CN206546346U - A kind of Field Electron Emission test device - Google Patents
A kind of Field Electron Emission test device Download PDFInfo
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- CN206546346U CN206546346U CN201720200647.8U CN201720200647U CN206546346U CN 206546346 U CN206546346 U CN 206546346U CN 201720200647 U CN201720200647 U CN 201720200647U CN 206546346 U CN206546346 U CN 206546346U
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- vacuum
- vacuum chamber
- anode
- action bars
- sample stage
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Abstract
The utility model provides a kind of Field Electron Emission test device, including vacuum chamber, bonding in vacuum mechanism, anode part and cathode portion；Vacuum chamber is cylinder type, and top center is provided with flange, and side wall is provided with the first connector and is connected with bonding in vacuum mechanism, and vacuum chamber side wall has some observation windows close to bottom position；Anode part is arranged on the controller on action bars positioned at the outside of vacuum chamber, is fixed on the anode of action bars lower end on the top of vacuum chamber, including installed in the action bars of flange center；Cathode portion includes some sample stages set around chamber bottom center circumferential, the binding post being connected with sample stage, and binding post is connected through chamber bottom with outer lead, and sample stage includes hold-down support and specimen holder, and sample stage is corresponding with observation window.The utility model is independent test device, can be connected with any vacuum equipment, can test multiple samples under an experimental condition, be convenient for changing the test that anode meets different sample requirements.
Description
Technical field
The utility model belongs to the apparatus field of testing of materials, and in particular to a kind of Field Electron Emission test device.
Background technology
Field electron emission materials are in EED, millimeter micron wave device, accounted in the research of sensor etc.
There is critical role, it is shown that good application prospect.In the research of field emmision material, the measuring technology of Field Electron Emission is outstanding
To be important.
For field emission material, ambiance, especially system vacuum be influence emitting performance it is important because
One of element.When high-velocity electrons and gas molecule collision, ionization occurs for gas molecule, ionizes out negative ions.Ionize out just
Ion, with certain energy bombardment field emmision material surface, makes emission tip gradually damage under electric field force effect, and influence transmitting is steady
It is qualitative；And to anode movement, when relatively without air ionization, negative electrical charge number increases the anion ionized out in the presence of electric field force,
Cause test data deviation big, therefore requirement during field emission test to system vacuum is harsh.Due to common test system
System is unable to reach so high vacuum, and current Flied emission test device is generally equipped with a set of independent vacuum by a sample room
System is constituted, and space-consuming is big, and experimentation cost is high.Also, existing Flied emission test device can only generally test one every time
Sample, if to complete the test of multiple samples, needs that " inflation is repeated several times（Destroy vacuum）→ installing sample → vacuumizes
The step of → test ".Operating process is more numerous and diverse, and testing efficiency is low.In addition, existing Flied emission test equipment anode fix,
It is difficult to change, it is impossible to meet the field emission test of different test requests, different sample sizes.
Utility model content
In place of in view of the shortcomings of the prior art, the purpose of this utility model is to provide a kind of field emission test dress
Put, it is an independent test system, can be connected to by pipeline on the existing vacuum equipment in laboratory, it is not necessary to be equipped with
Independent vacuum system；And multiple sample test platforms are provided with vacuum chamber, by designing controller architecture, Ke Yiyou
Effect regulation anode position, realizes the multiple cathode samples of anode correspondence test, is realized in the case where not destroying vacuum to many
Individual sample is tested；By structure design anode clamp, be convenient for changing anode, to meet a variety of cathode samples test will
Ask, such as film sample and needle point sample, so that reaching reduces cost, saves space, operating method and simply require.
The purpose of this utility model is achieved through the following technical solutions：
A kind of Field Electron Emission test device, including vacuum chamber, bonding in vacuum mechanism, anode part and negative pole part
Point；
The vacuum chamber is cylinder type, and top center is provided with flange, and side wall is provided with the first connector, described first
Connector is connected with bonding in vacuum mechanism, and the side wall of the vacuum chamber is provided with some observation windows close to bottom position；
The anode part is arranged on the top of vacuum chamber, including action bars, controller and anode, the action bars peace
Mounted in vacuum chamber top flange center, the controller is arranged on the outside for being located at vacuum chamber on action bars, the anode
It is connected to the lower end of action bars；
Some sample stages that the cathode portion includes setting around chamber bottom center circumferential, with a pair of sample stage 1
Insulation barrier is provided between the binding post that should be connected, the sample stage to be separated, the binding post passes through vacuum chamber bottom
Portion is simultaneously connected with outer lead, and the sample stage includes hold-down support and specimen holder, the sample stage and vacuum chamber side wall
Observe window position corresponding.
Further, the bonding in vacuum mechanism is a vacuum four-way pipe, and one of port connects the vacuum chamber
First connector of room, remaining port connects vacuum valve, vacuum meter and vacuum corrugated pipe respectively.
Preferably, the action bars includes the first montant, the first cross bar and the second montant, first montant is arranged on
Flange center, the axle center of second montant is on the vertical plane of circumference, the anode is fixed on where the sample stage center
The bottom of second montant.
In order to preferably implement have two alignment pins, the sample on the utility model, the hold-down support of the sample stage
There are two positioning holes frame bottom surface, and the alignment pin of hold-down support is corresponding with the position of positioning hole of specimen holder and can be closely connected,
The specimen holder uses insulating materials, and the specimen holder upper surface is provided with copper sheet, and the copper sheet is connected to by trip bolt
On specimen holder.
Further, the action bars end is provided with screw thread, and the anode is connected by screw thread with action bars, the sun
The geometric center of pole is coaxial with sample stage center；The controller control operation bar is rotated and moved up and down.
The utility model compared with the prior art, with advantages below and beneficial effect：
1st, the utility model is an independent vacuum chamber, only need to be by the existing vacuum equipment in itself and laboratory when using
（Such as magnetron sputtering or vacuum melting furnace）Connection, you can obtain the required vacuum of field emission test, it is not necessary to be equipped with single
Only vacuum system, solves the problem of existing Flied emission test equipment input cost is high.
2nd, the utility model be realized by setting multiple sample stages in cathode portion cavity of opening install and
Multiple samples are tested, the problem of solving existing sample test inefficiency.
3rd, the utility model is simple in construction, easy for operation, be skillfully constructed, and can efficiently solve and set in the prior art
Standby input cost is high, the low problem of sample test efficiency, and the deficiencies in the prior art are solved well, are the field emission of material
Performance study provides condition, at the same it is cost-effective, improve efficiency.
Brief description of the drawings
Fig. 1 structural representations of the present utility model；
Fig. 2 bonding in vacuum structural scheme of mechanism of the present utility model；
Fig. 3 A-A section plan views of the present utility model；
Fig. 4 sample stage structural representations of the present utility model.
Embodiment
The utility model is described in further detail with reference to embodiment, but embodiment of the present utility model is not
It is limited to this.
Embodiment
As shown in Figure 1, Figure 2, Figure 3 shows, a kind of Field Electron Emission test device, including vacuum chamber 1, bonding in vacuum mechanism
4th, anode part and cathode portion；The vacuum chamber 1 is cylinder type, and top center is provided with flange 3, and side wall is provided with first
Connector 12, first connector 12 is connected with bonding in vacuum mechanism 4, and the side wall of the vacuum chamber 1 is close to bottom position
It is provided with some observation windows 11；The anode part is arranged on the top of vacuum chamber 1, including action bars 5, controller 2 and sun
Pole 7, the action bars 5 is arranged on the center of flange 3, and the controller 2 is arranged on the outside for being located at vacuum chamber 1 on action bars 5,
The anode 7 is connected to the lower end of action bars 5；If the cathode portion includes what is set around the bottom centre's circumference of vacuum chamber 1
Insulation barrier 6 is provided between dry sample sample platform 8, the binding post 10 connected one to one with sample stage 8, the sample stage 8 to carry out
Separate, the binding post 10 is connected through the bottom of vacuum chamber 1 and with outer lead, the sample stage 8 includes hold-down support 81
With specimen holder 82, the sample stage 8 is corresponding with the position of observation window 11 of the side wall of vacuum chamber 1.
