CN209356624U - A kind of vacuum equipment for stable state Townsend discharge test - Google Patents
A kind of vacuum equipment for stable state Townsend discharge test Download PDFInfo
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- CN209356624U CN209356624U CN201920040321.2U CN201920040321U CN209356624U CN 209356624 U CN209356624 U CN 209356624U CN 201920040321 U CN201920040321 U CN 201920040321U CN 209356624 U CN209356624 U CN 209356624U
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Abstract
This application provides a kind of vacuum equipments for stable state Townsend discharge test, comprising: vacuum discharge tank body；Vacuum discharge tank body specifically includes: tank body shell, upper flange lid, first electrode component, second electrode component, current measuring interface, ventilating interface and vacuumizes interface；Upper flange lid is tightly connected by fastener and tank body shell；First electrode component specifically includes: sealed nylon mechanism, ceramic package electrode and first electrode disk；Second electrode component specifically includes: second electrode disk and elevating mechanism；Elevating mechanism is fixedly connected with second electrode disk, for driving second electrode disk to move up and down；Current measuring interface is set on tank body shell, is used for external impressed current measuring device, and the signal input part that current measuring interface is located on the inside of tank body shell is electrically connected with second electrode disk.The application drives second electrode disk mobile by high-precision servo motor and drive lead screw, realizes the high-precision adjustment of electrode spacing.
Description
Technical field
This application involves discharge test device fields more particularly to a kind of vacuum for stable state Townsend discharge test to set
It is standby.
Background technique
In SST (stable state Townsend method) experimentation, in order to obtain the electron swarm parameters value of more accurate gas discharge,
It must assure that the degree of purity of laboratory sample gas, therefore discharge test tank must be made to reach higher true before being filled with sample gas
Reciprocal of duty cycle.It is discharged according to stable state Townsend theoretical, is only 10-13~10-11A in the steady-state current I of electron avalanche discharge regime, to electric current
Measurement accuracy require it is very high, need to guarantee the sensitivity and accuracy of current measurement system；Steady-state current value is to electrode simultaneously
The variation of spacing is very sensitive, to ensure the accurate of the Fitting Calculation, it is necessary to assure adjust the accuracy of electrode spacing.
Therefore it provides it is a kind of be able to achieve the vacuum equipment that discharge test accurately adjusts and become those skilled in the art need
The technical issues of solution.
Summary of the invention
This application provides a kind of vacuum equipments for stable state Townsend discharge test, comprising: vacuum discharge tank body；
The vacuum discharge tank body specifically includes: tank body shell, upper flange lid, first electrode component, second electrode component,
Current measuring interface, ventilating interface and vacuumizes interface；
The upper flange lid is tightly connected by fastener and the tank body shell；
The first electrode component specifically includes: sealed nylon mechanism, ceramic package electrode and first electrode disk；
The sealed nylon mechanism is assemblied in the center of the upper flange lid；It is provided in the sealed nylon mechanism
Hollow pipeline, the one end of the hollow pipeline on the outside of sealing space are provided with ultraviolet lamp, and the hollow pipeline is close to close
One end of envelope space inner is provided with convex lens group and the first electrode disk；
The ceramic package electrode is assemblied in the upper flange and covers, and is electrically connected with the first electrode disk；
The second electrode component specifically includes: second electrode disk, elevating mechanism and grating scale sensor；
The elevating mechanism specifically includes: drive lead screw；
One end of the drive lead screw is fixedly connected with the second electrode disk；
The other end of the drive lead screw is connected with servo motor；
The grating scale sensor is used to measure the shift value of the drive lead screw；
The current measuring interface is set on the tank body shell, is used for external impressed current measuring device, and the electric current
The signal input part that measurement interface is located on the inside of the tank body shell is electrically connected with the second electrode disk；
The ventilation interface and the side for vacuumizing interface and being all set in the tank body shell.
Preferably, the vacuum discharge tank body further include: observation window；
The observation window is set to the side of the tank body shell.
Preferably, the first electrode disk and the second electrode disk are specially brass electrode disk.
Preferably, the first electrode disk and the second electrode disk are specially Rogovski's electrode disk.
