CN211669111U - Sample table for ion polishing sample EBSD test - Google Patents
Sample table for ion polishing sample EBSD test Download PDFInfo
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- CN211669111U CN211669111U CN202020250118.0U CN202020250118U CN211669111U CN 211669111 U CN211669111 U CN 211669111U CN 202020250118 U CN202020250118 U CN 202020250118U CN 211669111 U CN211669111 U CN 211669111U
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- sample
- clamp
- anchor clamps
- base
- rod
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- 238000012360 testing method Methods 0.000 title claims abstract description 39
- 238000001887 electron backscatter diffraction Methods 0.000 title claims abstract description 36
- 238000005498 polishing Methods 0.000 title claims abstract description 30
- 230000008878 coupling Effects 0.000 claims abstract description 8
- 238000010168 coupling process Methods 0.000 claims abstract description 8
- 238000005859 coupling reaction Methods 0.000 claims abstract description 8
- 230000006835 compression Effects 0.000 claims description 16
- 238000007906 compression Methods 0.000 claims description 16
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 2
- 238000009434 installation Methods 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 3
- 239000000523 sample Substances 0.000 description 72
- 238000000034 method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000005464 sample preparation method Methods 0.000 description 2
- BFWFPORISPXHAR-UHFFFAOYSA-N 9-Methyl-7-bromoeudistomin D Chemical compound OC1=C(Br)C=C2N(C)C3=CN=CC=C3C2=C1Br BFWFPORISPXHAR-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
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- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000013522 software testing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
The utility model discloses a sample table for testing ion polishing sample EBSD, which comprises a support bar, a clamp seat and a clamp; the lower extreme of bracing piece is connected with scanning electron microscope sample platform, the upper end of bracing piece is connected with the anchor clamps seat, the anchor clamps seat includes the coupling part that links to each other with bracing piece upper end and is located the anchor clamps installation end that coupling part's upper portion is used for sectional fixture, anchor clamps are used for installing the sample that awaits measuring, the side of the anchor clamps installation end of anchor clamps seat is four holding surfaces that set up respectively all around, respectively is provided with an anchor clamps on every holding surface. The utility model discloses a sample platform both can be used to the ion polishing of sample, also can be used to the EBSD test, uses to get up and has simple structure, convenient operation, efficient advantage.
Description
Technical Field
The utility model relates to a sample platform for EBSD test especially relates to a sample platform for ion polishing sample EBSD test.
Background
EBSD is a technology for acquiring the crystal orientation of a sample surface micro-area in a scanning electron microscope, and the technology can analyze the microstructure, the grain size, the texture, the grain boundary characteristics, the orientation difference and the phase distribution of the sample. Compared with other diffraction technologies, EBSD has the advantages of rapidness and large sample area statistics, fills the gap of an MBED technology and an XRD texture analysis technology under TEM, and develops into an important material analysis means. In the EBSD test, the quality of the test specimen is decisive for the test result, and therefore the EBSD specimen preparation is a very critical step. The conventional EBSD sample preparation method comprises two methods of electrolytic polishing and ion polishing, wherein the electrolytic polishing is suitable for a single-phase material with better conductivity, and the ion polishing has no special requirements on the conductivity and the phase composition of the material and has wider adaptability. For ion polishing in the EBSD sample preparation method, although a special ion polishing instrument is already available in the market, the ion polishing instrument is expensive in price and single in use, and is not yet comprehensively popularized.
The ion thinning instrument is one of necessary tools for preparing transmission electron microscope samples, and is popularized in some domestic transmission electron microscope testing mechanisms at present. The ion thinning instrument can be used for carrying out single-side ion polishing on a phi 3mm sample, so that the purpose of stress relief layer is achieved. After the ion polishing of the sample is completed, the sample needs to be taken off from the clamp and then bonded on an EBSD sample stage by conductive adhesive. The prior sample table has the following problems in use: (1) the conductive adhesive is not firmly bonded, and the sample is easy to slip, so that data acquisition distortion is caused; (2) the sample platform can only be bonded with one sample, and the testing efficiency is low.
Disclosure of Invention
In view of this, the utility model provides a sample platform for ion polishing sample EBSD test to solve current EBSD sample platform and ion attenuate appearance preparation ion polishing sample incompatible problem.
