CN210953875U - Sample carrier for transmission electron microscope - Google Patents
Sample carrier for transmission electron microscope Download PDFInfo
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- CN210953875U CN210953875U CN201921394001.3U CN201921394001U CN210953875U CN 210953875 U CN210953875 U CN 210953875U CN 201921394001 U CN201921394001 U CN 201921394001U CN 210953875 U CN210953875 U CN 210953875U
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Abstract
The utility model provides a sample carrier that transmission electron microscope used, include: the device comprises a film, a groove, an electrode, a fixing piece and a sample to be detected; the film is provided with a groove, two electrodes are arranged on two sides of the groove, the electrodes are respectively provided with a fixing piece, and the fixing pieces are used for fixing a sample to be detected between the two electrodes; the utility model has the advantages that: the sample carrier is provided with an electrode and a fixing piece, so that two ends of a sample to be detected can be fixed, and the sample is prevented from deforming or falling; the sample carrier is provided with the groove, so that the imaging quality of the sample to be detected is improved; the sample carrier is provided with electrodes, and can perform electrical measurement on a sample to be measured.
Description
Technical Field
The utility model relates to an electron microscope accessory especially relates to a sample carrier that transmission electron microscope used.
Background
A Transmission Electron Microscope (TEM) can acquire appearance information, structure information, component information, various crystal defect information and the like of a sample, and is one of important instruments for researching the microstructure of a material; the TEM uses electron beams as an illumination source and forms an image on a fluorescent screen through a multi-stage electromagnetic lens. Because the penetration ability of the electron beam is low, when the microscopic structure of the material is researched by using the TEM, the sample is placed on the sample carrier, the thickness is generally controlled below 100nm, the traditional sample carrier is in a sawtooth structure, and the sample can be placed at the top end or the side wall of the sawtooth. When a sample is placed on the side wall of the sample carrier, because one side of the sample is not supported, the sample is easy to bend due to stress during the thinning process, so that the analysis of the subsequent TEM is influenced. When the sample is placed on the top of the sawtooth shape, the sample is easy to fall off when the carrier is transferred because of no protection. In addition, the existing sample carrier lacks an electrical path, and the electrical property of the nano material cannot be measured.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a solve traditional sample carrier and exist and lack support and protection, cause the sample to warp easily or drop to lack the problem of electricity route, supply one kind to have support and guard action to the sample, and the carrier body that the transmission electron microscope that has the electrode used.
The utility model provides a technical scheme is: a sample carrier for use with a transmission electron microscope, comprising: the device comprises a film, a groove, an electrode, a fixing piece and a sample to be detected; the thin film is provided with a groove, electrodes are arranged on two sides of the groove, fixing pieces are respectively arranged on the electrodes, and the fixing pieces are used for fixing a sample to be detected between the two electrodes.
Furthermore, the film adopts silicon nitride material with silicon as a substrate, the size of the film is 200 μm by 200 μm, the thickness of the film is 80-100 nm, and the film is used as a substrate of the sample carrier.
Furthermore, the depth of the groove is 40-50 nm, so that the sample can be in a suspended state, and the imaging quality is improved.
Furthermore, the electrodes are made of gold, the tail ends of the electrodes are arranged in parallel, the width of the outer ends of the electrodes is far larger than that of the tail ends, the influence of the resistance of the electrodes on the measurement of the electrical properties of the sample to be measured is reduced, and the electrodes can apply electric excitation to the sample to be measured.
Further, the fixing piece is made of a platinum material and used for fixing the sample to be detected on the electrode.
Further, the width of the sample to be detected is less than 10 nm.
Compared with the prior art, the beneficial effects of the utility model are that: the sample carrier is provided with an electrode and a fixing piece, so that two ends of a sample to be detected can be fixed, and the sample is prevented from deforming or falling; the sample carrier is provided with the groove, so that the imaging quality of the sample to be detected is improved; the sample carrier is provided with electrodes, and can perform electrical measurement on a sample to be measured.
Drawings
FIG. 1 is a schematic diagram of the chip structure of the present invention;
in the figure: 1-film, 21-groove, 22-groove, 23-groove, 31-electrode, 32-electrode, 33-electrode, 34-electrode, 41-fixing sheet, 42-fixing sheet, 43-fixing sheet, 44-fixing sheet and 5-sample to be tested.
