CN108896595A - A kind of scanning electron microscope sample table of protection probe - Google Patents
A kind of scanning electron microscope sample table of protection probe Download PDFInfo
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- CN108896595A CN108896595A CN201810616807.6A CN201810616807A CN108896595A CN 108896595 A CN108896595 A CN 108896595A CN 201810616807 A CN201810616807 A CN 201810616807A CN 108896595 A CN108896595 A CN 108896595A
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- pawl
- sample table
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- 239000000523 sample Substances 0.000 title claims abstract description 238
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 73
- 238000005381 potential energy Methods 0.000 abstract description 4
- 230000003139 buffering effect Effects 0.000 abstract 1
- 238000009434 installation Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/102—Different kinds of radiation or particles beta or electrons
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/309—Accessories, mechanical or electrical features support of sample holder
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The present invention discloses a kind of scanning electron microscope sample table of protection probe, including sample table buffer unit and sample table pedestal, and sample table pedestal connects the loading turntable of Electronic Speculum, and more than one sample table buffer unit is arranged on sample table pedestal；Sample table buffer unit includes flange, sample pawl pedestal, sample pawl, spring, sleeve, sample pawl fastener, it makes mistakes when due to manual operation so that sample collides with probe, sample table buffer unit can play the role of buffering, spring can absorb most of collision energy when colliding, the elastic potential energy of spring is converted to, leads to direct damage of popping one's head in so as to avoid there is rigid collision.
Description
Technical field
The present invention relates to a kind of scanning electron microscope sample tables of protection probe, belong to field of precision instruments.
Background technique
Scanning electron microscope, that is, scanning electron microscope is a kind of electron-optical imaging instrument, and the extremely narrow electron beam of use is swept
Sample is retouched, is interacted by electron beam and sample, generates various signals, these signals are received by corresponding detector, through putting
It is sent to kinescope imaging after big device amplification, with sample preparation is simple, amplification factor adjustable extent is wide, image resolution ratio is high, the depth of field is big
The characteristics of, have in fields such as material, metallurgy, biologies and is widely applied.
Sample table is a significant components in scanning electron microscope, for carrying sample, when observing sample, and sample table movement
Sample is sent to safety detection position, but for requiring high magnification numbe to shoot, in order to improve the quality of scanned picture, needs sample
With probe infinite approach, the observation position of sample can exceed safety detection position, it is easy to due to human error cause probe and
Sample directly contacts, so that probe be made to damage.
Summary of the invention
The purpose of the present invention is overcoming the shortcomings of prior art, a kind of protection scanning probe tem sample platform is provided, it is intended to
When solution scanned sample needs high power to shoot, with sample rigid collision occurs for probe during sample and probe infinite approach,
The problem of to damage probe.
A kind of scanning electron microscope sample table of protection probe, including sample table buffer unit and sample table pedestal 1, sample table bottom
Seat 1 connects the loading turntable of scanning electron microscope, and more than one sample table buffer unit is arranged on sample table pedestal 1, Ke Yigen
According to the quantity of the number selection sample table buffer unit of sample；
Sample table buffer unit includes flange 2, sample pawl pedestal 3, sample pawl, spring 5, sleeve 6, sample pawl fastener 8, flange
2 are arranged on sample table pedestal 1, and sleeve 6 is arranged on flange 2, and spring 5 is arranged outside sleeve 6, and the bottom of spring 5 is arranged
On flange 2, the side view of sample pawl pedestal 3 is T font structure, and sample pawl pedestal 3 contacts i.e. sample pawl with the top of spring 5
The top of the T font structure of pedestal 3 is located at 5 top of spring and contacts with each other, and sleeve 6 is vacantly arranged in the bottom of T font structure
It is interior, annular groove is provided at the top of T font structure, sample pawl is arranged in the annular groove of T font structure, sample pawl fastener
8 are arranged on sample pawl pedestal 3 and fix sample pawl.
The top center of the T font structure of the sample pawl pedestal 3 is also provided with threaded hole, and sample pawl fastener 8 is equipped with
External screw thread, external screw thread merge with the screw thread matching in the top center threaded hole of the T font structure of sample pawl pedestal 3 by sample pawl
It is fixed.
The scanning electron microscope sample table of the protection probe further includes driving motor, controller, pressure sensor 7, and pressure passes
Sensor 7 is located between sample pawl pedestal 3 and spring 5, and contacts with the top on the top of sample pawl pedestal 3 and spring 5, driving electricity
Machine and the loading turntable of scanning electron microscope connect, and pressure sensor 7 and driving motor are connect with controller respectively.
