CN206516602U - A kind of ESEM multifunctional sample platform - Google Patents
A kind of ESEM multifunctional sample platform Download PDFInfo
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- CN206516602U CN206516602U CN201720039579.1U CN201720039579U CN206516602U CN 206516602 U CN206516602 U CN 206516602U CN 201720039579 U CN201720039579 U CN 201720039579U CN 206516602 U CN206516602 U CN 206516602U
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- 238000002389 environmental scanning electron microscopy Methods 0.000 title claims abstract description 16
- 239000000463 material Substances 0.000 abstract description 11
- 238000009434 installation Methods 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 147
- 238000012360 testing method Methods 0.000 description 9
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005662 electromechanics Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 231100000956 nontoxicity Toxicity 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 238000003325 tomography Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Abstract
The utility model discloses a kind of ESEM multifunctional sample platform, including sample stage main body, sample stage main body is provided with two or more not in the platform of same level, each platform of sample stage main body is provided with multiple stitch holes I, there is the whole body hole I corresponding with stitch hole I side of sample stage main body, each platform of sample stage main body is provided with the groove at multiple circular arc bottoms, sample stage body side is provided with two or more circular arc camber, it is easy to use hand mobile example platform, sample stage bottom part body is provided with dovetail groove；The utility model improves conventional efficient, and multiple samples can be once placed on sample stage, sets the groove at the circular arc bottom for differentiating direction, is easy to distinguish similar sample；It is block to be easy to support compared with thin material；When observing rounded material section, the groove at circular arc bottom can be placed on, then be firmly bonded with conducting resinl；Multiple differences in height can be placed simultaneously at a distance of larger sample；Circular arc camber is left for finger backup land in sample stage side, is not easy to skid during installation, convenient push-in bayonet socket.
Description
Technical field
The utility model belongs to ESEM detection technique field, in particular, is related to a kind of ESEM multi-functional
Sample stage.
Background technology
ESEM is a kind of electron-optical imaging instrument, mainly uses high-power electron beam to act on the surface of sample,
To produce the X rays topographs of different contrasts, and then the difference of sample surface morphology can just be shown.Brief principle is as follows：Electronics
Rifle（Thermal field, awkward silence at a meeting, tungsten filament etc.）Launch high-power electron beam, these electron beams will be applied to sample surfaces, and interaction produces a variety of
Electronic information：The signals such as backscattered electron, secondary electron, absorption electronics, auger electrons, characteristic X-ray.This series of electronics
Signal can be received by corresponding detector, then be sent to display tube by amplifier.ESEM, which is mainly used, to be inspired
Secondary electron and backscattered electron reflect the elementary analysis of the surface topography and conventional ingredient of solid sample, shown shape
Looks contrast and element contrast can provide important information to material surface modifying, port analysis on cracks, materials'use environment etc., extensively
Applied to different fields such as electromechanics, material, medicine, mining industry, the administration of justice.Because of the particularity of its operation principle, and production cost is higher,
So the preparation to sample is also required：Nonmagnetic, no moisture, nontoxicity, composition will not decompose and other in test
Change, bulk sample need that fixation, powder sample will be sticked on conducting resinl, the sample bad to electric conductivity will be plated
Film makes its surface conductance etc..
