CN204088258U - A kind of sample platform of scanning electronic microscope - Google Patents
A kind of sample platform of scanning electronic microscope Download PDFInfo
- Publication number
- CN204088258U CN204088258U CN201420542286.1U CN201420542286U CN204088258U CN 204088258 U CN204088258 U CN 204088258U CN 201420542286 U CN201420542286 U CN 201420542286U CN 204088258 U CN204088258 U CN 204088258U
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- sample
- groove
- inclined groove
- sample stage
- electronic microscope
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Abstract
The utility model discloses a kind of sample platform of scanning electronic microscope, described sample stage is located at least one pair of vertical groove and pair of angled groove; The cell wall of described vertical groove is provided with screw, is provided with the jackscrew of cooperation in screw; Described pair of angled groove is symmetrically set in the both sides of sample stage, and the angle of inclined groove and sample stage is 20 ~ 40 degree.The utility model arranges vertical groove and inclined groove on sample stage, adopts vertical groove to be fixed in groove by testing sample, is convenient to the right-angle view of sample in cross section; Inclined groove is adopted to carry out the multi-angle observation on sample in cross section and surface; Thus achieve the detection within the vision of wide-angle, the more test detail of convenient observation.
Description
Technical field
The utility model relates to a kind of sample platform of scanning electronic microscope, is particularly useful for test sheets type sample.
Background technology
In prior art, ESEM be a kind of sample preparation simple, differentiate high, that comprehensive analytical capacity is strong test analysis equipment, be widely used in surface and the cross section micro-analysis of various types of materials at present.Wherein, sample stage is the core component of ESEM equipment, and it is generally the circular platform of aluminum.When sample surfaces is tested, usually by conducting resinl sample is pasted on sample table top and observes.And cross sectional testing to be done to sample, need to stick conducting resinl in the surrounding of sample stage, then sample is affixed on platform side.
Current ESEM is in test process, and sample stage can realize the rotation of certain angle by connecting shaft motor.For Hitachi S4800 model, sample stage can maximum inclination about 30 degree.But in test process, sample has the risk of the damage machine that drops; Especially, when the operating distance of electron gun and sample stage is nearer, big angle rotary has the risk damaging instrument.And in real work, tester wishes again the field range that can obtain greater angle, this contradiction annoyings tester and the ESEM manufacturer of this area always.
Summary of the invention
Goal of the invention of the present utility model is to provide a kind of sample platform of scanning electronic microscope.
To achieve the above object of the invention, the technical solution adopted in the utility model is: a kind of sample platform of scanning electronic microscope, described sample stage is located at least one pair of vertical groove and pair of angled groove;
The width of described vertical groove is 0.3 ~ 1.5 mm, and the degree of depth is 5 ~ 8 mm; Its cell wall is provided with screw, is provided with the jackscrew of cooperation in screw;
The width of described inclined groove is 0.3 ~ 1.5 mm, and the degree of depth is 5 ~ 8 mm; Described pair of angled groove is symmetrically set in the both sides of sample stage, and the angle of inclined groove and sample stage is 20 ~ 40 degree;
Lateral wall 2 ~ 4 mms lower than madial wall of described inclined groove.
Above, described vertical groove and inclined groove are all used to the sample loading sheet type, such as silicon chip, cell piece etc.
The cell wall of described groove is provided with screw, is provided with the jackscrew of cooperation in screw, and this structure is used to fixing testing sample, withstands sample, make it be fixed in groove by the screw-in of jackscrew.
The lateral wall of described inclined groove is lower than madial wall, makes the lateral surface of sample expose outside groove, is convenient to the surface of ESEM to sample and detects.
In technique scheme, described vertical groove and inclined groove are mutually vertical to be arranged.
In technique scheme, all through described sample stage of described vertical groove and inclined groove.This structure can make testing sample load or removal from side, handled easily.
Preferably, the end that holds out against of described jackscrew is provided with buffering top flat.This is to better fix testing sample, and sample can be prevented broken by jackscrew top.
Preferably, the width of described vertical groove and inclined groove is 0.5 ~ 1 mm, and the degree of depth is 6 ~ 7 mm.
Preferably, the angle of described inclined groove and sample stage is 30 degree; Lateral wall 3 mms lower than madial wall of described inclined groove.This structure is to coordinate existing Hitachi S4800 ESEM, because its sample stage can maximum inclination about 30 degree.When observing sample, utilize ESEM to do (tilt test) when sample inclination is tested, sample stage itself can rotate from 0 to 30 degree, add structure of the present utility model, can realize sample from-30 degree to 60 degree of observations; Be equivalent to do the observation Sample details from level to vertical multi-angle.