For solving the technical problem that exists, the technical scheme of the utility model is that:
a sample table for testing an ion polishing sample EBSD comprises a support rod, a clamp seat and a clamp;
the lower extreme of bracing piece is connected with scanning electron microscope sample platform, the upper end of bracing piece is connected with the anchor clamps seat, the anchor clamps seat includes the coupling part that links to each other with bracing piece upper end and is located the anchor clamps installation end that coupling part's upper portion is used for sectional fixture, anchor clamps are used for installing the sample that awaits measuring, the side of the anchor clamps installation end of anchor clamps seat is four holding surfaces that set up respectively all around, respectively is provided with an anchor clamps on every holding surface.
Furthermore, the lower end of the supporting rod is matched with an interface of a scanning electron microscope sample stage, the clamp seat is fixedly connected to the upper end of the supporting rod through threads, four supporting surfaces of the clamp seat are respectively provided with a fixing hole, and the connecting part of the clamp is inserted into the fixing hole in the supporting surface of the clamp seat and fixed through a clamping screw.
Further, anchor clamps include base, dead lever, depression bar and pressure spring, the base is used for bearing the weight of the sample, the dead lever suits with the sample seat of ion attenuate appearance, the lower extreme of base is provided with the dead lever, the dead lever is the junction between the holding surface of anchor clamps and anchor clamps seat, anchor clamps pass through the dead lever and are connected with the holding surface of anchor clamps seat, be provided with the depression bar on the base, the depression bar overlaps on the cylinder section pole body of base back one side and is equipped with pressure spring.
Furthermore, the fixing holes are located in the center of each supporting surface and are provided with clamping screws.
Further, the fixture mounting end on the upper portion of the fixture seat is of a regular quadrangular frustum pyramid structure, and four supporting surfaces of the fixture seat are uniformly distributed and form a fixed included angle with the bottom surface of the fixture seat.
Furthermore, four supporting surfaces of the clamp seat are uniformly distributed and form an included angle of 70 degrees with the bottom surface of the clamp seat.
Furthermore, a boss is arranged on the lower portion of the bearing surface of the base, which is used for bearing the test sample.
Furthermore, the compression bar is L-shaped, and comprises a cylindrical section sleeved with a compression spring and a clamping section for clamping a sample placed on the surface of the base.
Compared with the prior art, the invention has the following beneficial effects:
the EBSD sample platform mainly comprises a support rod, a clamp seat and a clamp, wherein the clamp can be used for installing a square sample with a larger size, the sample can be directly installed on the clamp seat to carry out EBSD test after ion polishing is finished, the larger square sample can clearly identify the sampling direction and is not easy to damage in the sample transfer process; the boss on one side of the clamp base and the L-shaped pressure lever with the spring can firmly clamp the sample on the clamp, so that the sample is prevented from sliding in the EBSD test process, and the accuracy of the test result is prevented from being influenced. In addition, four anchor clamps can be installed simultaneously to the anchor clamps seat, can once put into scanning electron mirror with four samples and test, use and get up to have simple structure, convenient operation, efficient advantage.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic structural view of the support rod of the present invention;
FIG. 3 is a front view of a half-section of the clamp base of the present invention;
FIG. 4 is a schematic bottom view of the clamp base of the present invention;
FIG. 5 is a schematic front view of a half-section of the clamp of the present invention;
fig. 6 is a right-side view of the clamp of the present invention.
In the above drawings, 1 is a support rod, 2 is a clamp seat, 2-1 is a support surface, 2-2 is a fixing hole, 2-3 is a clamping screw, 3 is a clamp, 3-1 is a base, 3-2 is a fixing rod, 3-3 is a pressure rod, and 3-4 is a compression spring.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1-6, the utility model provides a sample platform for ion polishing sample EBSD test, including bracing piece 1, anchor clamps seat 2 and anchor clamps 3.
The lower extreme of bracing piece 1 is connected with scanning electron microscope sample platform, and the upper end of bracing piece 1 is connected with anchor clamps seat 2, and anchor clamps seat 2 includes the coupling part that links to each other with bracing piece 1 upper end and is located the anchor clamps installation end that the upper portion of coupling part is used for installing anchor clamps 3, and anchor clamps 3 are used for installing the sample that awaits measuring, and the side of the anchor clamps installation end of anchor clamps seat 2 is four holding surfaces 2-1 that set up respectively all around, respectively is provided with an anchor clamps 3 on every holding surface 2-1.
