CN206546812U - One kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane - Google Patents

One kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane Download PDF

Info

Publication number
CN206546812U
CN206546812U CN201720327057.1U CN201720327057U CN206546812U CN 206546812 U CN206546812 U CN 206546812U CN 201720327057 U CN201720327057 U CN 201720327057U CN 206546812 U CN206546812 U CN 206546812U
Authority
CN
China
Prior art keywords
sample
irregular
stage body
electronic microscope
scanning electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201720327057.1U
Other languages
Chinese (zh)
Inventor
陈志民
王瑞娟
吴奇隆
冯丽
王鸿杰
王朋旭
禹润缜
李书珍
陈永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhengzhou University
Original Assignee
Zhengzhou University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhengzhou University filed Critical Zhengzhou University
Priority to CN201720327057.1U priority Critical patent/CN206546812U/en
Application granted granted Critical
Publication of CN206546812U publication Critical patent/CN206546812U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)

Abstract

The utility model is related to for the irregular sample platform of scanning electronic microscope of sample stationary plane, the irregular sample of end face, which can effectively be solved, to be placed, or place and unstable cause image blur, the problem of can not even observing, its solve technical scheme be, including stage body, the rib crossed one another in " well " font is provided with stage body, stage body is divided into several interval by rib, irregular groove is provided with each interval, plasticine is filled with groove, the utility model structure novel and unique, advantages of simple, easy processing, cost is low, suitable for a variety of ESEMs, it is easy to fix the sample fixation irregular sample of end face, it is easy for installation simple, sample fixation and imaging effect is good, reduce the preparation difficulty of sample, substantially increase the operating efficiency of ESEM, it is the innovation on sample platform of scanning electronic microscope.

Description

One kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane
Technical field
The utility model is related to sample platform of scanning electronic microscope, particularly a kind of to be used for the irregular ESEM of sample stationary plane Sample stage.
Background technology
ESEM is a kind of new electronic optical instrument, and it has, and sample preparation is simple, multiplication factor adjustable extent is wide, figure The high resolution of picture, the features such as the depth of field is big.For decades, ESEM has been widely used in biology, medical science, metallurgy etc. In the field of subject, each development about subject is promoted.Another important feature of ESEM is that the depth of field is big, and image richness is vertical Body-sensing, the depth of focus of ESEM is bigger than transmission electron microscope 10 times, hundred times bigger than light microscope.Due to image depth Greatly, thus gained scanning electron picture is rich in third dimension, with three-dimensional configuration, using the teaching of the invention it is possible to provide the information more much more than other microscopes, This feature is very valuable to user.
Sample stage is one of critical component of SEM, it to carry sample, and by optical system into Local feature as characterizing sample.However, because the end face of some samples is irregular, so that can not be stably placed common Sample stage on, therefore, the innovation and improvement of sample platform of scanning electronic microscope are urgent problems.
The content of the invention
For above-mentioned situation, to solve the defect of prior art, the purpose of the utility model, which is just to provide one kind, is used for sample The irregular sample platform of scanning electronic microscope of product stationary plane, can effectively solve the irregular sample of end face can not place, or place not Image blur steadily is caused, the problem of can not even observing.
The technical scheme that the utility model is solved is, including stage body, is provided with and is crossed one another in " well " font on stage body Stage body is divided into several interval by rib, rib, is provided with each interval in irregular groove, groove and is filled with rubber Mud.
The utility model structure novel and unique, advantages of simple, easy processing, cost is low, it is adaptable to a variety of ESEMs, is easy to Fixed sample fixes the irregular sample of end face, easy for installation simple, sample fixation and imaging effect is good, reduces sample Preparation difficulty, substantially increase the operating efficiency of ESEM, be the innovation on sample platform of scanning electronic microscope.
Brief description of the drawings
Fig. 1 is structure top view of the present utility model.
Fig. 2 for the utility model Fig. 1 A-A to sectional view.
Embodiment
Embodiment of the present utility model is described in further detail below in conjunction with accompanying drawing.
Provided by Fig. 1-2, the utility model includes being provided with the rib crossed one another in " well " font on stage body, stage body 1 3, stage body 1 is divided into several interval by rib 3, is provided with each interval in irregular groove 2, groove 2 and is filled with rubber Skin mud 4.
In order to ensure using effect, described stage body is circular or square.
The described quantity of groove 2 has 9, is split to form according to the rib 3 on stage body 1 in " well " font.
Described groove 2 has certain depth, and thickness of the depth less than stage body 1 of groove.
The described depth of groove 2 is the 1/4 to 3/4 of the thickness of stage body 1.
Described groove 2 is the gully shape for being uneven, crossing one another.
Applicant is it is noted that a kind of above-mentioned only embodiment provided of the application, is not meant to limit this Shen Protection domain please, it is every to be made and being belonged to the application substantially identical technical scheme with equivalent or equivalent substitution means The protection domain of the application.
Service condition of the present utility model is to place appropriate plasticine in groove 2 first, then fixes scanning sample On plasticine, and with conductive gemel connection sample and stage body groove, rib, sample observation face is set to be in level.Groove 2 is due to being The gully shape with certain depth be uneven, crossed one another, so for some irregular small samples, can directly press from both sides Fixation is held, metal sample is then directly inserted into plasticine, it is no longer necessary to conducting resinl, can be with by said structure and working condition Find out, the mode of irregular scanning sample end face can be fixed by using plasticine, is effectively saved in scanning process because of fixed sample Time needed for product, improve the operating efficiency of ESEM and reduce the preparation difficulty of sample.
The utility model structure novel and unique, advantages of simple, easy processing, cost is low, it is adaptable to a variety of ESEMs, is used to Sample is subjected to the sample to be observed rapidly and accurately to find of subregion proper alignment, and irregular small sample is pressed from both sides Fixation is held, and conducting resinl is not needed for the observation of metal sample, easy to use, simple to operate, sample fixation and imaging Effect is good, reduces the preparation difficulty of sample, substantially increases the operating efficiency of ESEM, is on sample platform of scanning electronic microscope Innovation, with good economic and social benefit.