Preferably, the current measuring interface is specially 2 core aerospace connectors of vacuum sealing type.
Preferably, the ultraviolet lamp specifically includes: mercury lamp or deuterium lamp.
Preferably, the vacuum equipment further includes cabinet body；
The interior of the cabinet is equipped with the servo motor；
The top surface of the cabinet body is for placing the vacuum discharge tank body, and the cabinet body top surface and the vacuum discharge tank
The bottom surface of body is provided with the connection through-hole being mutually matched；
The diameter of the bore and the drive lead screw of the connection through-hole matches.
Preferably, the bottom of cabinet bulk is provided with universal wheel.
As can be seen from the above technical solutions, the application has the following advantages:
This application provides a kind of vacuum equipments for stable state Townsend discharge test, comprising: vacuum discharge tank body；It is described
Vacuum discharge tank body specifically includes: tank body shell, upper flange lid, first electrode component, second electrode component, current measurement connect
Mouthful, ventilating interface and vacuumizes interface；The upper flange lid is tightly connected by fastener and the tank body shell；Described first
Electrode assembly specifically includes: sealed nylon mechanism, ceramic package electrode and first electrode disk；The sealed nylon mechanism is assemblied in
The center of the upper flange lid；Hollow pipeline is provided in the sealed nylon mechanism, the hollow pipeline is close to sealing
One end on the outside of space is provided with ultraviolet lamp, and the one end of the hollow pipeline on the inside of sealing space is provided with convex lens group
With the first electrode disk；The ceramic package electrode is assemblied in the upper flange and covers, and is electrically connected with the first electrode disk
It connects；The second electrode component specifically includes: second electrode disk and elevating mechanism；The elevating mechanism and the second electrode disk
It is fixedly connected, for driving the second electrode disk to move up and down；The current measuring interface is set to the tank body shell
On, be used for external impressed current measuring device, and the current measuring interface be located at signal input part on the inside of the tank body shell and
The second electrode disk electrical connection；The ventilation interface and the side for vacuumizing interface and being all set in the tank body shell.
The application drives second electrode disk mobile by high-precision servo motor and drive lead screw, realizes the high-precision tune of electrode spacing
It is whole.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of application without any creative labor, may be used also for those of ordinary skill in the art
To obtain other attached drawings according to these attached drawings.
Fig. 1 is a kind of structural schematic diagram of the vacuum equipment for stable state Townsend discharge test provided by the present application；
Fig. 2 is a kind of top view of the vacuum equipment for stable state Townsend discharge test provided by the present application.
Wherein, appended drawing reference is as follows:
1, observation window；2, ventilation interface；3, ceramic package electrode；4, sealed nylon mechanism；5, upper flange lid；6, outside tank body
Shell；7, electrode disk；8, vacuum pump assembly；9, elevating mechanism；10, cabinet body；11, ultraviolet lamp；12, blind plate spare interface；13, it takes out
Vacuum interface；14, current measuring interface.
Specific embodiment
The embodiment of the present application provides a kind of vacuum equipment for stable state Townsend discharge test, for realizing electrode spacing
High-precision adjustment.
To enable present invention purpose, feature, advantage more obvious and understandable, below in conjunction with the application
Attached drawing in embodiment, the technical scheme in the embodiment of the application is clearly and completely described, it is clear that disclosed below
Embodiment be only some embodiments of the present application, and not all embodiment.Based on the embodiment in the application, this field
Those of ordinary skill's all other embodiment obtained without making creative work belongs to the application protection
Range.
Fig. 1 and Fig. 2 are please referred to, the embodiment of the present application provides a kind of vacuum equipment for stable state Townsend discharge test,
It include: vacuum discharge tank body；
The vacuum discharge tank body specifically includes: tank body shell 6, upper flange lid 5, first electrode component, second electrode group
Part, current measuring interface 14, ventilation interface 2 and vacuumize interface 13；
The upper flange lid 5 is tightly connected by fastener and the tank body shell 6；
The first electrode component specifically includes: sealed nylon mechanism 4, ceramic package electrode 3 and first electrode disk 7；
The sealed nylon mechanism 4 is assemblied in the center of the upper flange lid 5；It is set in the sealed nylon mechanism 4
It is equipped with hollow pipeline, the one end of the hollow pipeline on the outside of sealing space is provided with ultraviolet lamp 11, the hollow pipeline
One end on the inside of sealing space is provided with convex lens group and the first electrode disk 7；
Wherein, the purpose of the present embodiment setting convex lens group is to collect ultraviolet light more by the formation of convex lens group boundling
In light beam after, be radiated in Gold plated Layer through quartz glass, can produce stable initial current, and then can be improved measured value
Accuracy；
The ceramic package electrode 3 is assemblied on the upper flange lid 5, and is electrically connected with the first electrode disk 7；
The second electrode component specifically includes: second electrode disk 7, elevating mechanism 9 and grating scale sensor；
The second electrode disk 7 and the first electrode disk 7 are symmetrical；
The elevating mechanism 9 specifically includes: drive lead screw；
One end of the drive lead screw is fixedly connected with the second electrode disk 7；
The other end of the drive lead screw is connected with servo motor；
The grating scale sensor is used to measure the shift value of the drive lead screw, can from numerically to adjustment spacing into
Row quantization, guarantees the accuracy of adjustment electrode spacing；
The current measuring interface 14 is set on the tank body shell 6, is used for external impressed current measuring device, and the electricity
The signal input part that flow measurement interface 14 is located at 6 inside of tank body shell is electrically connected with the second electrode disk 7；
The ventilation interface 2 and the side for vacuumizing interface 13 and being all set in the tank body shell 6.
The vacuum tank upper outer circumference of the present embodiment is equipped with 1 group of KF 40 and vacuumizes interface 13, and main vacuum valve uses KF
40 manual cap of high-vacuum baffle valve are connect by 40 bellows of KF with tank body；The stainless steel cylinder vacuum tank configures 1 set two
Grade vacuum pump assembly, the vacuum pump assembly is by 1 FF 160/620F molecular pump and 1 RVD-18 type rotary vane mechanical pump group
At；The mechanical pump can directly extract gas in tank by 1 group of three-way pipeline and 25 Manual vacuum valve of KF without molecular pump
Body；Final vacuum is 10 in the vacuum tank tank-4Then Pa, Pressure Rise Rate≤10Pa/h can also be ionized compound using resistance
Formula vacuum machine measures air pressure in tank.
And interface 2 of ventilating specifically includes 1 group of intake interface and 1 group of outlet interface, for injecting and/or excluding experiment gas
Body.
More specifically, the vacuum discharge tank body further include: observation window 1；
The observation window 1 is set to the side of the tank body shell 6.
It should be noted that observing the intracorporal discharge test situation of vacuum discharge tank for convenience, the present embodiment is in vacuum
Tank side surface circumference center position opens the observation window 1 of 1 group of optical quartz glass, and aperture is DN 100mm.
In addition to above-mentioned observation window 1, ventilation interface 2, current measuring interface 14 and interface 13 is vacuumized on tank body shell 6
Outside, blind plate spare interface 12 can also be added, to carry out Function Extension to the present embodiment vacuum equipment
More specifically, the first electrode disk 7 and the second electrode disk 7 are specially brass electrode disk.
More specifically, the first electrode disk 7 and the second electrode disk 7 are specially Rogovski's electrode disk.
It should be noted that the electrode disk that the present embodiment uses is specially Rogovski's electrode disk, wherein as powering on
The diameter 140mm of the first electrode disk 7 of pole, single side planar diameter are 100mm, and are connected by screw thread and nylon vacuum packaging system
It connects；Fixing bolt is installed at the brass electrode top, distance center 50mm, passes through copper with ceramic package electrode 3
Conducting wire connection, and at the brass electrode centers, through the gold-plated quartz glass of single side is inlaid with, effectively observing diameter is
20mm；The Quartz glass surfaces are gold-plated using vacuum vapour deposition, gold plating thickness 20nm；The nylon potting device,
Brass electrode and quartz glass composition overall vacuum sealing.