The lower end of a supporting rod 1 is matched with an interface of a scanning electron microscope sample stage, threads are arranged at the upper end of the supporting rod 1, a clamp seat 2 is fixedly connected to the upper end of the supporting rod 1 through the threads, four supporting surfaces 2-1 of the clamp seat 2 are respectively provided with a fixing hole 2-2, and a connecting part of a clamp 3 is inserted into the fixing hole 2-2 on the supporting surface 2-1 of the clamp seat 2 and is fixed through a clamping screw 2-3, so that the surface of a sample is parallel to the supporting surface 2-1 of the clamp seat 2.
Can only install less circular sample in order to solve current sample platform simultaneously to bring and be difficult to discern the sample direction, bring great difficulty and sample size for the EBSD analysis and little, the intensity is low, the easy problem of damaging when unloading from the sample platform in the embodiment of the utility model provides an, adopted following structural design's anchor clamps. The clamp 3 comprises a base 3-1, a fixing rod 3-2, a pressure rod 3-3 and a compression spring 3-4, wherein the base 3-1 is used for bearing a test sample, and the fixing rod 3-2 is matched with a sample seat of the ion thinning instrument, so that the clamp 3 can be used for ion polishing of the test sample and EBSD testing. The lower end of the base 3-1 is provided with a fixed rod 3-2, the fixed rod 3-2 is a connecting part between the clamp 3 and a supporting surface 2-1 of the clamp seat 2, the clamp 3 is connected with the supporting surface 2-1 of the clamp seat 2 through the fixed rod 3-2, the base 3-1 is provided with a pressure lever 3-3, and a cylindrical section rod body of the pressure lever 3-3 on one side of the back surface of the base 3-1 is sleeved with a compression spring 3-4. By adopting the clamp, the clamp can be well adapted to an ion thinning instrument, and can clamp a square sample with a large size for ion polishing.
The fixing holes 2-2 are positioned at the center of each supporting surface 2-1 and are provided with clamping screws 2-3.
The fixture mounting end on the upper part of the fixture seat 2 is of a regular quadrangular frustum pyramid structure, and four supporting surfaces 2-1 of the fixture seat 2 are uniformly distributed and form a fixed included angle with the bottom surface of the fixture seat 2. The embodiment of the utility model provides an in, four holding surfaces 2-1 evenly distributed of anchor clamps seat 2 and with the anchor clamps seat 2 bottom surface contained angle be 70, can guarantee that the sample surface satisfies EBSD test requirement with scanning electron microscope incident electron beam's contained angle. And through the use of four anchor clamps, once can put into the scanning electron mirror with four samples and test to improve efficiency of software testing.
The lower part of the bearing surface of the base 3-1 for bearing the test sample is provided with a boss, so that the test sample can be prevented from sliding under the action of gravity in the test process.
The compression rod 3-3 is L-shaped, the compression rod 3-3 comprises a cylindrical section sleeved with a compression spring 3-4 and a clamping section for clamping a sample placed on the surface of the base 3-1, and the L-shaped compression rod sleeved with the compression spring 3-4 is used, so that the sample can be prevented from moving in the processes of ion thinning and EBSD testing.