Because technique scheme is used, the utility model compared with prior art has following advantages:
1, the utility model is on existing sample platform of scanning electronic microscope basis, improves it, and sample stage arranges vertical groove and inclined groove, adopts vertical groove to be fixed in groove by testing sample, is convenient to the right-angle view of sample in cross section; Inclined groove is adopted to carry out the multi-angle observation on sample in cross section and surface; Thus achieve the detection within the vision of wide-angle, the more test detail of convenient observation;
2, the utility model adopts screw and jackscrew to fix testing sample, and not only fixation is reliable, avoids sample and drops and the risk of damaging instrument, but also save conducting resinl consumptive material, save sample preparation cost;
3, the lateral wall of inclined groove designs lower than madial wall by the utility model, makes the lateral surface of sample expose outside groove, is convenient to the surface of ESEM to sample and detects, and can realize cross section and the front surface of observing multiple sheet type sample simultaneously;
4, structure of the present utility model is simple, and cost is lower, is suitable for applying.
Accompanying drawing explanation
Fig. 1 is the stereogram of the utility model embodiment one.
Fig. 2 is the end view of the utility model embodiment one.
Fig. 3 is the vertical view of the utility model embodiment one.
1, vertical groove; 2, inclined groove; 3, screw.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described.
Embodiment one:
Shown in Fig. 1 ~ 3, a kind of sample platform of scanning electronic microscope, described sample stage is provided with a pair vertical groove 1 and pair of angled groove 2;
The width of described vertical groove is 0.7 mm, and the degree of depth is 7 mm; Its cell wall is provided with screw 3, is provided with the jackscrew of cooperation in screw;
The width of described inclined groove is 0.7 mm, and the degree of depth is 7 mm; Described pair of angled groove is symmetrically set in the both sides of sample stage, the angle of inclined groove and sample stage 30 degree;
Lateral wall 3 mms lower than madial wall of described inclined groove.
Described vertical groove and inclined groove are mutually vertical to be arranged.The all through described sample stage of described vertical groove and inclined groove.
The end that holds out against of described jackscrew is provided with buffering top flat.
Claims (6)
1. a sample platform of scanning electronic microscope, is characterized in that: described sample stage is provided with at least one pair of vertical groove (1) and pair of angled groove (2);
The width of described vertical groove is 0.3 ~ 1.5 mm, and the degree of depth is 5 ~ 8 mm; Its cell wall is provided with screw (3), is provided with the jackscrew of cooperation in screw;
The width of described inclined groove is 0.3 ~ 1.5 mm, and the degree of depth is 5 ~ 8 mm; Described pair of angled groove is symmetrically set in the both sides of sample stage, and the angle of inclined groove and sample stage is 20 ~ 40 degree;
Lateral wall 2 ~ 4 mms lower than madial wall of described inclined groove.
2. sample platform of scanning electronic microscope according to claim 1, is characterized in that: described vertical groove and inclined groove are mutually vertical to be arranged.
3. sample platform of scanning electronic microscope according to claim 1, is characterized in that: all through described sample stage of described vertical groove and inclined groove.
4. sample platform of scanning electronic microscope according to claim 1, is characterized in that: the end that holds out against of described jackscrew is provided with buffering top flat.
5. sample platform of scanning electronic microscope according to claim 1, is characterized in that: the width of described vertical groove and inclined groove is 0.5 ~ 1 mm, and the degree of depth is 6 ~ 7 mm.
6. sample platform of scanning electronic microscope according to claim 1, is characterized in that: the angle of described inclined groove and sample stage is 30 degree; Lateral wall 3 mms lower than madial wall of described inclined groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420542286.1U CN204088258U (en) | 2014-09-19 | 2014-09-19 | A kind of sample platform of scanning electronic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420542286.1U CN204088258U (en) | 2014-09-19 | 2014-09-19 | A kind of sample platform of scanning electronic microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204088258U true CN204088258U (en) | 2015-01-07 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420542286.1U Expired - Fee Related CN204088258U (en) | 2014-09-19 | 2014-09-19 | A kind of sample platform of scanning electronic microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204088258U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105158050A (en) * | 2015-08-12 | 2015-12-16 | 核工业理化工程研究院 | Fixing device for scanning electron microscope test of fibers and test method |
-
2014
- 2014-09-19 CN CN201420542286.1U patent/CN204088258U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105158050A (en) * | 2015-08-12 | 2015-12-16 | 核工业理化工程研究院 | Fixing device for scanning electron microscope test of fibers and test method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150107 Termination date: 20160919 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |