CN212392211U - Microsecond-level vacuum arc ion source energy spectrum analyzer device - Google Patents
Microsecond-level vacuum arc ion source energy spectrum analyzer device Download PDFInfo
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- CN212392211U CN212392211U CN202022124061.2U CN202022124061U CN212392211U CN 212392211 U CN212392211 U CN 212392211U CN 202022124061 U CN202022124061 U CN 202022124061U CN 212392211 U CN212392211 U CN 212392211U
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Abstract
The utility model discloses a microsecond vacuum arc ion source energy spectrum analyzer device, which comprises a metal shell, wherein the top of the metal shell is provided with a top opening, the bottom of the metal shell is provided with a concave bottom fixed cylinder with an opening facing the top, and the opening of the concave bottom fixed cylinder is provided with a circular ring-shaped compression ring; the metal shell is internally provided with an extraction electrode, a grid mesh, a collector and a plurality of insulation limiting plates which separate and fix the extraction electrode, the grid mesh and the collector from one side inwards in sequence from the top opening, and a cavity is formed among the insulation limiting plates. The analyzer device adopts a design close to an all-metal shell, can shield the influence of an external electromagnetic field to the maximum extent, for example, a pulse high-voltage electric field generated during the discharge of a vacuum arc ion source can possibly influence the diffusion of plasma and the measurement of ion current, and can shield the external electromagnetic field as much as possible to obtain a more accurate measurement result.
Description
Technical Field
The utility model relates to an energy spectrum appearance device, concretely relates to microsecond level vacuum arc ion source energy spectrum appearance device.
Background
The vacuum arc ion source is a short pulse strong current ion source, is used for generating metal/mixed ion beams, has the characteristics of small volume, single repeatable discharge and the like, outputs ion current with the intensity of hundreds of mA magnitude, and has important application value in the aspects of neutron generators, ion implanters and the like. The deuterium element as a working substance is usually stored as a metal hydride in the electrode of a vacuum arc ion source and can be stored for a long time in a vacuum environment. When the vacuum arc ion source works, a pulse high voltage is loaded between the cathode and the anode of the vacuum arc ion source, vacuum arc creeping discharge is generated through triggering, and meanwhile, luminous spots are generated on a creeping discharge path under the action of electron bombardment, sputtering and the like, and the luminous spots are called as cathode spots. The cathode spot contains deuterium and metal plasma, and ions are extracted from the extraction electrode through expansion diffusion.
Parameters such as electron density, temperature and ion composition of the plasma generated by discharge can be diagnosed through a Langmuir probe, a spectrometer and a flight time spectrum, and performance information of the vacuum arc ion source is obtained. In the aspect of physical mechanism research of a vacuum arc ion source, for example, in the aspect of a diffusion velocity model of plasma, for example, Davis et al, an energy molecular device is used for measuring ion kinetic energy to verify a potential peak theoretical model, and it is found that the experimentally measured ion velocity is low, and the difference between the velocities of ions in different charge states is large probably because of the influence of the vacuum degree, so that it is very important to accurately measure the ion diffusion energy spectrum. For the measurement of the ion energy spectrum, firstly, the vacuum cavity is required to be ensured to have a high enough vacuum degree, and the ion diffusion is prevented from being influenced by residual gas; secondly, the vacuum arc ion source is microsecond short pulses, energy spectrum measurement needs to be carried out under bias voltage values of different energy spectrum analyzers, and how to ensure that the size, ion components and proportion of ion flows extracted under different pulses are approximately equal is a big problem, particularly the position of a cathode spot is changed during pulse discharge.
The existing measurement methods and experimental devices are different, and the obtained ion diffusion speed data are greatly different, so that the measurement data are not accurate enough.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that the measurement unsafe problem that exists among the prior art, aim at provides a microsecond level vacuum arc ion source energy spectrum appearance device, solves above-mentioned problem.
The utility model discloses a following technical scheme realizes:
a microsecond-level vacuum arc ion source energy spectrum analyzer device comprises a metal shell, wherein the top of the metal shell is provided with a top opening, the bottom of the metal shell is provided with a concave bottom fixed cylinder with an opening facing the top, and an annular pressure ring is arranged at the opening of the concave bottom fixed cylinder; the metal shell is internally provided with an extraction electrode, a grid mesh, a collector and a plurality of insulation limiting plates which separate and fix the extraction electrode, the grid mesh and the collector from one side inwards in sequence from the top opening, and a cavity is formed among the insulation limiting plates.