Claims (6)

1. one kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane, including stage body, it is characterised in that on stage body (1) The rib (3) crossed one another in " well " font is provided with, stage body (1) is divided into several interval by rib (3), it is each interval interior It is provided with irregular groove (2), groove (2) and is filled with plasticine (4).
2. according to claim 1 be used for the irregular sample platform of scanning electronic microscope of sample stationary plane, it is characterised in that described Stage body to be circular or square.
3. according to claim 1 be used for the irregular sample platform of scanning electronic microscope of sample stationary plane, it is characterised in that described Groove (2) quantity have 9, according to being split to form on stage body (1) in the rib (3) of " well " font.
4. according to claim 1 be used for the irregular sample platform of scanning electronic microscope of sample stationary plane, it is characterised in that described Groove (2) have certain depth, and groove depth be less than stage body (1) thickness.
5. according to claim 1 be used for the irregular sample platform of scanning electronic microscope of sample stationary plane, it is characterised in that described Groove (2) depth be stage body (1) thickness 1/4 to 3/4.
6. according to claim 1 be used for the irregular sample platform of scanning electronic microscope of sample stationary plane, it is characterised in that described Groove (2) be the gully shape that is uneven, crosses one another.
CN201720327057.1U 2017-03-30 2017-03-30 One kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane Expired - Fee Related CN206546812U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720327057.1U CN206546812U (en) 2017-03-30 2017-03-30 One kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720327057.1U CN206546812U (en) 2017-03-30 2017-03-30 One kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane

Publications (1)

Publication Number Publication Date
CN206546812U true CN206546812U (en) 2017-10-10

Family

ID=59996191

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720327057.1U Expired - Fee Related CN206546812U (en) 2017-03-30 2017-03-30 One kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane

Country Status (1)

Country Link
CN (1) CN206546812U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108346552A (en) * 2017-11-15 2018-07-31 华东师范大学 Scanning electron microscope 3-D view reconstructs Special sample table storage device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108346552A (en) * 2017-11-15 2018-07-31 华东师范大学 Scanning electron microscope 3-D view reconstructs Special sample table storage device
CN108346552B (en) * 2017-11-15 2019-07-19 华东师范大学 Scanning electron microscope 3-D image reconstructs Special sample table storage device

Similar Documents

Publication Publication Date Title
CN203312249U (en) Clamping type section and surface sample SEM sample bench
EP2075821A3 (en) Sample holder, method for observation and inspection, and apparatus for observation and inspection
CN206546812U (en) One kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane
EP2665083A3 (en) Scanning microscope having an adaptive scan
WO2014105304A3 (en) Method and apparatus for conducting automated integrated circuit analysis
Vergès et al. The gigapixel image concept for graphic SEM documentation. Applications in archeological use-wear studies
EP2887306A3 (en) Image processing method and apparatus
CN102636507A (en) SEM-based method for qualitative and quantitative analysis of TiN inclusions in steel
EP1986155A3 (en) Specimen analysis and acicular region analyzer
US11430130B2 (en) Image processing method and computer-readable recording medium having recorded thereon image processing program
CN203312250U (en) Multi-angle tightening type SEM sample bench
CN103969472A (en) In situ observation device and method of pitting forming process
CN102540444B (en) Sample observation surface flattening device for microscope and sample flattening method
EP2645692A3 (en) Image processing device, image processing method and apparatus
CN206546811U (en) A kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample
KR20110012456A (en) Method of making conductive cold mounting specimen for sem
CN211100539U (en) Sample loading device for transmission electron microscope plasma cleaning instrument
CN209447760U (en) A kind of scanning electron microscope sample stage for observing sample fracture
Parikesit et al. Quantitative low-cost webcam-based microscopy
CN204700199U (en) A kind of tilted back type cohoront machine apparatus for shaping
CN209055746U (en) It is a kind of with the Novel glass slide for checking stereoscopic effect
CN203101425U (en) Sample stage for scanning various sample sections by using atomic force microscope
CN204188539U (en) A kind of checkout equipment of metal picture frame wire rod
CN103217381A (en) High rank coal maceral observation method
CN209927752U (en) Fixing device for semi-cylindrical section sample of scanning electron microscope

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20171010

Termination date: 20180330

CF01 Termination of patent right due to non-payment of annual fee