CN210834962U

CN210834962U - Test bench suitable for scanning electron microscope EBSD test

Info

Publication number: CN210834962U
Application number: CN201921655467.4U
Authority: CN
Inventors: 浦红; 方政; 刘敏; 刘志军
Original assignee: Maanshan Iron and Steel Co Ltd
Current assignee: Maanshan Iron and Steel Co Ltd
Priority date: 2019-09-30
Filing date: 2019-09-30
Publication date: 2020-06-23
Anticipated expiration: 2029-09-30

Abstract

The utility model discloses a test bench suitable for scanning electron microscope EBSD test, including the base station, the test bench still includes the sample seat and can be with the spacing mounting structure who installs on the base station inclined plane of sample seat, be equipped with the location fastening device who is used for location and fixed sample on the sample seat. The test bed can stably fix large-size and heavy samples on the sample table, and sample slippage in the test process can not occur, so that final image drift is caused.

Description

Test bench suitable for scanning electron microscope EBSD test

Technical Field

The utility model belongs to the technical field of the scanning electron microscope, concretely relates to test bench suitable for scanning electron microscope EBSD tests.

Background

The scanning electron microscope is an electron microscope for observing the microscopic morphology of the surface of a material. In recent years, EBSD has become widely used in the field of scanning electron microscopy as one of important accessories of electron microscopy.

The Electron Back Scattering Diffraction (EBSD) technology is a method for determining the crystal structure, orientation and related information thereof based on the analysis of a diffraction chrysanthemum cell zone excited by an electron beam on the surface of an inclined sample in a scanning electron microscope.

The EBSD is matched with a scanning electron microscope and an energy spectrometer for use, and can be used for researching the basic performance and characteristics of materials, such as: texture, grain size, phase analysis, phase identification, grain boundaries, deformation and strain.

EBSD is a commonly used material characterization means at present, and a sample is required to be inclined by 70 degrees in the vertical direction during the test process, and the sample is required not to be inclined in the horizontal direction. At present, a commercial EBSD sample platform is suitable for light and thin small samples, and the samples are adhered to the sample platform by conductive adhesive (or silver adhesive) so that the horizontal direction of the samples is parallel to a probe as much as possible. For large-size and heavy inlaid samples, if a traditional fixing mode is adopted, the vertical direction of the sample table is inclined by 70 degrees, and the samples easily slide in the testing process under the action of gravity, so that the originally set detection area is changed, the pictures are deflected, and the test result is inaccurate or even fails.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving the technical problem who exists among the prior art. Therefore, the utility model provides a test bench suitable for scanning electron microscope EBSD test, the purpose is convenient for fix a position test sample, avoids appearing removing under the action of gravity.

In order to realize the purpose, the utility model discloses the technical scheme who takes does:

the utility model provides a test bench suitable for scanning electron microscope EBSD test, includes the base station, the test bench still includes the sample seat and can be with the spacing mounting structure of installing on the base station inclined plane of sample seat, be equipped with the location fastening device who is used for location and fixed sample on the sample seat.

The positioning and fastening mechanism comprises a first positioning block and a second positioning block which are arranged on the side edge of the upper end face of the sample seat, the second positioning block is provided with a screw hole, and the screw hole is penetrated through a screw to fix a sample on the sample seat.

The sample seat is circular, and the first positioning block and the second positioning block are both arc-shaped positioning stop blocks.

The number of the first positioning blocks is one, the number of the second positioning blocks is two, and the two second positioning blocks and the first positioning block form a three-point fixing structure.

The connecting line between the two second positioning blocks bisects the upper end face of the sample holder, and the first positioning block is positioned on the vertical bisection line of the connecting line between the two second positioning blocks.

The limiting installation structure comprises a bolt, a base platform leg, a sample seat leg and a positioning hole which is arranged on the inclined plane of the base platform and is perpendicular to the inclined plane of the base platform, and the sample seat leg is connected with the positioning hole in a positioning mode.

The limiting installation structure further comprises a bolt hole formed in the side face of the base station, and the sample seat leg installed in the positioning hole is positioned by penetrating a bolt through the bolt hole.

The utility model has the advantages that:

firstly, a large-size and heavy sample can be stably fixed on a sample table, and the sample slippage in the test process can not occur, so that the final image drift is avoided;

secondly, the base station is stable, and the head can fix sample seats with different shapes, such as large-size and heavy sample seats with round embedded samples. The design of three arc positioning stop blocks of the sample seat can prevent the sample from sliding downwards, and the three-point clamping of the sample is more stable. The problem that the levelness and the verticality of a sample are difficult to control by a traditional gluing method can be well solved.

Drawings

The description includes the following figures, the contents shown are respectively:

fig. 1 is a schematic structural view of the base station of the present invention;

FIG. 2 is a schematic structural diagram of a sample holder according to the present invention;

fig. 3 is a schematic structural view of the assembled base and sample holder.

Labeled as:

1. the device comprises a base platform, 2, a sample seat, 3, a first positioning block, 4, a second positioning block, 5, base platform legs, 6, sample seat legs, 7, positioning holes, 8 and bolt holes.

Detailed Description

The following detailed description of the embodiments of the present invention will be given with reference to the accompanying drawings, for the purpose of helping those skilled in the art to understand more completely, accurately and deeply the conception and technical solution of the present invention, and to facilitate its implementation. It should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. In the following embodiments, the terms "first", "second" and "third" do not denote absolute differences in structure and/or function, nor do they denote a sequential order of execution, but rather are used for descriptive convenience only.

As shown in fig. 1 to 3, a test bench suitable for scanning electron microscope EBSD test, includes base station 1, and this test bench still includes sample holder 2 and can be with the spacing mounting structure of installing on base station 1 inclined plane of sample holder 2, and the contained angle between the inclined plane of base station and the bottom surface is 70, is equipped with the location fastening device who is used for location and fixed sample on the sample holder 2.

The positioning and fastening mechanism comprises a first positioning block 3 and a second positioning block 4 which are arranged on the side edge of the upper end face of the sample holder 2, the second positioning block 4 is provided with a screw hole, and a sample is fixed on the sample holder 2 by passing through the screw hole through a screw. Specifically, the first positioning block is used as an anti-skidding positioning block, the second positioning block is used as a positioning block for fixing, and the first positioning block and the second positioning block are matched to form the positioning and fastening effects on the sample, so that the sample is prevented from sliding and deviating.

The sample holder 2 is preferably circular, and the first positioning block 3 and the second positioning block 4 are both circular arc-shaped positioning stoppers. When the sample positioning device is specifically arranged, one first positioning block 3 is provided, two second positioning blocks 4 are provided, and the two second positioning blocks 4 and the first positioning block 3 form a three-point fixing structure, so that the stable positioning effect of the sample is improved. Preferably, a connecting line between the two second positioning blocks 4 bisects the upper end surface of the sample holder 2, and the first positioning block 3 is located on a perpendicular bisector of the connecting line between the two second positioning blocks 4.

The limiting installation structure comprises a bolt, a base platform leg 5, a sample seat leg 6 and a positioning hole 7 which is arranged on the inclined surface of the base platform and is perpendicular to the inclined surface of the base platform, and the sample seat leg 6 is connected with the positioning hole 7 in a positioning mode.

In order to further ensure the stability of the assembled base station and sample seat, the limiting installation structure also comprises a bolt hole 8 arranged on the side surface of the base station, and the sample seat leg arranged in the positioning hole is positioned by a bolt penetrating through the bolt hole.

In specific implementation, the base platform is a 70-degree pre-tilt EBSD sample platform, the diameter is 15mm, the height is 30mm, a positioning hole is formed in the middle of a 70-degree inclined plane of the head part, a circular sample seat can be inserted into the positioning hole, a bolt can be used for firmly fixing the sample seat by drilling a side face, the leg length of the base platform is 8mm, the base platform can be inserted into an electron microscope sample platform, and the structural drawing of the base platform is shown in figure 1. The base platform is made of copper.

The sample seat is designed to be capable of fixing a sample, the sample seat can be flexibly designed according to the shape of the sample, for example, a designed circular sample seat suitable for embedding the sample is provided with a first positioning block for preventing the sample from sliding downwards, the inner diameter of the circular sample seat is 30mm, the outer diameter of the circular sample seat is 36mm, three circular positioning stop blocks are formed in the positions, the length of each circular positioning stop block is × mm, the height of each circular positioning stop block is 10mm, the circular sample seat is 90 degrees apart, the left and right symmetrical second positioning blocks are respectively provided with a screw hole for fixing the sample through screws, the three points enable the sample to be fixed more firmly, the legs of the sample seat are 8mm long, and the sample seat can.

And fixing the sample on the sample seat by using screws, inserting the sample seat on a 70-degree inclined plane at the head of the base station, fixing the sample seat by using screws, and after the assembly is finished, fixing the base station on a sample table of an electron microscope to perform the EBSD test.

The utility model discloses solve the EBSD test of the heavier circular sample of inlaying of jumbo size emphatically, can also design the sample seat of other shapes for the EBSD of other shape samples detects. The sample table is low in manufacturing cost, convenient to manufacture, simple to operate and high in applicability.

The invention has been described above by way of example with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited by the above-described manner. Various insubstantial improvements are made by adopting the method conception and the technical proposal of the utility model; or without improvement, the above conception and technical solution of the present invention can be directly applied to other occasions, all within the protection scope of the present invention.

Claims

1. The utility model provides a test bench suitable for scanning electron microscope EBSD test, includes the base station, its characterized in that, the test bench still includes the sample seat and can be with the spacing mounting structure of installing on the base station inclined plane of sample seat, be equipped with the location fastening device who is used for location and fixed sample on the sample seat.

2. The test bench suitable for scanning electron microscope EBSD test according to claim 1, wherein the positioning fastening mechanism comprises a first positioning block and a second positioning block which are arranged on the side of the upper end face of the sample holder, the second positioning block is provided with a screw hole, and the sample is fixed on the sample holder by passing through the screw hole through the screw.

3. The test bed suitable for scanning electron microscope EBSD test according to claim 2, wherein the sample holder is circular, and the first positioning block and the second positioning block are both circular arc positioning stoppers.

4. The test bed suitable for the EBSD test of the scanning electron microscope as claimed in claim 2 or 3, wherein the number of the first positioning blocks is one, the number of the second positioning blocks is two, and the two second positioning blocks and the first positioning block form a three-point fixing structure.

5. The test bed suitable for scanning electron microscope EBSD test is characterized in that a connecting line between the two second positioning blocks bisects the upper end surface of the sample seat, and the first positioning block is located on a perpendicular bisector of the connecting line between the two second positioning blocks.

6. The test bed suitable for scanning electron microscope EBSD test according to claim 1, wherein the limiting installation structure comprises a bolt, a base platform leg, a sample seat leg and a positioning hole which is arranged on the inclined surface of the base platform and is perpendicular to the inclined surface of the base platform, and the sample seat leg is connected with the positioning hole in a positioning way.

7. The test bed suitable for scanning electron microscope EBSD test according to claim 6, wherein the limiting installation structure further comprises bolt holes arranged on the side surface of the base platform, and the sample seat legs installed in the positioning holes are positioned by bolts penetrating through the bolt holes.