CN114355432A - Miniature weak charged particle beam detection device - Google Patents
Miniature weak charged particle beam detection device Download PDFInfo
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- CN114355432A CN114355432A CN202111648737.0A CN202111648737A CN114355432A CN 114355432 A CN114355432 A CN 114355432A CN 202111648737 A CN202111648737 A CN 202111648737A CN 114355432 A CN114355432 A CN 114355432A
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Abstract
The invention relates to a micro weak charged particle beam detection device, comprising: an electron suppressor for suppressing secondary electrons; a beam absorber for absorbing the charged particle beam; a signal amplification electrode for generating a secondary amplified electron current; the signal absorbing electrode is used for detecting and absorbing the total amplified current signal; the electron suppressor, the beam current absorber, the signal amplifier and the signal absorber are sequentially arranged along the direction of the head-on charged beam current, and the working environment of the detection device is a vacuum environment. Compared with the prior art, the invention has the advantages of high detection precision, low production cost, easy processing and the like.
Description
Technical Field
The invention relates to the technical field of charged particle detection, in particular to a miniature weak charged particle beam detection device.
Background
Pulsed charged particle beams can be divided into pulsed electron beams and pulsed ion beams, and are widely used in the fields of material surface modification, nuclear physics and nuclear technology, plasma physics, aerospace and the like. In the prior art, the measurement of the beam density distribution of the charged particle beam generally adopts a mechanical scanning method, a color changing sheet method, a scintillator photoelectric method, a flat electrode array and the like.
At present, the direct measurement of the beam intensity of the charged particles smaller than the picoampere magnitude by adopting a conventional method is difficult to realize, so that a detection device capable of aiming at the beam intensity of the charged particles of the picoampere magnitude is urgently needed.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide the miniature weak charged particle beam detection device which is high in detection precision, low in production cost and easy to process.
The purpose of the invention can be realized by the following technical scheme:
a miniature weak charged particle beam detection device, comprising:
an electron suppressor for suppressing secondary electrons;
a beam absorber for absorbing the charged particle beam;
a signal amplification electrode for generating a secondary amplified electron current;
the signal absorbing electrode is used for detecting and absorbing the total amplified current signal;
the electron suppressor, the beam current absorber, the signal amplifier and the signal absorber are respectively arranged in sequence along the direction of the head-on charged beam current; the working environment of the detection device is a vacuum environment.
Preferably, the detection device is provided with a vacuum connecting support used for installing a fixed screw and a vacuum electrode.
More preferably, the vacuum connecting support adopts the CF35 knife edge flange standard; three threaded holes are uniformly formed in the flange surface of the vacuum connecting support and used for mounting fixed screws, and three vacuum electrode interfaces are alternately arranged on a concentric ring of the threaded holes and used for mounting vacuum electrodes.
More preferably, the electronic suppressor is mounted on the fixing screw rod in an insulated manner and is connected with a vacuum electrode of the vacuum connecting support.
More preferably, the beam current absorption electrode is mounted on the fixing screw rod in an insulated manner and is connected with a vacuum electrode of the vacuum connection support.
More preferably, the beam current absorbing electrode comprises a porous circular ring sheet and a micro-channel circular plate; the circular plate of the micro-channel is concentrically spot-welded on the reverse side of the porous circular sheet.
More preferably, the signal amplification pole is non-insulatively arranged on the fixing screw rod.
More preferably, the signal amplification pole comprises a porous circular ring sheet and a micro-channel circular plate; the circular plate of the micro-channel is concentrically spot-welded on the front surface of the porous circular ring sheet.
More preferably, the signal absorbing electrode is mounted on the fixing screw rod in an insulated manner and is connected with a vacuum electrode of the vacuum connecting support.
More preferably, a conical semi-countersink is arranged at the center of the signal absorbing pole and used for inhibiting secondary electrons from generating and collecting amplified electronic signals.
Compared with the prior art, the invention has the following beneficial effects:
firstly, the detection precision is high: the micro weak charged particle beam detection device provided by the invention can inhibit secondary electrons through the electron suppressor, amplify electron current through the signal amplifier, and enhance the collection of the electron current by arranging the conical semi-counter bore, so that the amplification detection of the FeiAN-level weak charged particle beam can be realized.