Further, the bonding in vacuum mechanism 4 is a vacuum four-way pipe, and one of port 401 connects described true
First connector 12 of plenum chamber 1, the connection of port 402 vacuum valve, the connection of port 403 vacuum meter, the connection of port 404 vacuum ripple
Line pipe 13.
Preferably, the action bars 5 includes the first montant 501, the first cross bar 502 and the second montant 503, described first
Montant 501 is arranged on the center of flange 3, the vertical plane of axle center circumference where the center of sample stage 8 of second montant 503
On, the anode 7 is fixed on the bottom of the second montant 503.
In order to preferably implement have two alignment pins 811, institute on the utility model, the hold-down support 81 of the sample stage 8
Stating the bottom surface of specimen holder 82 has two positioning holes 821, the alignment pin 811 of hold-down support 81 and the position of positioning hole 821 of specimen holder 82
Correspondence can simultaneously be closely connected, and the specimen holder 82 uses insulating materials, and the upper surface of specimen holder 82 is provided with copper sheet
822, the copper sheet 822 is connected on specimen holder 82 by trip bolt 823.
Further, the end of action bars 5 is provided with screw thread, and the anode 7 is connected by screw thread with action bars 5, institute
The geometric center for stating anode 7 is coaxial with the center of sample stage 8；The control operation bar 5 of controller 2 is rotated and moved up and down.
Before test, according to the size of sample 9 and test request, sun is constituted after selection particular conductivity anode and dielectric film integration
Pole 7, the end of action bars 5 is installed to by anode 7；
When being tested using the utility model Patent equipment：
The port 401 for connecting bonding in vacuum mechanism 4 is connected to the first connector 12 of vacuum chamber 1 first, by vacuum valve
Door, vacuum meter, vacuum corrugated pipe 13 are connected respectively to the port 402 of bonding in vacuum mechanism 4, port 403, on port 404, will be true
The other end of empty bellows 13 is connected on the interface of the existing vacuum equipment in laboratory, can be using connection sides such as flange or cutting ferrules
Formula；
Specimen holder 82 is taken out, testing sample 9 is arranged on to the specimen holder 82 of Field Electron Emission test device cathode portion
On, copper sheet 822 is pressed onto on sample 9 and trip bolt 823 is tightened, then specimen holder 82 is installed on fixed support 81, sample
Positioning hole 821 on product frame 82 is aligned with the alignment pin 811 on fixed support 81；
Vacuum valve is opened, starts vacuum system and extracts the gas in vacuum chamber 1 out, pass through bonding in vacuum mechanism 4
The vacuum meter that port 403 is connected to monitor the vacuum state of vacuum chamber 1 in real time, makes to reach test vacuum in vacuum chamber 1
It is required that（Such as 10-4Pa）；
By the rotation process bar 5 of controller 2, make the anode 7 of the lower end of action bars 5 just to sample 9, then pass through controller 2
Control control stick 5 moves down anode 7, and the position of anode 7 is observed by observation window 11, until anode 7 is placed on sample 9
On；
The two ends of electrical measurement instrument connect the He of binding post 10 that the place sample stage of testing sample 9 is connected by wire respectively
Anode 7, now test loop formed, pass through electrical measurement instrument complete Field Electron Emission test；
Test after the sample, controlled control stick 5 to move up anode 7 by controller 2, then control operation bar 5
Rotation, makes anode 7 be directed at next cathode sample to be measured 9, repeats the above steps, be finally completed the test of whole samples.
The utility model is an independent test device, arbitrarily can be connected with other vacuum equipments, it is not necessary to be equipped with independent
Vacuum system, can by change Field Electron Emission test device Anodic 7 size and sample stage 8 quantity realize it is many
Plant size, the test request of multiple samples.When cathode sample 9 is film, or test emission uniformity can be waited, and anode 7 is optional
Use transparent conductive film（Such as ito thin film）；Sample size is smaller（Area is less than 0.5mm2）When, anode 7 can select good lead
Body material（Such as metallic copper）.Anode 7 only need to be processed into the size supporting with the end thread of action bars 5, be then fitted into
The end of action bars 5 achieves that test sizes sample and meets test request.