Further, the microsecond-level vacuum arc ion source energy spectrum analyzer device is characterized in that the bottom fixing cylinder is of a cylindrical structure with threads on the outer side and is fixed on the metal shell through threaded screwing; the center position of one side of the bottom fixing cylinder is provided with a through hole, and the through hole protrudes out of the metal shell.
The bottom stationary cylinder is fixed to the analyzer case by a screw, and the feeder line passes through a through hole of the bottom stationary cylinder. The utility model discloses the whole metal seal structure that is similar to of analysis appearance device can furthest shield the influence of outside electromagnetic field (can produce the forceful electric power magnetic field when vacuum arc ion source pulse high-voltage discharge), obtains more accurate measuring result.
Furthermore, the microsecond vacuum arc ion source energy spectrum analyzer device is characterized in that a conical opening is arranged at the center of the extraction electrode, a plasma diffusion area is formed by the top opening and the extraction electrode, and an ion flow emission surface is formed at the conical opening in the center of the extraction electrode.
Further, the microsecond-level vacuum arc ion source energy spectrum analyzer device is characterized in that the inner side section of the top opening of the metal shell is of a step-shaped structure, and an insulation limiting plate is arranged between the extraction electrode and the top opening of the metal shell.
Further, the section of each insulating limiting plate is of a stepped structure; four through holes are drilled in the plurality of insulation limiting plates, the corresponding through holes are aligned, fixing screws are fixed in the through holes, and the plurality of insulation limiting plates are fixed into a whole through the fixing screws.
The fixing screws are long screws, and the plurality of insulating limiting plates are fixed through the long screws. Through the setting with screw cap embedding metal casing, increased the firm relation between this whole system of insulating limiting plate, grid, extraction electrode, collector and the analysis appearance shell, avoided the not hard up condition in assembly, the test procedure.
Insulating limiting plate beat four through-holes, every insulating limiting plate's through-hole all aligns during the use, plays to let in the feeder effect on the one hand, on the other hand is favorable to the extraction vacuum, ensures the inside high vacuum environment of analysis appearance device.
Further, a microsecond vacuum arc ion source energy spectrum analyzer device, the outside both ends of collector are provided with the feed screw.
The feed screw is used for connecting an oscilloscope, and ensures good contact of power line access.
Further, the microsecond vacuum arc ion source energy spectrum analyzer device is characterized in that the metal shell is cylindrical.
Further, the opening is square in shape.
Further, the number of the grids is three. The distance between the grids can be adjusted according to the needs, and the phenomenon of striking sparks among the grids is avoided.
An energy spectrum analyzer device in the prior art mainly aims at a constant current ion source (such as a radio frequency source, a penning source and the like), and during measurement, the ion source is required to be operated all the time to obtain a constant current ion flow, and the bias voltage value of a grid mesh is gradually changed to obtain an I-V curve. However, for a vacuum arc ion source with microsecond pulses, a single discharge pulse is 5 mus, the time of the single pulse is very short, the collected current under different bias voltage values cannot be measured in the time of the single pulse, if the bias voltage value is changed under different pulses, because of the change of the position of the cathode spot, the ion current obtained by the leading-out electrode of the ion source can not be ensured to be consistent with the ion current obtained under other pulses, in this case, the energy spectrum obtained by measurement has great error, and the utility model adopts a metal shell which is cylindrical as a whole, the top of the metal shell is provided with a square opening area, the inner side of the top of the metal shell is provided with an insulating limit plate and an extraction electrode, the extraction electrode of the vacuum arc ion source is removed during measurement, and the ion source, the square opening area and the extraction electrode form a plasma diffusion and ion flow emission surface. The distance from the cathode spot to the extraction electrode is large enough, the plasma diffused to the extraction electrode can be considered that the charge state is not changed any more, the diffusion speed of ions is not influenced by the charge state distribution any more, and in addition, the plasma diffused to the metal shell can be guided away in time. The analyzer device simulates the plasma diffusion environment in the vacuum arc ion source, and reduces the difference of the ion current led out under different pulses and different cathode spot positions as much as possible, so that the measured experimental data is more real and reliable.