The test of scanning electron microscope example typically requires to carry out under vacuum or low vacuum state, often does a test, it is necessary to protect
Hold the vacuum pressure in sample cavity and reach certain numerical value, and the time once vacuumized typically can be at 20 minutes or so, so when survey
When the sample of examination is more, in order to save the multiple pumpdown time of repetition, generally testing sample will not be put into sample cavity one by one
Interior test, but selection is once together placed in multiple samples on sample stage, and sample cavity is placed into together.The sample of ESEM
Sample platform is for carrying sample of different shapes, sample is firmly secured on sample stage, if so wanting to reach once many
The purpose put, it is necessary to be designed from many aspects to sample stage, will ensure the apparent height distance probe of multiple samples in addition
It is closely located, it is impossible to which that appearance height differs larger sample and is put into sample cavity together.Existing sample platform of scanning electronic microscope, generally
All be that sample to be detected is placed on sample stage by conductive gemel connection to be observed in plane, or sample be first placed in it is small
Objective table, be then fixed on again on sample stage.Chinese patent CN101916706A has invented a suitable observation micro-knife
Has the sample stage of the plane of disruption, patent CN202259150U discloses a kind of sample stage for carrying four sample cells, patent
CN203192748U devise it is a kind of can distinguish the planar sample platform of similar sample, swept with reference to ZEISS EVO18 tungsten filaments
The use of Electronic Speculum is retouched, following problem is found：（1）Multiple samples can not be once placed on sample stage；（2）When sample is similar, hold
Easily obscure；（3）During the block tomography compared with thin material of observation, it is difficult to support compared with thin material；（4）The section of circular edge material is difficult to
Place；（5）Multiple differences in height can not be placed simultaneously at a distance of larger sample；（6）When circular sample platform is fixed in sample cavity, sample
Sample platform is not due to having finger backup land, and finger easily skids, and causes sample stage to be pushed into bayonet socket and produces difficulty.The content of the invention
In view of the above-mentioned problems, the utility model proposes a kind of ESEM multifunctional sample platform, including sample stage main body 1,
Sample stage main body 1 is not provided with two or more in the platform of same level, and each platform of sample stage main body 1 is provided with multiple pins
There is whole body hole I 1-6 corresponding with the 1-4 of stitch hole I 1-4 of pin hole I, the side of sample stage main body 1, sample stage main body 1 it is each
Platform is provided with the groove 1-8 at multiple circular arc bottoms, is easy to place arc-shaped sample, for example, can fix the side of sintering cylinder
Face, for observing its section or cross section, the side of sample stage main body 1 is provided with two or more circular arc camber 1-7, is easy to be moved with hand
Sample stage, the bottom of sample stage main body 1 is provided with dovetail groove 1-5, and dovetail groove 1-5 purpose is in order that sample stage is fixed on scanning electricity
On the sample stage support base of mirror sample cavity, dovetail groove 1-5 and support base clamping prevent sample stage is slipped in test process from inclining
Tiltedly.
Notch plate 2 is set on the upper platform set low of sample stage main body 1, and notch plate 2 is the convex knot in middle concave two
Multiple 2-1 of stitch hole II are provided with above structure, notch plate 2, side is then provided with the corresponding 2-2 of whole body hole II, notch plate 2 and height
Space 1-9 is left between one-level platform, space 1-9 can place sheet sample, observe section or the cross section of sheet sample.
The notch plate 2 and the bolt connection of sample stage main body 1.
The 1-4 of stitch hole I is communicated with the 1-6 of whole body hole I, be in order to whole body hole 1-6 assemble screw, reach fixed stitch
The purpose of stitch in the 1-4 of hole I, the 2-1 of stitch hole II is also such with the 2-2 of whole body hole II.
The circular arc at circular arc bottom sets different directions in the groove 1-8 at the circular arc bottom, can be for taking one's bearings.
Beneficial effect：（1）Conventional efficient is improved, multiple samples can be once placed on sample stage；（2）Sample stage main body
Circular arc bottom sets different directions in the groove at upper circular arc bottom, is easy to distinguish similar sample；（3）Bulk is easy to compared with thin material
Support；（4）When observing rounded material section, it can be placed in groove, then be firmly bonded with conducting resinl；（5）Sample stage main body
Provided with two or more not in the platform of same level, multiple differences in height can be placed simultaneously at a distance of larger sample；（6）Sample
Finger backup land is left in the side of platform main body, is not easy to skid during installation, convenient push-in bayonet socket.
Brief description of the drawings
Fig. 1 is the sample stage agent structure schematic diagram of the utility model embodiment 1；
Fig. 2 is the side view of the sample stage main body of the utility model embodiment 1；
Fig. 3 is the spill plate structure schematic diagram of the utility model embodiment 1；
Fig. 4 is the structural representation after the sample stage main body of the utility model embodiment 1 and notch plate combination；
In figure, 1- sample stage main bodys；2- notch plates；1-1- sample stage main body first layers；The 1-2- sample stage main body second layers；
1-3- sample stage main body third layer；1-4- stitch hole I；1-5- dovetail grooves；1-6- whole body hole I；1-7- circular arc cambers；1-8- is recessed
Groove；1-9- spaces；1-10- screwed holes；2-1- stitch hole II；2-2- whole body hole II；2-3- counter sinks；2-4- concave structures.
Embodiment
With reference to specific embodiments and the drawings, the utility model is described in further detail, and the following examples is only solution
The utility model is released, the restriction to the utility model protection domain is not constituted.
Embodiment 1
ESEM multifunctional sample platform described in the present embodiment, as shown in Figure 1, 2, including sample stage main body 1, sample stage master
Body 1, not in the platform of same level, is sample stage main body first layer 1-1, sample stage main body second layer 1- respectively provided with three
2nd, sample stage main body third layer 1-3, highly according to sample stage main body first layer 1-1, sample stage main body second layer 1-2, sample stage
Main body third layer 1-3 is reduced successively, and sample stage main body first layer 1-1 area is maximum, and four groove 1-8, groove are provided with above
1-8 bottom is arc-shaped, is easy to place arc-shaped sample, for example, can fix the side of sintering cylinder, is broken for observing it
Face or cross section, one group two-by-two of four groove 1-8, two groups of groove 1-8 bottoms arc-shapeds are vertically arranged, and are easy to differentiate sample, sample
Sample platform main body first layer 1-1 is provided with four 1-4 of stitch hole I in the position close to edge, and in sample stage main body first layer 1-1 sides
Face is provided with the 1-6 of whole body hole I of insertion corresponding with the 1-4 of stitch hole I, and the 1-4 of stitch hole I is communicated with the 1-6 of whole body hole I, is in order in week
Body hole 1-6 assembles screw, reaches the purpose of stitch in the fixed 1-4 of stitch hole I, sample stage main body second layer 1-2 and sample stage master
Body third layer 1-3 has a 2 and 1 stitch holes and whole body hole matched, its structure and purpose and sample stage main body the
The 1-4 of stitch hole I on one layer of 1-1 is identical with the 1-6 of whole body hole I；It is easy to provided with two circular arc camber 1-7 the side of sample stage main body 1
With hand mobile example platform, the bottom of sample stage main body 1 is provided with dovetail groove 1-5, and dovetail groove 1-5 purpose is in order that sample stage is fixed
In on the sample stage support base of scanning electron microscope example chamber, dovetail groove 1-5 and support base clamping prevent sample stage in test process
Slip and tilt, be also provided with two screwed hole 1-10 on sample stage main body second layer 1-2, sample stage main body 1 there are three different heights
Platform structure purpose be mainly and build different starting point platforms for the sample of different height, approach the upper surface of multiple samples
In same plane；When sample does not have larger difference in height, then do not consider to use sample stage main body second layer 1-2 and sample stage master
Body third layer 1-3, so generally sample stage main body first layer 1-1 surface areas are maximum, the second layer and third layer surface
Area is reduced successively.
Notch plate 2 is the convex structure in middle concave two, as shown in figure 3, middle is concave structure 2-4, at raised two ends
Counter sink 2-3 is provided with, counter sink 2-3 is engaged with the screwed hole 1-10 being provided with sample stage main body second layer 1-2, works as sample stage
Notch plate 2 not enough, or when needing regulation height, is bolted on sample stage by main body first layer 1-1 surface area
On main body second layer 1-2, as shown in figure 4, notch plate 2 is in shape under the raised middle concave in both sides, both sides projection be in order to assemble after
Bossing maintains an equal level with sample stage main body first layer 1-1 surfaces, expands the area of maximum height, in addition recessed part one side
It is to make up the difference in height between sample stage main body first layer 1-1, sample stage main body second layer 1-2, play intermediate altitude
Effect, on the other hand can observe the fracture in its section, notch plate at the edge of negative area with conducting resinl bonding compared with thin material
Two ends bossing on 2 is respectively equipped with 2 2-1 of stitch hole II, and side is then provided with the corresponding 2-2 of whole body hole II, and it is tied
Structure is identical with the 1-4 of stitch hole I and the 1-6 of whole body hole I on sample stage main body first layer 1-1 with purpose, notch plate 2 and sample stage master
Space 1-9 is left between body first layer 1-1, space 1-9 can place sheet sample, observe the section or transversal of sheet sample
Face.
In the present embodiment, sample stage main body first layer 1-1 is than the sample stage main body second layer high 7mm of 1-2, sample stage main body
Two layers of 1-2 are than the sample stage main body third layer high 5mm of 1-3, sample stage main body first layer 1-1, sample stage main body second layer 1-2, sample
Sample platform main body third layer 1-3 area of plane ratio about 5:3:2；The part that notch plate 2 is protruded above is higher by than sunk part
3mm, when notch plate is fixed on sample stage main body second layer 1-2, the projection of notch plate 2 and sample stage main body first layer 1-
1 maintains an equal level, and the size of the upper surface of notch plate 2 is identical with sample stage main body second layer 1-2 areas.
In use, testing sample is as follows, first group：4 5mm × 5mm × 4mm metallographic blocks（Tested surface is length and width face）,
Second group：3 4mm × 4mm × 7mm corrosion blocks（Tested surface is length and width face）, the 3rd group：2 5mm × 5mm × 15mm fractures
Block（Tested surface is length and width face）, the 4th group：2 5mm × 5mm × 0.2mm（Tested surface is wide high surface）, the 5th group：1 along straight
It is cut into two-part 10mm × 4mm sintering cylinder in footpath direction（Tested surface is section）.
All samples are clean with ultrasonic wave alcohol washes, then sample is dried up with hair-dryer, first group of sample is consolidated
Due on sample stage main body first layer 1-1, second group of sample is fixed on the concave structure 2-4 of notch plate, by the 3rd group of sample
Product are fixed on sample stage main body third layer 1-3, it is contemplated that the height of the 3rd group of sample is higher and quality is larger, thus except with
Conducting resinl fixes the 3rd group of ground, and also the 3rd group is entangled on sample stage main body third layer 1-3 with conducting resinl, the 4th group of sample
Space 1-9, the groove 1- for the arc-shaped bottom that the 5th group of sample is placed on sample stage main body first layer 1-1 are adhered to conducting resinl
In 8, all samples are all stablized be positioned on sample stage after, complete the sample preparation that surface sweeping Electronic Speculum tests early stage, each group sample exists
Placement location can be selected according to sample stage shape when placement, can also be marked using conducting resinl, be easy to differentiate.
ESEM main frame is opened, two fingers pinch two circular arc camber 1-7 of the side of sample stage main body 1, by sample
Platform is put into sample cavity, and vacuum is extracted afterwards, when vacuum values reach requirement, you can opens electron gun, then observes each sample
Pattern, observation takes out sample stage after finishing and removes sample.
Claims (5)
1. a kind of ESEM multifunctional sample platform, including sample stage main body（1）, it is characterised in that sample stage main body（1）On set
There are platform of the two or more not in same level, sample stage main body（1）Each platform be provided with multiple stitch holes I（1-4）, sample
Sample platform main body（1）Side have and stitch hole I（1-4）Corresponding whole body hole I（1-6）, sample stage main body（1）Each platform
It is provided with the groove at multiple circular arc bottoms（1-8）, the side of sample stage main body 1 is provided with two or more circular arc camber（1-7）, sample stage
Main body（1）Bottom is provided with dovetail groove（1-5）.
2. ESEM multifunctional sample platform according to claim 1, it is characterised in that sample stage main body（1）It is upper to set low
Platform on notch plate is set（2）, notch plate（2）For the convex structure in middle concave two, notch plate（2）Multiple stitch are provided with above
Hole II（2-1）, sideways provided with stitch hole II（2-1）Corresponding whole body hole II（2-2）, notch plate（2）With high one-level platform it
Between leave space（1-9）.
3. ESEM multifunctional sample platform according to claim 2, it is characterised in that the notch plate（2）With sample stage
Main body（1）Bolt connection.
4. ESEM multifunctional sample platform according to claim 2, it is characterised in that the stitch hole I（1-4）With the whole body
Hole I（1-6）Communicate, stitch hole II（2-1）With whole body hole II（2-2）Communicate.
5. ESEM multifunctional sample platform according to claim 1, it is characterised in that the groove at the circular arc bottom（1-
8）The circular arc at middle circular arc bottom sets different directions.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720039579.1U CN206516602U (en) | 2017-01-13 | 2017-01-13 | A kind of ESEM multifunctional sample platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720039579.1U CN206516602U (en) | 2017-01-13 | 2017-01-13 | A kind of ESEM multifunctional sample platform |
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| CN206516602U true CN206516602U (en) | 2017-09-22 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108896595A (en) * | 2018-06-15 | 2018-11-27 | 昆明理工大学 | A kind of scanning electron microscope sample table of protection probe |
| CN109839423A (en) * | 2017-11-27 | 2019-06-04 | 中国科学院大连化学物理研究所 | For the method for half volatilization and the direct Mass Spectrometer Method of difficult volatile organic compounds in blood |
| CN113552159A (en) * | 2021-09-22 | 2021-10-26 | 常州欣盛半导体技术股份有限公司 | Sample objective table for COF carrier tape inspection and use method thereof |
-
2017
- 2017-01-13 CN CN201720039579.1U patent/CN206516602U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109839423A (en) * | 2017-11-27 | 2019-06-04 | 中国科学院大连化学物理研究所 | For the method for half volatilization and the direct Mass Spectrometer Method of difficult volatile organic compounds in blood |
| CN108896595A (en) * | 2018-06-15 | 2018-11-27 | 昆明理工大学 | A kind of scanning electron microscope sample table of protection probe |
| CN113552159A (en) * | 2021-09-22 | 2021-10-26 | 常州欣盛半导体技术股份有限公司 | Sample objective table for COF carrier tape inspection and use method thereof |
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