CN109613064A - The adjustable field emission test device of electrode spacing and method in a kind of vacuum system - Google Patents
The adjustable field emission test device of electrode spacing and method in a kind of vacuum system Download PDFInfo
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- CN109613064A CN109613064A CN201811367414.2A CN201811367414A CN109613064A CN 109613064 A CN109613064 A CN 109613064A CN 201811367414 A CN201811367414 A CN 201811367414A CN 109613064 A CN109613064 A CN 109613064A
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- field emission
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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Abstract
The invention discloses a kind of adjustable field emission test device of electrode spacing in vacuum system and methods, including ammeter, vacuum system and placement field emission material fixing seat, micrometer caliper, micrometer caliper support base, sleeve, square key transmission shaft, stepper motor and pedestal therein；Field emission material fixing seat, micrometer caliper support base and stepper motor are fixed on the base；Field emission material is fixed on field emission material fixing seat；Micrometer caliper is fixed in the through-hole of micrometer caliper support base, makes its measuring staff end towards field emission material, and round end is fixedly connected with one end of square key transmission shaft by sleeve；It is electrically connected lead-out wire A on micrometer caliper, draws vacuum system and is followed by setting voltage；The other end of square key transmission shaft and the shaft of stepper motor connect；Field emission material fixing seat is conductor；It is electrically connected concatenation ammeter after lead-out wire B draws vacuum system again in field emission material fixing seat and connects the earth again.
Description
Technical field
The present invention relates to vacuum measurement technical fields, and in particular to the continuously adjustable field of electrode spacing in a kind of vacuum system
Cause transmission test set and method.
Background technique
Electronics is known as electron emission from the process that cathode escapes into vacuum.Electron emission is according to electrons gain energy or disappears
Except the mode of constraint is broadly divided into four kinds of citation forms: thermionic emission, photoelectron emissions, secondary and field are sent a telegraph
Son transmitting.Field Electron Emission and the principle of other three kinds of electron emission modes are entirely different, other three kinds of modes require outer
Portion provides energy to the electronics of solid interior, makes electronics that enough energy can be absorbed to escape the surface of solids.And field-causing electron
Transmitting is then different, and this mode needs to apply a sufficiently strong electric field in the surface of solids, is weakened the potential barrier of the surface of solids,
Barrier height is lower, and width narrows.It is enough to compare with electron wavelength if barrier width is too narrow to, electronics will penetrate potential barrier and take off
From the surface of solids.This electron emission mode is known as Field Electron Emission.Field emission belongs to one kind of cold cathode emission, field
Electron field emissive is the very effective a kind of mode for obtaining electron emission, with current density is big, monochromaticjty is good, stability
Well, the advantages that small power consumption, fast reaction speed, and without the sluggishness on launch time.Field emission is cold cathode electron transmitting
One kind, be the important branch of electron source, technology of ion source, be also a fast-developing advanced subject of vacuum measurement science.
Since the discovery of Field Electron Emission phenomenon, theoretical and emissive material research has obtained people and has greatly closed
Note, the research of current field emission focus primarily upon the research to its emitter material.Experimentally understand Field Electron Emission
Property, most universal at present and most easy means are exactly to measure the total emission current of cathode by transformation inter-electrode voltage,
To obtain electric current-voltage (I-V) relation curve.
Currently, widespread practice is to place the certain insulating materials (ceramics etc.) of thickness between the anode and cathode as pad
Piece generally chooses several representative thickness since machining accuracy and cost are limited, and thickness is generally 50 μm, 100 μm, 200
μm etc., due to the discontinuous variation of spacer thickness, test is only capable of choosing a kind of constant spacing every time, can only obtain some discrete
Data point, and if necessary to transformation electrode spacing, then it must shut off vacuum system, test device is taken out and replaced by exposure atmosphere
Test experiments are carried out again after other thickness gaskets, and experimentation is cumbersome, this undoubtedly destroys the reset condition of test, not only very
Altitude parameter (vacuum degree, all kinds of gas componants and vapor content etc.) can not be completely the same with test mode before, test
Sample may also be due to exposing atmosphere again and by different degrees of pollution, while bringing the repetition of unnecessary manpower and material resources
Work；
Field emitter material is also sticked on stainless steel base by other test devices with elargol, anode and stainless steel bottom
Insulation spacer is placed between doing.However elargol easily penetrates into gap, is possible to expanded by heating in test, elargol is in vacuum test ring
The gases affect carbon nanotube pollution for being easy bubbing under border, causing the change of partial vacuum, while releasing, or even in height
Pressure breakdown, leads to test crash.Electrode spacing is also fixed, uncontrollable a, vacuum test in experiment every time
The data that a kind of electrode spacing can be obtained, greatly affected testing efficiency.