Detailed Description
The technical scheme of the patent is further described in detail by combining the drawings and specific examples.
A sample carrier for use with a transmission electron microscope, comprising: the film 1, the groove 21, the groove 22, the groove 23, the electrode 31, the electrode 32, the electrode 33, the electrode 34, the fixing piece 41, the fixing piece 42, the fixing piece 43, the fixing piece 44 and the sample 5 to be measured; film 1 on have slot 21, slot 22, slot 23, slot 21 both sides distribution electrode 31 and electrode 32, slot 22 both sides distribution electrode 32 and electrode 33, slot 23 both sides distribution electrode 33 and electrode 34, stationary blade 41 be used for fixing the sample 5 that awaits measuring between electrode 31, stationary blade 42 be used for fixing the sample 5 that awaits measuring between electrode 32, stationary blade 43 be used for fixing the sample 5 that awaits measuring between electrode 33, stationary blade 44 be used for fixing the sample 5 that awaits measuring between electrode 34.
Furthermore, the film 1 adopts silicon nitride material with silicon as substrate, the size is 200 μm by 200 μm, the thickness is between 80-100 nm, and the film is used as a substrate of the sample carrier.
Furthermore, the depth of the groove 2 is 40-50 nm, so that a sample can be in a suspended state, and the imaging quality is improved.
Further, the electrodes 3 are made of gold, the tail ends of the electrodes 3 are arranged in parallel, the width of the outer ends of the electrodes 3 is far larger than that of the tail ends, the influence of the resistance of the electrodes 3 on the measurement of the electrical properties of the sample 5 to be measured is reduced, and the electrodes 3 can apply electric excitation to the sample 5 to be measured.
Further, the fixing sheet 4 is made of platinum and is used for fixing the sample 5 to be measured on the electrode 3.
Further, the width of the sample 5 to be detected is less than 10 nm.
The utility model discloses a theory of operation is: the sample 5 to be tested is integrated on the film 1 with the electrode 3 and the groove 2, and the electrode 3 on the film 1 can provide an electrical path for the electrical property characterization of the sample 5 to be tested. The groove 2 is formed in the film at the lower end of the sample 5 to be detected, so that the sample 5 to be detected is in a suspended state, and TEM imaging is facilitated. After the chip is arranged on the in-situ electrical sample rod, structural characterization and electrical property measurement can be simultaneously completed on a sample, and the TEM carries out high-resolution imaging on the material through the pores.
Although the preferred embodiments of the present patent have been described in detail, the present patent is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present patent within the knowledge of those skilled in the art.
Claims (6)
1. A sample carrier for use with a transmission electron microscope, comprising: the device comprises a film, a groove, an electrode, a fixing piece and a sample to be detected; the film is provided with a groove, two electrodes are arranged on two sides of the groove, the electrodes are respectively provided with a fixing piece, and the fixing pieces are used for fixing a sample to be detected between the two electrodes.
2. The carrier for a transmission electron microscope according to claim 1, wherein the thin film is a silicon nitride material with a silicon substrate, a size of 200 μm by 200 μm and a thickness of 80-100 nm, and is used as a base of the carrier.
3. The sample carrier according to claim 1, wherein the depth of the trench is 40-50 nm, so that the sample can be suspended and the imaging quality can be improved.
4. A sample carrier for a transmission electron microscope as claimed in claim 1, wherein the electrodes are made of gold, the ends of the electrodes are arranged in parallel, and the width of the outer ends of the electrodes is much greater than the width of the ends.
5. The specimen carrier for a transmission electron microscope according to claim 1, wherein the fixing plate is made of a platinum material for fixing the specimen to be measured on the electrode.
6. A sample carrier for use with a transmission electron microscope as claimed in claim 1, wherein the width of the sample to be measured is less than 10 nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921394001.3U CN210953875U (en) | 2019-08-26 | 2019-08-26 | Sample carrier for transmission electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921394001.3U CN210953875U (en) | 2019-08-26 | 2019-08-26 | Sample carrier for transmission electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210953875U true CN210953875U (en) | 2020-07-07 |
Family
ID=71373634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921394001.3U Active CN210953875U (en) | 2019-08-26 | 2019-08-26 | Sample carrier for transmission electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210953875U (en) |
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2019
- 2019-08-26 CN CN201921394001.3U patent/CN210953875U/en active Active
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