CN108346552B - Special Sample Stage Storage Device for Scanning Electron Microscope 3D Image Reconstruction - Google Patents

Abstract

The invention discloses a kind of scanning electron microscope 3-D images to reconstruct Special sample table storage device, including a bracket, and the bracket includes plate face and stabilizer blade, and the plate face is equipped with sample stage hole；Described device further includes sample stage set, first the bar portion of scanning electron microscope 3-D image reconstruct Special sample table is inserted into the sample stage set when use, then sample stage set is inserted into the sample stage hole again, so that the scanning electron microscope 3-D image reconstruct Special sample table is fixed on the bracket, the scanning electron microscope 3-D image reconstruct Special sample table storage device further includes the sample stage box of the receiving bracket.Scanning electron microscope 3-D image reconstruct Special sample table storage device of the invention saves scanning electron microscope 3-D image and reconstructs Special sample table, not only carrying and convenient transportation, but also dry environment can be provided for sample, while can be to avoid the pollution of micronic dust.

Description

Special Sample Stage Storage Device for Scanning Electron Microscope 3D Image Reconstruction

technical field

The invention relates to the field of scanning electron microscopes, in particular to a special sample stage storage device for three-dimensional image reconstruction of scanning electron microscopes.

Background technique

Scanning electron microscope (SEM), the full name of scanning electron microscope (scanning electron microscope), is an electron microscope that uses an electron beam to scan the surface of a sample to obtain sample information. It produces high-resolution images of the sample surface in three dimensions, and scanning electron microscopy can be used to identify the surface structure of the sample. It consists of three parts: vacuum system, electron beam system and imaging system.

Scanning electron microscope three-dimensional image reconstruction technology is a 3D imaging technology. It can realize in-situ observation of samples in low vacuum or ambient field emission scanning electron microscopy, and automatically acquire ultra-fine 3D structures. During the observation process, the sample needs to be ultra-thin sectioned, and then observed layer by layer, and the obtained pictures are output to the 3D imaging system for 3D image reconstruction. The suitable research fields of 3D image reconstruction technology of scanning electron microscope include: nervous system science, stem cells, embryology, pathology, botany, tissue culture, etc.

After the preparation of the observation sample is completed, the sample needs to be fixed on the special sample stage, and then the sample stage is installed on the sample stage base and placed in the sample chamber for observation. Due to the small size and special structure of the special sample stage for 3D image reconstruction of SEM, the use process is extremely inconvenient.

SUMMARY OF THE INVENTION

In view of the above-mentioned defects of the prior art, the present invention provides a special sample stage storage device for scanning electron microscope three-dimensional image reconstruction. A stage hole; the device also includes a sample stage cover. When in use, first insert the rod of the special sample stage for scanning electron microscope three-dimensional image reconstruction into the sample stage cover, and then insert the sample stage cover into the sample stage hole inside, so that the special sample stage for three-dimensional image reconstruction of the scanning electron microscope is fixed on the bracket.

Further, the sample stage holes are blind holes; preferably, the number of the sample stage holes is more than 6; more preferably, it is more than 10.

Further, the orifice edge of the sample stage hole is chamfered.

Further, the device includes a sample stage set, and the sample stage set includes a plurality of sample stage sets with the same outer diameter and different inner diameters. The inner diameter of each sample stage cover is adapted to a specific type of special sample stage for 3D image reconstruction of scanning electron microscopes with different diameter rods.

Further, the depth of the sample stage cover is equal to the rod portion of the special sample stage for SEM three-dimensional image reconstruction, and the length of the sample stage cover is greater than the depth of the sample stage hole. Preferably, the width of the sample stage cover is greater than the width of the head of the sample stage dedicated to reconstructing three-dimensional images of the scanning electron microscope.

Further, the material of the sample stage cover is rubber, silica gel, or plastic.

Further, the apparatus further includes a sample stage box for accommodating the support.