And the diameter of the second electrode disk 7 as lower electrode is 140mm, single side planar diameter is 100 mm, with top electrode
Spacing is up to 55mm, and to neutral good；The brass electrode is eccentrically mounted on nylon pivot flange, the nylon support
Flange is connect with bottom servo motor ball screw device, can be by adjusting lower electrode position after transmission range on external touch screen
It sets to adjust upper/lower electrode spacing, degree of regulation is 15 μm, and is displaced equipped with grating scale with real-time display that display precision is 5 μm；
1 group of fixing bolt is set at electrode lower panel center under the brass system as electrode column, draws 1 copper conductor to tank body
Current measuring interface 14；The current measuring interface 14 is connect by cable with microgalvanometer outside tank body, to measure reality
It tests and the steady-state current generated after lower electrode is reached by initiating electron.
More specifically, the current measuring interface 14 is specially 2 core aerospace connectors of vacuum sealing type.
It should be noted that the present embodiment is by using the earth-shielded 2 core aviation company having compared with strong anti-interference ability
Device is connect, connector is connect by BNC pin end with micro current instrument outside tank body, to improve the accurate of measurement Current Voltage
Property.
More specifically, the ultraviolet lamp 11 specifically includes: mercury lamp or deuterium lamp.
More specifically, the vacuum equipment further includes cabinet body 10；
10 mounted inside of cabinet body has the servo motor；
The top surface of the cabinet body 10 is for placing the vacuum discharge tank body, and 10 top surface of the cabinet body and the vacuum are put
The bottom surface of electric tank body is provided with the connection through-hole being mutually matched；
The diameter of the bore and the drive lead screw of the connection through-hole matches.
It is understood that cabinet body 10 is also used to load and set for controlling the vacuum other than above-mentioned servo motor
Standby controlling terminal and interactive terminal accurately adjusts electrode disk spacing according to the parameter of input for controlling servo motor.
More specifically, 10 bottom of cabinet body is provided with universal wheel.
Gas stable state is measured in a kind of vacuum equipment for stable state Townsend discharge test through this embodiment
When Townsend is tested, comprising the following steps:
Step 1, ultraviolet lamp 11 is installed, adjustment lamp strip position focuses on ultraviolet light in Gold plated Layer, opens ultraviolet lamp
11 light preheat 1 hour, and ultraviolet light is radiated in Gold plated Layer by convex lens group and quartz glass, can produce stable initial electricity
Flow I0；
Step 2, upper flange lid 5 is installed to tank body shell 6 and is fastened, negative polarity d. c high voltage power supply is passed through into copper conductor
It is connected to ceramic package electrode 3, entire tank body shell 6 is grounded, and high-voltage probe and digital oscilloscope are set to monitor in real time
Voltage value；
Step 3, microgalvanometer is connected to aerospace connectors interface；
Step 4, it is laid with gas passage, is connect sample gas with intake interface by rubber hose, and check gas circuit
Air-tightness；
Step 5, the rotary vane mechanical pump in vacuum pump assembly is first opened, air pressure in tank is evacuated to 10Pa hereinafter, opening again
Molecular pump continues to be evacuated to 10-4Pa；
Step 6, sample gas is filled in tank to setting atmospheric pressure value and is first filled if laboratory sample gas is mixed gas
Enter small content gas, be re-filled with big content gas, and stands 3 hours and be sufficiently mixed to it；
Step 7, in experiment, by elevating mechanism for lower electrode 9 adjust between first electrode disk 7 and second electrode disk 7 away from
From d, and the output voltage values U for adjusting negative polarity d. c power supply makes electric field E between plate maintain setting value, and is measured by micro-current
Electron avalanche electric current I between template；
Step 8, under given electric field E value, the value of d and U is adjusted, measurement obtains a series of I dispersion number relevant to d
Value group (Ii,di)。
Step 9, by the Fitting Calculation, sample can be calculated according to the correlativity of electrode spacing and steady-state current value
The impact ionization coefficient α and attachment coefficient η that gas electronic collapses.
The above, above embodiments are only to illustrate the technical solution of the application, rather than its limitations；Although referring to before
Embodiment is stated the application is described in detail, those skilled in the art should understand that: it still can be to preceding
Technical solution documented by each embodiment is stated to modify or equivalent replacement of some of the technical features；And these
It modifies or replaces, the spirit and scope of each embodiment technical solution of the application that it does not separate the essence of the corresponding technical solution.
