CN207318410U - A kind of detection device for the assessment of film field emission performance - Google Patents
A kind of detection device for the assessment of film field emission performance Download PDFInfo
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- CN207318410U CN207318410U CN201721481458.9U CN201721481458U CN207318410U CN 207318410 U CN207318410 U CN 207318410U CN 201721481458 U CN201721481458 U CN 201721481458U CN 207318410 U CN207318410 U CN 207318410U
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- probe
- field emission
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- detection device
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Abstract
The utility model discloses a kind of detection device for the assessment of film field emission performance, includes probe and ceramic tray, and ceramic tray is installed on probe lower section, between the two accessible stop；Probe is arranged at the bottom of a cylinder, and cylinder is opposite with ceramic tray；A glass plate for carrying fluorescent powder is equipped with the surface of cylinder；Probe is connected by connecting tube with track, and for track installation on a vacuum flange, vacuum flange one screw rod propulsive mechanism of connection forms the advance and retreat driving structure to probe.The utility model is by working under a high vacuum, micron-sized distance controlling can be realized using the screw rod push structure of similar micrometer caliper, the application of big voltage can be achieved using high vacuum ceramics, the flat structure design of probe ensure that being normally carried out for Flied emission measurement；It can be used for the field emission performance of testing film, measuring accuracy is high, and measurement stroke is big, and high vacuum ceramics are realized in the diverter branch that big voltage applies only with resistive element, simple in structure.
Description
Technical field
The utility model is related to electron detection device technical field, and in particular to one kind be used for film field emission performance into
The detection device of row assessment.
Background technology
The performance-critical parameter of field emission display film includes threshold voltage, saturation current etc., and highfield drives film material
Material surface electronic is to the main operational principle that vacuum transmitting is Field Emission Display, and the emitting performance of filed emission cathode material is
Determine the key problem of whole Field Emission Display performance.It is more for having in the specific detection of filed emission cathode material emitting performance
Require, such as high vacuum, contactless, huge electric field etc..The key of Flied emission measurement is to apply great electric field, it is desirable to
Reach every meter of more than 1000000V, and film and the distance between electrode be not controllable in the micron-scale, between film and electrode
There is no other closer structures, and these technical requirements are realized difficult in current detection device, cause detection process
It is very cumbersome.
Utility model content
The utility model is directed to the defects of prior art, there is provided a kind of structure is simpler, design is more reasonable, more convenient control
Make, more easily reach the detection device for being used for the assessment of film field emission performance of testing requirements.
In order to solve the above technical problems, the utility model adopts the following technical solution：One kind is used for film field emission performance
The detection device of assessment, it is characterised in that：Include for the probe of detection and the ceramic tray for placing film sample, pottery
Porcelain tray be installed on probe lower section, formed between the two it is accessible communicate structure, i.e., probe sample between accessible stop；Visit
Head is arranged at the bottom of a cylinder, and cylinder is opposite with ceramic tray, pops one's head between cylinder and ceramic tray；In cylinder just
Top is equipped with a glass plate for carrying fluorescent powder, and glass plate forms electronics by the way that cylinder is opposite with the film sample on ceramic tray
Transmitting shows structure；Ceramic tray is installed on a block substrate, and block substrate and a guide rail connect into removable frame；Probe passes through
The connecting tube of one insulation is connected with a track, and for track installation on a vacuum flange, vacuum flange connects a screw rod propulsive mechanism
Form the advance and retreat driving structure to probe；Ceramic tray is located above the vacuum flange, and screw rod propulsive mechanism is located at vacuum method
Blue lower section.
Further, the probe is installed on insulating ceramics, and insulating ceramics is fixed by ceramic nut, ceramic nut
The lower outside of cylinder is arranged at insulating ceramics；Ceramic nut is fixed in the connecting tube.
Further, one rotatable baffle is provided with by shaft in the lower section of glass plate, which passes through shaft
The barrier structure to ultraviolet is formed, prevents ultraviolet from causing to damage to human eye.
Further, the ceramic tray is installed on a tray seat by fastening screw, and tray seat is installed on block substrate
On.
Further, a collection baffle is provided with below block substrate, baffle is collected and is installed on vacuum flange.
Preferably, it is described probe include three kinds of structures, be respectively band aperture plate penetrate structure probe, slab construction probe and
Hemispherical dome structure is popped one's head in, to meet different measurement demands.
Further, the vacuum flange is not less than 10 for vacuum-6The vacuum flange of Pa.
Preferably, the propulsion mobile accuracy of the screw rod propulsive mechanism is 0.02mm, promotes stroke to be not less than 20mm, is utilized
The screw rod propulsive mechanism of similar micrometer caliper realizes the distance controlling probe measurement of micron level, it is achieved thereby that every meter of electric field
Million volts and accurate adjustable.
In a device, the application of big voltage is realized using high vacuum ceramic insulation, drives sample stage (ceramic tray) sample
The electronics of material surface is launched to vacuum, is collected by top cathode.The electronics produced in measurement process can be by top cylinder
Glass plate at rear is collected.Fluorescent powder is coated with glass plate, it can be seen that the effect that electronic field emission is shown
The utility model under a high vacuum, has two-terminal structure by work, can be to current-voltage-work of film
Being measured as distance Curve, it can realize micron-sized distance controlling using the screw rod push structure of similar micrometer caliper,
Can be achieved the application of big voltage using high vacuum ceramics, the flat structure design of probe ensure that Flied emission measurement it is normal into
OK；It can be used for the field emission performance of testing film, measuring accuracy is high, and measurement stroke is big, and high vacuum ceramics realize that big voltage is applied
It is simple in structure only with resistive element in the diverter branch added.
Brief description of the drawings
Fig. 1 is the utility model structure diagram；
Fig. 2 is the utility model main part structural representation；
Fig. 3 is the structure diagram of three kinds of probes.
In figure, 1 is vacuum flange, and 2 be ceramic tray, and 3 be probe, and 4 be cylinder, and 5 be ceramic nut, and 6 be insulating ceramics,
7 be block substrate, and 8 be guide rail, and 9 be screw rod propulsive mechanism, and 10 be glass plate, and 11 be baffle, and 12 is collect baffle, and 13 be fastening spiral shell
Silk, 14 be track, and 15 be connecting tube, and A is that band aperture plate penetrates structure probe, and B pops one's head in for slab construction, and C visits for hemispherical dome structure
Head.
Embodiment
In the present embodiment, referring to Figures 1 and 2, the detection device for the assessment of film field emission performance, includes use
In the probe 3 of detection and ceramic tray 2 for placing film sample, ceramic tray 2 is installed on the lower section of probe 3, between the two
Formed it is accessible communicate structure, that is, pop one's head in 3 and sample between accessible stop；Probe 3 is arranged at the bottom of a cylinder 4, cylinder 4
Opposite with ceramic tray 2, probe 3 is between cylinder 4 and ceramic tray 2；In the surface of cylinder 4 fluorescent powder is carried equipped with one
Glass plate 10, glass plate 10 pass through cylinder 4 it is opposite with the film sample on ceramic tray 2 formed electron emission show structure；
Ceramic tray 2 is installed on a block substrate 7, and 7 and one guide rail 8 of block substrate connects into removable frame；Probe 3 passes through an insulation
Connecting tube 15 is connected with a track 14, and track 14 is installed on a vacuum flange 1, and vacuum flange 1 connects a screw rod propulsive mechanism 9
Form the advance and retreat driving structure to probe 3；Ceramic tray 2 is located above the vacuum flange 1, and screw rod propulsive mechanism 9 is positioned at true
The lower section of empty flange 1.
The probe 3 is installed on insulating ceramics 6, and insulating ceramics 6 is fixed by ceramic nut 5, ceramic nut 5 and absolutely
Edge ceramics 6 are arranged at the lower outside of cylinder 4；Ceramic nut 5 is fixed in the connecting tube 15.
One rotatable baffle 11 is provided with by shaft in the lower section of glass plate 10, which is formed by shaft
To the barrier structure of ultraviolet, prevent ultraviolet from causing to damage to human eye.
The ceramic tray 2 is installed on a tray seat by fastening screw 13, and tray seat is installed on block substrate 7.
A collection baffle 12 is provided with below block substrate 7, baffle 12 is collected and is installed on vacuum flange 1.
The probe 3 includes three kinds of structures, is respectively that band aperture plate penetrates structure probe A, slab construction probe B and hemisphere
Shape structure probe C, to meet different measurement demands, uses band aperture plate to penetrate structure probe A in the present embodiment.
The vacuum flange 1 is not less than 10 for vacuum-6The vacuum flange of Pa.
The propulsion mobile accuracy of the screw rod propulsive mechanism 9 is 0.02mm, promotes stroke to be not less than 20mm, utilizes similar spiral shell
The screw rod propulsive mechanism of rotation mircrometer gauge realizes 3 measurement of distance controlling probe of micron level, it is achieved thereby that every meter of electric field million
Lie prostrate and accurate adjustable.
The utility model is described in detail above, it is described above, be only the utility model preferred embodiment and
, it is when the application practical range cannot be limited, i.e., all to make equivalent changes and modifications according to the application scope, it all should still belong to this practicality
In new covering scope.
Claims (8)
- A kind of 1. detection device for the assessment of film field emission performance, it is characterised in that：Include for detection probe and For placing the ceramic tray of film sample, ceramic tray is installed on probe lower section, is formed accessible communicate structure between the two； Probe is arranged at the bottom of a cylinder, and cylinder is opposite with ceramic tray, pops one's head between cylinder and ceramic tray；In cylinder Surface is equipped with a glass plate for carrying fluorescent powder, and glass plate forms electricity by the way that cylinder is opposite with the film sample on ceramic tray Son transmitting shows structure；Ceramic tray is installed on a block substrate, and block substrate and a guide rail connect into removable frame；Probe is logical The connecting tube for crossing an insulation is connected with a track, and for track installation on a vacuum flange, vacuum flange connects a screw rod pusher It is configured to the advance and retreat driving structure to probe；Ceramic tray is located above the vacuum flange, and screw rod propulsive mechanism is located at vacuum The lower section of flange.
- 2. the detection device according to claim 1 for the assessment of film field emission performance, it is characterised in that：The probe It is installed on insulating ceramics, and insulating ceramics is fixed by ceramic nut, ceramic nut and insulating ceramics are arranged under cylinder On the outside of portion；Ceramic nut is fixed in the connecting tube.
- 3. the detection device according to claim 1 for the assessment of film field emission performance, it is characterised in that：In glass plate Lower section one rotatable baffle is provided with by shaft, which forms the barrier structure to ultraviolet by shaft.
- 4. the detection device according to claim 1 for the assessment of film field emission performance, it is characterised in that：The ceramics Pallet is installed on a tray seat by fastening screw, and tray seat is installed on block substrate.
- 5. the detection device according to claim 1 for the assessment of film field emission performance, it is characterised in that：In block substrate Lower section is provided with a collection baffle, collects baffle and is installed on vacuum flange.
- 6. the detection device according to claim 1 for the assessment of film field emission performance, it is characterised in that：The probe Include three kinds of structures, be respectively that band aperture plate penetrates structure probe, slab construction probe and hemispherical dome structure probe.
- 7. the detection device according to claim 1 for the assessment of film field emission performance, it is characterised in that：The vacuum Flange is not less than 10 for vacuum-6The vacuum flange of Pa.
- 8. the detection device according to claim 1 for the assessment of film field emission performance, it is characterised in that：The screw rod The propulsion mobile accuracy of propulsive mechanism is 0.02mm, promotes stroke to be not less than 20mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721481458.9U CN207318410U (en) | 2017-11-09 | 2017-11-09 | A kind of detection device for the assessment of film field emission performance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721481458.9U CN207318410U (en) | 2017-11-09 | 2017-11-09 | A kind of detection device for the assessment of film field emission performance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207318410U true CN207318410U (en) | 2018-05-04 |
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ID=62401395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721481458.9U Active CN207318410U (en) | 2017-11-09 | 2017-11-09 | A kind of detection device for the assessment of film field emission performance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207318410U (en) |
-
2017
- 2017-11-09 CN CN201721481458.9U patent/CN207318410U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230104 Address after: 210000 building 12-500, 29 buyue Road, Qiaolin street, Pukou District, Nanjing City, Jiangsu Province Patentee after: Jiangsu Jichuang Atomic Cluster Technology Research Institute Co.,Ltd. Address before: 215551 Second Floor, Xinlian Science and Technology Innovation Park, No. 9, Wengzhuang Road, Shanghu Town, Changshu, Suzhou, Jiangsu Patentee before: SUZHOU KANGLIFENG NANO TECHNOLOGY CO.,LTD. |
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| TR01 | Transfer of patent right |