Currently, all development field emission research is with regard to will inevitably carry out its performance test, it is therefore necessary to propose
A kind of New Type Field causes transmission test set, overcomes during traditional experiment that electrode spacing can not be accurately continuous under vacuum test environment
The shortcomings that adjusting.
Summary of the invention
In view of this, the present invention provides the field emission test devices that electrode spacing in a kind of vacuum system is continuously adjusted
And method, it can be realized electrode spacing under vacuum test environment and accurately continuously adjust.
A kind of technical solution of test device in the present invention are as follows: the adjustable field emission test of electrode spacing in vacuum system
Device, including vacuum system, ammeter and the field emission material fixing seat being placed in vacuum system, micrometer caliper, spiral shell
Revolve mircrometer gauge support base, sleeve, square key transmission shaft, stepper motor and pedestal；
The field emission material fixing seat, micrometer caliper support base and stepper motor are fixed on the base；
Field emission material is fixed on the field emission material fixing seat；
The micrometer caliper is fixed on the micrometer caliper support base, is arranged on the micrometer caliper support base
Through-hole, the micrometer caliper pass through the through-hole, make its measuring staff end towards the field emission material, round end and the side
One end of key transmission shaft is fixedly connected by the sleeve；Lead-out wire A, the lead-out wire A are electrically connected on the micrometer caliper
It draws vacuum system and is followed by setting voltage；
The other end of the square key transmission shaft is connect with the shaft of the stepper motor；
The control line of the stepper motor is drawn out to except vacuum system；
The field emission material fixing seat is conductor；It is electrically connected lead-out wire B's in the field emission material fixing seat
One end, concatenation ammeter connects the earth again after the other end of the lead-out wire B draws vacuum system, and the ammeter is for measuring field
Cause emission current.
It further include tabletting as a kind of preferred embodiment of test device in the present invention, the tabletting pushes down the field and causes hair
It penetrates after material and the field emission material is fixed in the field emission material fixing seat by screw.
As a kind of preferred embodiment of test device in the present invention, the voltage that sets is 0-5000V.
As a kind of preferred embodiment of test device in the present invention, the pedestal uses ceramic material, for making the bottom
Seat insulate with vacuum system.
The technical solution of test method in the present invention are as follows: it uses test device described above, comprising the following steps:
The first step, when field emission material not being fixed in field emission material fixing seat, by the survey of micrometer caliper
Rod end and the contact of field emission material fixing seat, write down the initial scale of micrometer caliper；
Second step is rotated by control line traffic control stepper motor, drives the movement of square key transmission shaft, and then control the spiral
The measuring staff end of mircrometer gauge retreats set distance；
Third step, the fixed field emission material for setting thickness in the field emission material fixing seat, make field cause hair
Penetrate measuring staff end of the material towards the micrometer caliper；
Third step is grounded after lead-out wire B is connected with ammeter, and the field emission material is as cathode；By lead-out wire A
It is connected with setting voltage, the micrometer caliper is as anode；The stepper motor rotation is adjusted by adjusting control line, in turn
The square key transmission shaft is driven to move, the square key transmission shaft movement makes the micrometer caliper rotation setting scale, Mei Gezhuan
The electrode spacing of the dynamic corresponding field emission of scale, the ammeter record autoelectronic current when Different electrodes spacing.
As a kind of preferred embodiment of test method in the present invention, the voltage that sets is 0-5000V.
The utility model has the advantages that
(1) compare the field emission test device of constant spacing, and the present invention realizes field emission in vacuum system
Electrode spacing continuously adjusts, when for needing to test the emitting performance under different spacer conditions, without opening vacuum system repeatedly
System can complete the test that different spacing are adjusted using the device in a test process, improve testing efficiency, save big
The human and material resources of amount and testing time greatly improve the economy of test；Meanwhile field emission of the present invention
Test device, structure is simple, manufacture easy to process, measures the emission current curve obtained using the device and spacing is varied multiple times
Repeatedly exposure atmosphere is compared, and consistency is more preferable；Through-hole is set on micrometer caliper support base of the invention, it can be effectively by spiral shell
Rotation mircrometer gauge is positioned；The present apparatus can be expanded to the similar experimental provision for needing in vacuum system small spacing to adjust.
(2) test method of the invention is easy to operate, can effectively realize Different electrodes spacing it is continuously adjustable when test
The electric current of field emission can obtain field emission performance according to current curve is measured；Test method of the invention can expand to
The similar experiment for needing small spacing to adjust in vacuum system.
Detailed description of the invention
Fig. 1 is a kind of structural representation of the adjustable field emission test device of electrode spacing in vacuum system in the present invention
Figure.
Wherein, 1- field emission material fixing seat, 2- tabletting, 3- field emission material, 4- micrometer caliper, 5- spiral are surveyed
Micro- device support base, 6- sleeve, 7- square key transmission shaft, 8- stepper motor, 9- control line, 10- pedestal, 11- lead-out wire A, 12- extraction
Line B
Specific embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
The adjustable field emission test device of electrode spacing in a kind of vacuum system is present embodiments provided, can be realized true
Electrode spacing accurately continuously adjusts under hollow testing environment.
As shown in Figure 1, the field emission test device includes: vacuum system and the field emission that is arranged in vacuum system
Material fixing seat 1, micrometer caliper 4, micrometer caliper support base 5, sleeve 6, square key transmission shaft 7, stepper motor 8 and pedestal
10；Field emission material fixing seat 1, micrometer caliper support base 5 and stepper motor 8 are fixed on pedestal 10；Field emission material
Expect to be screwed after 3 both ends tablettings 2 are pushed down in field emission material fixing seat 1, makes it towards micrometer caliper support base
5；The through-hole that micrometer caliper 4 passes through on micrometer caliper support base 5 is fixed therein, and makes its measuring staff end towards field emission material
Material 3, round end are fixedly connected with one end of square key transmission shaft 7 by sleeve 6；The other end of square key transmission shaft 7 and stepping electricity
The shaft of machine 8 connects；The control line 9 of stepper motor 8 draws vacuum system and carries out real-time control.It is electrically connected on micrometer caliper 4
Lead-out wire A, lead-out wire A are connected after drawing vacuum system with setting voltage, the anode as field emission；Field emission material
Lead-out wire B is set in fixing seat 1, and lead-out wire B is concatenated after drawing vacuum system with ammeter, ammeter electrical connection the earth, field
Cathode of the emissive material 3 as field emission is caused, ammeter is used to measure the electric current of field emission, passes through the current curve measured
It can analyze the performance of field emission.
Specifically: micrometer caliper 4 is conductor, telescopic extensions 0cm~15cm, diameter 6.32mm.The step of stepper motor 8
It is 1 ° into angle, it is 1.388 μm of microns that spacing, which controls precision,.Field emission material fixing seat 1 is conductor.Tabletting 2 and pedestal 10 are equal
For ceramic material (95 porcelain), test device and vacuum system insulation and tabletting 2 and field cause are controlled for being put into vacuum system
Insulation between emissive material 3.
Initial Shi Weifang field emission material 3, by field emission material fixing seat 1, micrometer caliper 4, micrometer caliper
Support base 5, sleeve 6, square key transmission shaft 7 and stepper motor 8 are fixed on according to the method described above on pedestal 10, adjust micrometer caliper
4 measuring staff end of micrometer caliper and field emission material fixing seat 1 are contacted, write down the initial scale by 4 initial scales.Then lead to
It crosses control line 9 and controls the rotation of stepper motor 8, square key transmission shaft 7 is driven to move, and then control 4 measuring staff end of micrometer caliper and retreat
Set distance is put into the field emission material 3 for having measured thickness.Lead-out wire B12 is set in field emission material fixing seat 1,
In micrometer caliper 4, lead-out wire A11 is set；The lead-out wire B12 is connect with ammeter, ammeter electrical connection the earth, at this point, institute
It states field emission material 3 and is used as cathode, the lead-out wire A11 on the micrometer caliper 4 is connected with setting voltage as anode.It is logical
It crosses control line 9 and controls the rotation of stepper motor 8, the rotation of stepper motor 8 drives the rotation of its shaft, and then drives the fortune of square key transmission shaft 7
Dynamic, the movement of square key transmission shaft 7 makes micrometer caliper 4 rotate certain scale, can be accurate according to the scale that micrometer caliper 4 rotates
Know the distance between 4 measuring staff end of micrometer caliper and field emission material 3.Because the test device can pass through control line 9
Stepper motor control 8 rotates, that is, does not need the test device and field emission material 3 taking out vacuum, can measure spacing
The current curve of the field emission continuously adjusted can be obtained field emission performance by current curve.
Different types of micrometer caliper 4, stepper motor 8 of different driving mode etc. is selected to can be used for different accuracy
The test of the continuously adjustable field emission of spacing.
In conclusion the above is merely preferred embodiments of the present invention, being not intended to limit the scope of the present invention.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Claims (6)
1. the adjustable field emission test device of electrode spacing in a kind of vacuum system, which is characterized in that including vacuum system, electricity
Flow table and the field emission material fixing seat (1) being placed in vacuum system, micrometer caliper (4), micrometer caliper support base
(5), sleeve (6), square key transmission shaft (7), stepper motor (8) and pedestal (10)；
The field emission material fixing seat (1), micrometer caliper support base (5) and stepper motor (8) are fixed on the pedestal
(10) on；
Field emission material (3) is fixed on the field emission material fixing seat (1)；
The micrometer caliper (4) is fixed on the micrometer caliper support base (5), the micrometer caliper support base (5)
Upper setting through-hole, the micrometer caliper (4) pass through the through-hole, make its measuring staff end towards the field emission material (3), rotation
Turn end and is fixedly connected with one end of the square key transmission shaft (7) by the sleeve (6)；It is electrically connected on the micrometer caliper (4)
It connects lead-out wire A (11), the lead-out wire A (11) draws vacuum system and is followed by setting voltage；
The other end of the square key transmission shaft (7) is connect with the shaft of the stepper motor (8)；
The control line (9) of the stepper motor (8) is drawn out to except vacuum system；
The field emission material fixing seat (1) is conductor；Lead-out wire B is electrically connected on the field emission material fixing seat (1)
(12) one end, concatenation ammeter connects the earth, the ammeter again after the other end of the lead-out wire B (12) draws vacuum system
For measuring autoelectronic current.
2. the adjustable field emission test device of electrode spacing in vacuum system as described in claim 1, which is characterized in that also
Including tabletting (2), the tabletting (2) pushes down the field emission material (3) and passes through screw afterwards for the field emission material (3)
It is fixed on the field emission material fixing seat (1).
3. the adjustable field emission test device of electrode spacing in vacuum system as described in claim 1, which is characterized in that institute
It states and sets voltage as 0-5000V.
4. the adjustable field emission test device of electrode spacing, the pedestal in vacuum system as claimed in claim 2 or claim 3
(10) ceramic material is used, for making the pedestal (10) and vacuum system insulate.
5. the adjustable field emission test method of electrode spacing in a kind of vacuum system, it is surveyed using as described in claim 1
Trial assembly is set, comprising the following steps:
The first step, when field emission material (3) not being fixed on field emission material fixing seat (1), by micrometer caliper (4)
Measuring staff end and field emission material fixing seat (1) contact, write down the initial scale of micrometer caliper (4)；
Second step is rotated by control line (9) control stepper motor (8), drives square key transmission shaft (7) movement, and then control institute
The measuring staff end for stating micrometer caliper (4) retreats set distance；
Third step, the fixed field emission material (3) for setting thickness on the field emission material fixing seat (1), cause field
Emissive material (3) is towards the measuring staff end of the micrometer caliper (4)；
Third step is grounded after lead-out wire B (12) is connected with ammeter, and the field emission material (3) is used as cathode；It will draw
Line A (11) is connected with setting voltage, and the micrometer caliper (4) is used as anode；The stepping is adjusted by adjusting control line (9)
Motor (8) rotation, and then square key transmission shaft (7) movement is driven, square key transmission shaft (7) movement makes the spiral micrometer
Device (4) rotation setting scale, the electrode spacing of each corresponding field emission of rotation scale, the ammeter record different electricity
Interpolar away from when autoelectronic current.
6. the adjustable field emission test method of electrode spacing in vacuum system as claimed in claim 5, which is characterized in that institute
It states and sets voltage as 0-5000V.
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| CN201811367414.2A CN109613064A (en) | 2018-11-16 | 2018-11-16 | The adjustable field emission test device of electrode spacing and method in a kind of vacuum system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110349379A (en) * | 2019-08-07 | 2019-10-18 | 上海中医药大学附属岳阳中西医结合医院 | A kind of warning device of particular surroundings measurement and safety monitoring |
| CN111140452A (en) * | 2019-12-26 | 2020-05-12 | 兰州空间技术物理研究所 | Multi-parameter online adjusting mechanism and method for Hall thruster performance optimization |
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| CN110349379A (en) * | 2019-08-07 | 2019-10-18 | 上海中医药大学附属岳阳中西医结合医院 | A kind of warning device of particular surroundings measurement and safety monitoring |
| CN111140452A (en) * | 2019-12-26 | 2020-05-12 | 兰州空间技术物理研究所 | Multi-parameter online adjusting mechanism and method for Hall thruster performance optimization |
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