Further, the board surface of the support is further provided with ventilation holes, and the lower surface of the board surface is provided with a layer of polytetrafluoroethylene film.

Further, the sample stage box includes a box body and a box cover that cooperates with the box body and can be sealed and connected to the box body, the inner wall of the box body has a ring of convex edges, and a a sealing gasket; a column is arranged in the middle of the plate surface of the bracket, and a platform is arranged at the top of the column; when the bracket is placed in the sample stage box, the edge of the lower surface of the plate surface abuts against the The sealing gasket is closed, and the box cover presses the platform inwardly, so that the lower surface of the board surface is pressed against the sealing gasket.

Further, the box cover is provided with a vacuum pumping valve.

Further, the box cover is provided with a handle.

technical effect

The storage device for the special sample stage for scanning electron microscope three-dimensional image reconstruction of the present invention stores the special sample stage for scanning electron microscope three-dimensional image reconstruction, which is not only convenient to carry and transport, but also can provide a dry environment for the sample and avoid dust pollution.

Description of drawings

Fig. 1 is a schematic diagram of the structure of a special sample stage for scanning electron microscope three-dimensional image reconstruction;

2 is a schematic diagram of a stent structure according to a preferred embodiment of the present invention;

Fig. 3 is a schematic view of the enlarged structure of a special sample stage for SEM three-dimensional image reconstruction and a sample stage hole;

4 is a schematic structural diagram of a special sample stage storage device for scanning electron microscope three-dimensional image reconstruction according to a preferred embodiment of the present invention;

FIG. 5 is a schematic structural diagram of a sample stage box according to a preferred embodiment of the present invention.

Detailed ways

Example 1

As shown in FIG. 1, the structure of the special sample stage 1 for scanning electron microscope three-dimensional image reconstruction is basically a long rod, including a head 11 and a rod 12, wherein the top surface of the head 11 is flat and is set to load the sample, typically Such as Gatan 3View Pin type sample stage. The special sample stage for 3D image reconstruction of SEM is small in size and has a long rod shape, so it is very easy to dump when the sample is loaded during use, and the general biological samples have strict requirements on the storage environment, which leads to the use and storage. Extremely inconvenient.

As shown in FIG. 2 and FIG. 3 , the present embodiment provides a special sample stage storage device for scanning electron microscope three-dimensional image reconstruction. The device includes a bracket 2 . The plate surface 21 is provided with a sample stage hole 211 for accommodating the special sample stage 1 for 3D image reconstruction of SEM; the device further includes a sample stage cover 3, and the special sample stage for 3D image reconstruction of SEM is used first. The rod portion 12 of 1 is inserted into the sample stage cover 3, and then the sample stage cover 3 is inserted into the sample stage hole 211, so that the special sample stage 1 for scanning electron microscope three-dimensional image reconstruction is fixed on the bracket 2 superior. The outer diameter of the sample stage cover 3 is compatible with the inner diameter of the sample stage hole 211 . The outer diameter of the sample stage cover 3 is relatively fixed. The inner diameter of the sample stage cover 3 is compatible with the rod portion 12 of the special sample stage 1 for scanning electron microscope three-dimensional image reconstruction. Since the special sample stage 1 for scanning electron microscope three-dimensional image reconstruction may have different specifications and models, the outer diameter of the rod portion is different. Therefore, the sample stage covers 3 in this embodiment may include multiple types, each of which has the same outer diameter (which is compatible with the inner diameter of the sample stage hole 211 ), and different inner diameters, which are respectively suitable for specific models of Special sample stage for 3D image reconstruction of scanning electron microscope. Different types of sample stage covers 3 are respectively suitable for a specific type of special sample stage for 3D image reconstruction of SEM. In the process of use, the special sample stage for 3D image reconstruction of scanning electron microscope of different specifications and models can be fixed on the bracket only by replacing different sample stage covers.