Secondly, the production cost is low: the miniature weak charged particle beam detection device disclosed by the invention fixedly installs all electrodes on the vacuum connecting support flange through the three supporting connecting pieces, so that the whole structure is compact and simple, the processing and installation are convenient, and the production cost is economic; meanwhile, a four-electrode structure is adopted, wherein the signal amplification electrode is internally grounded, so that the use of one driving power supply can be reduced, and the operation cost is more economic.
Thirdly, easy processing: the components of the miniature weak charged particle beam detection device disclosed by the invention adopt a concentric convolution structure, the maximum external diameter in the vacuum of the device is about 25mm, the structure is small and exquisite, the coaxiality is high, and the processing and assembling precision is easy to improve.
Drawings
FIG. 1 is a schematic structural diagram of a micro weak charged particle beam detection device according to the present invention;
fig. 2 is a schematic cross-sectional structure diagram of the micro weak charged particle beam detection device of the present invention.
The reference numbers in the figures indicate:
1. the device comprises an electron suppression electrode, a beam current absorption electrode, a signal amplification electrode, a signal absorption electrode, a vacuum connection support, a fixing screw rod, a vacuum electrode and a support, wherein the electron suppression electrode 2, the beam current absorption electrode 3, the signal amplification electrode 4, the signal absorption electrode 5 and the vacuum connection support 501 are arranged in the vacuum connection support, and the fixing screw rod 502 is arranged in the vacuum connection support.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, shall fall within the scope of protection of the present invention.
A micro weak charged particle beam detector, the structure of which is shown in fig. 1 and fig. 2, comprising: vacuum connection support 5, electron suppression utmost point 1, beam current absorption utmost point 2, signal amplification utmost point 3 and signal absorption utmost point 4, wherein:
the vacuum connecting support 5 is used for installing a fixed screw rod and a vacuum electrode interface of the probe and providing vacuum sealing;
an electron suppressor 1 for suppressing secondary electrons.
And the beam absorber 2 is used for absorbing weak charged particle beams.
And the signal amplification pole 3 is used for generating secondary amplified electron current.
And a signal sink electrode 4 for detecting and absorbing the total amplified current signal.
The vacuum connecting support 5 in this embodiment adopts the CF35 knife edge flange standard, three threaded holes are uniformly arranged on the flange surface of the vacuum connecting support 5 for mounting the fixing screws 501, three vacuum electrode interfaces 502 are alternately arranged on the concentric ring with the threaded holes for mounting vacuum electrodes, and the vacuum electrodes are used for vacuum potential and signal connection of each electrode inside.
The electron suppressor 1 is formed by a porous ring sheet, is mounted on the fixing screw 501 in an insulated manner, and is connected to a vacuum electrode of the vacuum connection holder 5. The electron suppressor 1 is the first electrode facing the direction of the charged beam.
The beam current absorption electrode 2 is mounted on the fixed screw 501 in an insulated manner and is connected with a vacuum electrode of the vacuum connection support 5. The beam current absorbing electrode 2 comprises a porous circular sheet and a micro-channel circular plate, and the micro-channel circular plate is concentrically spot-welded on the reverse side of the porous circular sheet. The beam absorber 2 is the second electrode facing the direction of the charged beam.
The signal amplification pole 3 is non-insulated and installed on the fixed screw 501, i.e. the potential is grounded. The signal amplification electrode 3 comprises a porous circular ring sheet and a micro-channel circular plate, and the micro-channel circular plate is concentrically spot-welded on the front surface of the porous circular ring sheet. The signal amplification electrode 3 is a third electrode facing the direction of the charged beam.
The signal absorbing electrode 4 is composed of a porous circular ring thick sheet with a conical semi-counter bore in the middle, is installed on the fixed screw 501 in an insulating mode, and is connected with a vacuum electrode of the vacuum connecting support 5. The central position of the signal absorbing pole 4 is provided with a conical semi-countersink which is used for inhibiting the generation of secondary electrons and collecting amplified electronic signals. The beam absorber 4 is the fourth electrode facing the direction of the charged beam.