The method for testing the ion polishing sample EBSD by using the sample platform of the utility model comprises the following steps:
1) cutting a sample, mechanically polishing the surface to be tested, ensuring that the size of the sample is long, wide and thick (3-8 mm), multiplied by (0.1-1 mm), placing the surface to be polished of the sample on a base 3-1 of a clamp 3, aligning one side of the sample with a boss on the base 3-1 of the clamp 3, clamping the sample by a pressure rod 3-3, and ensuring that the sample does not move;
2) placing the clamp 3 for mounting the sample into an ion thinning instrument, setting parameters such as an ion gun angle, energy, time and the like, and carrying out ion polishing on the sample to remove the stress layer;
3) firstly, mounting a clamp seat 2 on a support rod 1, then inserting a clamp 3 which finishes ion polishing into a fixing hole 2-2 of the clamp seat 2 and fixing the clamp by using a clamping screw 2-3;
4) mounting the assembled EBSD test sample platform on a scanning electron microscope sample platform, rotating the scanning electron microscope sample platform and enabling the sample to be tested to be opposite to the EBSD probe;
5) and closing the door of the scanning electron microscope chamber, and carrying out EBSD test after the vacuum degree of the sample chamber meets the requirement.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. A sample stage for an ion polishing sample EBSD test is characterized by comprising a support rod (1), a clamp seat (2) and a clamp (3);
the lower extreme of bracing piece (1) is connected with scanning electron microscope sample platform, the upper end of bracing piece (1) is connected with anchor clamps seat (2), anchor clamps seat (2) include the coupling part that links to each other with bracing piece (1) upper end and be located the anchor clamps erection end that the upper portion of coupling part is used for sectional fixture (3), anchor clamps (3) are used for installing the sample that awaits measuring, the side of the anchor clamps erection end of anchor clamps seat (2) is four holding surfaces (2-1) that set up respectively all around, respectively is provided with an anchor clamps (3) on every holding surface (2-1).
2. The sample stage for the ion polishing sample EBSD test according to claim 1, wherein the lower end of the support rod (1) is adapted to the interface of the sample stage of the scanning electron microscope, the clamp base (2) is fixedly connected to the upper end of the support rod (1) through threads, each of the four support surfaces (2-1) of the clamp base (2) is provided with a fixing hole (2-2), and the connecting part of the clamp (3) is inserted into the fixing hole (2-2) of the support surface (2-1) of the clamp base (2) and fixed through a clamping screw (2-3).
3. The sample stage for the EBSD test of the ion-polished sample according to claim 1 or 2, wherein the clamp (3) comprises a base (3-1), a fixing rod (3-2), a pressure rod (3-3) and a compression spring (3-4), the base (3-1) is used for bearing the sample, the fixing rod (3-2) is adapted to the sample holder of the ion thinning apparatus, the fixing rod (3-2) is arranged at the lower end of the base (3-1), the fixing rod (3-2) is a connecting part between the clamp (3) and the supporting surface (2-1) of the clamp holder (2), the clamp (3) is connected with the supporting surface (2-1) of the clamp holder (2) through the fixing rod (3-2), the pressure rod (3-3) is arranged on the base (3-1), the compression rod (3-3) is sleeved with a compression spring (3-4) on a cylindrical rod section on one side of the back surface of the base (3-1).
4. The sample stage for the ion-polished sample EBSD test according to claim 2, wherein the fixing holes (2-2) are located at the center of each support surface (2-1) and are provided with clamping screws (2-3).
5. The sample stage for the ion polishing sample EBSD test according to claim 3, wherein the fixture mounting end at the upper part of the fixture seat (2) is in a regular quadrangular frustum pyramid structure, and four supporting surfaces (2-1) of the fixture seat (2) are uniformly distributed and form a fixed included angle with the bottom surface of the fixture seat (2).
6. The sample stage for the ion polished sample EBSD test according to claim 5, wherein the four supporting surfaces (2-1) of the clamp base (2) are uniformly distributed and form an angle of 70 degrees with the bottom surface of the clamp base (2).
7. The sample stage for the ion polishing sample EBSD test according to claim 3, wherein the pedestal (3-1) is provided with a boss at the lower part of the bearing surface for bearing the sample.
8. The sample stage for the ion polishing sample EBSD test according to claim 3, wherein the compression rod (3-3) is L-shaped, and the compression rod (3-3) comprises a cylindrical section sleeved with a compression spring (3-4) and a clamping section for clamping the sample placed on the surface of the base (3-1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020250118.0U CN211669111U (en) | 2020-03-04 | 2020-03-04 | Sample table for ion polishing sample EBSD test |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020250118.0U CN211669111U (en) | 2020-03-04 | 2020-03-04 | Sample table for ion polishing sample EBSD test |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211669111U true CN211669111U (en) | 2020-10-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020250118.0U Expired - Fee Related CN211669111U (en) | 2020-03-04 | 2020-03-04 | Sample table for ion polishing sample EBSD test |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211669111U (en) |
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2020
- 2020-03-04 CN CN202020250118.0U patent/CN211669111U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201013 |