CN2747578Y - Built-in controllable moveable anode electronic emitting tester - Google Patents
Built-in controllable moveable anode electronic emitting tester Download PDFInfo
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- CN2747578Y CN2747578Y CN 200420084205 CN200420084205U CN2747578Y CN 2747578 Y CN2747578 Y CN 2747578Y CN 200420084205 CN200420084205 CN 200420084205 CN 200420084205 U CN200420084205 U CN 200420084205U CN 2747578 Y CN2747578 Y CN 2747578Y
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- anode
- movable bar
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- insulating film
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- 238000012360 testing method Methods 0.000 claims abstract description 32
- 238000007796 conventional method Methods 0.000 claims abstract description 4
- 230000005540 biological transmission Effects 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 abstract description 4
- 239000012776 electronic material Substances 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000004154 testing of material Methods 0.000 abstract description 2
- 230000010354 integration Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- -1 monox Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
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Abstract
The utility model relates to a built-in controllable moveable anode electronic emitting tester which belongs to the industry of an electronic material testing apparatus. The existing apparatus has the disadvantages that the anode has to be arranged outside the vacuum chamber so that the sample can not directly carry out the test after fabrication, and because the sample has to be exposed to the atmosphere, the sample changes compared with that the sample is not exposed to the atmosphere. The insulating film separated from the anode is easy to deform, and the different deformations during mounting cause the relatively great distance error between the cathode and the anode. The operational process of mounting is also relatively complicated. The utility model which comprises a vacuum chamber, a vacuum pump system, an anode part, a cathode part, an electrical measuring apparatus and a movable bar control assembly composed of a movable bar controller and a movable bar is characterized in that the anode part is formed by the integration of the anode (1) and the insulating film (4). Seeing the picture, the surface of the anode (1) is coated with a layer of insulating film (4) by the conventional method, and the center of the insulating film (4) has an area that is not coated with the insulating film as the testing area of field emission.
Description
Technical field:
Belong to electronic material testing apparatus industry, be applied to the test aspect of field emmision material research.
Background technology:
Field electron emission materials is having a wide range of applications aspect radio tube and the field emission plane demonstration.In the research and production of field emmision material, the measuring technology of field-causing electron emission seems quite important.
In existing the transmission test set, generally be to need in the vacuum chamber outside sample to be installed on two electrodes (as Fig. 1) earlier, send into vacuum chamber then, two electrodes are communicated with test circuit.A dielectric film is wherein arranged between sample and anode, and dielectric film separates with anode usually.Its shortcoming is:
1) anode need be installed outside vacuum chamber, makes can not directly measure after the specimen preparation, must expose atmosphere, will test and send into a transmission test chamber again after fastener installs, and this moment sample surfaces with do not expose atmosphere before change than, so be unfavorable for studying;
2) dielectric film separates with anode, and dielectric film is yielding, and the deformation when being installed each time has difference, causes that yin, yang anode-cathode distance error is bigger, makes that the stochastic error in the test result increases;
3) the also more loaded down with trivial details complexity of the operating process that is installed.
Summary of the invention:
Built-in controlled moving anode field-causing electron transmission test set provided by the invention, the cathode and anode spacing error that causes at the anode in the field-causing electron transmission test field and dielectric film split is big, need sample is exposed the problem that atmosphere is installed.
Solve the method for anode cathode separation error in the technical solution of the present invention, exactly anode and dielectric film are fixed on the vacuum may command carriage release lever after integrated, when being placed on after specimen preparation is come out on the negative electrode, be put into integrated anode bottom, moving anode is placed into it on sample then, has just formed the test structure of field-causing electron emission.
Built-in controlled moving anode field-causing electron transmission test set (see figure 2) provided by the invention, the movable bar Control Component, the electrical measurement instrument 12 that comprise vacuum chamber 10, vacuum pump system 14, anode part 7, cathode portion 6, form by movable bar controller 9 and movable bar 8; Vacuum chamber 10 bottoms are linked to each other so that obtain high vacuum by vacuum pipe 13 with vacuum pump system 14, and movable bar controller 9 is equipped with in the top, move up and down in order to control movable bar 8; What link to each other with movable bar 8 is that anode part 7,7 bottoms are cathode portion 6; Anode part 7 is all linked to each other with electrical measurement instrument 12 by lead 11 with cathode portion 6, it is characterized in that: described anode part 7 is with anode 1 and the dielectric film 4 integrated (see figure 3)s that form, promptly plate one deck dielectric film 4 with conventional method on anode 1 surface, the center is reserved a zone and is not plated dielectric film on dielectric film 4, and this zone is as field transmission test area.
Wherein, the thickness of dielectric film 4 is in 1 micron to 50 microns scope.
The material of dielectric film 4 can be any conventional insulating material such as monox, aluminium oxide
Explain: the effect of (1) dielectric film 4 is that anode 1 and testing sample 3 are separated.The thickness of the size of the not coating film area that the center is reserved on the dielectric film 4 and shape and dielectric film 4 is decided according to the concrete needs of test.
(2) the movable bar Control Component formed of movable bar controller 9 and movable bar 8 is conventional vacuum standard accessory.
