CN204464231U - A kind of sample platform of scanning electronic microscope - Google Patents
A kind of sample platform of scanning electronic microscope Download PDFInfo
- Publication number
- CN204464231U CN204464231U CN201520201041.7U CN201520201041U CN204464231U CN 204464231 U CN204464231 U CN 204464231U CN 201520201041 U CN201520201041 U CN 201520201041U CN 204464231 U CN204464231 U CN 204464231U
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- China
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- sample
- clamping mechanism
- elastic clamping
- electronic microscope
- scanning electronic
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Abstract
The utility model discloses a kind of sample platform of scanning electronic microscope, described sample stage is provided with the surface platform of horizontal positioned print and at least 2 for clamping the elastic clamping mechanism of print; Between described elastic clamping mechanism and sample stage, there is angle of inclination, and respective angle of inclination is different.The utility model, by arranging surface platform and the elastic clamping mechanism of horizontal positioned print on sample stage, achieves and observes the plane of sample and inclined-plane and detect; The cross section and the front surface that are particularly useful for sheet type sample detect.
Description
Technical field
The utility model relates to a kind of sample platform of scanning electronic microscope, is particularly useful for test sheets type sample.
Background technology
In prior art, ESEM be a kind of sample preparation simple, differentiate high, that comprehensive analytical capacity is strong test analysis equipment, be widely used in surface and the cross section micro-analysis of various types of materials at present.Wherein, sample stage is the core component of ESEM equipment, and it is generally the circular platform of aluminum.When sample surfaces is tested, for sheet type sample, usually by conducting resinl sample is pasted on sample table top and observes.And cross sectional testing to be done to sample, need to stick conducting resinl in the surrounding of sample stage, then sample is affixed on platform side.
Current ESEM is in test process, and sample stage can realize the rotation of certain angle by connecting shaft motor.For Hitachi S4800 model, sample stage can maximum inclination about 30 degree.But in test process, sample has the risk of the damage machine that drops; Especially, when the operating distance of electron gun and sample stage is nearer, big angle rotary has the risk damaging instrument.And in real work, tester wishes again the field range that can obtain greater angle, this contradiction annoyings tester and the ESEM manufacturer of this area always.
In addition, owing to needing to use conducting resinl during test, and in fact, when most conductor, part semiconductor contact with sample stage (aluminum), contact resistance between them is enough little, conductivity can meet observation demand, can directly observe completely and without the need to use conducting resinl increase conductivity; Therefore conducting resinl is used to there is wasting phenomenon in prior art.
Summary of the invention
Goal of the invention of the present utility model is to provide a kind of sample platform of scanning electronic microscope.
To achieve the above object of the invention, the technical solution adopted in the utility model is: a kind of sample platform of scanning electronic microscope, and described sample stage is provided with the surface platform of horizontal positioned print and at least 2 for clamping the elastic clamping mechanism of print;
Between described elastic clamping mechanism and sample stage, there is angle of inclination, and respective angle of inclination is different.
Above, described surface platform is used to horizontal positioned print, so that ESEM carries out plane test to sample; Elastic clamping mechanism is used to clamping print, and makes to be formed between print and sample stage to tilt, so that ESEM does cross sectional testing to sample.Certainly, the size of elastic clamping mechanism should be greater than the size of print to be measured, to be put among elastic clamping mechanism by sample.
Described elastic clamping mechanism is all used to the sample loading sheet type, such as silicon chip, cell piece, sheet metal etc.
In technique scheme, described sample stage is provided with bayonet socket, is provided with the block tongue of cooperation in bayonet socket, and block tongue elasticity is connected in bayonet socket, forms described elastic clamping mechanism.
Preferably, the top of described block tongue is provided with buffer substrate tablet.This is to better fix testing sample, prevents sample to be caught broken.
Preferably, described elastic clamping mechanism has 6, and form 2 row, often 3 block tongues of row elastic clamping mechanism are all sheathed on a pull bar, are provided with spring between block tongue and pull bar, form elastic connection structure.
Preferably, described 6 angles of inclination between elastic clamping mechanism and sample stage are respectively 15 °, 30 °, 45 °, 65 °, 75 ° and 90 °.
In test process, can 180 ° rotate sample stages, can realize 165 °, sample, the measurement of 150 °, 135 °, 115 °, 105 °.
Preferably, described sample stage is square structure, and the length of side is 20 ~ 30 mm, and thickness is 15 ~ 20 mm.
