CN202066807U - Electron collector being suitable for intelligently testing secondary electron emission coefficient of solid material - Google Patents
Electron collector being suitable for intelligently testing secondary electron emission coefficient of solid material Download PDFInfo
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- CN202066807U CN202066807U CN2011201562883U CN201120156288U CN202066807U CN 202066807 U CN202066807 U CN 202066807U CN 2011201562883 U CN2011201562883 U CN 2011201562883U CN 201120156288 U CN201120156288 U CN 201120156288U CN 202066807 U CN202066807 U CN 202066807U
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Abstract
The utility model relates to an electronic collector being suitable for intelligently testing a secondary electronic emission coefficient of a solid material, which comprises a primary electronic collector, a secondary electronic collector, a primary preposing amplifier, a secondary preposing amplifier, a target table and an insulation rotating shaft, wherein the primary preposing amplifer and the secondary preposing amplifier are respectively connected with the primary electronic connector and the secondary electronic collector; the upper surface of the target table is provided with a stainless steel clamp, and the lower surface of the target table is fixedly connected with the insulation rotating shaft; the insulation rotating shaft is arranged above the primary electronic collector and is vertical to the axis of the primary electronic collector; and the secondary electronic collector is a semispherical metal shell with a small hole, the semispherical metal shell is arranged above the insulation rotating shaft, and the axis of the small hole is overlapped with the axis of the primary electronic collector. Due to the adoption of the electron collector, the primary electron and the secondary electron can be completely collected, so the output signal is more precise and is more approached to the real data of the secondary electron emission. The electron collector is a necessary constitutional part of the secondary electron emission coefficient intelligent test device of the solid material.
Description
Technical field
The present invention relates to solid material secondary electron emissions characteristic test technical field, particularly be applicable to the electron collector of solid material secondary electron yield intelligence test.
Background technology
So-called secondary (Secondary Electron Emission) when just being meant electronics (or ion) the bombardment body surface with certain energy or speed, can cause the phenomenon that electronics emits from this body surface.Quantitatively can be from the secondary electron of sample surfaces emission greater or less than primary electron, on energy, also present certain distribution, elastic scattering electrons comprising primary electron, inelastic scattering electronics, true secondary electron, Auger electron etc., sometimes also have other complicated phenomenon to follow the secondary process, as radiation X ray, produce fluorescence etc.
The ability of solid material secondary characterizes with secondary electron yield δ usually.Briefly, secondary electron yield may be defined as secondary emission electron stream I
SWith primary electron stream I
PThe ratio.
Solid material secondary electron yield proving installation is the favourable instrument that obtains its secondary electron yield, and an important component part of this instrument is exactly an electron collection device.Because therefore the electric current very low (nA magnitude) of the secondary electron of collecting measures very difficulty.That is to say, very high for the requirement of the electron collection device in the solid material secondary electron yield intelligent test device.
Influencing this electron collection device, to collect factors of accuracy a lot, as emission, the secondary electron of three electronics collect not exclusively, the absorption of gatherer inside surface etc.Electron collection device is used to collect electronics, and its design focal point is 2 points: whether the integrality of (1) electron collection promptly can intactly collect primary electron and secondary electron respectively; (2) precision of electron collection makes the data of collecting approach the True Data of secondary itself as far as possible.The performance of gathering-device will directly have influence on the measuring accuracy of whole solid material secondary electron yield intelligent test device.
Summary of the invention
Technical bottleneck in view of present above-mentioned Related Research Domain, the utility model provides a kind of electron collector that is applicable to the intelligence test of solid material secondary electron yield, can realize respectively the complete collection of primary electron and secondary electron and carry out signal and amplify, in whole secondary electron yield intelligent test device, play a very important role.
The electron collector that is applicable to the intelligence test of solid material secondary electron yield of the present utility model comprises primary electron gatherer, secondary electron gatherer, prime amplifier, secondary prime amplifier, target platform and an and insulation rotating shaft.
Described primary electron gatherer is a Faraday cylinder, and by urceolus and inner core and place the insulcrete between two to constitute, the Faraday cylinder axis overlaps with the electron impact direction; Described secondary electron gatherer is hemispherical metal shell, described metal shell is with the material of copper as inwall, make gatherer can fully collect secondary electron, the surface of described copper is coated with one deck gold film, also be coated with one deck carbon on the described golden film, to prevent pounding electronics because energy is too big three times in the secondary electron inner collector wall from the secondary electron that the test material sample surfaces ejects; Described secondary electron gatherer center has aperture, and the aperture is 1.5mm～2.5 mm; The secondary electron gatherer places insulation rotating shaft top, its little axially bored line and Faraday cylinder dead in line; Described target platform upper surface is equipped with the stainless steel anchor clamps, is used for fixing the test material sample, and lower surface is fixedlyed connected with the insulation rotating shaft; Described insulation rotating shaft places the Faraday cylinder top, perpendicular to the Faraday cylinder axis and with the offset distance of described axis be 1cm～2cm, this offset distance can guarantee when rotating the insulation rotating shaft incident beam is directly got in the Faraday cylinder, finishes the collection of primary electron; When rotating the insulation rotating shaft once more simultaneously, make target platform center, thereby guarantee the collection of secondary electron over against incident beam.
Concrete principle of work of the present utility model is:
Because the electric field in closure, the hollow conductor is zero, Faraday cylinder shields its inner space, is not subjected to influence atmosphere or any parasitic fields, can accurately collect the primary electron line.The primary electron line that Faraday cylinder is collected converts voltage signal to by resistance, sends in the display device after amplifying by a prime amplifier again.
The secondary electron gatherer is hemispheric metallic object, and center drilling can be injected on the sample incident electron.Utilize the secondary electron gatherer to collect the secondary electron electric current, and convert voltage signal to, after the secondary prime amplifier amplifies, send in the display device again by resistance.
Compared with prior art, the utlity model has following advantage:
(1) electron collection is more complete, the aperture of secondary electron gatherer is identical with maximum incident beam beam diameter in the utility model electron collector, just the secondary electron that can allow electron beam overflow from the entrance port is minimum, primary electron and secondary electron intactly can be collected respectively;
(2) secondary electron gatherer employing copper is inwall in the utility model, plate one deck gold and carbon film again, can prevent to pound electronics because energy is too big three times in the secondary electron inner collector wall from the secondary electron that the test material sample surfaces ejects, be that output signal is more accurate, work function is less, and the data of collecting more approach the True Data of secondary itself.
Description of drawings
Fig. 1 is applicable to the structural representation of the electron collector of solid material secondary electron yield intelligence test for the utility model.
Embodiment
Below in conjunction with embodiment and accompanying drawing the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Embodiment
The utility model is applicable to that the concrete structure of the electron collector of solid material secondary electron yield intelligence test is: comprise primary electron gatherer, secondary electron gatherer 1, prime amplifier, secondary prime amplifier, a target platform 2 and the insulation rotating shaft 3 of fixedlying connected with it; Described primary electron gatherer is a Faraday cylinder, by urceolus 4 and inner core 5 and place the insulcrete 6 between two to constitute.Described secondary electron gatherer is hemispherical metal shell, places insulation rotating shaft top, and housing has the aperture that the aperture is 1.5mm～2.5 mm, little axially bored line and Faraday cylinder dead in line; One time prime amplifier is connected with the secondary electron gatherer with the primary electron gatherer respectively with the secondary prime amplifier, is respectively applied for to amplify primary electron signal and secondary electron signal.
Described metal shell is with the material of copper as inwall, make gatherer can fully collect secondary electron, the surface of described copper is coated with one deck gold film, also be coated with one deck carbon on the described golden film, to prevent pounding electronics because energy is too big three times in the secondary electron inner collector wall from the secondary electron that the test material sample surfaces ejects.
The upper surface of target platform 2 is equipped with the stainless steel anchor clamps, is used for fixing the test material sample, and lower surface is fixedlyed connected with insulation rotating shaft 3; Described insulation rotating shaft 3 places Faraday cylinder top, perpendicular to the Faraday cylinder axis and with described axis the offset distance of 1cm～2cm is arranged.
The sample of test material is put into the target platform, clip with anchor clamps.During electron impact, rotate insulation rotating shaft 3, make the target platform avoid incident beam, can directly get in the inner core of Faraday cylinder, collect the primary electron electric current, carry out signal through a prime amplifier and be amplified into display device to make electron beam; Rotate the insulation rotating shaft, make the test material sample on the target platform aim at the electron impact direction, make electron beam can directly bombard the test material sample on the target platform, the secondary electron gatherer is collected the secondary electron electric current that sends from the test material sample, carries out signal through the secondary prime amplifier and is amplified into display device.
After software carries out analyzing and processing and corresponding data computing, can demonstrate relation curve between the electron energy of secondary electron yield and electron impact at display interface as a result, and compare with theoretical curve.
Need to prove at last: above embodiment is the unrestricted the technical solution of the utility model in order to explanation only, although the utility model is had been described in detail with reference to above-mentioned embodiment, those of ordinary skill in the art is to be understood that: still can make amendment or be equal to replacement the utility model, and replace any modification and the part that do not break away from spirit and scope of the present utility model, and it all should be encompassed in the claim scope of the present utility model.
Claims (5)
1. be applicable to the electron collector of solid material secondary electron yield intelligence test, it is characterized in that: comprise primary electron gatherer, secondary electron gatherer, prime amplifier, secondary prime amplifier, target platform and an insulation rotating shaft; Described target platform upper surface is equipped with the stainless steel anchor clamps, and lower surface is fixedlyed connected with the insulation rotating shaft; Described insulation rotating shaft places primary electron gatherer top, and perpendicular to primary electron gatherer axis; Described secondary electron gatherer is hemispherical metal shell, is positioned at insulation rotating shaft top; Described hemispherical metal shell has aperture, and little axially bored line overlaps with primary electron gatherer axis; A described prime amplifier is connected with the secondary electron gatherer with the primary electron gatherer respectively with the secondary prime amplifier.
2. the electron collector that is applicable to the intelligence test of solid material secondary electron yield according to claim 1 is characterized in that: described small aperture is 1.5mm～2.5 mm.
3. the electron collector that is applicable to the intelligence test of solid material secondary electron yield according to claim 2 is characterized in that: as inner-wall material, the copper surface is coated with one deck gold film to described hemispherical metal shell, also is coated with one deck carbon on the golden film with copper.
4. the electron collector that is applicable to the intelligence test of solid material secondary electron yield according to claim 3 is characterized in that: the offset distance of described insulation rotating shaft and primary electron gatherer axis is 1cm～2 cm.
5. the electron collector that is applicable to the intelligence test of solid material secondary electron yield according to claim 4 is characterized in that: described primary electron gatherer is a Faraday cylinder, by urceolus and inner core and place the insulcrete between two to constitute.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201562883U CN202066807U (en) | 2011-05-17 | 2011-05-17 | Electron collector being suitable for intelligently testing secondary electron emission coefficient of solid material |
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| CN2011201562883U CN202066807U (en) | 2011-05-17 | 2011-05-17 | Electron collector being suitable for intelligently testing secondary electron emission coefficient of solid material |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102680503A (en) * | 2012-04-27 | 2012-09-19 | 西安空间无线电技术研究所 | Method for determining secondary electron emission characteristics of rough metal surfaces |
| CN103760181A (en) * | 2013-12-24 | 2014-04-30 | 兰州空间技术物理研究所 | Method and system for testing secondary electron yield of star-used dielectric materials |
| CN103776857A (en) * | 2014-01-17 | 2014-05-07 | 西安交通大学 | Semispherical electronic collecting device and measurement method for secondary electron yield measurement |
| CN104465847A (en) * | 2014-12-24 | 2015-03-25 | 清华大学 | Electronic collector implementation method based on stress distribution |
| CN104569014A (en) * | 2014-10-27 | 2015-04-29 | 西安空间无线电技术研究所 | Method and device for testing secondary electron emission coefficient of material under all incidence angles |
| CN106093094A (en) * | 2016-07-19 | 2016-11-09 | 西安交通大学 | The secondary electron spectral measurement device of a kind of dielectric material and measuring method |
| CN108896596A (en) * | 2018-09-18 | 2018-11-27 | 中国工程物理研究院流体物理研究所 | A kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement |
| CN109100380A (en) * | 2018-08-23 | 2018-12-28 | 中国工程物理研究院流体物理研究所 | A kind of double-layer grid tennis ball shape secondary electron collector |
| CN113495082A (en) * | 2020-03-19 | 2021-10-12 | 清华大学 | Secondary electron emission coefficient measuring device |
-
2011
- 2011-05-17 CN CN2011201562883U patent/CN202066807U/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102680503B (en) * | 2012-04-27 | 2014-07-02 | 西安空间无线电技术研究所 | Method for determining secondary electron emission characteristics of rough metal surfaces |
| CN102680503A (en) * | 2012-04-27 | 2012-09-19 | 西安空间无线电技术研究所 | Method for determining secondary electron emission characteristics of rough metal surfaces |
| CN103760181B (en) * | 2013-12-24 | 2016-02-17 | 兰州空间技术物理研究所 | The method of testing of star secondary electron emission yield of dielectric material and test macro |
| CN103760181A (en) * | 2013-12-24 | 2014-04-30 | 兰州空间技术物理研究所 | Method and system for testing secondary electron yield of star-used dielectric materials |
| CN103776857A (en) * | 2014-01-17 | 2014-05-07 | 西安交通大学 | Semispherical electronic collecting device and measurement method for secondary electron yield measurement |
| CN103776857B (en) * | 2014-01-17 | 2016-04-27 | 西安交通大学 | The dome-type electron collection device measured for secondary electron yield and measuring method |
| CN104569014A (en) * | 2014-10-27 | 2015-04-29 | 西安空间无线电技术研究所 | Method and device for testing secondary electron emission coefficient of material under all incidence angles |
| CN104569014B (en) * | 2014-10-27 | 2017-01-25 | 西安空间无线电技术研究所 | Method and device for testing secondary electron emission coefficient of material under all incidence angles |
| CN104465847A (en) * | 2014-12-24 | 2015-03-25 | 清华大学 | Electronic collector implementation method based on stress distribution |
| CN104465847B (en) * | 2014-12-24 | 2016-06-15 | 清华大学 | A kind of electron collector based on stress distribution realizes method |
| CN106093094A (en) * | 2016-07-19 | 2016-11-09 | 西安交通大学 | The secondary electron spectral measurement device of a kind of dielectric material and measuring method |
| CN109100380A (en) * | 2018-08-23 | 2018-12-28 | 中国工程物理研究院流体物理研究所 | A kind of double-layer grid tennis ball shape secondary electron collector |
| CN109100380B (en) * | 2018-08-23 | 2020-12-22 | 中国工程物理研究院流体物理研究所 | Double-layer grid spherical secondary electron collector |
| CN108896596A (en) * | 2018-09-18 | 2018-11-27 | 中国工程物理研究院流体物理研究所 | A kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement |
| CN113495082A (en) * | 2020-03-19 | 2021-10-12 | 清华大学 | Secondary electron emission coefficient measuring device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111207 Termination date: 20140517 |