In this embodiment, the sample stage holes 211 are blind holes; the number of the sample stage holes 211 is multiple, for example, more than 6; for example, more than 10. In order to facilitate insertion, the sample stage hole 211 and the edge of the aperture of the sample stage cover 3 can be set as a chamfered structure. During use, the special sample stage 1 for scanning electron microscope three-dimensional image reconstruction can be fixed on the bracket 2. When in use, for example, when the sample needs to be loaded, the special sample stage 1 for scanning electron microscope three-dimensional image reconstruction can be combined with the sample stage cover 3. When removed, since the outer surface of the rod portion 12 is covered with the sample stage cover 3 with a larger diameter, it is more convenient to hold, and since the weight of the sample stage cover 3 lowers the center of gravity, the vertical placement is more stable.

In this embodiment, the depth of the sample stage cover 3 is equal to the rod portion 12 of the special sample stage 1 for scanning electron microscope three-dimensional image reconstruction, and the depth of the sample stage hole 211 is the length of the sample stage cover 3 2/3 of . The width of the sample stage cover 3 is greater than or equal to the width of the head 11 of the special sample stage 1 for three-dimensional image reconstruction of the scanning electron microscope. The material of the sample stage cover 3 can be rubber, silica gel, metal or plastic, etc., preferably silica gel. Through the sample stage cover 3 , the special sample stage 1 for scanning electron microscope three-dimensional image reconstruction can be more stably fixed on the bracket 2 .

Example 2

For the convenience of carrying and transportation, as shown in FIG. 4 and FIG. 5 , the special sample stage storage device for scanning electron microscope three-dimensional image reconstruction provided in this embodiment further includes a sample stage box 4 accommodating the bracket 2 . In this embodiment, the board surface 21 of the bracket 2 is further provided with a ventilation hole 212 , the ventilation hole 212 is a through hole penetrating the board surface 21 , and the lower surface of the board surface 21 is provided with a layer of Tetrafluoroethylene film 213. The polytetrafluoroethylene film 213 is a breathable and watertight film, and is sealed under the ventilation holes 212 to play the role of breathable and dustproof. In other embodiments, other waterproof breathable membranes may also be used.

The sample stage box 4 includes a box body 41 and a box cover 42 that cooperates with the box body 41 and can be sealed and connected to the box body 41. The inner wall of the box body 41 has a ring of convex edges 411. A sealing gasket 412 is arranged on the edge 411; a column 214 is arranged in the middle of the plate surface 21 of the bracket 2, and a platform 2141 is arranged at the top of the column 214; when the bracket 2 is placed in the sample stage box 4, The edge of the lower surface of the board surface 21 (outside of the legs 22 ) is in contact with the sealing gasket 412 . The height of the platform 2141 is slightly higher than the box body 41 . When the box cover 42 is closed, the box cover 42 is tightened inward. Press the platform 2141 , so that the lower surface of the board surface 21 is pressed against the sealing gasket 412 . The board surface 21 divides the inner space of the box body 41 into two layers: the upper and lower layers. At the same time, the upright column 214 can also be used as a handle for extracting the bracket 2 . In this embodiment, a sealing gasket is arranged between the box cover 42 and the box body 41 , and the box cover 42 can be fastened on the box body 41 to form a fully sealed structure.

A water-absorbing material 5 such as a desiccant can be placed at the bottom of the lower layer of the box body 41 to keep the inside of the sample stage box 4 dry. Due to the existence of the ventilation holes 212, the water vapor on the upper layer of the bracket 2 can also be absorbed by the water-absorbing material 5, while the board surface 21 A layer of PTFE membrane 213 with waterproof and breathable function is arranged on the lower surface of the bottom surface, so that the fine dust contained in the water-absorbing material 5 cannot enter the upper layer, preventing the sample on the special sample stage 1 for scanning electron microscope three-dimensional image reconstruction from being microscopically damaged. dust pollution.

In this embodiment, the box cover 42 is further provided with a vacuum pumping valve 421 , and the sample stage box 4 can be evacuated through the vacuum pumping valve 421 . A handle 422 can also be provided on the box cover 42, which is convenient to carry. During use, those skilled in the art can place the water-absorbing material 5 in the sample stage box 4 to keep the inside of the sample stage box 4 dry according to the situation, or directly vacuumize the sample stage box 4 under conditions. .

During the research, the inventors found that after the sample preparation is completed, the sample loaded on the special sample stage for 3D image reconstruction of the scanning electron microscope is very easy to absorb water and deform. The general water-absorbing material contains a large amount of fine dust, which can easily cause contamination of the sample. Using the sample stage box of the present invention to store the special sample stage for scanning electron microscope three-dimensional image reconstruction is not only convenient to carry and transport, but also can provide a dry environment for the sample, and can avoid the pollution of fine dust.

The preferred embodiments of the present invention have been described above in detail. It should be understood that those skilled in the art can make many modifications and changes according to the concept of the present invention without creative efforts. Therefore, all technical solutions that can be obtained by those skilled in the art through logical analysis, reasoning or limited experiments on the basis of the prior art according to the concept of the present invention shall fall within the protection scope determined by the claims.

Claims (7)

1. a kind of scanning electron microscope 3-D image reconstructs Special sample table storage device, which is characterized in that the scanning electron microscope is three-dimensional Image reconstruction Special sample table is elongated rod shape, including head and bar portion；The scanning electron microscope 3-D image reconstructs Special sample table Storage device includes a bracket, and the bracket includes plate face and stabilizer blade, and the plate face is equipped with sample stage hole；Described device further includes The bar portion of scanning electron microscope 3-D image reconstruct Special sample table is first inserted into the sample stage set when use by sample stage set It is interior, then sample stage set is inserted into the sample stage hole again, so that the scanning electron microscope 3-D image reconstructs dedicated sample Sample platform is fixed on the bracket；

Wherein, described device includes sample stage set group, and the sample stage set group includes that the different sample of a variety of outer diameter same inner diameters is flat The depth of platform set, the sample stage set is equal with the scanning electron microscope 3-D image reconstruct bar portion of Special sample table, and institute The length for stating sample stage set is greater than the depth in the sample stage hole；

The scanning electron microscope 3-D image reconstruct Special sample table storage device further includes the sample stage box of the receiving bracket； The sample stage box includes box body and is sealably coupled with what the box body cooperated in the box cover of the box body, the box body Inner wall has a circle convex edge, and the convex edge is equipped with a seal washer；A column, institute are equipped in the middle part of the plate face of the bracket Column top is stated equipped with a platform；After the bracket is put into the sample stage box, the lower surface edge portion of the plate face is abutted In the seal washer, being closed the box cover, then the box cover inwardly presses the platform, so that the following table of the plate face Face is pressed on the seal washer；

Also, the plate face of the bracket is additionally provided with venthole, and the lower surface of the plate face is equipped with a strata tetrafluoroethylene.

2. scanning electron microscope 3-D image as described in claim 1 reconstructs Special sample table storage device, which is characterized in that described Sample stage hole is blind hole.

3. scanning electron microscope 3-D image as described in claim 1 reconstructs Special sample table storage device, which is characterized in that described The width of sample stage set is greater than the width on scanning electron microscope 3-D image reconstruct Special sample table head.

4. scanning electron microscope 3-D image as described in claim 1 reconstructs Special sample table storage device, which is characterized in that described The quantity in sample stage hole is 6 or more.

5. scanning electron microscope 3-D image as claimed in claim 4 reconstructs Special sample table storage device, which is characterized in that described The quantity in sample stage hole is 10 or more.

6. scanning electron microscope 3-D image as described in claim 1 reconstructs Special sample table storage device, which is characterized in that described The material of sample stage set is rubber, silica gel, metal or plastics.

7. scanning electron microscope 3-D image as described in claim 1 reconstructs Special sample table storage device, which is characterized in that described Box cover is equipped with vacuum extraction valve.