CN108346552B - Scanning electron microscope 3-D image reconstructs Special sample table storage device - Google Patents
Scanning electron microscope 3-D image reconstructs Special sample table storage device Download PDFInfo
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- CN108346552B CN108346552B CN201711126803.1A CN201711126803A CN108346552B CN 108346552 B CN108346552 B CN 108346552B CN 201711126803 A CN201711126803 A CN 201711126803A CN 108346552 B CN108346552 B CN 108346552B
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- China
- Prior art keywords
- electron microscope
- scanning electron
- sample stage
- sample
- image
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Abstract
The invention discloses a kind of scanning electron microscope 3-D images to reconstruct Special sample table storage device, including a bracket, and the bracket includes plate face and stabilizer blade, and the plate face is equipped with sample stage hole；Described device further includes sample stage set, first the bar portion of scanning electron microscope 3-D image reconstruct Special sample table is inserted into the sample stage set when use, then sample stage set is inserted into the sample stage hole again, so that the scanning electron microscope 3-D image reconstruct Special sample table is fixed on the bracket, the scanning electron microscope 3-D image reconstruct Special sample table storage device further includes the sample stage box of the receiving bracket.Scanning electron microscope 3-D image reconstruct Special sample table storage device of the invention saves scanning electron microscope 3-D image and reconstructs Special sample table, not only carrying and convenient transportation, but also dry environment can be provided for sample, while can be to avoid the pollution of micronic dust.
Description
Technical field
The present invention relates to scanning electron microscope field more particularly to a kind of reconstruct Special sample table storages of scanning electron microscope 3-D image
Device.
Background technique
Scanning electron microscope (SEM), full name scanning electron microscope (scanning electron microscope) are a kind of
The electron microscope of sample message is obtained using electronics beam scanning sample surfaces.It can generate the high-resolution of sample surfaces
Image, and image, in three-dimensional, scanning electron microscope can be used to the surface texture of identification sample.It is made of three parts:
Vacuum system, electron beam system and imaging system.
Scanning electron microscope 3-D image reconfiguration technique is a kind of 3D imaging technique.It can sweep in low vacuum or environment Flied emission
It retouches in Electronic Speculum and realizes to the home position observation of sample, obtain hyperfine 3D structure automatically.During observation, need to surpass sample
Slice, then successively observation, is output to 3D imaging system for the picture of acquisition and carries out 3-D image reconstruct.Scanning electron microscope is three-dimensional
The suitable research field of image reconstruction technique includes: neuroscience, stem cell, embryology, pathology, botany, tissue
Culture etc..
After the completion of sample preparation to be seen, needs for sample to be fixed on Special sample table, then sample stage is installed again
Onto sample pedestal, merging sample room is observed.Since scanning electron microscope 3-D image reconstructs Special sample table small volume, knot
Structure is special, therefore use process is extremely inconvenient.
Summary of the invention
In view of the above drawbacks of the prior art, the present invention provides a kind of scanning electron microscope 3-D images to reconstruct Special sample
Platform storage device, described device include a bracket, and the bracket includes plate face and stabilizer blade, and the plate face is equipped with sample stage hole；Institute
Stating device further includes sample stage set, and the bar portion of scanning electron microscope 3-D image reconstruct Special sample table is first inserted into institute by when use
It states in sample stage set, then sample stage set is inserted into the sample stage hole again, so that the scanning electron microscope 3-D image
It is fixed on the bracket to reconstruct Special sample table.
Further, the sample stage hole is blind hole；Preferably, the quantity in the sample stage hole is 6 or more；More preferably
Ground is 10 or more.
Further, the orifice edge in the sample stage hole is chamfering.
Further, described device includes sample stage set group, the sample stage set group include a variety of outer diameter same inner diameters not
Same sample platform set.Every kind of sample platform set internal diameter respectively with the scanning electron microscope three of the specific model of the bar portion with different-diameter
Image reconstruction Special sample table is tieed up to be adapted.
Further, the bar portion of the depth of the sample stage set and scanning electron microscope 3-D image reconstruct Special sample table
It is equal, and the length of sample stage set is greater than the depth in the sample stage hole.Preferably, the width of the sample stage set is big
Width in scanning electron microscope 3-D image reconstruct Special sample table head.
Further, the material of the sample stage set is rubber, silica gel or plastics etc..
Further, described device further includes the sample stage box of the receiving bracket.
Further, the plate face of the bracket is additionally provided with venthole, and the lower surface of the plate face is equipped with a strata four
Fluoride film.
Further, the sample stage box includes box body and is sealably coupled with what the box body cooperated in the box body
Box cover, the inner wall of the box body has a circle convex edge, and the convex edge is equipped with a seal washer；The plate face of the bracket
Middle part is equipped with a column, and the column top is equipped with a platform；After the bracket is put into the sample stage box, the plate face
Lower surface edge portion is connected to the seal washer, and being closed the box cover, then the box cover inwardly presses the platform, to make
The lower surface for obtaining the plate face is pressed on the seal washer.