(3) anode part 7 is fixedly mounted on when vacuum chamber is assembled in the vacuum chamber on " movable bar " 8.
During test, testing sample 3 is placed on the anode below of putting into vacuum chamber on the negative electrode 2 again, is positioned over sample surfaces by movable bar controller control anode part 7 then, begin to test.
Adopt the obtained actual effect of built-in controlled moving anode field-causing electron transmission test set of the present invention to be:
1) dielectric film and anode are integrated, and dielectric film is not yielding, do not have the deformation difference when being installed each time, make that anode cathode separation control is more accurate, and the test stochastic error is little;
2) owing to saved the process that is installed of dielectric film and anode, it is more simple and convenient that test operating procedure becomes.
Description of drawings:
Existing transmission test anode and cathode structural drawing of Fig. 1
1. anodes among the figure; 2. negative electrode; 3. sample; 4. dielectric film; 5. nut
The built-in controlled moving anode field-causing electron transmission test set of Fig. 2
6. cathode portion among the figure; 7. anode part; 8. movable bar; 9. movable bar controller; 10. vacuum chamber; 11. lead; 12 electrical measurement instrument; 13. vacuum pipe; 14. vacuum pump system;
Built-in removable anode of Fig. 3 and cathode junction composition
1. anodes among the figure; 2. negative electrode; 3. sample; 4. dielectric film; 8. movable bar
Embodiment
Device (see figure 2) of the present invention, the movable bar Control Component, the electrical measurement instrument 12 that comprise vacuum chamber 10, vacuum pump system 14, anode part 7, cathode portion 6, form by movable bar controller 9 and movable bar 8.
When testing, at first sample 3 is put into vacuum chamber, be placed on the negative electrode 2, sample 3 and negative electrode 2 have been formed cathode portion 6.Start vacuum pump system 14 then, the gas in the vacuum chamber 10 is taken out, make to reach ultra-high vacuum state in the vacuum chamber.At this moment move down by " movable bar controller " 9 control " anode parts " 7, it is pressed on the cathode portion 6.This moment, test loop formed, and therefore can finish the field-causing electron transmission test by field-causing electron transmitter current and institute's making alive of electrical measurement instrument 12 measuring samples.
Claims (2)
1, built-in controlled moving anode field-causing electron transmission test set, the movable bar Control Component, the electrical measurement instrument (12) that comprise vacuum chamber (10), vacuum pump system (14), anode part (7), cathode portion (6), form by movable bar controller (9) and movable bar (8); Vacuum chamber (10) is following to be linked to each other so that obtain high vacuum by vacuum pipe (13) with vacuum pump system (14), and movable bar controller (9) is equipped with in the top, moves up and down in order to control movable bar (8); What link to each other with movable bar (8) is anode part (7), and anode part (7) bottom is cathode portion (6); Anode part (7) is all linked to each other with electrical measurement instrument (12) by lead (11) with cathode portion (6), it is characterized in that: described anode part (7) is with anode (1) and integrated the forming of dielectric film (4), promptly plate one deck dielectric film (4) with conventional method on anode (1) surface, reserve a zone in the last center of dielectric film (4) and do not plate dielectric film, this zone is as field transmission test area.
2, built-in controlled moving anode field-causing electron transmission test set according to claim 1, the thickness of dielectric film wherein (4) is at 1 micron to 50 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420084205 CN2747578Y (en) | 2004-07-22 | 2004-07-22 | Built-in controllable moveable anode electronic emitting tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420084205 CN2747578Y (en) | 2004-07-22 | 2004-07-22 | Built-in controllable moveable anode electronic emitting tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2747578Y true CN2747578Y (en) | 2005-12-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420084205 Expired - Fee Related CN2747578Y (en) | 2004-07-22 | 2004-07-22 | Built-in controllable moveable anode electronic emitting tester |
Country Status (1)
| Country | Link |
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| CN (1) | CN2747578Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675632A (en) * | 2012-09-21 | 2014-03-26 | 中国科学院电子学研究所 | Cathode emission testing apparatus and system for microwave vacuum electronic devices |
| CN106841369A (en) * | 2017-03-03 | 2017-06-13 | 河南理工大学 | A kind of Field Electron Emission test device |
| CN109613064A (en) * | 2018-11-16 | 2019-04-12 | 兰州空间技术物理研究所 | The adjustable field emission test device of electrode spacing and method in a kind of vacuum system |
-
2004
- 2004-07-22 CN CN 200420084205 patent/CN2747578Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675632A (en) * | 2012-09-21 | 2014-03-26 | 中国科学院电子学研究所 | Cathode emission testing apparatus and system for microwave vacuum electronic devices |
| CN106841369A (en) * | 2017-03-03 | 2017-06-13 | 河南理工大学 | A kind of Field Electron Emission test device |
| CN106841369B (en) * | 2017-03-03 | 2023-03-24 | 河南理工大学 | Field electron emission testing device |
| CN109613064A (en) * | 2018-11-16 | 2019-04-12 | 兰州空间技术物理研究所 | The adjustable field emission test device of electrode spacing and method in a kind of vacuum system |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |