CN113436953A - Faraday cup for measuring scanning electron microscope electron beam current - Google Patents
Faraday cup for measuring scanning electron microscope electron beam current Download PDFInfo
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- CN113436953A CN113436953A CN202110689569.3A CN202110689569A CN113436953A CN 113436953 A CN113436953 A CN 113436953A CN 202110689569 A CN202110689569 A CN 202110689569A CN 113436953 A CN113436953 A CN 113436953A
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- faraday cup
- faraday
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/263—Contrast, resolution or power of penetration
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24405—Faraday cages
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2801—Details
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Radiation (AREA)
Abstract
The invention provides a Faraday cup for measuring electron beam current of a scanning electron microscope, which can accurately measure the intensity of incident electron beam current of the scanning electron microscope and has simple structure and convenient operation. It includes: the cup cover comprises an entry hole penetrating in the thickness direction; the cup body comprises an inwards concave blind hole inwards concave in the thickness direction; the insulating bottom support is used for isolating the sample table and the cup body; the cup cover is covered on the upper surface of the cup body, and the penetration hole is arranged towards the concave blind hole; the cup also comprises an insulated wire, wherein one end of an inner-layer metal core of the insulated wire is connected with the cup body, and the other end of the inner-layer metal core of the insulated wire is used for connecting a high-precision current measuring device; the cup cover and the cup body are made of conductor materials, and the insulating bottom support is made of insulating materials.
Description
Technical Field
The invention relates to the technical field of scanning electron microscopes, in particular to a Faraday cup for measuring electron beam current of a scanning electron microscope.
Background
The scanning electron microscope has wide application in the fields of material science, metallurgy, biomedicine, geological exploration and the like, wherein one of indexes representing the working performance of the scanning electron microscope is the current of an electron beam, and because the intensity of the electron beam is linearly related to the intensity of the electron beam, the intensity of the electron beam directly influences the final imaging resolution. Therefore, it is necessary to achieve high-precision measurement of the magnitude of the beam current. The accurate measurement of the current intensity of the incident electrons of the scanning electron microscope needs to solve the following problems: 1. there is a need for a collection device, i.e., a faraday cup or faraday cage, that can collect incident electrons; 2. an instrument which can record the electrons collected by the Faraday cup and realize quantification through the current magnitude, namely a high-sensitivity ammeter or an integrated beam current testing hardware system; 3. after the incident electrons bombard the inner wall of the faraday cup, a large amount of secondary electrons, backscattered electrons, auger electrons, etc. are generated, and the electrons also need to be collected to prevent escaping, which affects the measurement of the current intensity. 4. The faraday cup needs to be insulated from the sample stage so that current generated by incident electrons is prevented from flowing out through the sample stage.
Besides the design of the inner wall structure of the Faraday cup, a large amount of secondary electrons, backscattered electrons, Auger electrons and other electronic signals generated by the bombardment of incident electrons escape from the incident hole as little as possible, and special materials such as high-conductivity graphite can be used for reducing the number of electrons generated by the bombardment of the incident electrons and improving the signal collection efficiency. Current commercial faraday cups, while simple in construction, require additional test system integration and are expensive and testing efficiency is still not optimal. Therefore, a new faraday cup with low cost, simple structure, convenient processing, easy integration and high testing efficiency needs to be designed for accurately measuring the electron beam current of the scanning electron microscope and improving the resolution of the electron microscope.
Disclosure of Invention
Aiming at the problems, the invention provides the Faraday cup for measuring the electron beam current of the scanning electron microscope, which can accurately measure the incident electron beam current intensity of the scanning electron microscope, and has the advantages of simple structure and convenient operation.
The utility model provides a measurement scanning electron microscope electron beam current's Faraday cup which characterized in that, it includes:
the cup cover comprises an entry hole penetrating in the thickness direction;
the cup body comprises an inwards concave blind hole inwards concave in the thickness direction;
the insulating bottom support is used for isolating the sample table and the cup body;
the cup cover is covered on the upper surface of the cup body, and the penetration hole is arranged towards the concave blind hole;
the cup also comprises an insulated wire, wherein one end of an inner-layer metal core of the insulated wire is connected with the cup body, and the other end of the inner-layer metal core of the insulated wire is used for connecting a high-precision current measuring device;
the cup cover and the cup body are made of conductor materials, and the insulating bottom support is made of insulating materials.
It is further characterized in that:
the cup cover is a first cylinder with a first thickness, the cup body is a second cylinder with a second thickness, the second thickness is larger than the first thickness, and the diameter of the first cylinder is equal to that of the second cylinder;
the cup cover and the cup body are both made of brass, and the insulating bottom support is made of an ECTFE resin material;
the cup body is characterized by also comprising a graphite cylinder, wherein the graphite cylinder is inserted into the concave blind hole, the upper surface of the graphite cylinder is an inclined plane, and a space is reserved between the upper surface of the graphite cylinder and the upper plane of the cup body;
a reserved ejection hole is formed in the bottom of the cup body, the upper portion of the reserved ejection hole is communicated to the recessed blind hole, and the reserved ejection hole is used for ejecting the graphite cylinder out of the recessed blind hole, so that assembling and disassembling operations are facilitated;
the incidence hole comprises an upper micropore and a lower conical opening in the thickness direction, the top of the conical opening is communicated with the micropore, the diameter of the lower part of the conical opening is the same as that of the concave blind hole, and after the cup cover is covered on the cup body, the conical opening is arranged right above the concave blind hole;
a guide hole is formed in the lower portion of the cup cover in the thickness direction and corresponds to the bottom area of the conical opening, and the diameter of the guide hole is the same as that of the concave blind hole;
the outer ring wall of the graphite cylinder is tightly attached to the inner wall of the concave blind hole, so that electrons cannot be separated from the whole inner cavity from the outer ring wall of the graphite cylinder;
the insulation bottom support comprises a supporting tray and supporting legs, the lower central area of the supporting tray is provided with downward convex supporting legs, the center of the upper surface of the supporting tray is internally concave to form a cylindrical groove, the cup body is embedded in the cylindrical groove, and the outer wall of the cup body is arranged by being attached to the inner annular wall of the cylindrical groove, so that stable and reliable assembly is ensured;
under the working state, the inclined plane of the upper surface of the graphite cylinder faces the position where the inner-layer metal core is connected with the cup body.
After adopting above-mentioned technical scheme, the bowl cover lid is adorned in the cup, and the cup is connected to the inlayer metal core one end of insulated conductor, the other end of the inlayer metal core of insulated conductor is used for connecting high accuracy survey electric current device, the cup supports on the insulating collet, locate insulating collet on scanning electron microscope's sample platform, evacuation afterwards, later open the electron gun, set up corresponding accelerating voltage, all inject the signal of electron gun in the indent blind hole through the incident hole, survey the electron beam that electric current device directly read under the current condensing lens current value through the high accuracy, it can accurate measurement scanning electron microscope incident electron beam intensity, and its structure only includes the bowl cover, the cup, insulating collet and an insulated conductor, moreover, the steam generator is simple in structure, and convenient operation.
Drawings
FIG. 1 is a schematic perspective view of an embodiment of the present invention (not shown with insulated wires);
FIG. 2 is an exploded perspective view of an embodiment of the present invention (insulated conductor not shown);
FIG. 3 is a schematic cross-sectional perspective view of an embodiment of the present invention (with insulated wires);
FIG. 4 is an enlarged, semi-sectional, schematic view of a perspective view of the lid of the present invention;
FIG. 5 is a graph comparing measured data for a Faraday cup and an inlet Faraday cup of one embodiment of the present invention;
FIG. 6 is a graph comparing measured data for a second measurement example using a Faraday cup of the present invention with measured data for an inlet Faraday cup;
the names corresponding to the sequence numbers in the figure are as follows:
the cup cover comprises a cup cover 10, micropores 11, a tapered opening 12, a positioning through hole 13, a guide hole 14, a notch 15, a cup body 20, an inward concave blind hole 21, a threaded hole 22, a reserved ejecting hole 23, an insulating bottom support 30, a supporting tray 31, a supporting foot 32, a cylindrical groove 33, an insulating lead 40, an inner-layer metal core 41, a graphite column 50, an upper surface 51, a bolt 60 and a cavity 70.
Detailed Description
A Faraday cup for measuring electron beam current of a scanning electron microscope is shown in figures 1-4: the cup cover 10 comprises an incidence hole penetrating in the thickness direction, and the incidence hole comprises an upper micropore 11 and a lower conical opening 12; the cup body 20 comprises an inward concave blind hole 21 which is inward concave in the thickness direction;
an insulating bottom support 30 for isolating the sample stage from the cup body 20;
the cup cover 10 is covered on the upper surface of the cup body 20, and the incident hole is arranged towards the concave blind hole 21;
the top of the conical opening 12 is communicated with the micropores 11, the diameter of the lower part of the conical opening 12 is the same as that of the concave blind hole 21, and after the cup cover 10 is covered on the cup body 20, the conical opening 12 is arranged right above the concave blind hole 21;
one end of an inner layer metal core 41 of the insulated wire 40 is welded with the cup body 20, and the other end of the inner layer metal core 41 of the insulated wire 40 is used for connecting a high-precision current measuring device; in specific implementation, the high-precision current measuring device is a high-sensitivity ammeter or an integrated beam current testing hardware system.
The cup cover 10 and the cup body 20 are both made of brass, and the insulating bottom support 30 is made of ECTFE resin.
Specific examples, see fig. 1-4: the cup cover 10 is a first cylinder with a first thickness, the cup body 20 is a second cylinder with a second thickness, the second thickness is larger than the first thickness, and the diameter of the first cylinder is equal to that of the second cylinder; the aperture of the upper micro-hole 11 is 100-200 μm, and the flaring angle of the lower conical mouth 12 is 45 degrees.
Four positioning through holes 13 are annularly distributed on the cup cover 10, four threaded holes 22 are correspondingly annularly distributed on the upper surface of the cup body 20, and the bolts 60 penetrate through the positioning through holes 13 and then are fixedly connected into the corresponding threaded holes 22, so that the cup cover 10 and the cup body 20 are quickly positioned and assembled and are convenient to disassemble; and a notch 15 is arranged on the side part of one positioning through hole 13 and the threaded hole 22, the notch 15 is used for auxiliary positioning of the inner layer metal core 41 of the insulated conductor 40, and then the inner layer metal core 41 is welded and connected with the corresponding position of the cup body 20.
In the specific embodiment, the cup further comprises a graphite column 50, the graphite column 50 is inserted into the recessed blind hole 21, the upper surface 51 of the graphite column 50 is an inclined surface, the inclination of the inclined surface is specifically 10-60 degrees from the bottom surface of the graphite column, and a space is left between the upper surface 51 of the graphite column 50 and the upper plane of the cup body 20 to form a cavity 70 for capturing electrons;
the bottom of the cup body 20 is provided with a reserved ejecting hole 23, the upper portion of the reserved ejecting hole 23 is communicated to the recessed blind hole 21, and the reserved ejecting hole 23 is used for ejecting the graphite cylinder 50 out of the recessed blind hole 21, so that the assembly and disassembly operations are convenient.
In specific implementation, a guide hole 14 is formed in the lower part of the cup cover 10 in the thickness direction and corresponds to the bottom area of the conical opening 12, and the diameter of the guide hole 14 is the same as that of the concave blind hole 21;
the outer annular wall of the graphite cylinder 50 is tightly attached to the inner wall of the concave blind hole 21, so that electrons cannot be separated from the whole inner cavity from the outer annular wall of the graphite cylinder 50; the number of electrons generated by the bombardment of incident electrons of the material is reduced through the high-conductivity graphite, and the signal collection efficiency is improved.
The insulating support 30 comprises a support tray 31 and support legs 32, wherein a lower central area of the support tray 31 is provided with a lower convex support leg 32, a cylindrical groove 33 is formed in the center of the upper surface of the support tray 31 in a concave manner, in the specific implementation, the diameter of the lower convex support leg 32 is 3.18mm, the diameter of the cylindrical groove 33 is 12.7mm, the cup body 20 is embedded in the cylindrical groove 33, and the outer wall of the cup body 20 is arranged in a manner of being attached to the inner annular wall of the cylindrical groove 33, so that the stable and reliable assembly is ensured;
in the operating state, the slope of the upper surface 51 of the graphite cylinder 50 is arranged toward the position where the inner metal core 41 is coupled to the cup 20, so that more accurate measurement results can be received.
The working principle is as follows: the bowl cover lid is adorned in the cup, and the cup is connected to insulated conductor's inlayer metal core one end, the other end of the inlayer metal core of insulated conductor is used for connecting high accuracy survey current device, the cup supports on insulated collet, it is located scanning electron microscope's sample platform with insulated collet, evacuation afterwards, later open the electron gun, set up corresponding accelerating voltage, all penetrate the indent blind hole through the micropore with the signal of electron gun, survey the electron beam that current device directly read under the current condenser current value through the high accuracy, it can the incident electron beam intensity of accurate measurement scanning electron microscope, and its structure only includes the bowl cover, the cup, insulated collet and an insulated conductor, a structure is simple, and convenient for operation.
Measurement embodiment one
After the Faraday cup is assembled, an insulated wire is welded on the surface of the Faraday cup and is connected with an aviation plug on a flange on the side of a scanning electron microscope, the wire is led out from the other end of the flange and is connected with a high-sensitivity ammeter or an integrated beam current testing hardware system, and the tail end of the Faraday cup is grounded to form a closed loop. Before the test is started, the Faraday cup is placed on a sample stage of a scanning electron microscope, and then the Faraday cup is vacuumized until the vacuum is up to 10-3After Pa, the electron gun was turned on and the acceleration voltage was set to 10 kV. Then, finding out micropores on the surface under low power, adjusting the amplification factor until all signals of the electron gun fall into the micropores, absorbing the signals by the Faraday cup and a graphite cylinder below the Faraday cup, and directly reading the electron beam under the current value (Spot Size) of the current condenser lens on a high-sensitivity ammeter or an integrated beam testing hardware system. By recording the electron beam current under different condenser current values, the change trend of the electron beam current along with the condenser current value can be drawn, so that the Faraday cup and the import method can be comparedTest efficiency of the drawn cup (Tadapler, 100 μm hole) and the effect of graphite cylinders of different inclination angles. As shown in fig. 5, the electron beam current has the same trend with Spot Size at an acceleration voltage of 10kV, and the faraday cup test efficiency with a 10 ° graphite cylinder on the upper surface is much higher than that of the imported faraday cup.
Measurement example two
After the Faraday cup is assembled, an insulated wire is welded on the surface of the Faraday cup and is connected with an aviation plug on a flange on the side of a scanning electron microscope, the wire is led out from the other end of the flange and is connected with a high-sensitivity ammeter or an integrated beam current testing hardware system, and the tail end of the Faraday cup is grounded to form a closed loop. Before the test is started, the Faraday cup is placed on a sample stage of a scanning electron microscope, and then the Faraday cup is vacuumized until the vacuum is up to 10-3After Pa, the electron gun was turned on and the acceleration voltage was set to 15 kV. Then, finding out micropores on the surface under low power, adjusting the amplification factor until all signals of the electron gun fall into the micropores, absorbing the signals by the Faraday cup and a graphite cylinder below the Faraday cup, and directly reading the electron beam under the current value (Spot Size) of the current condenser lens on a high-sensitivity ammeter or an integrated beam testing hardware system. By recording the electron beam current under different condenser current values, the change trend of the electron beam current along with the condenser current value can be drawn, so that the test efficiency of the Faraday cup and an inlet Faraday cup (Tadapler, 100 mu m hole) can be compared, and the influence of graphite cylinders with different inclination angles can be compared. As shown in fig. 6, the electron beam current has the same trend with Spot Size at 15kV acceleration voltage, and all self-grinding faraday cups have much higher test efficiency than the inlet faraday cup, and the faraday cup with 10 ° graphite cylinder on the upper surface has the highest test efficiency.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. The utility model provides a measurement scanning electron microscope electron beam current's Faraday cup which characterized in that, it includes:
the cup cover comprises an entry hole penetrating in the thickness direction;
the cup body comprises an inwards concave blind hole inwards concave in the thickness direction;
the insulating bottom support is used for isolating the sample table and the cup body;
the cup cover is covered on the upper surface of the cup body, and the penetration hole is arranged towards the concave blind hole;
the cup also comprises an insulated wire, wherein one end of an inner-layer metal core of the insulated wire is connected with the cup body, and the other end of the inner-layer metal core of the insulated wire is used for connecting a high-precision current measuring device;
the cup cover and the cup body are made of conductor materials, and the insulating bottom support is made of insulating materials.
2. The faraday cup of claim 1, wherein: the cup cover is a first cylinder with a first thickness, the cup body is a second cylinder with a second thickness, the second thickness is larger than the first thickness, and the diameter of the first cylinder is equal to that of the second cylinder.
3. The faraday cup of claim 1, wherein: the cup cover and the cup body are made of brass, and the insulating bottom support is made of ECTFE resin.
4. The faraday cup of claim 1, wherein: the cup body is characterized by further comprising a graphite column body, the graphite column body is inserted into the concave blind hole, the upper surface of the graphite column body is an inclined plane, and a space is reserved between the upper surface of the graphite column body and the upper plane of the cup body.
5. The Faraday cup of claim 4, wherein the Faraday cup is used for measuring electron beam current of a scanning electron microscope, and comprises: and a reserved ejection hole is formed in the bottom of the cup body, the upper part of the reserved ejection hole is communicated to the recessed blind hole, and the reserved ejection hole is used for ejecting the graphite cylinder out of the recessed blind hole.
6. The faraday cup of claim 1, wherein: the cup cover is covered on the cup body, and the cone opening is arranged right above the concave blind hole.
7. The Faraday cup of claim 6, wherein the Faraday cup is used for measuring electron beam current of a scanning electron microscope, and comprises: the lower portion of the cup cover in the thickness direction is provided with a guide hole corresponding to the bottom area of the conical opening, and the diameter of the guide hole is the same as that of the concave blind hole.
8. The Faraday cup of claim 4, wherein the Faraday cup is used for measuring electron beam current of a scanning electron microscope, and comprises: the outer ring wall of the graphite cylinder is tightly attached to the inner wall of the concave blind hole.
9. The faraday cup of claim 1, wherein: the insulation bottom support comprises a supporting tray and supporting legs, wherein the lower central area of the supporting tray is provided with the lower convex supporting legs, the center of the upper surface of the supporting tray is internally concave to form a cylindrical groove, the cup body is embedded in the cylindrical groove, and the outer wall of the cup body is attached to the inner annular wall of the cylindrical groove.
10. The Faraday cup of claim 4, wherein the Faraday cup is used for measuring electron beam current of a scanning electron microscope, and comprises: the inclined plane of the upper surface of the graphite cylinder faces the position where the inner-layer metal core is connected with the cup body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110689569.3A CN113436953A (en) | 2021-06-22 | 2021-06-22 | Faraday cup for measuring scanning electron microscope electron beam current |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110689569.3A CN113436953A (en) | 2021-06-22 | 2021-06-22 | Faraday cup for measuring scanning electron microscope electron beam current |
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| CN113436953A true CN113436953A (en) | 2021-09-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110689569.3A Pending CN113436953A (en) | 2021-06-22 | 2021-06-22 | Faraday cup for measuring scanning electron microscope electron beam current |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111722263A (en) * | 2020-06-15 | 2020-09-29 | 电子科技大学 | Faraday cup design for high-power electron beam spot measurement |
-
2021
- 2021-06-22 CN CN202110689569.3A patent/CN113436953A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111722263A (en) * | 2020-06-15 | 2020-09-29 | 电子科技大学 | Faraday cup design for high-power electron beam spot measurement |
| CN111722263B (en) * | 2020-06-15 | 2022-08-23 | 电子科技大学 | Faraday cup design for high-power electron beam spot measurement |
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