CN106841369A - A kind of Field Electron Emission test device - Google Patents
A kind of Field Electron Emission test device Download PDFInfo
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- CN106841369A CN106841369A CN201710122599.XA CN201710122599A CN106841369A CN 106841369 A CN106841369 A CN 106841369A CN 201710122599 A CN201710122599 A CN 201710122599A CN 106841369 A CN106841369 A CN 106841369A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
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Abstract
The present invention provides a kind of Field Electron Emission test device, including vacuum chamber, bonding in vacuum mechanism, anode part and cathode portion；Vacuum chamber is cylinder type, and top center is provided with flange, and side wall is provided with the first connector and is connected with bonding in vacuum mechanism, and vacuum chamber side wall has some observation windows near bottom position；Anode part is arranged on the controller on action bars on the top of vacuum chamber, including installed in the action bars of flange center positioned at the outside of vacuum chamber, is fixed on the anode of action bars lower end；Cathode portion includes the binding post that some sample stages set around chamber bottom center circumferential and sample stage connect one to one, binding post is connected through chamber bottom with outer lead, sample stage includes hold-down support and specimen holder, and sample stage is corresponding with observation window.The present invention is independent test device, can be connected with any vacuum equipment, can test multiple samples under an experimental condition, is convenient for changing the test that anode meets different sample requirements.
Description
Technical field
The invention belongs to the apparatus field of testing of materials, and in particular to a kind of Field Electron Emission test device.
Background technology
In EED, millimeter micron wave device is accounted for field electron emission materials in the research of sensor etc.
There is critical role, it is shown that good application prospect.In the research of field emmision material, the measuring technology of Field Electron Emission is outstanding
For important.
For field emission material, ambiance, especially system vacuum be influence emitting performance it is important because
One of element.When high-velocity electrons and gas molecule collision, there is ionization in gas molecule, ionize out negative ions.Ionize out just
Ion, with certain energy bombardment field emmision material surface, makes emission tip gradually damage under electric field force effect, and influence transmitting is steady
It is qualitative；And the anion for ionizing out in the presence of electric field force to anode movement, it is relative without air ionization when negative electrical charge number increase,
Cause test data deviation big, therefore requirement harshness during field emission test to system vacuum.Due to common test system
System is unable to reach vacuum so high, and current Flied emission test device is generally equipped with a set of independent vacuum by a sample room
System is constituted, and is taken up room big, and experimentation cost is high.Also, existing Flied emission test device can only generally test one every time
Sample, if to complete the test of multiple samples, needs that " inflation is repeated several times（Destruction vacuum）→ installation sample → vacuumize
The step of → test ".Operating process is more numerous and diverse, and testing efficiency is low.Additionally, existing Flied emission test equipment anode fix,
It is difficult to change, it is impossible to meet the field emission test of different test requests, different size sample.
The content of the invention
In place of in view of the shortcomings of the prior art, it is an object of the invention to provide a kind of field emission test device,
It is an independent test system, can be connected on the existing vacuum equipment in laboratory by pipeline, it is not necessary to be equipped with only
Vertical vacuum system；And multiple sample test platforms are provided with vacuum chamber, by designing controller architecture, can be effective
Regulation anode position, realizes the anode multiple cathode samples of correspondence test, is realized to multiple in the case where vacuum is not destroyed
Sample is tested；By structure design anode clamp, anode is convenient for changing, the test to meet various cathode samples will
Ask, such as film sample and needle point sample are simply required so as to reach reduces cost, save space, operating method.
The purpose of the present invention is achieved through the following technical solutions：
A kind of Field Electron Emission test device, including vacuum chamber, bonding in vacuum mechanism, anode part and cathode portion；
The vacuum chamber is cylinder type, and top center is provided with flange, and side wall is provided with the first connector, first connection
Mouth is connected with bonding in vacuum mechanism, and the side wall of the vacuum chamber is provided with some observation windows near bottom position；
The anode part is arranged on the top of vacuum chamber, including action bars, controller and anode, and the action bars is arranged on
Vacuum chamber top flange center, the controller is arranged on action bars the outside for being located at vacuum chamber, the anode connection
In the lower end of action bars；
The cathode portion includes that some sample stages set around chamber bottom center circumferential and sample stage are corresponded and connects
The binding post for connecing, is provided with insulation barrier and is separated between the sample stage, and the binding post passes through chamber bottom simultaneously
It is connected with outer lead, the sample stage includes hold-down support and specimen holder, the observation of the sample stage and vacuum chamber side wall
Window position is corresponding.
Further, the bonding in vacuum mechanism is a vacuum four-way pipe, and one of port connects the vacuum chamber
First connector of room, remaining port connects vacuum valve, vacuum meter and vacuum corrugated pipe respectively.
Preferably, the action bars includes the first montant, the first cross bar and the second montant, first montant is arranged on
Flange center, on the vertical plane of circumference where the sample stage center, the anode is fixed in the axle center of second montant
The bottom of the second montant.
In order to preferably implement the present invention, there are two alignment pins, the specimen holder bottom on the hold-down support of the sample stage
There are two location holes in face, and the alignment pin of hold-down support is corresponding with the position of positioning hole of specimen holder and can be closely connected, described
Specimen holder uses insulating materials, and the specimen holder upper surface is provided with copper sheet, and the copper sheet is connected to sample by trip bolt
On frame.
Further, the action bars end is provided with screw thread, and the anode is connected by screw thread with action bars, the sun
The geometric center of pole is coaxial with sample stage center；The controller control operation bar is rotated and is moved up and down.
The present invention compared with the prior art, with advantages below and beneficial effect：
1st, the present invention is an independent vacuum chamber, only need to be by the existing vacuum equipment in itself and laboratory when using（As magnetic control splashes
Penetrate or vacuum melting furnace etc.）Connection, you can obtain the required vacuum of field emission test, it is not necessary to be equipped with single vacuum system
System, solves the problems, such as that existing Flied emission test equipment input cost is high.
2nd, the present invention is to realize opening a cavity Installation And Test by setting multiple sample stages in cathode portion
Multiple samples, solve the problems, such as existing sample test inefficiency.
3rd, simple structure of the present invention, it is easy for operation, be skillfully constructed, can efficiently solve in the prior art equipment throw
Enter high cost, the low problem of sample test efficiency, the deficiencies in the prior art are solved well, be the field emission performance of material
Research offer condition, at the same it is cost-effective, improve efficiency.
Brief description of the drawings
Fig. 1 the structural representation of present invention；
Fig. 2 bonding in vacuum structural scheme of mechanism of the invention；
Fig. 3 A-A section plan views of the invention；
Fig. 4 sample stage structural representations of the invention.
Specific embodiment
The present invention is described in further detail with reference to embodiment, but embodiments of the present invention not limited to this.
Embodiment
As shown in Figure 1, Figure 2, Figure 3 shows, a kind of Field Electron Emission test device, including vacuum chamber 1, bonding in vacuum mechanism
4th, anode part and cathode portion；The vacuum chamber 1 is cylinder type, and top center is provided with flange 3, and side wall is provided with first
Connector 12, first connector 12 is connected with bonding in vacuum mechanism 4, and the side wall of the vacuum chamber 1 is near bottom position
It is provided with some observation windows 11；The anode part is arranged on the top of vacuum chamber 1, including action bars 5, controller 2 and sun
Pole 7, the action bars 5 is arranged on the center of flange 3, and the controller 2 is arranged on action bars 5 outside for being located at vacuum chamber 1,
The anode 7 is connected to the lower end of action bars 5；If the cathode portion includes what is set around the bottom centre's circumference of vacuum chamber 1
The binding post 10 that dry sample sample platform 8 and sample stage 8 connect one to one, insulation barrier 6 is provided between the sample stage 8 to be carried out
Separate, the binding post 10 is connected through the bottom of vacuum chamber 1 and with outer lead, the sample stage 8 includes hold-down support 81
With specimen holder 82, the sample stage 8 is corresponding with the position of observation window 11 of the side wall of vacuum chamber 1.
Further, the bonding in vacuum mechanism 4 is a vacuum four-way pipe, and one of port 401 connects described true
First connector 12 of plenum chamber 1, the connection of port 402 vacuum valve, the connection of port 403 vacuum meter, the connection of port 404 vacuum ripple
Line pipe 13.
Preferably, the action bars 5 includes the first montant 501, the first cross bar 502 and the second montant 503, described first
Montant 501 is arranged on the center of flange 3, the vertical plane of axle center circumference where the center of the sample stage 8 of second montant 503
On, the anode 7 is fixed on the bottom of the second montant 503.
In order to preferably implement the present invention, there are two alignment pins 811, the sample on the hold-down support 81 of the sample stage 8
There are two location holes 821 bottom surface of product frame 82, and the alignment pin 811 of hold-down support 81 is corresponding with the position of location hole 821 of specimen holder 82
And can be closely connected, the specimen holder 82 uses insulating materials, and the upper surface of the specimen holder 82 is provided with copper sheet 822, institute
Copper sheet 822 is stated to be connected on specimen holder 82 by trip bolt 823.
