CN106841369B - Field electron emission testing device - Google Patents
Field electron emission testing device Download PDFInfo
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- CN106841369B CN106841369B CN201710122599.XA CN201710122599A CN106841369B CN 106841369 B CN106841369 B CN 106841369B CN 201710122599 A CN201710122599 A CN 201710122599A CN 106841369 B CN106841369 B CN 106841369B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
Abstract
The invention provides a field electron emission testing device, which comprises a vacuum chamber, a vacuum connecting mechanism, an anode part and a cathode part, wherein the vacuum chamber is provided with a vacuum inlet and a vacuum outlet; the vacuum cavity is cylindrical, a flange is arranged at the center of the top of the vacuum cavity, a first connecting port is arranged on the side wall of the vacuum cavity and connected with a vacuum connecting mechanism, and a plurality of observation windows are arranged on the side wall of the vacuum cavity close to the bottom of the vacuum cavity; the anode part is arranged at the upper part of the vacuum chamber and comprises an operating rod arranged at the center of the flange, a controller arranged at the outer side of the vacuum chamber and arranged on the operating rod, and an anode fixed at the lower end of the operating rod; the cathode part comprises a plurality of sample stages arranged around the center circumference of the bottom of the vacuum chamber and binding posts connected with the sample stages in a one-to-one correspondence manner, the binding posts penetrate through the bottom of the vacuum chamber and are connected with external wires, the sample stages comprise fixed supports and sample frames, and the sample stages correspond to the observation windows. The invention is an independent testing device, can be connected with any vacuum equipment, can test a plurality of samples under the condition of one-time test, and is convenient for replacing the anode to meet the test requirements of different samples.
Description
Technical Field
The invention belongs to the field of material testing equipment, and particularly relates to a field electron emission testing device.
Background
The field electron emission material plays an important role in the research of field emission flat panel displays, millimeter and micron wave devices, sensors and the like, and shows good application prospect. In the research of field emission materials, a test technique of field electron emission is particularly important.
For field emission materials, the ambient atmosphere, especially the system vacuum, is one of the important factors affecting emission performance. When the high-speed electrons collide with the gas molecules, the gas molecules are ionized to generate positive and negative ions. The ionized positive ions bombard the surface of the field emission material with certain energy under the action of electric field force, so that the emission tip is gradually damaged, and the emission stability is influenced; the ionized negative ions move to the anode under the action of the electric field force, and the number of negative charges is increased when no air is ionized, so that the deviation of test data is large, and the requirement on the vacuum degree of a system is strict when a field emission test is carried out. Because the common test system can not reach such high vacuum degree, the field emission test device usually comprises a sample chamber and a set of independent vacuum system, and has large occupied space and high test cost. Further, the conventional field emission testing apparatus can generally test only one sample at a time, and if the testing of a plurality of samples is to be completed, the steps of "inflating (breaking vacuum) → installing the sample → evacuating → testing" need to be repeated a plurality of times. The operation process is relatively complicated, and the testing efficiency is low. In addition, the anode of the existing field emission testing equipment is fixed and not easy to replace, and the field emission testing of samples with different testing requirements and different sizes cannot be met.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a field emission testing device which is an independent testing system and can be connected to the existing vacuum equipment in a laboratory through a pipeline without being provided with an independent vacuum system; the vacuum chamber is provided with a plurality of sample testing platforms, the position of the anode can be effectively adjusted by designing a controller structure, one anode can correspondingly test a plurality of cathode samples, and the plurality of samples can be tested under the condition of not damaging vacuum; the anode clamp is designed through the structure, so that the anode is convenient to replace, and the testing requirements of various cathode samples, such as a film sample and a needle point sample, are met, so that the requirements of reducing cost, saving space and being simple in operation method are met.
The purpose of the invention is realized by the following technical scheme:
a field electron emission testing device includes a vacuum chamber, a vacuum connection mechanism, an anode portion and a cathode portion;
the vacuum chamber is cylindrical, a flange is arranged at the center of the top of the vacuum chamber, a first connecting port is arranged on the side wall of the vacuum chamber, the first connecting port is connected with the vacuum connecting mechanism, and a plurality of observation windows are arranged on the side wall of the vacuum chamber close to the bottom of the vacuum chamber;
the anode part is arranged at the upper part of the vacuum chamber and comprises an operating rod, a controller and an anode, the operating rod is arranged at the center of a flange at the top of the vacuum chamber, the controller is arranged on the operating rod and positioned at the outer side of the vacuum chamber, and the anode is connected to the lower end of the operating rod;
the negative pole part includes a plurality of sample platforms that set up around vacuum chamber bottom center circumference, the terminal of being connected with sample platform one-to-one, be provided with insulating baffle between the sample platform and separate, the terminal passes vacuum chamber bottom and is connected with external conductor, the sample platform includes fixing support and sample holder, the sample platform is corresponding with the observation window position of vacuum chamber lateral wall.
Furthermore, the vacuum connecting mechanism is a vacuum four-way pipe, one port of the vacuum four-way pipe is connected with the first connecting port of the vacuum chamber, and the other ports of the vacuum four-way pipe are respectively connected with a vacuum valve, a vacuum gauge and a vacuum corrugated pipe.
Preferably, the operating rod comprises a first vertical rod, a first cross rod and a second vertical rod, the first vertical rod is installed at the center of the flange, the axis of the second vertical rod is located on the vertical surface of the circumference where the center of the sample platform is located, and the anode is fixed at the bottom end of the second vertical rod.
In order to better implement the invention, two positioning pins are arranged on a fixed support of the sample table, two positioning holes are arranged on the bottom surface of the sample frame, the positioning pins of the fixed support correspond to the positioning holes of the sample frame in position and can be tightly matched and connected, the sample frame is made of insulating materials, a copper sheet is arranged on the upper surface of the sample frame, and the copper sheet is connected to the sample frame through fastening screws.
Furthermore, the tail end of the operating rod is provided with threads, the anode is connected with the operating rod through the threads, and the geometric center of the anode is coaxial with the center of the sample table; the controller controls the operation lever to rotate and move up and down.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. the invention is an independent vacuum chamber, when in use, the vacuum chamber can obtain the required vacuum of the field emission test only by connecting the vacuum chamber with the existing vacuum equipment (such as magnetron sputtering or vacuum smelting furnace) in a laboratory, and an independent vacuum system is not required to be equipped, thereby solving the problem of high investment cost of the existing field emission test equipment.
2. According to the invention, the plurality of sample stages are arranged on the cathode part to realize the installation and the test of a plurality of samples by opening the cavity once, so that the problem of low test efficiency of the existing samples is solved.
3. The invention has simple structure, convenient operation and use and ingenious conception, can effectively solve the problems of high equipment input cost, low sample testing efficiency and the like in the prior art, well solves the defects of the prior art, provides conditions for the field emission performance research of materials, saves the cost and improves the efficiency.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the vacuum attachment mechanism of the present invention;
FIG. 3 isbase:Sub>A top view of section A-A of the present invention;
FIG. 4 is a schematic diagram of a sample stage according to the present invention.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
Examples
As shown in fig. 1, 2, 3, a field electron emission testing apparatus includes a vacuum chamber 1, a vacuum connecting mechanism 4, an anode portion, and a cathode portion; the vacuum chamber 1 is cylindrical, a flange 3 is arranged at the center of the top of the vacuum chamber, a first connecting port 12 is formed in the side wall of the vacuum chamber, the first connecting port 12 is connected with a vacuum connecting mechanism 4, and a plurality of observation windows 11 are formed in the positions, close to the bottom, of the side wall of the vacuum chamber 1; the anode part is arranged at the upper part of the vacuum chamber 1 and comprises an operating rod 5, a controller 2 and an anode 7, wherein the operating rod 5 is arranged at the center of the flange 3, the controller 2 is arranged on the operating rod 5 and positioned at the outer side of the vacuum chamber 1, and the anode 7 is connected to the lower end of the operating rod 5; the cathode part comprises a plurality of sample platforms 8 arranged around the circumference of the center of the bottom of the vacuum chamber 1 and a binding post 10 connected with the sample platforms 8 in a one-to-one correspondence manner, an insulating baffle 6 is arranged between the sample platforms 8 for separation, the binding post 10 penetrates through the bottom of the vacuum chamber 1 and is connected with an external lead, each sample platform 8 comprises a fixed support 81 and a sample frame 82, and the positions of the sample platforms 8 and the observation window 11 of the side wall of the vacuum chamber 1 correspond to each other.
Further, the vacuum connection mechanism 4 is a vacuum four-way pipe, wherein a port 401 is connected to the first connection port 12 of the vacuum chamber 1, a port 402 is connected to the vacuum valve, a port 403 is connected to the vacuum gauge, and a port 404 is connected to the vacuum bellows 13.
Preferably, the operating rod 5 comprises a first vertical rod 501, a first cross rod 502 and a second vertical rod 503, the first vertical rod 501 is installed in the center of the flange 3, the axis of the second vertical rod 503 is located on a vertical plane of the circumference where the center of the sample stage 8 is located, and the anode 7 is fixed at the bottom end of the second vertical rod 503.
In order to better implement the present invention, the fixing support 81 of the sample stage 8 is provided with two positioning pins 811, the bottom surface of the sample holder 82 is provided with two positioning holes 821, the positioning pins 811 of the fixing support 81 correspond to the positioning holes 821 of the sample holder 82 in position and can be tightly connected, the sample holder 82 is made of an insulating material, the upper surface of the sample holder 82 is provided with a copper sheet 822, and the copper sheet 822 is connected to the sample holder 82 through a fastening screw 823.
Furthermore, the tail end of the operating rod 5 is provided with a thread, the anode 7 is connected with the operating rod 5 through the thread, and the geometric center of the anode 7 is coaxial with the center of the sample table 8; the controller 2 controls the operation lever 5 to rotate and move up and down.
Before testing, selecting a specific conductive anode and an insulating film to be integrated to form an anode 7 according to the size of a sample 9 and testing requirements, and installing the anode 7 at the tail end of an operating rod 5;
when the testing device disclosed by the invention is used for testing:
firstly, a port 401 connected with a vacuum connecting mechanism 4 is connected with a first connecting port 12 of a vacuum chamber 1, a vacuum valve, a vacuum gauge and a vacuum corrugated pipe 13 are respectively connected with a port 402, a port 403 and a port 404 of the vacuum connecting mechanism 4, the other end of the vacuum corrugated pipe 13 is connected with an interface of the existing vacuum equipment in a laboratory, and the connecting modes such as a flange or a clamping sleeve can be adopted;
taking out the sample holder 82, mounting the sample 9 to be tested on the sample holder 82 of the cathode part of the field electron emission testing device, pressing the copper sheet 822 on the sample 9 and screwing the fastening screw 823, then mounting the sample holder 82 on the fixed bracket 81, aligning the positioning hole 821 on the sample holder 82 with the positioning pin 811 on the fixed bracket 81;
the vacuum valve is opened, the vacuum system is started to pump out the gas in the vacuum chamber 1, and the vacuum state of the vacuum chamber 1 is monitored in real time by the vacuum gauge connected to the port 403 of the vacuum connecting mechanism 4, so that the vacuum degree in the vacuum chamber 1 is required to be tested (for example, 10) -4 Pa）；
Rotating the operating rod 5 through the controller 2 to enable the anode 7 at the lower end of the operating rod 5 to be opposite to the sample 9, then controlling the operating rod 5 through the controller 2 to enable the anode 7 to move downwards, and observing the position of the anode 7 through the observation window 11 until the anode 7 is placed on the sample 9;
two ends of the electrical measuring instrument are respectively connected with a binding post 10 and an anode 7 which are connected with a sample stage where a sample 9 to be measured is located through conducting wires, at the moment, a test loop is formed, and field electron emission test is completed through the electrical measuring instrument;
after the sample is tested, the controller 2 controls the operating rod 5 to move the anode 7 upwards, then controls the operating rod 5 to rotate, so that the anode 7 is aligned with the next cathode sample 9 to be tested, and the steps are repeated to finally complete the test of all the samples.
The invention is an independent testing device, can be arbitrarily connected with other vacuum equipment, does not need to be provided with a separate vacuum system, and can realize the testing requirements of various sizes and a plurality of samples by changing the size of the anode 7 and the number of the sample tables 8 in the field electron emission testing device. When the cathode sample 9 is a thin film, or the emission uniformity performance is tested, the anode 7 can be a transparent conductive film (such as an ITO film); when the sample size is small (area is less than 0.5 mm), the anode 7 can be made of a good conductor material (such as metallic copper). The anode 7 is processed into a size matched with the thread at the tail end of the operating rod 5, and then the anode is arranged at the tail end of the operating rod 5, so that various size samples can be tested and the testing requirements can be met.
It should be noted that the above-mentioned embodiments illustrate rather than limit the technical solutions of the present invention, and that equivalent substitutions or other modifications made by those skilled in the art according to the prior art are intended to be included within the scope of the claims of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (6)
1. A field electron emission test apparatus, comprising: comprises a vacuum chamber, a vacuum connecting mechanism, an anode part and a cathode part;
the vacuum chamber is cylindrical, a flange is arranged at the center of the top of the vacuum chamber, a first connecting port is arranged on the side wall of the vacuum chamber, the first connecting port is connected with the vacuum connecting mechanism, and a plurality of observation windows are arranged on the side wall of the vacuum chamber close to the bottom of the vacuum chamber;
the anode part is arranged at the upper part of the vacuum chamber and comprises an operating rod, a controller and an anode, the operating rod is arranged at the center of a flange at the top of the vacuum chamber, the controller is arranged on the operating rod and positioned at the outer side of the vacuum chamber, and the anode is connected to the lower end of the operating rod;
the negative pole part includes a plurality of sample platforms that set up around vacuum chamber bottom center circumference, the terminal of being connected with sample platform one-to-one, be provided with insulating baffle between the sample platform and separate, the terminal passes vacuum chamber bottom and is connected with external conductor, the sample platform includes fixing support and sample holder, the sample platform is corresponding with the observation window position of vacuum chamber lateral wall.