The sample pawl is made of three or more clamping pieces 4, and clamping piece 4 includes elastic piece, rectangular block, elastic piece 7
The bottom of font structure, 7 font structures of elastic piece is arranged on rectangular block, and rectangular block is movably arranged on the T of sample pawl pedestal 3
In annular groove at the top of font structure, the clamping to differently contoured sample is may be implemented under the action of restoring force in elastic piece.
The flange 2 is arranged on sample table pedestal 1 by bolt.
The controller is commercially available conventional controller, and model Arduino UNO R3 type controller etc. can be realized and adopt
Collection 7 data of pressure sensor simultaneously control driving motor operation.
The working principle of the invention is：The installation number that sample table buffer unit is chosen according to sample number, according to sample
The quantity and its installation site in the annular groove at the top of the T font structure of sample pawl pedestal 3 that shape chooses clamping piece 4,
Sample pawl fastener 8 is tightened, by sample holder in clamping piece 4, moves into sample cavity after gripping, when sample needs high power
When shooting, in order to improve the quality of scanned picture, sample, which requires more than safety detection position, to be continued to rise close to probe, in this process
In if since human error makes probe collide with sample, can make after sample stress clamping piece 4, sample pawl pedestal 3 by
Power, sample pawl pedestal 3 push, and 5 stress of spring is caused to move down, and sample and probe are elastic collision, not will lead to tip damage, this
When manually adjust reduce sample table height, be scanned again in safe distance；When driving motor, controller, pressure
It can make clamping piece 4,3 stress of sample pawl pedestal in the presence of sensor 7, after sample stress, sample pawl pedestal 3 pushes, and causes pressure
The stress of sensor 7 generates variation, and the variation of the power sensed is fed back to controller by pressure sensor 7, and controller receives
After signal, control driving motor rotation drives the loading turntable of scanning electron microscope and sample table pedestal 1 to move down, sample is far from probe；
Spring 5 can absorb most of collision energy when colliding, and be converted to the elastic potential energy of spring, rigid so as to avoid occurring
Property collision and cause probe damage.
The invention patent has the advantages that：
1, sample table pedestal and sample table buffer unit are detachable, installation easy to maintain.
2, pressure sensor structure is simple, good economy performance.
3, spring can effectively avoid the rigid contact of probe with sample, and structure is simple, convenient for promoting.
4, the installation direction and installation number that clamping piece can be determined according to the contour feature of sample, to the adaptability of sample
By force.
5, sample can be made to be positioned as close to probe, guarantee protection probe while shooting quality.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the scanning electron microscope sample table of the protection probe of the embodiment of the present invention 1；
Fig. 2 is the structural schematic diagram of 1 sample pawl pedestal of the embodiment of the present invention, clamping piece, sample pawl fastener；
Fig. 3 is the structural schematic diagram of the sample pawl pedestal of the embodiment of the present invention 1；
Fig. 4 is the structural schematic diagram of 1 sleeve of the embodiment of the present invention and flange；
Fig. 5 is the structural schematic diagram of 2 middle sleeve of the embodiment of the present invention, flange, sample pawl pedestal, pressure sensor, spring；
In figure：1- sample table pedestal, 2- flange, 3- sample pawl pedestal, 4- clamping piece, 5- spring, 6- sleeve, 7- pressure sensing
Device, 8- sample pawl fastener.
Specific embodiment
With reference to the accompanying drawing, the invention will be further described, but the contents of the present invention are not limited to the range.
Embodiment 1
The present embodiment it is a kind of protection probe scanning electron microscope sample table, as shown in Figure 1,2,3, 4, including sample table buffer unit and
Sample table pedestal 1, sample table pedestal 1 connect the loading turntable of scanning electron microscope, and sample is 8 cylindrical samples, so 8 samples
It includes flange 2, sample pawl pedestal 3, sample pawl, spring that sample table buffer unit, which is arranged on sample table pedestal 1, in platform buffer unit
5, sleeve 6, sample pawl fastener 8, flange 2 are arranged on sample table pedestal 1 by bolt, and sleeve 6 is arranged on flange 2, bullet
Spring 5 is arranged outside sleeve 6, and the bottom of spring 5 is arranged on flange 2, and 3 side view of sample pawl pedestal is T font structure, T word
The bottom of type structure is vacantly arranged in sleeve 6, and sample pawl pedestal 3 contacts the T word of i.e. sample pawl pedestal 3 with the top of spring 5
The top of type structure is located at 5 top of spring and contacts with each other, and the T font structure of sample pawl pedestal 3 is the equal of being pressed on spring 5
Face is provided with annular groove at the top of T font structure, and sample pawl is arranged in the annular groove of T font structure, T font structure
Top center is also provided with threaded hole, and sample pawl fastener 8 is equipped with external screw thread, the spiral shell of external screw thread and T font structure top center
Internal screw thread in pit, which matches to merge, fixes sample pawl, and sample pawl is made of four clamping pieces 4, clamping piece 4 include elastic piece,
Rectangular block, elastic piece are 7 font structures, and the bottom of 7 font structure of elastic piece is arranged on rectangular block, and rectangular block is movably arranged on
In annular groove at the top of the T font structure of sample pawl pedestal 3, elastic piece be may be implemented under the action of restoring force to difference
The clamping of profile sample.
