CN209947791U - Scanning electron microscope objective table and scanning electron microscope - Google Patents
Scanning electron microscope objective table and scanning electron microscope Download PDFInfo
- Publication number
- CN209947791U CN209947791U CN201920699593.3U CN201920699593U CN209947791U CN 209947791 U CN209947791 U CN 209947791U CN 201920699593 U CN201920699593 U CN 201920699593U CN 209947791 U CN209947791 U CN 209947791U
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- China
- Prior art keywords
- scanning electron
- electron microscope
- object carrying
- holes
- push rod
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- Expired - Fee Related
Links
- 230000002093 peripheral effect Effects 0.000 claims abstract description 4
- 238000005096 rolling process Methods 0.000 claims description 21
- 230000008602 contraction Effects 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
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- Sampling And Sample Adjustment (AREA)
Abstract
The utility model provides a scanning electron microscope objective table, it includes: the device comprises a platform, wherein an adjusting hole is formed in the central area of the platform, a plurality of object carrying holes are formed in the periphery of the adjusting hole, the object carrying holes are communicated with the adjusting hole through holes, push rods are arranged in the through holes, and a pressing plate is arranged at one end, communicated with the object carrying holes, of each push rod and is in a flat plate shape; the pressing block is arranged in the adjusting hole, the outer peripheral surface of the pressing block is a conical surface, the conical surface approximately tends to the lower side and approximately tends to the center to shrink, so that the pressing block can press the push rod, and the push rod has the tendency of moving from the adjusting hole to the object carrying hole. Through adopting above-mentioned technical scheme a scanning electron microscope objective table can drive the clamp plate through the briquetting and press from both sides tight sample and once load a plurality of samples, improve loading efficiency.
Description
Technical Field
The utility model belongs to the microscope instrument especially relates to a scanning electron microscope objective table and scanning electron are micro-.
Background
Scanning Electron Microscopy (SEM), a more modern tool for cell biology research invented in 1965, mainly uses secondary electron signal imaging to observe the surface morphology of a sample, i.e. scanning the sample with a very narrow electron beam, produces various effects by the interaction of the electron beam with the sample, among which is mainly the secondary electron emission of the sample. The conventional scanning electron microscope stage cannot load a plurality of samples at one time, so that the detection efficiency is low.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention is directed to a scanning electron microscope stage, which improves the sample loading efficiency.
In order to achieve the above purpose, the technical scheme of the utility model is realized like this:
the utility model provides a scanning electron microscope objective table, it includes:
the device comprises a platform, wherein an adjusting hole is formed in the central area of the platform, a plurality of object carrying holes are formed in the periphery of the adjusting hole, the object carrying holes are communicated with the adjusting hole through holes, push rods are arranged in the through holes, and a pressing plate is arranged at one end, communicated with the object carrying holes, of each push rod and is in a flat plate shape;
the pressing block is arranged in the adjusting hole, the outer peripheral surface of the pressing block is a conical surface, the conical surface approximately tends to the lower side and approximately tends to the center to shrink, so that the pressing block can press the push rod, and the push rod has the tendency of moving from the adjusting hole to the object carrying hole.
Preferably, the pressing block is provided with a plurality of wedge-shaped blocks having inclined surfaces facing the carrier hole, the inclined surfaces tending approximately to the lower side and away from the carrier hole.
Preferably, the number of the wedge-shaped blocks is the same as that of the carrying holes.
Preferably, one end of the push rod, which leads to the joint hole, is provided with a rolling part, the rolling part is rotatably connected to the push rod relative to the push rod, and a rotation axis of the rolling part extends in a horizontal direction.
Preferably, the rolling part is disposed opposite to an inclined surface of the wedge block.
Preferably, the rolling part is a rolling bearing.
Preferably, 4 carrying holes are arranged around the adjusting hole, and the 4 carrying holes are evenly spaced in the circumferential direction.
Preferably, the platform is in the form of a rectangular flat plate.
Preferably, the platform is provided with a support enabling the lower surface of the platform to be spaced from the surface on which the scanning electron microscope stage is placed.
The utility model discloses still provide a scanning electron microscope, scanning electron microscope includes any one of the above-mentioned technical scheme scanning electron microscope objective table.
Compared with the prior art, a scanning electron microscope objective table can drive the clamp plate through the briquetting and press from both sides tight sample and once load a plurality of samples, improve loading efficiency.
Drawings
The accompanying drawings, which form a part hereof, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without undue limitation. In the drawings:
fig. 1 is a top view of a scanning electron microscope stage according to an embodiment of the present invention;
fig. 2 is a cross-sectional view of a scanning electron microscope stage according to an embodiment of the present invention.
Description of reference numerals:
1-bracket, 2-platform, 3-carrying hole, 4-adjusting hole, 5-pressing plate, 6-pushing rod, 7-rolling part, 8-wedge block and 9-pressing block.