Further, the end of the action bars 5 is provided with screw thread, and the anode 7 is connected by screw thread with action bars 5, institute
The geometric center for stating anode 7 is coaxial with the center of sample stage 8；The control operation bar 5 of the controller 2 is rotated and is moved up and down.
Before test, according to the size of sample 9 and test request, sun is constituted after selection particular conductivity anode and dielectric film integration
Pole 7, the end of action bars 5 is installed to by anode 7；
When being tested using Patent equipment of the present invention：
The port 401 for connecting bonding in vacuum mechanism 4 is connected the first connector 12 of vacuum chamber 1 first, by vacuum valve, very
Sky meter, vacuum corrugated pipe 13 be connected respectively to the port 402 of bonding in vacuum mechanism 4, port 403, on port 404, by vacuum ripple
The other end of line pipe 13 is connected on the interface of the existing vacuum equipment in laboratory, can be using connected modes such as flange or cutting ferrules；
Specimen holder 82 is taken out, testing sample 9 is arranged on the specimen holder 82 of Field Electron Emission test device cathode portion, will
Copper sheet 822 is pressed onto on sample 9 and tightens trip bolt 823, and then specimen holder 82 is installed on fixed support 81, specimen holder 82
On location hole 821 aligned with the alignment pin 811 on fixed support 81；
Vacuum valve is opened, is started vacuum system and is extracted the gas in vacuum chamber 1 out, by the port of bonding in vacuum mechanism 4
The vacuum meter of 403 connections carrys out the vacuum state of monitor in real time vacuum chamber 1, makes to reach test vacuum level requirements in vacuum chamber 1
（Such as 10-4Pa）；
By the rotation process bar 5 of controller 2, make the anode 7 of the lower end of action bars 5 just to sample 9, then controlled by controller 2
Control stick 5 moves down anode 7, the position of anode 7 is observed by observation window 11, until anode 7 is placed on sample 9；
The two ends of electrical measurement instrument connect binding post 10 and anode that the place sample stage of testing sample 9 is connected respectively by wire
7, now test loop formed, by electrical measurement instrument complete Field Electron Emission test；
After having tested the sample, anode 7 is moved up by the control control stick 5 of controller 2, then control operation bar 5 rotates,
Anode 7 is directed at next cathode sample to be measured 9, repeat the above steps, be finally completed the test of whole samples.
The present invention is an independent test device, arbitrarily can be connected with other vacuum equipments, it is not necessary to be equipped with individually true
Empty set is united, and can realize various chis by the quantity of the size and sample stage 8 that change Field Electron Emission test device Anodic 7
The test request of very little, multiple samples.When cathode sample 9 is film, or test emission uniformity can be waited, and anode 7 can select saturating
Bright conductive film（Such as ito thin film etc.）；Sample size is smaller（Area is less than 0.5mm2）When, anode 7 can select good conductor material
Material（Such as metallic copper etc.）.Only anode 7 need to be processed into the size supporting with the end thread of action bars 5, be then fitted into operation
The end of bar 5 achieves that test sizes sample and meets test request.
It is noted that embodiment described above is to the illustrative and not limiting of technical solution of the present invention, affiliated technology neck
The equivalent of domain those of ordinary skill or other modifications made according to prior art, as long as not exceeding the technology of the present invention side
The thinking and scope of case, should be included within interest field of the presently claimed invention.
Claims (6)
1. a kind of Field Electron Emission test device, it is characterised in that：Including vacuum chamber, bonding in vacuum mechanism, anode part
And cathode portion；
The vacuum chamber is cylinder type, and top center is provided with flange, and side wall is provided with the first connector, first connection
Mouth is connected with bonding in vacuum mechanism, and the side wall of the vacuum chamber is provided with some observation windows near bottom position；
The anode part is arranged on the top of vacuum chamber, including action bars, controller and anode, and the action bars is arranged on
Vacuum chamber top flange center, the controller is arranged on action bars the outside for being located at vacuum chamber, the anode connection
In the lower end of action bars；
The cathode portion includes that some sample stages set around chamber bottom center circumferential and sample stage are corresponded and connects
The binding post for connecing, is provided with insulation barrier and is separated between the sample stage, and the binding post passes through chamber bottom simultaneously
It is connected with outer lead, the sample stage includes hold-down support and specimen holder, the observation of the sample stage and vacuum chamber side wall
Window position is corresponding.
2. a kind of Field Electron Emission test device according to claim 1, it is characterised in that：The bonding in vacuum mechanism
It is a vacuum four-way pipe, one of port connects the first connector of the vacuum chamber, and remaining port connects very respectively
Empty valve, vacuum meter and vacuum corrugated pipe.
3. a kind of Field Electron Emission test device according to claim 1, it is characterised in that：The action bars includes the
One montant, the first cross bar and the second montant, first montant are arranged on flange center, and the axle center of second montant is described
On the vertical plane of circumference where sample stage center, the anode is fixed on the bottom of the second montant.
4. a kind of Field Electron Emission test device according to claim 1, it is characterised in that：The fixation of the sample stage
There are two alignment pins on bearing, there are two location holes, the alignment pin of hold-down support and the positioning of specimen holder in the specimen holder bottom surface
Hole site correspondence can simultaneously be closely connected, and the specimen holder uses insulating materials, and the specimen holder upper surface is provided with copper sheet,
The copper sheet is connected on specimen holder by trip bolt.
5. a kind of Field Electron Emission test device according to claim 1 or 3, it is characterised in that：The action bars end
End is provided with screw thread, and the anode is connected by screw thread with action bars, and the geometric center of the anode is coaxial with sample stage center.
6. a kind of Field Electron Emission test device according to claim 1 or 3, it is characterised in that：The controller control
Action bars processed is rotated and is moved up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710122599.XA CN106841369B (en) | 2017-03-03 | 2017-03-03 | Field electron emission testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710122599.XA CN106841369B (en) | 2017-03-03 | 2017-03-03 | Field electron emission testing device |
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| Publication Number | Publication Date |
|---|---|
| CN106841369A true CN106841369A (en) | 2017-06-13 |
| CN106841369B CN106841369B (en) | 2023-03-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710122599.XA Active CN106841369B (en) | 2017-03-03 | 2017-03-03 | Field electron emission testing device |
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| Country | Link |
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| CN (1) | CN106841369B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109613064A (en) * | 2018-11-16 | 2019-04-12 | 兰州空间技术物理研究所 | The adjustable field emission test device of electrode spacing and method in a kind of vacuum system |
| CN113218634A (en) * | 2021-05-06 | 2021-08-06 | 昆山国力大功率器件工业技术研究院有限公司 | X-ray tube performance testing equipment |
| CN114664681A (en) * | 2022-02-14 | 2022-06-24 | 江苏中芯沃达半导体科技有限公司 | LED chip in-situ monitoring equipment and method |
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| JPH0743236A (en) * | 1993-07-30 | 1995-02-14 | Tokai Univ | Vacuum gauge of constant-current operating field emission type |
| CN2747578Y (en) * | 2004-07-22 | 2005-12-21 | 北京工业大学 | Built-in controllable moveable anode electronic emitting tester |
| CN102339713A (en) * | 2011-11-01 | 2012-02-01 | 电子科技大学 | Field emission X ray tube with light-grid compound control |
| CN103014627A (en) * | 2013-01-17 | 2013-04-03 | 大连理工大学 | Fe-Si-Al ternary amorphous thin film with adjustable band gap width and preparation method of thin film |
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Patent Citations (4)
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|---|---|---|---|---|
| JPH0743236A (en) * | 1993-07-30 | 1995-02-14 | Tokai Univ | Vacuum gauge of constant-current operating field emission type |
| CN2747578Y (en) * | 2004-07-22 | 2005-12-21 | 北京工业大学 | Built-in controllable moveable anode electronic emitting tester |
| CN102339713A (en) * | 2011-11-01 | 2012-02-01 | 电子科技大学 | Field emission X ray tube with light-grid compound control |
| CN103014627A (en) * | 2013-01-17 | 2013-04-03 | 大连理工大学 | Fe-Si-Al ternary amorphous thin film with adjustable band gap width and preparation method of thin film |
Non-Patent Citations (1)
| Title |
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| 龚力等: "光电子能谱仪新增功能研发", 《实验室研究与探索》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109613064A (en) * | 2018-11-16 | 2019-04-12 | 兰州空间技术物理研究所 | The adjustable field emission test device of electrode spacing and method in a kind of vacuum system |
| CN113218634A (en) * | 2021-05-06 | 2021-08-06 | 昆山国力大功率器件工业技术研究院有限公司 | X-ray tube performance testing equipment |
| CN113218634B (en) * | 2021-05-06 | 2022-06-17 | 昆山国力大功率器件工业技术研究院有限公司 | X-ray tube performance testing equipment |
| CN114664681A (en) * | 2022-02-14 | 2022-06-24 | 江苏中芯沃达半导体科技有限公司 | LED chip in-situ monitoring equipment and method |
| CN114664681B (en) * | 2022-02-14 | 2022-09-23 | 江苏中芯沃达半导体科技有限公司 | LED chip in-situ monitoring equipment and method |
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| CN106841369B (en) | 2023-03-24 |
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