The application method of the miniature weak charged particle beam detection device in the embodiment comprises the following steps:
after the assembled detection device is built, firstly, the device is installed at a measuring end of the charged particle beam to complete physical centering installation, and a vacuum maintaining device is opened; and secondly, connecting the vacuum electrodes connected with the electron suppressor and the beam current absorber to respective direct current voltage-stabilizing high-voltage power supplies. And thirdly, connecting a vacuum electrode interface connected with the signal absorbing electrode to a milliampere ammeter or directly connecting the vacuum electrode interface to an oscilloscope end with high internal resistance. And step four, gradually increasing bias voltage to the beam current absorption electrode to reach a working threshold, and seeing a corresponding signal on an ammeter or an oscilloscope when charged particle beam current enters the detection device. Fifthly, when the signal noise is too large, a proper voltage can be applied to the electron suppressor to suppress the generation of secondary electrons.
While the invention has been described with reference to specific embodiments, the invention is not limited thereto, and various equivalent modifications and substitutions can be easily made by those skilled in the art within the technical scope of the invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A micro weak charged particle beam detector is characterized in that the detector comprises:
an electron suppressor electrode (1) for suppressing secondary electrons;
a beam absorber (2) for absorbing the charged particle beam;
a signal amplification electrode (3) for generating a secondary amplified electron current;
a signal sink electrode (4) for detecting a sink total amplified current signal;
the electron suppressor (1), the beam absorber (2), the signal amplifier (3) and the signal absorber (4) are respectively arranged in sequence along the direction of the head-on charged beam; the working environment of the detection device is a vacuum environment.
2. The device for detecting the micro weak charged particle beam according to claim 1, wherein the device is provided with a vacuum connecting support (5) for installing a fixing screw (501) and a vacuum electrode (502).
3. The device for detecting the micro weak charged particle beam according to claim 2, wherein the vacuum connection support (5) adopts the CF35 knife flange standard; three threaded holes are uniformly formed in the flange surface of the vacuum connecting support (5) and used for mounting fixed screws (501), and three vacuum electrode interfaces (502) are arranged on concentric rings of the threaded holes in a staggered mode and used for mounting vacuum electrodes.
4. The device for detecting the micro weak charged particle beam according to claim 2, wherein the electron suppressor (1) is mounted on the fixing screw (501) in an insulated manner and connected with a vacuum electrode of the vacuum connection support (5).
5. The miniature weak charged particle beam detector according to claim 2, wherein said beam absorber (2) is mounted on a fixed screw (501) in an insulated manner and connected to a vacuum electrode of the vacuum connecting support (5).
6. The device for detecting the micro weak charged particle beam according to claim 5, wherein the beam absorber (2) comprises a porous annular sheet and a microchannel circular plate; the circular plate of the micro-channel is concentrically spot-welded on the reverse side of the porous circular sheet.
7. The device for detecting the micro weak charged particle beam according to claim 2, wherein the signal amplifier (3) is non-insulated and mounted on the fixed screw (501).
8. The device for detecting the micro weak charged particle beam according to claim 7, wherein the signal amplifier (3) comprises a porous ring sheet and a microchannel circular plate; the circular plate of the micro-channel is concentrically spot-welded on the front surface of the porous circular ring sheet.
9. The device for detecting the micro weak charged particle beam according to claim 2, wherein the signal absorbing electrode (4) is insulated and installed on the fixing screw rod (501) and connected with a vacuum electrode of the vacuum connecting support (5).
10. The miniature weak charged particle beam detector as claimed in claim 9, wherein a tapered semi-countersink is provided at the center of said signal absorbing electrode (4) for suppressing the generation of secondary electrons and collecting the amplified electron signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111648737.0A CN114355432A (en) | 2021-12-30 | 2021-12-30 | Miniature weak charged particle beam detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111648737.0A CN114355432A (en) | 2021-12-30 | 2021-12-30 | Miniature weak charged particle beam detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114355432A true CN114355432A (en) | 2022-04-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111648737.0A Pending CN114355432A (en) | 2021-12-30 | 2021-12-30 | Miniature weak charged particle beam detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114355432A (en) |
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2021
- 2021-12-30 CN CN202111648737.0A patent/CN114355432A/en active Pending
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