It is noted that embodiment described above is to the illustrative and not limiting of technical solutions of the utility model, affiliated skill
The equivalent substitution of art field those of ordinary skill or the other modifications made according to prior art, as long as not new beyond this practicality
The thinking and scope of type technical scheme, should be included within the interest field required by the utility model.
Claims (6)
1. a kind of Field Electron Emission test device, it is characterised in that：Including vacuum chamber, bonding in vacuum mechanism, anode part
And cathode portion；
The vacuum chamber is cylinder type, and top center is provided with flange, and side wall is provided with the first connector, first connection
Mouth is connected with bonding in vacuum mechanism, and the side wall of the vacuum chamber is provided with some observation windows close to bottom position；
The anode part is arranged on the top of vacuum chamber, including action bars, controller and anode, and the action bars is arranged on
Vacuum chamber top flange center, the controller is arranged on the outside for being located at vacuum chamber on action bars, the anode connection
In the lower end of action bars；
The cathode portion includes some sample stages set around chamber bottom center circumferential and sample stage is corresponded and connected
Insulation barrier is provided between the binding post connect, the sample stage to be separated, the binding post passes through chamber bottom simultaneously
It is connected with outer lead, the sample stage includes hold-down support and specimen holder, the observation of the sample stage and vacuum chamber side wall
Window position is corresponding.
2. a kind of Field Electron Emission test device according to claim 1, it is characterised in that：The bonding in vacuum mechanism
For a vacuum four-way pipe, one of port connects the first connector of the vacuum chamber, and remaining port is connected very respectively
Empty valve, vacuum meter and vacuum corrugated pipe.
3. a kind of Field Electron Emission test device according to claim 1, it is characterised in that：The action bars includes the
One montant, the first cross bar and the second montant, first montant are arranged on flange center, and the axle center of second montant is described
Where sample stage center on the vertical plane of circumference, the anode is fixed on the bottom of the second montant.
4. a kind of Field Electron Emission test device according to claim 1, it is characterised in that：The fixation of the sample stage
There are two alignment pins on bearing, there are two positioning holes, the positioning of the alignment pin and specimen holder of hold-down support in the specimen holder bottom surface
Hole site correspondence can simultaneously be closely connected, and the specimen holder uses insulating materials, and the specimen holder upper surface is provided with copper sheet,
The copper sheet is connected on specimen holder by trip bolt.
5. a kind of Field Electron Emission test device according to claim 1 or 3, it is characterised in that：The action bars end
End is provided with screw thread, and the anode is connected by screw thread with action bars, and the geometric center of the anode is coaxial with sample stage center.
6. a kind of Field Electron Emission test device according to claim 1 or 3, it is characterised in that：The controller control
Action bars processed is rotated and moved up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720200647.8U CN206546346U (en) | 2017-03-03 | 2017-03-03 | A kind of Field Electron Emission test device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720200647.8U CN206546346U (en) | 2017-03-03 | 2017-03-03 | A kind of Field Electron Emission test device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206546346U true CN206546346U (en) | 2017-10-10 |
Family
ID=59995996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720200647.8U Withdrawn - After Issue CN206546346U (en) | 2017-03-03 | 2017-03-03 | A kind of Field Electron Emission test device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206546346U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109580717A (en) * | 2018-11-17 | 2019-04-05 | 金华职业技术学院 | The electric measurement method of sample after a kind of vacuum chemical reaction |
-
2017
- 2017-03-03 CN CN201720200647.8U patent/CN206546346U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109580717A (en) * | 2018-11-17 | 2019-04-05 | 金华职业技术学院 | The electric measurement method of sample after a kind of vacuum chemical reaction |
| CN109580717B (en) * | 2018-11-17 | 2023-09-12 | 金华职业技术学院 | Electrical measurement method for sample after vacuum chemical reaction |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20171010 Effective date of abandoning: 20230324 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20171010 Effective date of abandoning: 20230324 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |