CN209447760U - A kind of scanning electron microscope sample stage for observing sample fracture - Google Patents

A kind of scanning electron microscope sample stage for observing sample fracture Download PDF

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Publication number
CN209447760U
CN209447760U CN201920434354.5U CN201920434354U CN209447760U CN 209447760 U CN209447760 U CN 209447760U CN 201920434354 U CN201920434354 U CN 201920434354U CN 209447760 U CN209447760 U CN 209447760U
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China
Prior art keywords
rotary table
sample
groove
electron microscope
scanning electron
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Expired - Fee Related
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CN201920434354.5U
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Chinese (zh)
Inventor
陈永
刘胜新
王靖博
连明洋
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Zhengzhou University
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Zhengzhou University
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Priority to CN201920434354.5U priority Critical patent/CN209447760U/en
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Abstract

The utility model relates to scanning electron microscope sample stage field, provide a kind of scanning electron microscope sample stage for observing sample fracture, can effectively solve common sample platform sample on the broken edge can not be stablized place and caused by sample fall off and the problems such as image blur.Sample stage is made of rotary table and fastening screw, it is arranged on rotary table fluted, each groove is embedded with circular magnet, and groove side is provided with threaded hole, the non-fracture end of sample can be directly placed in corresponding groove according to the different shape of sample, then it is fixed with fastening screw, it is not required to use conductive glue or conductive tape, installation is simple and convenient, and use is reliable and stable, scanning imagery is clear, is the innovation in terms of scanning electron microscope sample stage.

Description

A kind of scanning electron microscope sample stage for observing sample fracture
Technical field
The utility model relates to scanning electron microscope sample stage, especially a kind of scanning electron microscope sample for observing sample fracture Platform.
Background technique
Scanning electron microscope is a kind of novel electronic instrument, it has, and sample preparation is simple, amplification factor adjustable extent is wide, institute is at figure The high resolution of picture, the features such as depth of field is big.For decades, scanning electron microscope has been widely used in metallurgy, biology, medicine etc. In ambit, the development of related discipline is promoted.
The depth of focus of scanning electron microscope decades of times bigger than transmission electron microscope, hundred times bigger than optical microscopy.Due to image The depth of field is big, therefore gained scanning electron image is capable of providing information more more than other microscopes, this feature pair rich in three-dimensional sense User is very valuable.The fracture apperance of sample shown by scanning electron microscope shows material from profound, Gao Jingshen angle The essence of fracture has irreplaceable role in teaching, research and production, disconnected in material using scanning electron microscopic observation fracture Splitting the analysis of reason, the analysis of cause of accident and judgement of process rationality etc. is a strong means.
Sample stage is one of critical component of scanning electron microscope, then it installs to carry sample and enter sample in bracket Product sight chamber passes through the local feature of electronic system imaging representation sample.However, it is necessary to observe the sample of section, especially draw Stretch sample on the broken edge, impact fracture sample is very unstable to be placed on common sample stage, and sample section is in common sample It also needs to be fixed with conductive glue or conductive tape on platform, leading to sample, easily inclination even falls off during observation.Therefore, The convenience of the sample stability during the test and installation that how to promote observation fracture is current technology urgently to be solved Problem.
Summary of the invention
For above situation, for the defect for solving the prior art, the purpose of the utility model is just to provide a kind of observation sample The scanning electron microscope sample stage of product fracture, can effectively solve sample stage can not by the sample with fracture stablize place and caused by sample Pint fall or place it is unstable caused by image blur the problems such as.
The utility model adopts the following technical solution:
A kind of scanning electron microscope sample stage for observing sample fracture, including rotary table, which is characterized in that it is recessed that rotary table is equipped with first Slot, the second groove, third groove, circular magnet is embedded in first groove, the second groove and third groove, and rotary table passes through Fastening screw and the corresponding threaded holes of surrounding, which close, to be fixedly mounted.
The threaded hole of the rotary table periphery shares 6, is centrosymmetric using the center line of rotary table as symmetry axis and is uniformly divided Cloth.
The fastening screw is full flight screw formula, and external end head is provided with a word groove, and fastening screw shares 6, cooperation Threaded hole on rotary table uses.
First groove section is rounded, and depth is 0.5-0.75 times of rotary table, and the first groove shares 2, with rotary table Center line be that symmetry axis is centrosymmetric distribution.
Second groove section is square, and depth is 0.5-0.75 times of rotary table, and the second groove shares 2, with circle The center line of platform is that symmetry axis is centrosymmetric distribution.
The third groove section is rectangle, and depth is 0.5-0.75 times of rotary table, and third groove shares 2, with circle The center line of platform is that symmetry axis is centrosymmetric distribution.
The circular magnet shares 6.
The utility model has the advantage that
The utility model can place multiple samples of different shapes simultaneously, and sample section is scanned, can directly be fixed, It is not required to conductive glue or conductive tape, easy for installation simple, sample fixation and imaging effect is good reduces the system of sample Standby and installation difficulty improves the working efficiency observed using scanning electron microscope, convenient for the observation examination of sample fracture apperance That tests goes on smoothly, and is the innovation on scanning electron microscope sample stage.
Detailed description of the invention
Fig. 1 is a kind of scanning electron microscope sample stage overhead, partial cut-away view for observing sample fracture of the utility model;
Fig. 2 is a kind of face scanning electron microscope sample stage A-A cross-sectional view for observing sample fracture of the utility model;
Fig. 3 is a kind of face scanning electron microscope sample stage B-B cross-sectional view for observing sample fracture of the utility model;
Fig. 4 is a kind of face scanning electron microscope sample stage C-C cross-sectional view for observing sample fracture of the utility model;
Fig. 5 is a kind of scanning electron microscope sample stage usage state diagram for observing sample fracture of the utility model.
Description of symbols: 1, rotary table, 2, fastening screw, the 3, first groove, the 4, second groove, 5, third groove, 6, spiral shell Pit, 7, circular magnet, 8, circular sample, 9, flat sample, 10, square sample.
Specific embodiment
The technical solution of the utility model, but the protection scope of the utility model are described in further detail with reference to the accompanying drawing It is not limited to as described below.
As shown in Figures 1 to 5, a kind of scanning electron microscope sample stage for observing sample fracture, including rotary table 1, feature exists In rotary table 1 is equipped with the first groove 3, the second groove 4, third groove 5, first groove 3, the second groove 4 and third groove 5 It is inside embedded with circular magnet 7, rotary table matches fixed installation with the threaded hole 6 of surrounding by fastening screw 2.
Threaded hole 6 around the rotary table 1 shares 6, is centrosymmetric uniformly by symmetry axis of the center line of rotary table 1 Distribution.
The fastening screw 2 is full flight screw formula, and external end head is provided with a word groove, can be used straight screwdriver by its Rotation, fastening screw 2 share 6, and the threaded hole 6 on rotary table 1 is cooperated to use.
First groove, 3 section is rounded, and depth is 0.5-0.75 times of rotary table 1, and the first groove 3 shares 2, with circle The center line of platform 1 is that symmetry axis is centrosymmetric distribution.
Second groove, 4 section is square, and depth is 0.5-0.75 times of rotary table 1, and the second groove 4 shares 2, with The center line of rotary table 1 is that symmetry axis is centrosymmetric distribution.
5 section of third groove is rectangle, and depth is 0.5-0.75 times of rotary table 1, and third groove 5 shares 2, with The center line of rotary table 1 is that symmetry axis is centrosymmetric distribution.
The circular magnet shares 6, and size can be according to the size adjusting of groove.
In use, the non-fracture end of the sample with fracture is polished flat, it is (flat by sample length direction different cross section shape It is shape, rectangular or round) it is inserted into the groove 3 or groove 4 or groove 5 of rotary table 1 respectively, circular magnet 7 has sample bottom at this time Then fastening screw 2 is tightened until holding out against with straight screwdriver and fixes sample by certain adsorption capacity, and guarantee 6 fastenings The outer end of screw 2 enters in rotary table 1, to guarantee that entire rotary table 1 can smoothly enter into scanning electron microscope bracket.
The utility model scans sample section, can directly fix, and is not required to conductive glue or conductive tape, installation It is convenient and simple, sample can be fixedly secured and imaging effect is good, the preparation difficulty and installation difficulty of sample is reduced, can place simultaneously Circle, flat, rectangular 3 class sample, substantially increase the working efficiency observed using scanning electron microscope, have good economy And social benefit.
Above-described embodiment is the preferable embodiment of the utility model, but the embodiments of the present invention is not by above-mentioned The limitation of embodiment, and made under other any spiritual essence and principle without departing from the utility model change, modify, replacing In generation, simplifies combination, is included within the protection scope of the utility model.

Claims (6)

1. a kind of scanning electron microscope sample stage for observing sample fracture, including rotary table (1), which is characterized in that rotary table (1) upper surface Equipped with the first groove (3), the second groove (4), third groove (5), first groove (3), the second groove (4) and third groove (5) circular magnet (7) are embedded in, rotary table (1) matches fixed installation with the threaded hole (6) of surrounding by fastening screw (2).
2. the scanning electron microscope sample stage of observation sample fracture according to claim 1, which is characterized in that the rotary table (1) peripheral threaded hole (6) shares 6, is centrosymmetric and is uniformly distributed as symmetry axis using the center line of rotary table (1).
3. the scanning electron microscope sample stage of observation sample fracture according to claim 1, which is characterized in that the fastening Screw (2) is full flight screw formula, and external end head is provided with a word groove, and fastening screw (2) shares 6, the spiral shell in cooperation rotary table (1) Pit (6) uses.
4. the scanning electron microscope sample stage of observation sample fracture according to claim 1, which is characterized in that described first is recessed Slot (3) section is rounded, and depth is 0.5-0.75 times of rotary table (1), and the first groove (3) shares 2, with the center of rotary table (1) Line is that symmetry axis is centrosymmetric distribution.
5. the scanning electron microscope sample stage of observation sample fracture according to claim 1, which is characterized in that described second is recessed Slot (4) section is square, and depth is 0.5-0.75 times of rotary table (1), and the second groove (4) shares 2, in rotary table (1) Heart line is that symmetry axis is centrosymmetric distribution.
6. the scanning electron microscope sample stage of observation sample fracture according to claim 1, which is characterized in that the third is recessed Slot (5) section is rectangle, and depth is 0.5-0.75 times of rotary table (1), and third groove (5) shares 2, in rotary table (1) Heart line is that symmetry axis is centrosymmetric distribution.
CN201920434354.5U 2019-04-02 2019-04-02 A kind of scanning electron microscope sample stage for observing sample fracture Expired - Fee Related CN209447760U (en)

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Application Number Priority Date Filing Date Title
CN201920434354.5U CN209447760U (en) 2019-04-02 2019-04-02 A kind of scanning electron microscope sample stage for observing sample fracture

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Application Number Priority Date Filing Date Title
CN201920434354.5U CN209447760U (en) 2019-04-02 2019-04-02 A kind of scanning electron microscope sample stage for observing sample fracture

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CN209447760U true CN209447760U (en) 2019-09-27

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110993475A (en) * 2019-12-05 2020-04-10 山东省分析测试中心 Scanning electron microscope universal rotating sample table for fracture analysis and scanning electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110993475A (en) * 2019-12-05 2020-04-10 山东省分析测试中心 Scanning electron microscope universal rotating sample table for fracture analysis and scanning electron microscope
CN110993475B (en) * 2019-12-05 2020-08-28 山东省分析测试中心 Scanning electron microscope universal rotating sample table for fracture analysis and scanning electron microscope

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Granted publication date: 20190927

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