Claims (8)
1. a kind of vacuum equipment for stable state Townsend discharge test characterized by comprising vacuum discharge tank body；
The vacuum discharge tank body specifically includes: tank body shell, upper flange lid, first electrode component, second electrode component, electric current
Measurement interface, ventilating interface and vacuumizes interface；
The upper flange lid is tightly connected by fastener and the tank body shell；
The first electrode component specifically includes: sealed nylon mechanism, ceramic package electrode and first electrode disk；
The sealed nylon mechanism is assemblied in the center of the upper flange lid；It is provided in the sealed nylon mechanism hollow
Pipeline, the one end of the hollow pipeline on the outside of sealing space are provided with ultraviolet lamp, and the hollow pipeline is empty close to sealing
Between inside one end be provided with convex lens group and the first electrode disk；
The ceramic package electrode is assemblied in the upper flange and covers, and is electrically connected with the first electrode disk；
The second electrode component specifically includes: second electrode disk, elevating mechanism and grating scale sensor；
The elevating mechanism specifically includes: drive lead screw；
One end of the drive lead screw is fixedly connected with the second electrode disk；
The other end of the drive lead screw is connected with servo motor；
The grating scale sensor is used to measure the shift value of the drive lead screw；
The current measuring interface is set on the tank body shell, is used for external impressed current measuring device, and the current measurement
The signal input part that interface is located on the inside of the tank body shell is electrically connected with the second electrode disk；
The ventilation interface and the side for vacuumizing interface and being all set in the tank body shell.
2. vacuum equipment according to claim 1, which is characterized in that the vacuum discharge tank body further include: observation window；
The observation window is set to the side of the tank body shell.
3. vacuum equipment according to claim 1, which is characterized in that the first electrode disk and second electrode disk tool
Body is brass electrode disk.
4. vacuum equipment according to claim 3, which is characterized in that the first electrode disk and second electrode disk tool
Body is Rogovski's electrode disk.
5. vacuum equipment according to claim 1, which is characterized in that the current measuring interface is specially vacuum sealing type
2 core aerospace connectors.
6. vacuum equipment according to claim 1, which is characterized in that the ultraviolet lamp specifically includes: mercury lamp or deuterium lamp.
7. vacuum equipment according to claim 1, which is characterized in that the vacuum equipment further includes cabinet body；
The interior of the cabinet is equipped with the servo motor；
The top surface of the cabinet body is for placing the vacuum discharge tank body, and the cabinet body top surface and the vacuum discharge tank body
Bottom surface is provided with the connection through-hole being mutually matched；
The diameter of the bore and the drive lead screw of the connection through-hole matches.
8. vacuum equipment according to claim 7, which is characterized in that the bottom of cabinet bulk is provided with universal wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920040321.2U CN209356624U (en) | 2019-01-10 | 2019-01-10 | A kind of vacuum equipment for stable state Townsend discharge test |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920040321.2U CN209356624U (en) | 2019-01-10 | 2019-01-10 | A kind of vacuum equipment for stable state Townsend discharge test |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112083295A (en) * | 2020-08-11 | 2020-12-15 | 西安交通大学 | Experimental device and method based on pulse Thomson method |
| CN114364486A (en) * | 2019-09-11 | 2022-04-15 | 巴维斯技术股份有限公司 | Workpiece tray rotating, reversing and replacing device positioned on horizontal machining center and tray rack |
-
2019
- 2019-01-10 CN CN201920040321.2U patent/CN209356624U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114364486A (en) * | 2019-09-11 | 2022-04-15 | 巴维斯技术股份有限公司 | Workpiece tray rotating, reversing and replacing device positioned on horizontal machining center and tray rack |
| CN114364486B (en) * | 2019-09-11 | 2024-06-04 | 巴维斯技术股份有限公司 | Device for turning, reversing and changing workpiece tray on horizontal machining center and tray frame |
| CN112083295A (en) * | 2020-08-11 | 2020-12-15 | 西安交通大学 | Experimental device and method based on pulse Thomson method |
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