2. A field electron emission testing apparatus according to claim 1, wherein: the vacuum connecting mechanism is a vacuum four-way pipe, one port of the vacuum four-way pipe is connected with the first connecting port of the vacuum chamber, and the other ports of the vacuum four-way pipe are respectively connected with a vacuum valve, a vacuum gauge and a vacuum corrugated pipe.
3. A field electron emission testing apparatus according to claim 1, wherein: the operating rod comprises a first vertical rod, a first horizontal rod and a second vertical rod, the first vertical rod is installed at the center of the flange, the axis of the second vertical rod is located on the vertical surface of the circumference where the center of the sample platform is located, and the anode is fixed at the bottom end of the second vertical rod.
4. A field electron emission testing apparatus according to claim 1, wherein: the sample platform is characterized in that two positioning pins are arranged on a fixing support of the sample platform, two positioning holes are formed in the bottom surface of the sample frame, the positioning pins of the fixing support correspond to the positioning holes of the sample frame in position and can be in tight fit connection, the sample frame is made of insulating materials, and a copper sheet is arranged on the upper surface of the sample frame and connected to the sample frame through fastening screws.
5. A field electron emission testing apparatus according to claim 1 or 3, wherein: the tail end of the operating rod is provided with threads, the anode is connected with the operating rod through the threads, and the geometric center of the anode is coaxial with the center of the sample table.
6. A field electron emission testing apparatus according to claim 1 or 3, wherein: the controller controls the operation rod to rotate and move up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710122599.XA CN106841369B (en) | 2017-03-03 | 2017-03-03 | Field electron emission testing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710122599.XA CN106841369B (en) | 2017-03-03 | 2017-03-03 | Field electron emission testing device |
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| CN106841369A CN106841369A (en) | 2017-06-13 |
| CN106841369B true CN106841369B (en) | 2023-03-24 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109613064A (en) * | 2018-11-16 | 2019-04-12 | 兰州空间技术物理研究所 | The adjustable field emission test device of electrode spacing and method in a kind of vacuum system |
| CN113218634B (en) * | 2021-05-06 | 2022-06-17 | 昆山国力大功率器件工业技术研究院有限公司 | X-ray tube performance testing equipment |
| CN114664681B (en) * | 2022-02-14 | 2022-09-23 | 江苏中芯沃达半导体科技有限公司 | LED chip in-situ monitoring equipment and method |
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| JPH0743236A (en) * | 1993-07-30 | 1995-02-14 | Tokai Univ | Vacuum gauge of constant-current operating field emission type |
| CN2747578Y (en) * | 2004-07-22 | 2005-12-21 | 北京工业大学 | Built-in controllable moveable anode electronic emitting tester |
| CN102339713A (en) * | 2011-11-01 | 2012-02-01 | 电子科技大学 | Field emission X ray tube with light-grid compound control |
| CN103014627A (en) * | 2013-01-17 | 2013-04-03 | 大连理工大学 | Fe-Si-Al ternary amorphous thin film with adjustable band gap width and preparation method of thin film |
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2017
- 2017-03-03 CN CN201710122599.XA patent/CN106841369B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0743236A (en) * | 1993-07-30 | 1995-02-14 | Tokai Univ | Vacuum gauge of constant-current operating field emission type |
| CN2747578Y (en) * | 2004-07-22 | 2005-12-21 | 北京工业大学 | Built-in controllable moveable anode electronic emitting tester |
| CN102339713A (en) * | 2011-11-01 | 2012-02-01 | 电子科技大学 | Field emission X ray tube with light-grid compound control |
| CN103014627A (en) * | 2013-01-17 | 2013-04-03 | 大连理工大学 | Fe-Si-Al ternary amorphous thin film with adjustable band gap width and preparation method of thin film |
Non-Patent Citations (1)
| Title |
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| 光电子能谱仪新增功能研发;龚力等;《实验室研究与探索》;20111115(第11期);全文 * |
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