Compared with the prior art, the utility model, following advantage and beneficial effect have:
1. the utility model relates to a microsecond level vacuum arc ion source energy spectrum appearance device, adopt a whole cylindric metal casing that is, there is a square opening at its top to be used for placing the vacuum arc ion source, be provided with extraction electrode inside the shell, the multi-disc grid net, the collector, and multi-disc insulation limiting plate, the device has ensured the inside high vacuum environment of analysis appearance, avoid the ion current to receive the residual gas influence, and through the diffusion structure of vacuum arc ion source-shell square opening-extraction electrode combination formation plasma, and extract the ion current, such structural design can greatly alleviate under the different pulse, the extraction ion current difference that leads to under the different cathode spot positions, can realize measuring the energy spectrum of pulse vacuum arc ion source under the bias voltage of different grid nets, and make the experimental data that record more true reliable.
2. The utility model relates to a microsecond level vacuum arc ion source energy spectrum appearance device, disc insulation limiting plate middle part and edge part form the echelonment structure, form the convex body/concave body structure of a mutual embedding, are provided with three grids net, collector etc. in convex body/concave body position. The distance between the grids can be adjusted according to the needs, and the phenomenon of striking sparks among the grids is avoided. The insulating limiting plate is beaten 4 through-holes, and every insulating limiting plate's through-hole all aligns during the use, plays to let in the feeder effect on the one hand, and on the other hand is favorable to the extraction vacuum, ensures the inside high vacuum environment of analysis appearance device.
3. The utility model relates to a microsecond level vacuum arc ion source energy spectrum appearance device has adopted and has been close to the design of full metal casing, can furthest shield the influence of external electromagnetic field, and the pulse high voltage electric field that produces when for example the vacuum arc ion source discharges probably influences the diffusion of plasma, the measurement of ion flow, and this analysis appearance device can shield external electromagnetic field as far as possible, obtains more accurate measuring result.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
fig. 1 is a schematic structural diagram of the present invention.
Reference numbers and corresponding part names in the drawings:
1-metal shell, 2-leading-out electrode, 3-insulation limiting plate, 4-grid, 5-feed screw, 6-pressure ring, 7-bottom fixing cylinder, 8-fixing screw, 9-collector, 10-top opening, 11-through hole and 12-conical opening.
Detailed Description
To make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the following examples and drawings, and the exemplary embodiments and descriptions thereof of the present invention are only used for explaining the present invention, and are not intended as limitations of the present invention.
Examples
As shown in fig. 1, the microsecond vacuum arc ion source energy spectrum analyzer device comprises a metal shell 1, wherein the top of the metal shell 1 is provided with a top opening 10, the bottom of the metal shell is provided with a concave bottom fixed cylinder 7 with an opening facing the top, and an annular pressing ring 6 is arranged at the opening of the concave bottom fixed cylinder 7; the metal shell 1 is internally provided with an extraction electrode 2, a grid 4 and a collector 9 in sequence from one side of a top opening 10 to the inside, and a plurality of insulation limiting plates 3 for separating and fixing the extraction electrode 2, the grid 4 and the collector 9, wherein a cavity is formed among the insulation limiting plates 3. The bottom fixing cylinder 7 is of a cylindrical structure with threads on the outer side and is screwed and fixed on the metal shell 1 through threads; the center position of the bottom side of the bottom fixing cylinder 7 is provided with a through hole 11, and the through hole 11 protrudes to the outside of the metal shell 1. The central position of the extraction electrode 2 is provided with a conical opening 12, the top opening 10 and the extraction electrode 2 form a plasma diffusion area, and the conical opening 12 in the center of the extraction electrode 2 forms an ion current emission surface. The inner side section of the top opening 10 of the metal shell 1 is of a step-shaped structure, and an insulating limit plate 3 is arranged between the extraction electrode 2 and the top opening 10 of the metal shell 1. The sections of the multiple insulation limiting plates 3 are of a step-shaped structure; four through holes are drilled in the plurality of insulation limiting plates 3, the corresponding through holes are aligned, fixing screws 8 are fixed in the through holes, and the plurality of insulation limiting plates 3 are fixed into a whole through the fixing screws 8. And the two ends of the outer side of the collector 9 are provided with feed screws 5. The metal case 1 is cylindrical in shape. The shape of the opening 10 is square. The number of the grid meshes 4 is three.
During the use, with whole microsecond level vacuum arc ion source energy spectrum appearance device inside the vacuum cavity, place vacuum arc ion source (diameter phi is 20mm) in the square hollow structure of right part (top), the shell is whole ground connection, during the test, direct current power supply is connected to middle grid 4: the voltage amplitude adjusting range is 0-80V, and the collector 9 is connected with an oscilloscope. During testing, the leading-out electrode of the vacuum arc ion source is removed, and because constant ion current cannot be obtained under different pulse discharges and the position of a cathode spot generated under each pulse is not fixed, plasma generated by the vacuum arc discharges is diffused to the position of the leading-out electrode 2, an emitting surface is formed at the conical hole in the center of the leading-out electrode 2, and then the ion current is obtained, so that the influence of the pulse discharges is reduced as much as possible. The generated ion flow respectively passes through the three grids 4 and finally reaches the collector 9 to be collected, and the energy spectrum of the ion flow is obtained through conversion by measuring the functional relation between the grid 4 bias voltage and the collector 9 current.
The above-mentioned embodiments, further detailed description of the objects, technical solutions and advantages of the present invention, it should be understood that the above description is only the embodiments of the present invention, and is not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (9)
1. The microsecond-level vacuum arc ion source energy spectrum analyzer device is characterized by comprising a metal shell (1), wherein the top of the metal shell (1) is provided with a top opening (10), the bottom of the metal shell is provided with a concave bottom fixing cylinder (7) with an opening facing the top, and an annular pressing ring (6) is arranged at the opening of the concave bottom fixing cylinder (7); the metal casing (1) is internally provided with an extraction electrode (2), a grid mesh (4) and a collector (9) in sequence from top opening (10) to the inside, and a plurality of pieces of insulation limiting plates (3) which are separated and fixed from the extraction electrode (2), the grid mesh (4) and the collector (9) are formed between the insulation limiting plates (3).
2. The microsecond vacuum arc ion source energy spectrum analyzer device according to claim 1, wherein the bottom fixed cylinder (7) is a cylindrical structure with threads on the outer side and is fixed on the metal shell (1) through screwing; a through hole (11) is formed in the center of one side of the bottom fixing cylinder (7), and the through hole (11) protrudes out of the metal shell (1).
3. The microsecond vacuum arc ion source energy spectrum analyzer device according to claim 1, wherein the central position of the extraction electrode (2) is provided with a conical opening (12), the top opening (10) and the extraction electrode (2) form a plasma diffusion region, and the conical opening (12) in the center of the extraction electrode (2) forms an ion current emission surface.
4. The microsecond vacuum arc ion source energy spectrum analyzer device according to claim 1, wherein the inside cross section of the top opening (10) of the metal housing (1) is a stepped structure, and an insulating limit plate (3) is arranged between the extraction electrode (2) and the top opening (10) of the metal housing (1).
5. The microsecond-scale vacuum arc ion source energy spectrum analyzer device according to claim 1, wherein the cross section of the plurality of insulation limiting plates (3) is of a stepped structure; four through holes are drilled in the plurality of insulating limiting plates (3), the corresponding through holes are aligned, fixing screws (8) are fixed in the through holes, and the plurality of insulating limiting plates (3) are fixed into a whole through the fixing screws (8).
6. The microsecond vacuum arc ion source energy spectrum analyzer device according to claim 1, wherein the collector (9) is provided with feed screws (5) at both outer ends.
7. The microsecond vacuum arc ion source energy spectrum analyzer device according to claim 1, wherein the metal housing (1) is cylindrical in shape.
8. The microsecond vacuum arc ion source energy spectrum analyzer apparatus according to claim 1, wherein the top opening (10) is square in shape.
9. The microsecond vacuum arc ion source energy spectrum analyzer device according to claim 1, wherein the number of said grids (4) is three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022124061.2U CN212392211U (en) | 2020-09-24 | 2020-09-24 | Microsecond-level vacuum arc ion source energy spectrum analyzer device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022124061.2U CN212392211U (en) | 2020-09-24 | 2020-09-24 | Microsecond-level vacuum arc ion source energy spectrum analyzer device |
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| Publication Number | Publication Date |
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| CN212392211U true CN212392211U (en) | 2021-01-22 |
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| CN202022124061.2U Expired - Fee Related CN212392211U (en) | 2020-09-24 | 2020-09-24 | Microsecond-level vacuum arc ion source energy spectrum analyzer device |
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Granted publication date: 20210122 |