CN206546811U - A kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample - Google Patents

A kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample Download PDF

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Publication number
CN206546811U
CN206546811U CN201720327056.7U CN201720327056U CN206546811U CN 206546811 U CN206546811 U CN 206546811U CN 201720327056 U CN201720327056 U CN 201720327056U CN 206546811 U CN206546811 U CN 206546811U
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China
Prior art keywords
sample
blind hole
objective
base station
clamps
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Expired - Fee Related
Application number
CN201720327056.7U
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Chinese (zh)
Inventor
陈志民
王瑞娟
冯丽
王鸿杰
吴奇隆
禹润缜
王朋旭
李书珍
陈永
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Zhengzhou University
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Zhengzhou University
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Priority to CN201720327056.7U priority Critical patent/CN206546811U/en
Application granted granted Critical
Publication of CN206546811U publication Critical patent/CN206546811U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model is related to the sample platform of scanning electronic microscope that the type that can sort clamps irregular small sample, sample fall into disarray can effectively be solved, small sample is difficult to find observation and irregular small sample lays unstable problem, its solve technical scheme be, cylindrical first blind hole is provided with above base station body, first blind hole is internally threaded, edge is provided with the marking on base station body, objective table bottom is provided with cylindrical second blind hole, second blind hole is internally threaded, objective table is through screw rod spinning in the first blind hole of base station body, equipped with thin slice identical and with certain gradient in the middle part of objective table surrounding, the utility model by sample to carry out the sample to be observed rapidly and accurately to find of subregion proper alignment, and irregular small sample is gripped, and do not need conducting resinl for the observation of metal sample, substantially increase the operating efficiency of ESEM, it is the innovation on sample platform of scanning electronic microscope.

Description

A kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample
Technical field
The utility model is related to ESEM sample stage, and particularly a kind of type that sorts clamps sweeping for irregular small sample Retouch electron microscopic sample platform.
Background technology
ESEM is a kind of new electronic instrument, is that one kind utilizes electron beam scanning sample surfaces to obtain sample The electron microscope of information, its spy such as have sample preparation simple, wide multiplication factor adjustable extent, image high resolution, the depth of field big Point.For decades, ESEM has been widely used in the field of the subjects such as biology, medical science, metallurgy, and promoting respectively has Close the development of subject.One important feature of ESEM is that the depth of field is big, image richness third dimension, and the depth of focus of ESEM is than transmission Electron microscope is big 10 times, hundred times bigger than light microscope.Because image depth is big, therefore gained scanning electron image is rich in vertical Body-sensing, with three-dimensional configuration, using the teaching of the invention it is possible to provide the information more much more than other microscopes, this feature is very valuable to user. Fracture apperance shown by ESEM is from profound level, and the essence of Materials Fracture is presented in the angle of the high depth of field, teaching, scientific research and In production, there are irreplaceable, the analysis of analysis, cause of accident and sentencing for process rationality in Materials Fracture reason It is a strong means in terms of fixed.
Sample stage is the indispensable appurtenances of SEM, and it is to carry sample.However, current scanline Electronic Speculum Multiplication factor it is general be at least all more than 10 times, it is accurate fixed to be so difficult to for the tiny sample on sample stage in observation Position, and presently used sample stage sample put it is more chaotic, more increase find sample difficulty, further for irregular sample Product are difficult to lay firm, have a strong impact on later observations, greatly reduce the operating efficiency of SEM.Therefore, scan Electronic Speculum is urgent problem to be solved with the innovation and improvement of sample stage.
The content of the invention
For above-mentioned situation, to solve the defect of prior art, the purpose of the utility model, which is just to provide one kind, to sort Type clamps the sample platform of scanning electronic microscope of irregular small sample, can effectively solve sample fall into disarray, and small sample is difficult to find observation Unstable problem is laid with irregular small sample.
The technical scheme that the utility model is solved is, including base station body, objective table and screw rod, and circle is provided with above base station body The blind hole of cylindricality first, the first blind hole is internally threaded, and edge is provided with the marking on base station body, and objective table bottom is set There is cylindrical second blind hole, the second blind hole is internally threaded, objective table in the first blind hole of base station body, is carried through screw rod spinning Equipped with thin slice identical and with certain gradient in the middle part of thing platform surrounding.
The utility model to by sample carry out the sample to be observed with rapidly and accurately finding of subregion proper alignment, and Irregular small sample is gripped, and conducting resinl is not needed for the observation of metal sample, is simplified to a certain extent Operating process, substantially increases the operating efficiency of ESEM, is the innovation on sample platform of scanning electronic microscope.
Brief description of the drawings
Fig. 1 is structural front view of the present utility model(Complete section).
Fig. 2 is base station body structure top view of the present utility model.
Fig. 3 is carrier structure top view of the present utility model.
Embodiment
Embodiment of the present utility model is described in further detail below in conjunction with accompanying drawing.
Provided by Fig. 1-3, the utility model includes base station body, objective table and screw rod, base station body 1 is provided with cylinder above First blind hole 2, the first blind hole 2 is internally threaded, and edge is provided with the marking 7 on base station body 1, the bottom of objective table 4 is set Cylindrical second blind hole 5 is equipped with, the second blind hole 5 is internally threaded, objective table 4 is through the spinning of screw rod 3 in the first blind of base station body 1 In hole 2, equipped with thin slice 6 identical and with certain gradient in the middle part of the surrounding of objective table 4.
In order to ensure using effect, the first described blind hole 2 has identical 9, and base station body 1 is provided centrally with 1, along base The even circumferential of stage body 1 is provided with 8, and objective table 4 has identical 9, is corresponded with the first blind hole 2.
Described base station body 1 is the circle being made up of brass.
Described the first blind hole 2, the size of the second blind hole 5, diameter are identical.
The described marking 7 is triangle, is printed off by mould, to indicate sample placing direction.
Described screw rod 3 is the cylinder that is made of brass, and two ends are respectively arranged with external screw thread, respectively with the first blind hole 2, The internal thread of second blind hole 5 matches.
Described objective table 4 is the square body that stainless steel is made, and corner is in arc-shaped transition.
Described thin slice 6 is elastic stainless steel material, and gradient is 30-60 degree(With the angle of objective table 4), and top has small Projection, by resistance spot welding on objective table 4, to clamp irregular small sample.
Applicant is it is noted that a kind of above-mentioned only embodiment provided of the application, is not meant to limit this Shen Protection domain please, it is every to be made and being belonged to the application substantially identical technical scheme with equivalent or equivalent substitution means The protection domain of the application.
Service condition of the present utility model is that sample is placed on objective table 4, for irregular small sample with stainless Steel thin slice is fixed, while determining that each objective table puts sample type according to the sensing of the triangle marking, then detects sample Pattern, can the sample to be observed of fast searching according to the instruction of the triangle marking in detection process.
The utility model can by nine blind holes and objective table of base station body it can be seen from said structure and working condition Base station body is divided into nine regions to lay sample, and according to the direction indication of the triangle marking, just can fast be correctly found Sample is observed, it is to avoid the sample chaotic time not spent by easy-to-search, simultaneously for irregular small sample, stainless steel Thin slice plays certain effect that grips, and does not need conducting resinl for the observation of metal sample, easy for installation simple, and one Determine to simplify operating process in degree, substantially increase the operating efficiency of ESEM.
The utility model novel and unique, simple in construction, easily production is convenient to use, whole sample is carried out into subregion The sample to be observed rapidly and accurately to find is arranged together, and irregular small sample is gripped, it is adaptable to each Field emission scanning electron microscope is planted, the operating efficiency of ESEM is substantially increased, is the innovation on sample platform of scanning electronic microscope, has Good economic and social benefit.

Claims (8)

1. a kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample, including base station body, objective table and screw rod, its It is characterised by, base station body (1) is provided with cylindrical first blind hole (2) above, and the first blind hole (2) is internally threaded, base station body (1) edge is provided with the marking (7) on, objective table (4) bottom is provided with cylindrical second blind hole (5), the second blind hole (5) It is internally threaded, objective table (4) is interior in the first blind hole (2) of base station body (1) through screw rod (3) spinning, in objective table (4) surrounding Portion is equipped with thin slice (6) identical and with certain gradient.
2. the type according to claim 1 that sorts clamps the sample platform of scanning electronic microscope of irregular small sample, it is characterised in that Described the first blind hole (2) has identical 9, and base station body (1) is provided centrally with 1, is provided with along base station body (1) even circumferential 8, objective table (4) has identical 9, is corresponded with the first blind hole (2).
3. the type according to claim 1 that sorts clamps the sample platform of scanning electronic microscope of irregular small sample, it is characterised in that Described base station body (1) is the circle being made up of brass.
4. the type according to claim 1 that sorts clamps the sample platform of scanning electronic microscope of irregular small sample, it is characterised in that Described the first blind hole (2), the second blind hole (5) size, diameter are identical.
5. the type according to claim 1 that sorts clamps the sample platform of scanning electronic microscope of irregular small sample, it is characterised in that The described marking (7) is triangle, is printed off by mould, to indicate sample placing direction.
6. the type according to claim 1 that sorts clamps the sample platform of scanning electronic microscope of irregular small sample, it is characterised in that Described screw rod (3) is the cylinder that brass is made, and two ends are respectively arranged with external screw thread, respectively with the first blind hole (2), second Blind hole (5) internal thread matches.
7. the type according to claim 1 that sorts clamps the sample platform of scanning electronic microscope of irregular small sample, it is characterised in that Described objective table (4) is the square body that stainless steel is made, and corner is in arc-shaped transition.
8. the type according to claim 1 that sorts clamps the sample platform of scanning electronic microscope of irregular small sample, it is characterised in that Described thin slice (6) is elastic stainless steel material, is 30-60 degree with objective table (4) angle, and small projection is arranged at top, passes through electricity Resistance point is welded on objective table (4).
CN201720327056.7U 2017-03-30 2017-03-30 A kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample Expired - Fee Related CN206546811U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720327056.7U CN206546811U (en) 2017-03-30 2017-03-30 A kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720327056.7U CN206546811U (en) 2017-03-30 2017-03-30 A kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample

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CN206546811U true CN206546811U (en) 2017-10-10

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112147167A (en) * 2020-11-05 2020-12-29 中国科学院地质与地球物理研究所 Scanning electron microscope's geological sample fixing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112147167A (en) * 2020-11-05 2020-12-29 中国科学院地质与地球物理研究所 Scanning electron microscope's geological sample fixing device

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20171010

Termination date: 20180330

CF01 Termination of patent right due to non-payment of annual fee