Further, the box cover is equipped with vacuum extraction valve.
Further, the box cover is equipped with handle.
Technical effect
Scanning electron microscope 3-D image reconstruct Special sample table storage device of the invention saves scanning electron microscope 3-D image weight
Structure Special sample table, not only carries and convenient transportation, but also dry environment can be provided for sample, while can be to avoid micronic dust
Pollution.
Detailed description of the invention
Fig. 1 is scanning electron microscope 3-D image reconstruct Special sample table structural schematic diagram；
Fig. 2 is the supporting structure schematic diagram of a preferred embodiment of the present invention；
Fig. 3 is the enlarged structure schematic diagram of scanning electron microscope 3-D image reconstruct Special sample table and sample stage hole；
Fig. 4 is the scanning electron microscope 3-D image reconstruct Special sample table storage device of a preferred embodiment of the present invention
Structural schematic diagram；
Fig. 5 is the structural schematic diagram of the sample stage box of a preferred embodiment of the present invention.
Specific embodiment
Embodiment 1
As shown in Figure 1, the structure of scanning electron microscope 3-D image reconstruct Special sample table 1 is essentially elongated rod shape, including head
11 and bar portion 12, wherein the top surface on head 11 is that plane is arranged for load sample, typical such as Gatan 3View Pin type
Sample stage.Scanning electron microscope 3-D image reconstructs the small volume of Special sample table, and is elongated rod shape, therefore in use process
In, after load sample, be very easy to topple over, and general biological sample storage environment is required it is harsh, cause using with
Storage is extremely inconvenient.
As shown in Figures 2 and 3, a kind of scanning electron microscope 3-D image reconstruct Special sample table storage dress provided in this embodiment
It sets, described device includes a bracket 2, and the bracket 2 includes plate face 21 and stabilizer blade 22, and the plate face 21, which is equipped with, accommodates the scanning
The sample stage hole 211 of Electronic Speculum 3-D image reconstruct Special sample table 1；Described device further includes sample stage set 3, first by institute when use
The bar portion 12 for stating scanning electron microscope 3-D image reconstruct Special sample table 1 is inserted into the sample stage set 3, then again by sample stage set
In the 3 insertion sample stage holes 211 so that scanning electron microscope 3-D image reconstruct Special sample table 1 be fixed on it is described
On bracket 2.The outer diameter of the sample stage set 3 and the internal diameter in the sample stage hole 211 are adapted.The outer diameter of the sample stage set 3
Size is relatively fixed.The internal diameter of the sample stage set 3 and the bar portion 12 of scanning electron microscope 3-D image reconstruct Special sample table 1
It is adapted.Since scanning electron microscope 3-D image reconstruct Special sample table 1 may have different specification and model, lead to the outer of bar portion
Diameter difference.Therefore, the sample stage set 3 of the present embodiment may include a variety of, the outer diameter of every kind of sample stage set 3 it is identical (and
The internal diameter in the sample stage hole 211 is adapted), and internal diameter is different, is respectively suitable for the scanning electron microscope 3-D image of specific model
Reconstruct Special sample table.The scanning electron microscope 3-D image reconstruct that different types of sample stage set 3 is respectively suitable for specific model is special
Use sample stage.In use process, it is only necessary to different sample stage sets is replaced, it can be by the scanning electron microscope of different size and model three-dimensional
Image reconstruction Special sample table is fixed on bracket.
In this present embodiment, the sample stage hole 211 is blind hole；The quantity in the sample stage hole 211 is multiple, such as can
To be set as 6 or more；Such as 10 or more.In order to facilitate insertion, the sample stage hole 211 and sample stage can be covered 3
Orifice edge is set as chamfering structure.In use, scanning electron microscope 3-D image Special sample table 1 can be reconstructed to fix
On bracket 2, in use, such as scanning electron microscope 3-D image can be reconstructed 1 He of Special sample table when needing load sample
Sample stage set 3 is removed together, since the outside of bar portion 12 is cased with the sample stage being relatively large in diameter set 3, hold it is more convenient, and
Since the weight of sample stage set 3 has dragged down center of gravity, place vertically more stable.
In the present embodiment, the depth of the sample stage set 3 and the scanning electron microscope 3-D image reconstruct Special sample table 1
Bar portion 12 is equal, and the depth in the sample stage hole 211 is the 2/3 of the length of sample stage set 3.The sample stage set 3
Width be greater than or equal to the scanning electron microscope 3-D image reconstruct Special sample table 1 head 11 width.The sample stage
The material of set 3 can be rubber, silica gel, metal or plastics etc., preferably silica gel.Pass through sample stage set 3, scanning electron microscope three-dimensional figure
As reconstruct Special sample table 1 can be more firm be fixed on bracket 2.
Embodiment 2
In order to carry and convenient transportation, as shown in Figure 4 and Figure 5, scanning electron microscope 3-D image reconstruct provided in this embodiment
Special sample table storage device further includes the sample stage box 4 of the receiving bracket 2.In the present embodiment, the bracket 2 it is described
Plate face 21 is additionally provided with venthole 212, and the venthole 212 is the through-hole for penetrating through the plate face 21, the lower surface of the plate face 21
Equipped with a strata tetrafluoroethylene 213.Polytetrafluoroethylene film 213 is the film of permeable watertight, is sealed in the venthole 212
Below, play the role of ventilation dustproof.In other embodiments, other waterproof ventilated membranes also can be used.
The sample stage box 4 includes box body 41 and is sealably coupled with what the box body 41 cooperated in the box body 41
Box cover 42, the inner wall of the box body 41 have a circle convex edge 411, and the convex edge 411 is equipped with a seal washer 412；The branch
A column 214 is equipped in the middle part of the plate face 21 of frame 2,214 top of column is equipped with a platform 2141；When the bracket 2 is put
After entering the sample stage box 4, the lower surface edge portion (22 outside of stabilizer blade) of the plate face 21 is connected to the seal washer 412,
The height of platform 2141 slightly exceeds box body 41, and being closed the box cover 42, then the box cover 42 inwardly presses the platform 2141,
So that the lower surface of the plate face 21 is pressed on the seal washer 412.Plate face 21 divides the inner space of box body 41
For upper layer and lower layer.Meanwhile column 214 can also be used as the handle for extracting bracket 2.In the present embodiment, in box cover 42 and box body
One seal washer is set between 41, and box cover 42 can be fastened on box body 41 and form all-sealed structure.
The water-absorbent materials such as desiccant 5 can be placed in the lower level floor of box body 41, to keep dry inside sample stage box 4
Dry, due to the presence of venthole 212, the steam on 2 upper layer of bracket can equally be absorbed by water-absorbent material 5, while under plate face 21
Surface is equipped with one layer of polytetrafluoroethylene film 213 with waterproof and breathable effect, and therefore, micronic dust contained in water-absorbent material 5 can not
Into upper layer, it is therefore prevented that scanning electron microscope 3-D image reconstructs the sample on Special sample table 1 by dust pollution.
In the present embodiment, it is additionally provided with vacuum extraction valve 421 in the box cover 42, it can by the vacuum extraction valve 421
To be vacuumized to sample stage box 4.Handle 422 can also be set on the box cover 42, be convenient for carrying.In use, originally
Field technical staff can according to circumstances, in sample stage box 4 place water-absorbent material 5 to keep the drying inside sample stage box 4,
Or vacuumize process directly is carried out to sample stage box 4 in conditional situation.
The present inventor has found in the course of the research, after the completion of sample preparation, loads to the reconstruct of scanning electron microscope 3-D image
Sample on Special sample table is very easy to water suction deformation, and the authenticity of observation result has been seriously affected after sample dampness water suction.
And general water-absorbent material easily makes the pollution of paired samples containing a large amount of micronic dust.It is saved using sample stage box of the invention
Scanning electron microscope 3-D image reconstructs Special sample table, not only carrying and convenient transportation, but also dry ring can be provided for sample
Border, while can be to avoid the pollution of micronic dust.
The preferred embodiment of the present invention has been described in detail above.It should be appreciated that those skilled in the art without
It needs creative work according to the present invention can conceive and makes many modifications and variations.Therefore, all technologies in the art
Personnel are available by logical analysis, reasoning, or a limited experiment on the basis of existing technology under this invention's idea
Technical solution, all should be within the scope of protection determined by the claims.
Claims (7)
1. a kind of scanning electron microscope 3-D image reconstructs Special sample table storage device, which is characterized in that the scanning electron microscope is three-dimensional
Image reconstruction Special sample table is elongated rod shape, including head and bar portion；The scanning electron microscope 3-D image reconstructs Special sample table
Storage device includes a bracket, and the bracket includes plate face and stabilizer blade, and the plate face is equipped with sample stage hole；Described device further includes
The bar portion of scanning electron microscope 3-D image reconstruct Special sample table is first inserted into the sample stage set when use by sample stage set
It is interior, then sample stage set is inserted into the sample stage hole again, so that the scanning electron microscope 3-D image reconstructs dedicated sample
Sample platform is fixed on the bracket；
Wherein, described device includes sample stage set group, and the sample stage set group includes that the different sample of a variety of outer diameter same inner diameters is flat
The depth of platform set, the sample stage set is equal with the scanning electron microscope 3-D image reconstruct bar portion of Special sample table, and institute
The length for stating sample stage set is greater than the depth in the sample stage hole；
The scanning electron microscope 3-D image reconstruct Special sample table storage device further includes the sample stage box of the receiving bracket；
The sample stage box includes box body and is sealably coupled with what the box body cooperated in the box cover of the box body, the box body
Inner wall has a circle convex edge, and the convex edge is equipped with a seal washer；A column, institute are equipped in the middle part of the plate face of the bracket
Column top is stated equipped with a platform；After the bracket is put into the sample stage box, the lower surface edge portion of the plate face is abutted
In the seal washer, being closed the box cover, then the box cover inwardly presses the platform, so that the following table of the plate face
Face is pressed on the seal washer；
Also, the plate face of the bracket is additionally provided with venthole, and the lower surface of the plate face is equipped with a strata tetrafluoroethylene.
2. scanning electron microscope 3-D image as described in claim 1 reconstructs Special sample table storage device, which is characterized in that described
Sample stage hole is blind hole.
3. scanning electron microscope 3-D image as described in claim 1 reconstructs Special sample table storage device, which is characterized in that described
The width of sample stage set is greater than the width on scanning electron microscope 3-D image reconstruct Special sample table head.
4. scanning electron microscope 3-D image as described in claim 1 reconstructs Special sample table storage device, which is characterized in that described
The quantity in sample stage hole is 6 or more.
5. scanning electron microscope 3-D image as claimed in claim 4 reconstructs Special sample table storage device, which is characterized in that described
The quantity in sample stage hole is 10 or more.
6. scanning electron microscope 3-D image as described in claim 1 reconstructs Special sample table storage device, which is characterized in that described
The material of sample stage set is rubber, silica gel, metal or plastics.
7. scanning electron microscope 3-D image as described in claim 1 reconstructs Special sample table storage device, which is characterized in that described
Box cover is equipped with vacuum extraction valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711126803.1A CN108346552B (en) | 2017-11-15 | 2017-11-15 | Scanning electron microscope 3-D image reconstructs Special sample table storage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711126803.1A CN108346552B (en) | 2017-11-15 | 2017-11-15 | Scanning electron microscope 3-D image reconstructs Special sample table storage device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108346552A CN108346552A (en) | 2018-07-31 |
| CN108346552B true CN108346552B (en) | 2019-07-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201711126803.1A Expired - Fee Related CN108346552B (en) | 2017-11-15 | 2017-11-15 | Scanning electron microscope 3-D image reconstructs Special sample table storage device |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111855720A (en) * | 2019-04-26 | 2020-10-30 | 中国科学院广州能源研究所 | Novel frozen scanning electron microscope sample stage and sampling method |
| CN111508807B (en) * | 2020-04-26 | 2022-11-25 | 北京工业大学 | Scanning electron microscope stereo imaging system |
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| CN201142313Y (en) * | 2008-01-17 | 2008-10-29 | 中国热带农业科学院分析测试中心 | Collector of scanning electron microscope example bench |
| CN201876058U (en) * | 2010-11-26 | 2011-06-22 | 攀钢集团钢铁钒钛股份有限公司 | Drying oven for preparing samples |
| CN205091170U (en) * | 2015-11-06 | 2016-03-16 | 中南大学湘雅医院 | Portable biomedical sample TEM system appearance device |
| CN105606849A (en) * | 2016-03-01 | 2016-05-25 | 广州市刑事科学技术研究所 | Diatom test sample box |
| CN106290431A (en) * | 2016-07-21 | 2017-01-04 | 哈尔滨工业大学 | Scanning electron microscope test sample box and utilize its method carrying out testing |
| CN206546812U (en) * | 2017-03-30 | 2017-10-10 | 郑州大学 | One kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane |
-
2017
- 2017-11-15 CN CN201711126803.1A patent/CN108346552B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201142313Y (en) * | 2008-01-17 | 2008-10-29 | 中国热带农业科学院分析测试中心 | Collector of scanning electron microscope example bench |
| CN201876058U (en) * | 2010-11-26 | 2011-06-22 | 攀钢集团钢铁钒钛股份有限公司 | Drying oven for preparing samples |
| CN205091170U (en) * | 2015-11-06 | 2016-03-16 | 中南大学湘雅医院 | Portable biomedical sample TEM system appearance device |
| CN105606849A (en) * | 2016-03-01 | 2016-05-25 | 广州市刑事科学技术研究所 | Diatom test sample box |
| CN106290431A (en) * | 2016-07-21 | 2017-01-04 | 哈尔滨工业大学 | Scanning electron microscope test sample box and utilize its method carrying out testing |
| CN206546812U (en) * | 2017-03-30 | 2017-10-10 | 郑州大学 | One kind is used for the irregular sample platform of scanning electronic microscope of sample stationary plane |
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| CN108346552A (en) | 2018-07-31 |
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Granted publication date: 20190719 Termination date: 20211115 |