In use, adjusting annular groove of the clamping piece 4 at the top of the T font structure of sample pawl pedestal 3 according to specimen shape
Sample pawl fastener 8 is tightened, by sample holder in clamping piece 4, is moved into sample table after gripping by interior installation site
Sample cavity is scanned shooting, and when sample needs high power to shoot, in order to improve the quality of scanned picture, sample requires more than safety
Detection position continue to rise close to probe, in the process if human error make probe collide with sample, sample by
It can make clamping piece 4,3 stress of sample pawl pedestal after power, sample pawl pedestal 3 pushes, causes 5 stress of spring and move down, sample and spy
Head is elastic collision, and spring 5 can absorb most of collision energy when colliding, be converted to the elastic potential energy of spring, no
It will lead to tip damage, manually adjust the height for reducing sample table at this time, be scanned again in safe distance.
Embodiment 2
A kind of scanning electron microscope sample table of protection probe of the present embodiment, including sample table buffer unit and sample table pedestal 1, sample
Platform pedestal 1 connects the loading turntable of scanning electron microscope, and sample is the sample of a triangular pyramidal, so 1 sample table buffer unit
It is arranged on sample table pedestal 1；Sample table buffer unit includes flange 2, sample pawl pedestal 3, sample pawl, spring 5, sleeve 6, pressure
Force snesor 7, sample pawl fastener 8, driving motor, controller；
Flange 2 is arranged on sample table pedestal 1 by bolt, and sleeve 6 is arranged on flange 2, and spring 5 is arranged outside sleeve 6,
The bottom of spring 5 is arranged on flange 2, and 3 side view of sample pawl pedestal is T font structure, and the bottom of T font structure is vacantly arranged
In sleeve 6, as shown in figure 5, pressure sensor 7 is located between sample pawl pedestal 3 and spring 5, and upper with sample pawl pedestal 3
Portion and the contact of the top of spring 5, pressure sensor 7 are pasted onto the bottom surface of the T font structure lateral part of sample pawl pedestal 3, press
The contact of the top of force snesor 7 and spring 5, the T font structure for being equivalent to pressure sensor 7 and sample pawl pedestal 3 are pressed in spring 5
Above, it is provided with annular groove at the top of the T font structure of sample pawl pedestal 3, the annular groove of T font structure is arranged in sample pawl
Interior, the top center of T font structure is also provided with threaded hole, and sample pawl fastener 8 is equipped with external screw thread, external screw thread and T font knot
Internal screw thread in the threaded hole of the top center of structure matches to merge, and sample pawl is fixed, and sample pawl is by three 4 structures of clamping piece
At clamping piece 4 includes elastic piece, rectangular block, and elastic piece is 7 font structures, and the bottom of 7 font structure of elastic piece is arranged in rectangle
On block, rectangular block is movably arranged in the annular groove at the top of the T font structure of sample pawl pedestal 3, and elastic piece is in restoring force
Under effect, the clamping to differently contoured sample, the loading turntable connection of driving motor and scanning electron microscope, pressure sensing may be implemented
Device 7 and driving motor are connect with controller respectively, and controller is commercially available conventional controller, model Arduino UNO R3 type control
Device processed can be realized acquisition 7 data of pressure sensor and control driving motor operation.
In use, adjusting annular groove of the clamping piece 4 at the top of the T font structure of sample pawl pedestal 3 according to specimen shape
Interior installation site, 3 clamping pieces 4 are evenly provided in the annular groove at the top of the T font structure of sample pawl pedestal 3, will
Sample pawl fastener 8 is tightened, and by sample holder in clamping piece 4, is scanned sample table immigration sample cavity after gripping
Shooting, when sample needs high power to shoot, in order to improve the quality of scanned picture, sample is required more than on safety detection position continues
It rises close to probe, in the process if can make to press from both sides after sample stress since human error makes probe collide with sample
Piece 4,3 stress of sample pawl pedestal are held, sample pawl pedestal 3 pushes, and 7 stress of pressure sensor is caused to generate variation, pressure sensor 7
The variation of the power sensed is fed back into controller, after controller receives signal, control driving motor rotation drives scanning electricity
The loading turntable and sample table pedestal 1 of mirror move down, and sample is far from probe；Spring can absorb most of collision when colliding
Energy is converted to the elastic potential energy of spring, leads to the damage popped one's head in so as to avoid there is rigid collision, works as pressure sensor
The power of 7 inductions is restored to probe and the level before sample contacts, and driving motor is out of service, and probe takes off just with sample at this time
From this position is the better position of observation.
Claims (5)
1. a kind of scanning electron microscope sample table of protection probe, which is characterized in that including sample table buffer unit and sample table pedestal
（1）, sample table pedestal（1）The loading turntable of scanning electron microscope is connected, more than one sample table buffer unit is arranged in sample table
Pedestal（1）On, sample table buffer unit includes flange（2）, sample pawl pedestal（3）, sample pawl, spring（5）, sleeve（6）, sample
Pawl fastener（8）, flange（2）It is arranged in sample table pedestal（1）On, sleeve（6）It is arranged in flange（2）On, spring（5）Setting exists
Sleeve（6）Outside, spring（5）Bottom be arranged in flange（2）On, sample pawl pedestal（3）Side view be T font structure, T word
The top of type structure is located at spring（5）Sleeve is vacantly arranged in the bottom at top, T font structure（6）It is interior, the top of T font structure
Portion is provided with annular groove, and sample pawl is arranged in annular groove, sample pawl fastener（8）It is arranged in sample pawl pedestal（3）On simultaneously
Sample pawl is fixed.
2. protecting the scanning electron microscope sample table of probe according to claim 1, which is characterized in that the sample pawl pedestal（3）
The top center of T font structure be also provided with threaded hole, sample pawl fastener（8）It is equipped with external screw thread, external screw thread and sample pawl
Pedestal（3）T font structure top center threaded hole in screw thread match merge sample pawl is fixed.
3. protecting the scanning electron microscope sample table of probe according to claim 1, which is characterized in that the scanning of the protection probe
Tem sample platform further includes driving motor, controller, pressure sensor（7）, pressure sensor（7）Positioned at sample pawl pedestal（3）
With spring（5）Between, and with sample pawl pedestal（3）Bottom and spring（5）Top contact, the load of driving motor and scanning electron microscope
The connection of object turntable, pressure sensor（7）It is connect respectively with controller with driving motor.
4. protecting the scanning electron microscope sample table of probe according to claim 1, which is characterized in that the sample pawl by three with
On clamping piece（4）It constitutes, clamping piece（4）Including elastic piece, rectangular block, elastic piece is 7 font structures, 7 font knot of elastic piece
The bottom of structure is arranged on rectangular block, and rectangular block is movably arranged on sample pawl pedestal（3）T font structure at the top of annular groove
It is interior.
5. protecting the scanning electron microscope sample table of probe according to claim 1, which is characterized in that the flange（2）Pass through spiral shell
Bolt is arranged in sample table pedestal（1）On.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810616807.6A CN108896595B (en) | 2018-06-15 | 2018-06-15 | Scanning electron microscope sample table for protecting probe |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810616807.6A CN108896595B (en) | 2018-06-15 | 2018-06-15 | Scanning electron microscope sample table for protecting probe |
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| Publication Number | Publication Date |
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| CN108896595A true CN108896595A (en) | 2018-11-27 |
| CN108896595B CN108896595B (en) | 2020-11-17 |
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| CN201810616807.6A Active CN108896595B (en) | 2018-06-15 | 2018-06-15 | Scanning electron microscope sample table for protecting probe |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109540944A (en) * | 2019-01-04 | 2019-03-29 | 中南大学 | A kind of high-precision probe clamping device for Sample location in neutron diffraction measurement |
| CN113433134A (en) * | 2021-06-24 | 2021-09-24 | 深圳中科飞测科技股份有限公司 | Detection method, detection device and computer-readable storage medium |
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| CN109540944A (en) * | 2019-01-04 | 2019-03-29 | 中南大学 | A kind of high-precision probe clamping device for Sample location in neutron diffraction measurement |
| CN109540944B (en) * | 2019-01-04 | 2023-10-31 | 中南大学 | High-precision probe clamping device for sample positioning in neutron diffraction measurement |
| CN113433134A (en) * | 2021-06-24 | 2021-09-24 | 深圳中科飞测科技股份有限公司 | Detection method, detection device and computer-readable storage medium |
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