Because technique scheme is used, the utility model compared with prior art has following advantages:
1, the utility model devises a kind of new sample platform of scanning electronic microscope, by arranging surface platform and the elastic clamping mechanism of horizontal positioned print on sample stage, achieving and observing the plane of sample and inclined-plane and detect; The cross section and the front surface that are particularly useful for sheet type sample detect;
2, the utility model arranges the elastic clamping mechanism of multiple differing tilt angles on sample stage, achieves multi-angle observation, the more test detail of convenient observation;
3, the utility model adopts elastic clamping mechanism clamping print, and not only fixation is reliable, avoids sample and drops and the risk of damaging instrument, but also save conducting resinl consumptive material, save sample preparation cost;
4, structure of the present utility model is simple, and cost is lower, is suitable for applying.
Accompanying drawing explanation
Fig. 1 is the stereogram of the utility model embodiment one.
Fig. 2 is the stereogram in the utility model embodiment one after sample stage removal block tongue.
Fig. 3 is the assembling stereogram of block tongue and pull bar in the utility model embodiment one.
Wherein: 1, sample stage; 2, pull bar; 4, bayonet socket; 5, block tongue; 6, surface platform.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described.
Embodiment one:
Shown in Fig. 1 ~ 3, a kind of sample platform of scanning electronic microscope, described sample stage 1 is provided with the surface platform 6 of horizontal positioned print and 6 for clamping the elastic clamping mechanism of print;
Between described elastic clamping mechanism and sample stage, there is angle of inclination, and respective angle of inclination is different.
Described sample stage is provided with bayonet socket 4, and be provided with the block tongue 5 of cooperation in bayonet socket, block tongue elasticity is connected in bayonet socket, forms described elastic clamping mechanism.
Described elastic clamping mechanism has 6, and form 2 row, often 3 block tongues of row elastic clamping mechanism are all sheathed on a pull bar 2, are provided with spring between block tongue and pull bar, form elastic connection structure.
Pull bar one end, with smooth bulkhead nut, can provide impetus easily to separate bayonet socket for operating personnel like this; One end, with fixed screw, ensures that spring assembly position is fixed.
Described 6 angles of inclination between elastic clamping mechanism and sample stage are respectively 15 °, 30 °, 45 °, 65 °, 75 ° and 90 °.
Described sample stage is square structure, and the length of side is 25 mm, and thickness is 15 mm.
Claims (6)
1. a sample platform of scanning electronic microscope, is characterized in that: described sample stage (1) is provided with the surface platform (6) of horizontal positioned print and at least 2 for clamping the elastic clamping mechanism of print;
Between described elastic clamping mechanism and sample stage, there is angle of inclination, and respective angle of inclination is different.
2. sample platform of scanning electronic microscope according to claim 1, is characterized in that: described sample stage is provided with bayonet socket (4), and be provided with the block tongue (5) of cooperation in bayonet socket, block tongue elasticity is connected in bayonet socket, forms described elastic clamping mechanism.
3. sample platform of scanning electronic microscope according to claim 2, is characterized in that: the top of described block tongue is provided with buffer substrate tablet.
4. sample platform of scanning electronic microscope according to claim 1 and 2, it is characterized in that: described elastic clamping mechanism has 6, form 2 row, often 3 block tongues of row elastic clamping mechanism are all sheathed on a pull bar (2), be provided with spring between block tongue and pull bar, form elastic connection structure.
5. sample platform of scanning electronic microscope according to claim 4, is characterized in that: described 6 angles of inclination between elastic clamping mechanism and sample stage are respectively 15 °, 30 °, 45 °, 65 °, 75 ° and 90 °.
6. sample platform of scanning electronic microscope according to claim 1, is characterized in that: described sample stage is square structure, and the length of side is 20 ~ 30 mm, and thickness is 15 ~ 20 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520201041.7U CN204464231U (en) | 2015-04-03 | 2015-04-03 | A kind of sample platform of scanning electronic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520201041.7U CN204464231U (en) | 2015-04-03 | 2015-04-03 | A kind of sample platform of scanning electronic microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204464231U true CN204464231U (en) | 2015-07-08 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520201041.7U Expired - Fee Related CN204464231U (en) | 2015-04-03 | 2015-04-03 | A kind of sample platform of scanning electronic microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204464231U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105158050A (en) * | 2015-08-12 | 2015-12-16 | 核工业理化工程研究院 | Fixing device for scanning electron microscope test of fibers and test method |
| CN112147167A (en) * | 2020-11-05 | 2020-12-29 | 中国科学院地质与地球物理研究所 | Scanning electron microscope's geological sample fixing device |
-
2015
- 2015-04-03 CN CN201520201041.7U patent/CN204464231U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105158050A (en) * | 2015-08-12 | 2015-12-16 | 核工业理化工程研究院 | Fixing device for scanning electron microscope test of fibers and test method |
| CN112147167A (en) * | 2020-11-05 | 2020-12-29 | 中国科学院地质与地球物理研究所 | Scanning electron microscope's geological sample fixing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150708 Termination date: 20160403 |