CN110196362A - The test macro and method of electron gun emitting performance - Google Patents
The test macro and method of electron gun emitting performance Download PDFInfo
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- CN110196362A CN110196362A CN201910369692.XA CN201910369692A CN110196362A CN 110196362 A CN110196362 A CN 110196362A CN 201910369692 A CN201910369692 A CN 201910369692A CN 110196362 A CN110196362 A CN 110196362A
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- G—PHYSICS
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
A kind of electron gun emitting performance test macro and method, system include: the first vacuum chamber, the second vacuum chamber, vacuum system, electrode system and electric control system；First vacuum chamber and the second vacuum chamber are for placing electron gun, wherein the first vacuum chamber is equipped with anode；Vacuum system is used for the first vacuum chamber and the second vacuum chamber；Electrode system is used to provide electric current and voltage for electron gun；Electric control system is used to control the movement of vacuum system and the electrode system, to test the rifle emitting performance of electronics.The system has the advantages that compact-sized, high reliablity, measurement parameter congruence, can effectively shorten lead time of electron gun and microwave tube, mass application easy to produce.
Description
Technical field
The present invention relates to the test macros and side of vacuum electronics technical field more particularly to a kind of electron gun emitting performance
Method.
Background technique
Electron gun is the heart of microwave tube, by Cathode-heater assembly, cathode support cylinder, control electrode and heater lead assemblies
It is formed Deng part, function is the electronics note for generating and being formed certain shapes.In microwave tube development process, electron gun structure
Assembly and welding precision can be tested with contact or contactless measurement method, whether judge electron gun geometric dimension
It is qualified；But the detection of the electrical properties such as the emitting performance of electron gun and perveance can only after homogeneous tube to be formed heat survey link into
Row verifying.If the electrical performance indexes of electron gun are unqualified, it can only do over again to homogeneous tube, adjusting process parameter prepares electricity again
Sub- rifle component.The development process electron gun of microwave tube mainly faces two problems: first is that electron gun bunching electrode swell increment is big
It is small to determine the distance between K-A, the big or small emitting performance that can all influence electron gun of distance and homogeneous tube it is electrical
Performance.It is currently that distance is calculated according to swell increment, the working condition of K-A can not be simulated；Second is that forming electronics before homogeneous tube
The test of rifle emission p erformance and perveance measurement there is no correlation means, and gun cathode emission current it is big or it is small can shadow
Ring the sparking of homogeneous tube electron gun.For the reliability and stability for ensuring microwave tube, electron gun emitting performance need to be tested.
Summary of the invention
(1) technical problems to be solved
It is directed to existing technical problem, the present invention proposes the test macro and method of a kind of electron gun emitting performance, uses
Gun cathode emitting performance is tested and is led before solving to simulate the working condition of K-A in the prior art and form homogeneous tube
Flow the unmeasured problem of coefficient.
(2) technical solution
The present invention provides a kind of electron gun emitting performance test macro, comprising: the first vacuum chamber, the second vacuum chamber, vacuum
System, electrode system and electric control system；First vacuum chamber and the second vacuum chamber are for placing electron gun, wherein the first vacuum
Room is equipped with anode；Vacuum system is used for the first vacuum chamber and the second vacuum chamber；Electrode system for electron gun for mentioning
For electric current and voltage；Electric control system is used to control the movement of vacuum system and electrode system, to test the rifle transmitting of electronics
Performance.
Optionally, vacuum system includes ionic pump 1, mechanical pump 59, molecular pump 60 and vacuum pipe 3；The air inlet of ionic pump 1
Mouth the first vacuum chamber of connection；The gas outlet of the air inlet connection molecule pump 60 of mechanical pump 59, the air inlet connection the of molecular pump 60
Two vacuum chambers；The air inlet of molecular pump 60 is connect with the air inlet of ionic pump 1 by vacuum pipe 3.
Optionally, vacuum pipe 3 includes first port, second port, third port and the 4th port；Ionic pump 1 into
Port connects first port, and second port connects the first vacuum chamber；The air inlet of molecular pump 60 connects the 4th port, third end
Mouth the second vacuum chamber of connection.
Optionally, electrode system includes first electrode 8, second electrode 10 and third electrode 22, one end connection of three electrodes
Vacuum system, the other end connect electric control system.
Optionally, first port and second port are on same vertical line, and third port and the 4th port are in same and hang down
On line.
Optionally, vacuum system further includes the first pneumatic high vacuum flapper valve 4, the second pneumatic high vacuum flapper valve 9, third
Pneumatic high vacuum flapper valve 23, the 4th pneumatic high vacuum flapper valve 30, the 5th pneumatic high vacuum flapper valve 35, three-limb tube
36, blank flange 37, the 6th pneumatic high vacuum flapper valve 38, the 7th pneumatic high vacuum flapper valve 39, vacuum connection tube 40 and
Three bellowss 41；The air inlet of mechanical pump 59 passes through the 5th pneumatic high vacuum flapper valve 35, three-limb tube 36, third bellows
41 connect with the gas outlet of molecular pump 60；59 air inlet of mechanical pump passes through the 5th pneumatic high vacuum flapper valve 35, vacuum connection tube
40 connect with the 6th pneumatic high vacuum flapper valve 38, the 7th pneumatic high vacuum flapper valve 39；Blank flange 37 is set to the 4th port
It is other.
Optionally, the first gate valve 2 is equipped between the air inlet and first port of ionic pump 1, second port is true with first
The second gate valve 7 is equipped between empty room；The 4th gate valve 31, third end are equipped between the air inlet of molecular pump 60 and the 4th port
Third gate valve 24 is equipped between mouth and the second vacuum chamber.
Optionally, electron gun emitting performance test macro further includes vacuum meter 42, first resistor rule 34, second resistance rule 61
And ionization gauge 62；First resistor rule 34 connect with vacuum meter 42, for measuring the vacuum degree of 59 air inlet of mechanical pump；Second resistance
Rule 61 connect with vacuum meter 42, for measuring the rough vacuum of the first vacuum chamber and the second vacuum chamber；Ionization gauge 62 and vacuum meter
42 connections, for measuring the condition of high vacuum degree of the first vacuum chamber and the second vacuum chamber.
Optionally, the entry condition of ionic pump is that inlet vacuum degree is better than 5 × 10-4The entry condition of Pa, molecular pump is
Inlet vacuum degree is not less than 10Pa.
Another aspect of the present invention provides a kind of test method of electron gun emitting performance, comprising: S1 closes all plates
Valve, and open the first pneumatic high vacuum flapper valve；Electron gun is placed in the first vacuum chamber or the second vacuum chamber, so that electric by S2
The electrode of sub- rifle and the electrode of system connect；S3, start mechanical pump, open second, third, the 4th pneumatic high vacuum flapper valve,
To mechanical pump steam inlet vacuum degree be better than the first preset value, start molecular pump, open molecular pump connection second, third, the 4th
Gate valve；S4 opens the first gate valve when molecular pump inlet vacuum degree is better than the second preset value；S5 carries out electron gun
Heating, tests the emission current, perveance and surface temperature of electron gun.
(3) beneficial effect
The present invention proposes the test macro and method of a kind of electron gun emitting performance, has the beneficial effect that
(1) Performance Test System and method pass through vacuum system and electrical system acquisition ultrahigh vacuum, final vacuum
Better than 2 × 10-7Pa。
(2) Performance Test System and method can conveniently test electron gun emitting performance, effectively shorten electricity
The lead time of sub- rifle and microwave tube improves the reliability and stability of electron gun；
(3) Performance Test System and method can test temperature, voltage etc. of the electron gun under different electric currents and time
Experimental data provides foundation for microwave tube subsequent handling；
(4) double-station test system structure is compact, occupies little space, easy to operate, mass application easy to produce.
Detailed description of the invention
Fig. 1 diagrammatically illustrates the schematic diagram of microwave tube electron gun emitting performance test macro of the embodiment of the present invention.
Fig. 2 diagrammatically illustrates the right view of microwave tube electron gun emitting performance test macro of the embodiment of the present invention.
Fig. 3 diagrammatically illustrates electric control system in microwave tube electron gun emitting performance test macro of the embodiment of the present invention
Schematic diagram.
Fig. 4 diagrammatically illustrates the flow chart of microwave tube electron gun emitting performance test method of the embodiment of the present invention.
[appended drawing reference]
1- ionic pump；The first gate valve of 2-；3- vacuum pipe；
4- the first pneumatic high vacuum flapper valve；The first clip of 5-；The first threeway of 6-；
The second gate valve of 7--；8- first electrode；9- the second pneumatic high vacuum flapper valve；
10- second electrode；11- water cooling anode；12- elevating mechanism；
The first observation window of 13- CF63；14- stainless steel bell jar；The second observation window of 15- CF63；
16- bracket；17- edge of a knife flange CF150；18- quartz bell cover；
19- material disc；20- rubber seal；21- rack；
22- third electrode；23- third pneumatic high vacuum flapper valve；24- third gate valve；
25- reducer pipe；The second threeway of 26-；The first bellows of 27-；The second clip of 28-；
29- third clip；The 4th pneumatic high vacuum flapper valve of 30-；
The 4th gate valve of 31-；32- bend pipe；The second bellows of 33-；
34- first resistor rule；The 5th pneumatic high vacuum flapper valve of 35-；36- three-limb tube；
37- blank flange；The 6th pneumatic high vacuum flapper valve of 38-；
The 7th pneumatic high vacuum flapper valve of 39-；40- vacuum connection tube；41- third bellows；
42- vacuum meter；43- cabinet；44- display screen；45- bell jar rises button；
Button drops in 46- bell jar；47- bell jar disengages button；48- compressed air exception button；
49- vacuum exception button；50- water shortage button；51- molecular pump exception button；
52- mechanical pump exception button；53- alarm reset button；The first filament supply of 54-；
The second filament supply of 55-；56- high voltage power supply；57 ion pump powers；
58-UPS power supply；59- mechanical pump；60- molecular pump；61- second resistance rule；62- ionization gauge.
Specific embodiment
The present invention provides a kind of microwave tube electron gun emitting performance test macro and method, with it is compact-sized, can
High, the measurement parameter congruence advantage by property, can effectively shorten lead time of electron gun and microwave tube.
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.
One embodiment of the invention proposes a kind of electron gun emitting performance test macro, comprising:
First vacuum chamber, the second vacuum chamber, vacuum system, electrode system and electric control system.
First vacuum chamber and the second vacuum chamber are for placing electron gun, wherein the first vacuum chamber is equipped with anode；Vacuum system
For to the first vacuum chamber and the second vacuum chamber；Electrode system is used to provide electric current and voltage for electron gun；Electric-controlled
System processed is used to control the movement of vacuum system and electrode system, to realize to the rifle emitting performance for being placed in electronics in two vacuum chambers
Test.Concrete structure schematic diagram is as shown in Fig. 1 and Fig. 2.
Fig. 1 and Fig. 2 is please referred to, the first vacuum chamber (stainless steel bell jar is symmetrical arranged on 21 stainless steel work top of rack
And the second vacuum chamber (quartz bell cover 18) 14).Stainless steel bell jar 14 is connect with elevating mechanism 12, realizes the lifting of bell jar；Electronics
Rifle and water cooling anode 11 form electron gun performance and test structure, realize the working condition of simulation K-A；Pass through the first observation
Window 13 and the second observation window 15 realize internal observation；Installation and removal maintenance is carried out to stainless steel bell jar 14 by bracket 16；It is logical
It crosses edge of a knife flange 17 and realizes vacuum sealing.
Quartz bell cover 18 and the work top of lower section are tightly connected using L-type viton seal ring 20, constitute the work of sealing
Make platform.Vacuum pipe 3 and electrode terminal are provided with below workbench, for the vacuum between workbench and vacuum system
Connection, and the electric connection with electrode system.Quartz bell cover 18 requires to bear certain pressure and temperature, therefore main body is upright
Cylinder-shaped revolving body, bottom port shape be circular flat, top is hemispherical.Material disc 19 is placed in inside quartz bell cover,
Installation and fixation for electron gun.
Vacuum system includes: ionic pump 1, mechanical pump 59, molecular pump 60, valve and vacuum pipe 3.Wherein, ionic pump 1
In the lower part of 14 workbench of stainless steel bell jar, molecular pump 60 is located at the lower part of 18 workbench of quartz bell cover.
The air inlet of mechanical pump 59 is connected to the gas outlet with molecular pump 60；The air inlet of molecular pump 60 is connected to quartz clock
Cover 18 workbench.The air inlet of ionic pump 1 is connected to 14 workbench of stainless steel bell jar.The air inlet and ionic pump 1 of molecular pump 60
Air inlet connected by vacuum pipe 3.In actual operation, it can according to need and open corresponding vacuum pump, to stainless steel
Bell jar 14 and quartz bell cover 18 vacuumize.
Vacuum pipe 3 is the vacuum pipe of " H " type.The air inlet of ionic pump 1 is connected to vacuum tube by the first gate valve 2
The second port of the first port in road 3, vacuum pipe 3 is connected by the second gate valve 7 with 14 workbench of stainless steel bell jar.Its
In, first port and second port are the port in same vertical line.
The air inlet of molecular pump 60 is connect by the 4th gate valve 31 with the 4th port of vacuum pipe 3.Vacuum pipe 3
Third port is connect by third gate valve 24 with 18 workbench of quartz bell cover.Wherein, third port and the 4th port be in
The port of same vertical line.
Wherein, the first gate valve 2, the second gate valve 7, third gate valve 24 and the 4th gate valve 31 are pneumatic superelevation
Vacuum gate valve.When stainless steel bell jar workbench works independently, the first gate valve 2, the second gate valve 7 and the 4th gate valve are opened
31；When quartz bell cover workbench works independently, the first gate valve 2, third gate valve 24 and the 4th gate valve 31 are opened；Two work
When platform works at the same time, the first gate valve 2, the second gate valve 7, third gate valve 24 and the 4th gate valve 31 are opened.
Further, vacuum system further include: the first pneumatic high vacuum flapper valve 4, the second pneumatic high vacuum flapper valve 9,
Third pneumatic high vacuum flapper valve 23, the 4th pneumatic high vacuum flapper valve 30, the 5th pneumatic high vacuum flapper valve 35, threeway connection
Pipe 36, blank flange 37, the 6th pneumatic high vacuum flapper valve 38, the 7th pneumatic high vacuum flapper valve 39, vacuum connection tube 40 and
Third bellows 41.The air inlet of mechanical pump 59 passes through the 5th pneumatic high vacuum flapper valve 35, three-limb tube 36, third ripple
Pipe 41 is connect with the gas outlet of molecular pump 60；59 air inlet of mechanical pump passes through the 5th pneumatic high vacuum flapper valve 35, bonding in vacuum
Pipe 40 is connect with the 6th pneumatic high vacuum flapper valve 38, the 7th pneumatic high vacuum flapper valve 39.Blank flange 37 is set to vacuum tube
4th near ports in road 3 realize vacuum sealing, can be used for expansion interface use.
Mechanical pump 59, the second bellows 33, first resistor advise 34, three-limb tube 36, the first bellows 27, the first threeway
6, the second threeway 26, clip 5,28,29, bend pipe 32, reducer pipe 25, the first pneumatic high vacuum flapper valve 4, the 5th pneumatic Gao Zhen
Neutral gear plate valve 35, the 6th pneumatic high vacuum flapper valve 38, the 7th pneumatic high vacuum flapper valve 39, vacuum connection tube 40, the second gas
Dynamic cap of high-vacuum baffle valve 9 and third pneumatic high vacuum flapper valve 23, the 4th pneumatic high vacuum flapper valve 30 work with two respectively
Platform connection, forms the bypath system of vacuum system, realizes two workbench by the opening and closing of pneumatic high vacuum flapper valve
Forvacuum and vacuum deflation.
Electrode system is set to 21 lower section of rack, first electrode 8, second electrode 10 and the third electricity of corresponding workbench electrode
Pole 22.The microwave tube electron gun placed on workbench is electrically connected at below Working gantry on corresponding electrode.Three electrodes
Front end be connected into vacuum system, rear end is connect with electric control system, is provided for the microwave tube electron gun in vacuum state
Electric current and voltage.
Electron gun emitting performance test macro is additionally provided with ionization gauge 62 and second resistance rule 61, passes through 4 gate valves
Conversion measures the vacuum degree of vacuum system.Two workbench can be worked independently or be worked at the same time, and a wherein workbench
After amplifying gas, the vacuum degree of another one is not less than 6 × 10-6Pa。
Fig. 3 is referred to, electric control system is PLC control system, and cabinet 43 is equipped with compound vacuum gauge 42, display screen
44, bell jar rises button 45, button 47, the first filament supply 54, the second filament supply 55, high voltage power supply 56, ionic pump drop in bell jar
Power supply 57, ups power 58 are furnished with fault cues button, including compressed air exception button on cabinet 43 to prevent maloperation
48, vacuum exception button 49, water shortage button 50, molecular pump exception button 51, mechanical pump exception button 52 and alarm reset button
53.Mechanical pump 59, molecular pump 60, pneumatic high vacuum flapper valve, gate valve, ion pump power 57,54 He of electron gun filament power supply
55, high voltage power supply 55, ups power 58, compound vacuum gauge 42, bell jar liter button 45, bell jar drop button 46, bell jar disengagement button
47, compressed air exception button 48, vacuum exception button 49, water shortage button 50, molecular pump exception button 51, mechanical pump is pressed extremely
Button 52 and alarm reset button 53 are connect by controlling route with electric control system.
Molecular pump power source and molecular pump 60 are connect with electric control system, for controlling the starting and closing of molecular pump 60；
Ion pump power 57 is connect with ionic pump 1, and for controlling the starting and closing of ionic pump 1, wherein the entry condition of ionic pump is
Vacuum degree is better than 5 × 10-4Pa, and vacuum pipe and vacuum chamber are by sufficiently baking degassing；Two sets of filament supplys 54,55 and height
Voltage source 56 is connect with electrode respectively, controls the electric current and voltage of two workbench upper guns respectively.
Compound vacuum gauge 42 is connect with first resistor rule 34, second resistance rule 61 and ionization gauge 62, for monitoring vacuum system
The vacuum degree of system.In order to measure low vacuum and high vacuum simultaneously, which uses compound vacuum gauge.First resistor rule 34 are used for
The vacuum degree for measuring 59 air inlet of mechanical pump, meets the starting requirement of molecular pump 60.
Second resistance rule 61 and ionization gauge 62 are respectively connected to vacuum pipe 3.Wherein, second resistance rule 61 and vacuum meter 42
Connection, for measuring the vacuum degree (10 when two workbench low vacuum5Pa~1 × 10-1Pa).Ionization gauge 62 and vacuum meter 42 connect
It connects, for measuring the vacuum degree (1 × 10 when two workbench high vacuum-1Pa~2 × 10-7Pa)。
Two workbench share a set of digital display vacuum meter 42, mechanical pumps 59 and its a power supplys, a molecular pump 60 and its electricity
Source and an ionic pump 1 and its power supply 57.
Molecular pump abnormal 51 is associated with vacuum degree, and when vacuum degree is lower than 10Pa, molecular pump power source does not allow molecular pump 60 to open
It is dynamic.
Filament supply is associated with vacuum degree, and vacuum degree is lower than 3.0 × 10-4When Pa, heater current remains constant；It is excellent to vacuum degree
In 3.0 × 10-4When Pa, filament current value is gradually increased.
By the setting of the vacuum degrees entry conditions such as above-mentioned ionic pump 1, molecular pump 60, so that microwave tube electron gun emissivity
Energy test macro obtains ultrahigh vacuum by vacuum system and electrical system, and final vacuum is better than 2 × 10-7Pa, measurement are reliable
Property it is high.By designing two stations, the emitting performance and perveance of electron gun can not only be tested, also can measure electron gun not
With the temperature under electric current and time.Measurement parameter is complete.Pass through the company between the design method and each device of two station symmetrical structures
The design of mode is connect, so that system structure is compact, is occupied little space, easy to operate, mass application easy to produce.
Based on above-mentioned microwave tube electron gun emitting performance test macro, another embodiment of the present invention proposes a kind of electron gun hair
The test method of performance is penetrated, this method is in the case where working at the same time based on two stations, and process is as shown in Figure 4, comprising:
S1 closes all gate valves, and opens the first pneumatic high vacuum flapper valve.
Before carrying out performance detection, needs the water route of detection system, circuit whether normal, close all plates if normal
Valve (2,7,24,31), and the first pneumatic high vacuum flapper valve 4 is opened, vacuum system is deflated, and the bell jar on station is opened.
Electron gun is placed into bell jar by S2, and electron gun filament the two poles of the earth are connect with electrode respectively, notices that wiring will fasten,
Cover upper inverted bell, and close the first pneumatic high vacuum flapper valve 4.
S3 starts mechanical pump 59, opens the second pneumatic high vacuum flapper valve 9, third pneumatic high vacuum flapper valve 23 and the
Four pneumatic high vacuum flapper valves 30.It is better than the first preset value (such as 10Pa) to 59 inlet vacuum degree of mechanical pump, opens molecular pump
60 power supplys simultaneously start, and open the 4th gate valve 31, the second gate valve 7 and third gate valve 24 that molecular pump 60 connects.
S4, molecular pump 2 work normally, to 60 inlet vacuum degree of molecular pump better than the second preset value (such as 2.0 × 10- 3When Pa), the first gate valve 2 of ionic pump connection is opened, starts ionic pump 1.
S5 heats electron gun, tests the emission current, perveance and surface temperature of the electron gun.
It is better than 3.0 × 10 to vacuum degree in vacuum chamber-4When Pa, presses heating power supply "ON" button and start on two stations
Electron gun is heated, and electron gun slow heating, vacuum degree is better than 1 × 10-4Gradually add electric current 1A~2A when Pa, in component plus
Vacuum meter display system vacuum degree is better than 2 × 10 in thermal process-4Pa.In electron gun heating process, electron gun transmitting can be carried out
Electric current, perveance, the performance tests such as surface temperature.Meanwhile electron gun can carry out vacuum degassing, sufficiently to remove two stations electricity
Gas, the volatile substance of sub- rifle surface and internal absorption；After to electron gun heating, by heater current knob to " 0 ",
Test process terminates.
After test, the gate valve of ionic pump, molecular pump connection is closed, ionic pump, molecular pump " stopping " then being pressed
Button closes molecular pump power source, mechanical pumping source, cooling water and respective valves after molecule revolution speed is zero.
In addition, it is necessary to explanation, in attached drawing or specification text, the implementation for not being painted or describing is institute
Belong to form known to a person of ordinary skill in the art in technical field, is not described in detail.In addition, above-mentioned to each element and method
Definition is not limited in various specific structures, shape or the mode mentioned in embodiment, and those of ordinary skill in the art can be to it
It is simply changed or is replaced, such as:
(1) mechanical pump is can be replaced with dry pump；
(2) pneumatic high vacuum flapper valve can be replaced with manual high vacuum metal angle valve；
(3) gate valve can strike the replacement of ultrahigh vacuum gate valve with the hand；
(4) direction term mentioned in embodiment, such as "upper", "lower", " preceding " etc. are only the directions with reference to attached drawing, and
It is non-to be used to limit the scope of the invention.
In conclusion the present invention provides a kind of microwave tube electron gun emitting performance test macro with Double-station bench
And method, have the advantages that compact-sized, high reliablity, measurement parameter congruence, can effectively shorten lead time of electron gun, tool
There is preferable application value.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention
Within the scope of shield.
Claims (10)
1. a kind of electron gun emitting performance test macro characterized by comprising
First vacuum chamber, the second vacuum chamber, vacuum system, electrode system and electric control system；
First vacuum chamber and second vacuum chamber are for placing the electron gun, wherein first vacuum chamber is equipped with sun
Pole；
The vacuum system is used for first vacuum chamber and second vacuum chamber；
The electrode system is used to provide electric current and voltage for the electron gun；
The electric control system is used to control the movement of the vacuum system and the electrode system, to test the electronics
Rifle emitting performance.
2. electron gun emitting performance test macro according to claim 1, which is characterized in that the vacuum system include from
Son pump (1), mechanical pump (59), molecular pump (60) and vacuum pipe (3)；
The air inlet of the ionic pump (1) connects first vacuum chamber；
The air inlet of the mechanical pump (59) connects the gas outlet of the molecular pump (60), and the air inlet of the molecular pump (60) connects
Connect second vacuum chamber；
The air inlet of the molecular pump (60) is connect with the air inlet of the ionic pump (1) by the vacuum pipe (3).
3. electron gun emitting performance test macro according to claim 2, which is characterized in that vacuum pipe (3) packet
Include first port, second port, third port and the 4th port；
The air inlet of the ionic pump (1) connects the first port, and the second port connects first vacuum chamber；
The air inlet of the molecular pump (60) connects the 4th port, and the third port connects second vacuum chamber.
4. electron gun emitting performance test macro according to claim 1, which is characterized in that the electrode system includes the
One electrode (8), second electrode (10) and third electrode (22), one end of three electrodes connect the vacuum system, other end connection
The electric control system.
5. electron gun emitting performance test macro according to claim 3, which is characterized in that the first port with it is described
Second port is on same vertical line, and the third port and the 4th port are on same vertical line.
6. electron gun emitting performance test macro according to claim 3, which is characterized in that the vacuum system further includes
One pneumatic high vacuum flapper valve (4), the second pneumatic high vacuum flapper valve (9), third pneumatic high vacuum flapper valve (23), the 4th gas
Dynamic cap of high-vacuum baffle valve (30), the 5th pneumatic high vacuum flapper valve (35), three-limb tube (36), blank flange (37), the 6th
Pneumatic high vacuum flapper valve (38), the 7th pneumatic high vacuum flapper valve (39), vacuum connection tube (40) and third bellows (41)；
The air inlet of the mechanical pump (59) passes through the 5th pneumatic high vacuum flapper valve (35), three-limb tube (36), the
Three bellowss (41) are connect with the gas outlet of the molecular pump (60)；
Mechanical pump (59) air inlet by the 5th pneumatic high vacuum flapper valve (35), vacuum connection tube (40) with it is described
6th pneumatic high vacuum flapper valve (38), the connection of the 7th pneumatic high vacuum flapper valve (39)；
The blank flange (37) is set to by the 4th port.
7. electron gun emitting performance test macro according to claim 3, which is characterized in that the ionic pump (1) into
The first gate valve (2) are equipped between port and the first port, are equipped between the second port and first vacuum chamber
Second gate valve (7)；
Between the air inlet and the 4th port of the molecular pump (60) be equipped with the 4th gate valve (31), the third port with
Third gate valve (24) are equipped between second vacuum chamber.
8. electron gun emitting performance test macro according to claim 1, which is characterized in that the electron gun emitting performance
Test macro further includes vacuum meter (42), first resistor rule (34), second resistance rule (61) and ionization gauge (62)；
The first resistor rule (34) connect with the vacuum meter (42), for measuring the vacuum of the mechanical pump (59) air inlet
Degree；
The second resistance rule (61) connect with the vacuum meter (42), for measuring first vacuum chamber and described second very
The rough vacuum of empty room；
The ionization gauge (62) connect with the vacuum meter (42), for measuring first vacuum chamber and second vacuum chamber
Condition of high vacuum degree.
9. electron gun emitting performance test macro according to claim 8, which is characterized in that the trip bar of the ionic pump
Part is that inlet vacuum degree is better than 5 × 10-4Pa, the entry condition of the molecular pump are that inlet vacuum degree is not less than 10Pa.
10. a kind of electron gun emitting performance based on any one of the claim 1-9 electron gun emitting performance test macro
Test method characterized by comprising
S1 closes all gate valves, and opens the first pneumatic high vacuum flapper valve；
The electron gun is placed in the first vacuum chamber or the second vacuum chamber by S2, so that the electrode of the electron gun and the system
The electrode of system connects；
S3, start mechanical pump, open second, third, the 4th pneumatic high vacuum flapper valve, to the mechanical pump inlet vacuum degree
Better than the first preset value, start molecular pump, open molecular pump connection second, third, the 4th gate valve；
S4 opens the first gate valve when the molecular pump inlet vacuum degree is better than the second preset value, starts ionic pump；
S5 heats the electron gun, tests the emission current, perveance and surface temperature of the electron gun.
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| CN201910369692.XA CN110196362B (en) | 2019-05-05 | 2019-05-05 | System and method for testing emission performance of electron gun |
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| CN201910369692.XA CN110196362B (en) | 2019-05-05 | 2019-05-05 | System and method for testing emission performance of electron gun |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111800930B (en) * | 2020-06-15 | 2022-08-26 | 山东大学 | Test device capable of simulating ionized layer plasma environment |
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