Detailed Description
It should be noted that, in the present invention, the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in fig. 1 and 2, the present invention provides a scanning electron microscope stage, which includes a platform and a pressing block. The platform is rectangular and flat, and the central area of the platform is provided with an adjusting hole, for example, the adjusting hole 4 is a rectangular through hole. The platform is provided with a support which enables the lower surface of the platform to be away from the surface on which the scanning electron microscope stage is placed. A plurality of object carrying holes are formed in the periphery of the adjusting hole, for example, the object carrying holes 3 are rectangular holes, the object carrying holes are communicated with the adjusting hole through holes, push rods are arranged in the through holes, and pressing plates are arranged at the ends, communicated with the object carrying holes, of the push rods and are flat.
The pressing block is arranged in the adjusting hole, the outer peripheral surface of the pressing block is a conical surface, the conical surface approximately tends to the lower side and approximately tends to the center to shrink, so that the pressing block can press the push rod, and the push rod has the tendency of moving from the adjusting hole to the object carrying hole.
Further, the pressing block is provided with a plurality of wedge-shaped blocks, and the wedge-shaped blocks are provided with inclined surfaces facing the object carrying hole, and the inclined surfaces tend to be away from the object carrying hole along the lower side. The number of the wedge-shaped blocks is the same as that of the object carrying holes, for example, the number of the wedge-shaped blocks and the number of the object carrying holes are 4.
One end of the push rod, which leads to the joint hole, is provided with a rolling part, for example, the rolling part may be a rolling bearing, the rolling part may be rotatably connected to the push rod relative to the push rod, and a rotation axis of the rolling part extends in a horizontal direction. The rolling part is arranged opposite to the inclined surface of the wedge-shaped block.
4 object carrying holes are arranged around the adjusting hole, and the 4 object carrying holes are evenly spaced in the circumferential direction.
When a sample is loaded, the sample is placed in the loading hole, then the pressing block is placed in the adjusting hole 4, the inclined surface of the wedge-shaped block 8 is pressed against the rolling part 7, and the rolling part 7 can reduce friction. The push rod 7 moves from the adjusting hole to the object carrying hole, so that the pressing plate presses against the sample to complete positioning and loading.
The utility model discloses still provide a scanning electron microscope, it includes above-mentioned scanning electron microscope objective table.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A scanning electron microscope stage, comprising: it includes:
the device comprises a platform (2), wherein an adjusting hole (4) is formed in the central area of the platform (2), a plurality of object carrying holes (3) are formed in the periphery of the adjusting hole (4), the object carrying holes (3) are communicated with the adjusting hole (4) through holes, push rods (6) are arranged in the through holes, a pressing plate (5) is arranged at one end, communicated with the object carrying holes (3), of each push rod (6), and the pressing plate (5) is flat;
the pressing block (9) is arranged in the adjusting hole (4), the outer peripheral surface of the pressing block (9) is a conical surface, the conical surface tends to the lower side and tends to the central contraction, so that the pressing block (9) can press the push rod (6), and the push rod (6) has the tendency of moving from the adjusting hole (4) to the object carrying hole (3).
2. A scanning electron microscope stage according to claim 1 wherein: the pressure piece (9) is provided with a plurality of wedge-shaped blocks (8), the wedge-shaped blocks (8) are provided with an inclined surface facing the object carrying hole (3), and the inclined surface approximately tends to be away from the object carrying hole (3) towards the lower side.
3. A scanning electron microscope stage according to claim 2 wherein: the number of the wedge blocks (8) is the same as that of the object carrying holes (3).
4. A scanning electron microscope stage according to claim 2 wherein: one end of the push rod (6) leading to the joint hole (4) is provided with a rolling part (7), the rolling part (7) can be rotatably connected to the push rod (6) relative to the push rod (6), and the rotating axis of the rolling part (7) extends along the horizontal direction.
5. A scanning electron microscope stage according to claim 4 wherein: the rolling part (7) is opposite to the inclined surface of the wedge-shaped block (8).
6. A scanning electron microscope stage according to claim 5 wherein: the rolling part (7) is a rolling bearing.
7. A scanning electron microscope stage according to claim 1 wherein: the adjusting holes (4) are provided with 4 object carrying holes (3) around, and the 4 object carrying holes (3) are evenly spaced in the circumferential direction.
8. A scanning electron microscope stage according to claim 1 wherein: the platform (2) is rectangular and flat.
9. A scanning electron microscope stage according to claim 1 wherein: the platform (2) is provided with a support (1), and the support (1) can enable the lower surface of the platform (2) to be away from the surface on which the scanning electron microscope stage is placed.
10. A scanning electron microscope, characterized by: the scanning electron microscope comprises the scanning electron microscope stage of any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920699593.3U CN209947791U (en) | 2019-05-16 | 2019-05-16 | Scanning electron microscope objective table and scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920699593.3U CN209947791U (en) | 2019-05-16 | 2019-05-16 | Scanning electron microscope objective table and scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209947791U true CN209947791U (en) | 2020-01-14 |
Family
ID=69132902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920699593.3U Expired - Fee Related CN209947791U (en) | 2019-05-16 | 2019-05-16 | Scanning electron microscope objective table and scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209947791U (en) |
-
2019
- 2019-05-16 CN CN201920699593.3U patent/CN209947791U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200114 |
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| CF01 | Termination of patent right due to non-payment of annual fee |