-station scanning transmission bright field image imaging device which comprises a sample table, a rotating structure, a base and an imaging structure, wherein the sample table is arranged on the rotating structure; a plurality of sample grooves are formed in the sample table and distributed around the center of the sample table in a circular shape; one end of the rotating structure is fixedly connected with the sample table, and the other end of the rotating structure penetrates through the base and is used for driving the sample table to do circular motion in the horizontal direction; the imaging structure is fixedly arranged on the base, and the transmission port of the imaging structure corresponds to one of the sample grooves and is used for receiving the transmitted electrons passing through the sample groove and forming a bright field image. According to the application, the plurality of sample grooves are formed in the sample table, a plurality of samples can be placed at one time, and the rotating structure and the imaging structure are combined, so that after the bright field image of one sample is collected, the rotating structure is utilized to drive the sample table to rotate to the next sample groove, and the bright field image of the sample in the next sample groove is collected. The imaging device has high bright field image acquisition efficiency and low cost.
Description
Technical Field
The application discloses a multi-station scanning transmission bright field image imaging device, and belongs to the technical field of scanning transmission electron microscopy.
Background
The Scanning Transmission Electron Microscope (STEM) works as follows: and forming an electron beam by using an acceleration voltage of 80-300 kV, scanning the surface of the thin sample by using the converged electron beam, synchronously receiving the transmitted electrons passing through the thin sample by a detector, converting the transmitted electrons into a current signal, and displaying the current signal on a screen to form a scanning transmission image. Depending on the scattering angle of the transmitted electrons, the scanned transmitted image can be classified into a Bright Field (BF) image and a dark field (dark field DF) image, the bright field image corresponding to the transmitted electrons having a smaller scattering angle and the dark field image corresponding to the transmitted electrons having a larger scattering angle.
Because of the higher accelerating voltage of electron beam formed by the scanning transmission electron microscope, the electron beam penetrability is stronger for thin sample materials with softer textures (low atomic number), and the formed scanning transmission bright field image contrast is poorer. To solve the above problems, those skilled in the art generally upgrade and improve the existing scanning electron microscope, and form a scanning transmission bright field image by using the improved scanning electron microscope. The accelerating voltage of a Scanning Electron Microscope (SEM) is far lower than that of a scanning transmission electron microscope (generally 10-30 kV), and a scanning transmission bright field image with better contrast can be obtained by using the scanning electron microscope to observe a sample with low atomic number, so that the internal structure of the sample can be observed more clearly. In addition, the scanning electron microscope can reduce the damage of a thin sample to be observed, is favorable for realizing the observation of a sample with poor electron beam irradiation resistance, and has an irreplaceable effect in the structural analysis of soft materials such as organic polymers, organisms and the like.
In the prior art, there are two main modes of collecting scanning transmission bright field images by using a scanning electron microscope, one is to collect transmission electronic signals with smaller scattering angle by using a special semiconductor detector, and the other is to collect transmission electronic signals reflected by a reflecting plate by using a low-level secondary electron probe of the scanning electron microscope. The first method requires the purchase of special semiconductor detectors, which is costly. While the second method can realize the low-cost manufacture of the scanning transmission bright field image imaging device, the device can not collect secondary electron signals and EDS signals of a sample at the same time, and in addition, the device can be installed only one sample at a time, so that the high-flux collection requirement can not be met, and the collection efficiency is low.
Disclosure of Invention
The application aims to provide a multi-station scanning transmission bright field image imaging device, which solves the technical problems of high upgrading and reconstruction cost, only one sample at a time and low acquisition efficiency when a scanning electron microscope is used for acquiring scanning transmission bright field images in the prior art.
The application provides a multi-station scanning transmission bright field image imaging device which comprises a sample stage, a rotating structure, a base and an imaging structure, wherein the sample stage is arranged on the rotating structure;
the sample platform is provided with a plurality of sample grooves which are distributed around the center of the sample platform in a circular shape;
one end of the rotating structure is fixedly connected with the sample table, and the other end of the rotating structure penetrates through the base and is used for driving the sample table to do circular motion in the horizontal direction;
the imaging structure is fixedly arranged on the base, and a transmission port of the imaging structure corresponds to one of the sample grooves in position and is used for receiving transmission electrons passing through the sample groove and forming a bright field image.
Preferably, the imaging structure comprises a fixing unit, and a reflecting unit and an imaging unit which are fixedly connected with the fixing unit;
the fixing unit is vertically arranged on the base and is fixedly connected with the base;
the imaging unit is parallel to the sample table, a transmission opening formed in the imaging unit corresponds to one of the sample grooves, and the transmission opening is used for transmitting the transmission electrons to the reflecting unit;
the reflecting unit is parallel to the sample stage and is used for reflecting the transmitted electrons to the imaging unit.
Preferably, the fixing unit is a sliding rail;
the sliding rail is fixedly connected with the base;
the sliding rail is provided with a sliding groove, and the extending direction of the sliding groove is perpendicular to the plane of the base;
the reflecting unit and the imaging unit are fixedly connected with the sliding rail through the sliding groove, and the imaging unit is positioned between the reflecting unit and the sample stage.
Preferably, the reflection unit includes a first screw, a support table, and a reflection sheet;
the first screw penetrates through the sliding groove and is fixedly connected with the supporting table;
the supporting table is provided with a containing groove;
the reflector plate is fixedly arranged in the accommodating groove.
Preferably, the reflection unit further includes two second screws;
the two second screws are arranged on two opposite sides of the reflector plate, are inserted into the supporting table, and are connected with the reflector plate through nuts of the second screws, so that the reflector plate is fixed in the accommodating groove.
Preferably, the imaging unit comprises a third screw, a slot and a back-scattering electronic probe;
the third screw penetrates through the sliding groove and is fixedly connected with the slot;
the notch of the slot faces the reflecting unit, a transmission port is formed in the slot, and the transmission port corresponds to one of the sample grooves;
the back scattering electronic probe is arranged in the notch of the slot, and the signal detection surface of the back scattering electronic probe is opposite to the reflecting sheet on the supporting table, and the central hole of the back scattering electronic probe corresponds to the position of the transmission port.
Preferably, the imaging unit further comprises a fourth screw;
the fourth screw penetrates through the side wall of the slot and is in contact with the edge of the back-scattering electronic probe, and the fourth screw is used for fixing the back-scattering electronic probe in the slot.
Preferably, the sample holder further comprises pressing pieces and fifth screws, wherein the number of the pressing pieces and the fifth screws is the same as that of the sample grooves;
the fixed end of the pressing piece is fixedly connected with the sample table through a fifth screw, and the rotating path of the rotating end passes through the sample groove and is used for fixing a sample in the sample groove.
Preferably, the rotating end of the pressing piece is in a ring shape, and the rotating end can be just placed in the sample groove and presses the sample.
Preferably, a plurality of funnel-shaped grooves are formed in one side, close to the imaging structure, of the sample stage;
the position of the funnel-shaped groove corresponds to the position of the sample groove and is connected with the sample groove;
the diameter of the funnel-shaped groove on the lower surface of the sample table is larger than the diameter of the junction of the funnel-shaped groove and the sample groove.
Compared with the prior art, the multi-station scanning transmission bright field image imaging device has the following beneficial effects:
according to the multi-station scanning transmission bright field image imaging device, the plurality of sample grooves are formed in the sample table, a plurality of samples can be placed at one time, the rotating structure and the imaging structure are further combined, after the bright field image of one sample is collected, the rotating structure of the multi-station scanning transmission bright field image imaging device is driven to rotate circumferentially in the horizontal direction by using the sample table rotating device of the scanning electron microscope, the rotating structure rotates to the next sample groove, and the bright field image of the sample in the next sample groove is collected. The imaging device provided by the application has the advantages of high efficiency of collecting bright field images and simplicity and convenience in operation. Furthermore, the application uses the scanning electron microscope to collect signals from the electronic probe with the back scattering function, does not need to purchase a special semiconductor detector, and has lower cost.
Drawings
Fig. 1 to fig. 3 are schematic structural diagrams of a multi-station scanning transmission bright field image imaging device under different viewing angles in an embodiment of the application;
FIG. 4 is a schematic view of a strut according to an embodiment of the present application;
fig. 5 and 6 are schematic structural views of a base at different angles according to an embodiment of the present application;
fig. 7 and 8 are schematic structural views of a sliding rail according to an embodiment of the application;
FIG. 9 is a schematic view of a supporting table according to an embodiment of the present application;
FIG. 10 is a schematic view of a reflector according to an embodiment of the present application;
FIG. 11 is a schematic diagram illustrating a slot structure according to an embodiment of the present application;
FIG. 12 is a schematic diagram of a back-scattered electron probe according to an embodiment of the present application;
FIG. 13 is a schematic view of a structure of a pressing sheet according to an embodiment of the present application;
FIG. 14 is a schematic view showing the structure of the upper surface of the sample stage according to the embodiment of the present application;
FIG. 15 is a schematic view showing the structure of the lower surface of the sample stage according to the embodiment of the present application.
List of parts and reference numerals:
1 is a sample stage; 11 is a sample groove; 12 is a funnel-shaped groove; 2 is a rotary structure; 21 is a pillar; 211 is an upper flange; 212 is a lower flange; 3 is a base; 31 is a supporting boss; 4 is an imaging structure; 41 is a fixed unit; 411 is a slide rail; 412 are runners; 42 is a reflecting unit; 421 is a supporting table; 422 is an accommodating groove; 423 is a reflective sheet; 424 is a first screw; 425 is a second screw; 43 is an imaging unit; 431 is a slot; 432 is a transmission port; 433 is a back-scattering electronic probe; 434 is a central hole; 435 is a third screw; 436 is a fourth screw; 5 is tabletting; 51 is a fixed end; 52 is a rotating end; 53 is a fifth screw.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth such as the particular system architecture, techniques, etc., in order to provide a thorough understanding of the embodiments of the present application. It will be apparent, however, to one skilled in the art that the present application may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present application with unnecessary detail.
As shown in fig. 1 to 3, a multi-station scanning transmission bright field image imaging device according to an embodiment of the present application includes a sample stage 1, a rotating structure 2, a base 3, and an imaging structure 4;
the sample table 1 is provided with a plurality of sample grooves 11, and the plurality of sample grooves 11 are distributed around the center of the sample table 1 in a circular shape; in the embodiment of the present application, the number of the sample grooves 11 can be set according to actual needs, for example, 10, 12, 15, etc.; the plurality of sample grooves 11 may be uniformly distributed or unevenly distributed around the center of the sample stage 1, which is not limited by the present application.
One end of the rotating structure 2 is fixedly connected with the sample table 1, and the other end of the rotating structure penetrates through the base 3 to be connected with a sample table rotating device of the scanning electron microscope, and is used for driving the sample table 1 in the device to do circular motion in the horizontal direction. In the embodiment of the present application, the rotating structure 2 is specifically a stand 21 and a sample stage rotating device of the scanning electron microscope, wherein the stand 21 is shown in fig. 4. The top of pillar has upper flange 211, is equipped with the fixed orifices on the upper flange 211, and correspondingly, sample platform 1's lower surface center department is equipped with the recess that matches with upper flange 211, is equipped with the through-hole that corresponds with the fixed orifices on the sample platform 1, utilizes the fixed screw to pass through-hole and fixed orifices in proper order, can realize the fixed of the relative position between pillar 21 and the sample platform 1. Meanwhile, the bottom end of the support column 21 is provided with a lower flange 212, the lower flange 212 is provided with a positioning hole, the positioning hole is matched with a positioning pin hole of a sample table rotating device of the scanning electron microscope, and a pin penetrates through the positioning hole and the positioning pin hole, so that the positioning of the support column 21 and the sample table rotating device of the scanning electron microscope can be realized. The support column 21 is connected with a rotating device of a scanning electron microscope sample stage, and the support column 21 can be controlled to rotate by adjusting the R axis of the scanning electron microscope sample stage, so that the sample stage 1 of the device is further driven to do circular motion in the horizontal direction.
The imaging structure 4 is fixedly arranged on the base 3, and a transmission port of the imaging structure 4 corresponds to the position of one of the sample grooves 11 and is used for receiving the transmitted electrons passing through the sample groove 11 and forming a bright field image.
According to the multi-station scanning transmission bright field image imaging device, the sample table 1 is provided with the plurality of sample grooves 11, a plurality of samples can be placed at one time, and the rotating structure 2 and the imaging structure 4 are further combined, so that after the bright field image of one sample is acquired, the rotating structure 2 is driven to rotate circumferentially in the horizontal direction by using the sample table rotating device of the scanning electron microscope, and rotates to the next sample groove 11, and the bright field image of the sample in the next sample groove 11 is acquired. The imaging device has high acquisition efficiency and is simple and convenient to operate.
Further, the imaging structure 4 in the embodiment of the present application includes a fixing unit 41, and a reflecting unit 42 and an imaging unit 43 fixedly connected to the fixing unit 41;
the fixing unit 41 is vertically disposed on the base 3 and fixedly connected with the base 3 for fixing a vertical distance between the reflecting unit 42 and the imaging unit 43 and the sample stage 1. The structure of the base 3 in the embodiment of the present application is shown in fig. 5 and 6. The lower surface of the base 3 is provided with a supporting boss 31, the supporting boss 31 is adapted to the base of the scanning electron microscope sample stage, a fixing hole is formed in the supporting boss 31, and a fixing screw can penetrate through the fixing hole to be connected with the base of the scanning electron microscope sample stage, so that the base 3 is fixed on the base of the scanning electron microscope sample stage. The base 3 is connected with the base of the scanning electron microscope sample stage, so that the base can synchronously move along with the X axis, the Y axis and the Z axis of the scanning electron microscope sample stage. Further, the base 3 is further provided with fixing holes for fixing the fixing unit 41 to the base 3 by screws or bolts or the like.
The imaging unit 43 is parallel to the sample table 1, and a transmission opening formed in the imaging unit 43 corresponds to the position of one of the sample grooves 11, and is used for transmitting the transmission electrons to the reflecting unit 42;
the reflecting unit 42 is parallel to the sample stage 1 for reflecting the transmitted electrons to the imaging unit 43.
The application is provided with the reflecting unit 42 and the imaging unit 43, thereby not only reducing the cost of upgrading the scanning transmission bright field image imaging function of the scanning electron microscope, but also simultaneously collecting secondary electron signals and EDS signals and realizing the synchronous acquisition function of various signals.
The fixing unit 41 in the embodiment of the present application may be a fixing unit with a plurality of interfaces or a sliding rail 411. Because the slide rail 411 is convenient to operate, the embodiment of the present application preferably uses the slide rail 411 as the fixing unit 41, and the structure of the slide rail 411 is as shown in fig. 7 and 8.
Wherein the slide rail 411 is fixedly connected with the base 3 through a fixing hole arranged at the bottom of the slide rail;
the slide rail 411 is provided with a slide groove 412, and the extending direction of the slide groove 412 is perpendicular to the plane of the base 3;
the reflecting unit 42 and the imaging unit 43 are fixedly connected with the slide rail 411 through the slide groove 412, the imaging unit 43 is positioned between the reflecting unit 42 and the sample table 1, and the relative positions of the imaging unit 43 and the reflecting unit 42 on the slide rail 411 are adjustable.
The reflecting unit 42 in the embodiment of the application includes a first screw 424, a supporting table 421 and a reflecting piece 423;
the first screw 424 passes through the sliding groove 412 and is fixedly connected with the supporting table 421, and the relative position between the sliding rail 411 and the supporting table 421 is fixed by screwing the first screw 424;
the supporting table 421 is provided with a receiving groove 422, the structure of which is shown in fig. 9.
The reflective sheet 423 is fixedly disposed in the accommodating groove 422, wherein the reflective sheet 423 may be a platinum sheet, and a reflective surface thereof is polished. The structure of the reflecting sheet 423 is shown in fig. 10.
In the embodiment of the present application, the reflective sheet 423 is fixed in the accommodating groove 422 by the second screw 425, specifically: two second screws 425 are provided on opposite sides of the reflecting sheet 423, the two second screws 425 are connected to the supporting table 421, nuts of the second screws 425 are connected to the reflecting sheet 423, and the two second screws 425 are used for fixing the reflecting sheet 423 in the accommodating groove 422.
The imaging unit 43 of the embodiment of the present application includes a third screw 435, a slot 431 and a back-scattering electronic probe 433;
the third screw 435 penetrates through the sliding groove 412 and is fixedly connected with the slot 431, and the relative position between the sliding rail 411 and the slot 431 is fixed by screwing the third screw 435;
the notch of the slot 431 faces the reflecting unit 42, the slot 431 is provided with a transmission opening 432, and the transmission opening 432 corresponds to the position of one of the sample grooves 11; wherein the structure of the slot 431 is shown in fig. 11.
The back-scattering electronic probe 433 is disposed in the notch of the slot 431, and the signal detection surface of the back-scattering electronic probe 433 is opposite to the reflecting sheet 423 on the supporting table 421, and the central hole 434 of the back-scattering electronic probe 433 corresponds to the position of the transmitting port 432. The structure of the backscatter electron probe 433 is shown in fig. 12. In order to avoid damaging the back-scattering electronic probe 433 during the assembly and disassembly process, the slot in the embodiment of the application is made of plastic.
Further, the imaging unit 43 further includes a fourth screw 436;
a fourth screw 436 passes through a side wall of the slot 431 and contacts an edge of the back-scatter electron probe 433 for fixing the back-scatter electron probe 433 in the slot 431.
The multi-station scanning transmission bright field image imaging device uses the platinum sheet reflection transmission electrons and the scanning electron microscope to collect reflection electron signals from the back scattering electron probe 433, thereby not only reducing the cost of upgrading the scanning transmission bright field image imaging function of the scanning electron microscope, but also simultaneously collecting secondary electron signals and EDS signals and realizing the synchronous acquisition function of various signals.
In order to avoid displacement or falling off of the sample in the test process, the sample stage of the application is also provided with the same number of pressing sheets 5 and fifth screws 53 as the sample grooves 11;
the fixed end 51 of the pressing piece 5 is fixedly connected with the sample table 1 through a fifth screw 53, and the rotating path of the rotating end 52 passes through the sample groove 11 and is used for fixing the sample in the sample groove 11.
In order to avoid the influence of the tablet 5 on the acquisition of secondary electron signals and EDS signals, the rotating end of the tablet 5 in the embodiment of the present application is in a ring shape, and the rotating end can be just placed in the sample groove 11 and presses the sample. The inner diameter of the tabletting 5 is larger and the thickness is smaller, so that the observation field of view can be enlarged, and the collection of secondary electron signals and EDS signals can not be influenced, wherein the structure of the tabletting 5 is shown in fig. 13.
In the embodiment of the application, in order to ensure the long-term rotation and compression of the pressing sheet 5 and the reduction and deformation of the service life, the pressing sheet 5 is made of beryllium copper, and the beryllium copper has the advantages of high strength, elasticity, hardness, small elastic hysteresis, corrosion resistance, wear resistance, cold resistance, high conductivity, no magnetism and the like.
In order to avoid that the edge of the sample groove 11 affects the emission of the transmission electrons, a plurality of funnel-shaped grooves 12 are arranged on one side of the sample table 1, which is close to the imaging structure 4, in the embodiment of the application;
the position of the funnel-shaped groove 12 corresponds to the position of the sample groove 11 and is connected with the sample groove 11;
the diameter of the funnel-shaped groove 12 on the lower surface of the sample stage 1 is larger than the diameter of the funnel-shaped groove 12 where it meets the sample recess 11. The upper surface of the sample stage 1 in the embodiment of the present application is shown in fig. 14. The lower surface of the sample stage 1 with the funnel 12 is shown in fig. 15.
In order to prolong the service life of the device and reduce the weight of the device applied to the self-carried sample stage of the scanning electron microscope, the sample stage 1, the support column 21, the base 3, the sliding rail 411 and the support stage 421 are made of aluminum alloy in the embodiment of the application.
The following will take FEIQuanta650FEG scanning electron microscope as an example, to describe the usage method of the device of the present application:
(1) The slide rail 411 is fixed on the base 3 by using a fixing screw, so that the slide rail 411 is outward.
(2) The reflecting piece 423 is mounted in the receiving groove 422 of the supporting table 421 and fixed by a second screw 425.
(3) The assembled supporting table 421 is mounted on the lower end of the slide rail 411 such that one side of the reflecting piece 423 is upward.
(4) The slot 431 is mounted on the upper end of the sliding rail 411, so that the notch of the slot 431 is downward and is opposite to the reflecting piece 423 on the supporting table 421.
(5) The scanning electron microscope sample chamber is opened, the sample platform fixing disc and the supporting platform of the scanning electron microscope are taken down, the base 3 assembled by the steps is arranged on the sample platform base of the scanning electron microscope, the supporting boss on the base is aligned with the threaded hole on the base, the supporting boss is fixed on the base by screws, and one side of the installation sliding rail 411 and the signal processing unit of the back scattering electron probe 433 are located on the same side of the sample chamber.
(6) The back-scattering electronic probe 433 is inserted into the slot 431 such that the signal detection surface of the back-scattering electronic probe 433 is opposite to the reflecting sheet 423 on the supporting table 421, the central hole 434 of the back-scattering electronic probe 433 is aligned with the transmission opening 432 of the slot 431, the signal line of the back-scattering electronic probe 433 passes through the wire slot in the slide rail 411, and the back-scattering electronic probe 433 is fixed by the fourth screws 436 on both sides of the slot 431.
(7) The support column 21 is fixed on a rotating device of an original sample stage of the scanning electron microscope, so that a positioning hole is aligned with a positioning hole on the rotating device, and positioning is performed by using a positioning pin.
(8) A 3mm phi sample was placed in the sample recess 11 of the sample stage 1 and held in place in the sample recess 11 by the press sheet 5.
(9) The sample stage 1 with the sample mounted thereon is mounted on the support column 21, and the lower end groove of the sample stage 1 is fitted with the upper flange 211 of the support column 21 and is fixed by screws.
(10) After the distance between the reflecting sheet 423 and the upper surface of the sample stage 1 and the distance between the signal detecting surface of the back-scattering electronic probe 433 and the reflecting sheet 423 are respectively measured and the distances between the three are adjusted, the supporting stage 421 and the slot 431 are respectively fixed by the first screw 424 and the third screw 435 in the chute 412, and in this embodiment, the distance between the reflecting sheet 423 and the upper surface of the sample stage 1 is 22mm, and the distance between the signal detecting surface of the back-scattering electronic probe 433 and the reflecting sheet 423 is 14mm.
(11) And closing the scanning electron microscope sample chamber, vacuumizing the sample chamber, and observing, wherein in the observation process, the sample replacement can be realized by rotating the R axis of the scanning electron microscope sample table.
(12) After the test is finished, deflating the scanning electron microscope sample chamber, and opening the sample chamber to replace the sample or take down the scanning transmission bright field image imaging device.
According to the multi-station scanning transmission bright field image imaging device, a plurality of samples can be installed at one time, the samples can be replaced by rotating the R axis of the scanning electron microscope sample table, and the collection efficiency of bright field images is greatly improved. The multi-station scanning transmission bright field image imaging device uses the platinum sheet reflection transmission electrons and the scanning electron microscope to collect reflection electron signals from the back scattering electron probe 433, thereby not only reducing the cost of upgrading the scanning transmission bright field image imaging function of the scanning electron microscope, but also simultaneously collecting secondary electron signals and EDS signals and realizing the synchronous acquisition function of various signals.
The slot 431 and the supporting table 421 can move up and down, and the distance among the sample, the back scattering electronic probe 433 and the reflecting sheet 423 can be adjusted by moving the slot 431 and the supporting table 421, so that a clearer and more real scanning transmission bright field image can be obtained.
The tablet on the sample stage 1 has larger inner diameter and smaller thickness, not only can expand the observation field of view, but also can not influence the collection of secondary electron signals and EDS signals.
The signal detector (the reflecting sheet 423 and the back scattering electronic probe 433) is connected with the base of the scanning electron microscope sample stage through the base 3, so that the signal line damage or touch caused by the rotation of the R axis can not occur, and the potential safety hazard in the test process can be avoided.
While the application has been described in terms of preferred embodiments, it will be understood by those skilled in the art that various changes and modifications can be made without departing from the scope of the application, and it is intended that the application is not limited to the specific embodiments disclosed.
Claims (9)
1. The multi-station scanning transmission bright field image imaging device is characterized by comprising a sample table, a rotating structure, a base and an imaging structure;
the sample platform is provided with a plurality of sample grooves which are distributed around the center of the sample platform in a circular shape;
one end of the rotating structure is fixedly connected with the sample table, and the other end of the rotating structure penetrates through the base and is used for driving the sample table to do circular motion in the horizontal direction;
the imaging structure comprises a fixing unit, a reflecting unit and an imaging unit, wherein the reflecting unit and the imaging unit are fixedly connected with the fixing unit; the fixing unit is vertically arranged on the base and is fixedly connected with the base;
the imaging unit is parallel to the sample table, a transmission opening formed in the imaging unit corresponds to one of the sample grooves, and the transmission opening is used for receiving transmission electrons passing through the sample grooves and transmitting the transmission electrons to the reflecting unit;
the reflecting unit is parallel to the sample stage and is used for reflecting the transmitted electrons to the imaging unit.
2. The multi-station scanning transmission bright field image imaging device of claim 1, wherein the fixed unit is a slide rail;
the sliding rail is fixedly connected with the base;
the sliding rail is provided with a sliding groove, and the extending direction of the sliding groove is perpendicular to the plane of the base;
the reflecting unit and the imaging unit are fixedly connected with the sliding rail through the sliding groove, and the imaging unit is positioned between the reflecting unit and the sample stage.
3. The multi-station scanning transmission bright field image imaging apparatus according to claim 2, wherein the reflecting unit comprises a first screw, a supporting table and a reflecting sheet;
the first screw penetrates through the sliding groove and is fixedly connected with the supporting table;
the supporting table is provided with a containing groove;
the reflector plate is fixedly arranged in the accommodating groove.
4. The multi-station scanning transmission bright field image forming apparatus according to claim 3, wherein the reflecting unit further comprises two second screws;
the two second screws are arranged on two opposite sides of the reflector plate, are inserted into the supporting table, and are connected with the reflector plate through nuts of the second screws, so that the reflector plate is fixed in the accommodating groove.
5. The multi-station scanning transmission bright field image imaging device of claim 2, wherein the imaging unit comprises a third screw, a slot, and a back-scattering electronic probe;
the third screw penetrates through the sliding groove and is fixedly connected with the slot;
the notch of the slot faces the reflecting unit, a transmission port is formed in the slot, and the transmission port corresponds to one of the sample grooves;
the back scattering electronic probe is arranged in the notch of the slot, and the signal detection surface of the back scattering electronic probe is opposite to the reflecting sheet on the supporting table, and the central hole of the back scattering electronic probe corresponds to the position of the transmission port.
6. The multi-station scanning transmission bright field image imaging device of claim 5, wherein said imaging unit further comprises a fourth screw;
the fourth screw penetrates through the side wall of the slot and is in contact with the edge of the back-scattering electronic probe, and the fourth screw is used for fixing the back-scattering electronic probe in the slot.
7. The multi-station scanning transmission bright field image imaging device of claim 1, further comprising a fifth screw and a pressing plate in the same number as the sample grooves;
the fixed end of the pressing piece is fixedly connected with the sample table through a fifth screw, and the rotating path of the rotating end passes through the sample groove and is used for fixing a sample in the sample groove.
8. The multi-station scanning transmission bright field image imaging device of claim 7, wherein the rotating end of the sheeting is annular.
9. The multi-station scanning transmission bright field image imaging device according to claim 1, wherein a plurality of funnel-shaped grooves are arranged on one side of the sample stage close to the imaging structure;
the position of the funnel-shaped groove corresponds to the position of the sample groove and is connected with the sample groove;
the diameter of the funnel-shaped groove on the lower surface of the sample table is larger than the diameter of the junction of the funnel-shaped groove and the sample groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211576341.4A CN115763200B (en) | 2022-12-09 | 2022-12-09 | Multi-station scanning transmission bright field image imaging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211576341.4A CN115763200B (en) | 2022-12-09 | 2022-12-09 | Multi-station scanning transmission bright field image imaging device |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104148292A (en) * | 2014-06-30 | 2014-11-19 | 天津大学 | Multi-station rotary working table for automatically measuring image |
| CN114695040A (en) * | 2022-03-31 | 2022-07-01 | 内蒙古工业大学 | Scanning transmission imaging device in scanning electron microscope |
| CN114975049A (en) * | 2022-07-04 | 2022-08-30 | 厦门超新芯科技有限公司 | Multifunctional multi-station sample table for in-situ detection chip of scanning electron microscope |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104148292A (en) * | 2014-06-30 | 2014-11-19 | 天津大学 | Multi-station rotary working table for automatically measuring image |
| CN114695040A (en) * | 2022-03-31 | 2022-07-01 | 内蒙古工业大学 | Scanning transmission imaging device in scanning electron microscope |
| CN114975049A (en) * | 2022-07-04 | 2022-08-30 | 厦门超新芯科技有限公司 | Multifunctional multi-station sample table for in-situ detection chip of scanning electron microscope |
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