CN202903575U - Sample stage for angle-adjustable scanning electron microscope - Google Patents

Sample stage for angle-adjustable scanning electron microscope Download PDF

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Publication number
CN202903575U
CN202903575U CN 201220633312 CN201220633312U CN202903575U CN 202903575 U CN202903575 U CN 202903575U CN 201220633312 CN201220633312 CN 201220633312 CN 201220633312 U CN201220633312 U CN 201220633312U CN 202903575 U CN202903575 U CN 202903575U
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China
Prior art keywords
sample
electron microscope
scanning electron
sample stage
stage
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Expired - Fee Related
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CN 201220633312
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Chinese (zh)
Inventor
陈永
刘胜新
赵益弘
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Zhengzhou University
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Zhengzhou University
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Priority to CN 201220633312 priority Critical patent/CN202903575U/en
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Publication of CN202903575U publication Critical patent/CN202903575U/en
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Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a sample stage for an angle-adjustable scanning electron microscope. The sample stage can be used for effectively solving the problem that the formed image is fuzzy as the end surface of a sample cannot be stably placed by the sample stage. The technical scheme for solving the problem is that the sample stage for the angle-adjustable scanning electron microscope comprises a base table body, a fracture sample fixing table body and a supporting rod; the sample stage is characterized in that the fracture sample fixing table body and the supporting rod are arranged on the base table body, wherein one end of the fracture sample fixing table body is connected with one side of the base table body through a first hinge piece to form a first rotary pair; a plurality of hemispherical slots, which are on the same straight line, are uniformly distributed on the middle part of the lower plane of the fracture sample fixing table body; one end of the supporting rod is connected with the other side of the base table body by a second hinge piece to form a second rotary pair; and the other end of the supporting rod is arranged in the hemispherical slots to form an inclined angle adjusting structure of the fracture sample fixing table body. The sample stage for the angle-adjustable scanning electron microscope disclosed by the utility model is novel and unique in structure, simple and reasonable, easy to machine, low in cost, good in imaging effect, and capable of improving the working efficiency of the scanning electron microscope. Moreover, the sample stage is innovative on the sample stage for the scanning electron microscope.

Description

A kind of adjustable-angle scanning electron microscope sample stage
Technical field
The utility model relates to the scanning electron microscope sample stage, particularly a kind of adjustable-angle scanning electron microscope sample stage.
Background technology
A kind of novel electronic optical instrument of scanning electron microscope.It has the characteristics such as sample preparation is simple, the enlargement factor adjustable extent is wide, the resolution of image is high, the depth of field is large.Recent decades, scanning electron microscope has been widely used in the field of the subjects such as biology, medical science, metallurgy, has promoted the development of each Relevant Subjects.
Another important feature of scanning electron microscope is that the depth of field is large, visual rich stereoscopic sensation.Large 10 times than transmission electron microscope of the depths of focus of scanning electron microscope are than the large hundred times of optical microscope.Because the visual depth of field is large, is rich in stereoscopic sensation so the gained scanning electron resembles, and has three-dimensional configuration, and the information more much more than other microscopes can be provided, these characteristics are very valuable to the user.The shown fracture apperance of scanning electron microscope is from profound level, the angle of the high depth of field presents the essence of Materials Fracture, in teaching, research and production, irreplaceable effect is arranged, and is strong means at the analysis of Materials Fracture reason, the analysis of culprit and the aspects such as judgement of process rationality.
Sample stage is one of critical component of scanning electron microscope, and it is in order to carrying sample, and characterizes the local feature of sample by optical system imaging.Yet the end face of sample section, especially sheet sample can't stably be placed on the common sample stage, and normal and sample stage is not parallel.Therefore, scanning electron microscope is urgent problem with innovation and the improvement of sample stage.
Summary of the invention
For above-mentioned situation, for overcoming the defective of prior art, the purpose of the utility model just provides a kind of adjustable-angle scanning electron microscope sample stage, and can effectively solve sample stage can't be with the stable placement of the end face of sample, the problem of the image blur that causes.
The technical scheme that the utility model solves is, comprise the base station body, sample on the broken edge is stage body and support bar fixedly, it is characterized in that, sample on the broken edge fixedly stage body and support bar are housed on the base station body, a sample on the broken edge fixedly end of stage body links to each other with a side of base station body through the first articulated elements, consist of the first revolute pair, sample on the broken edge is the middle some semi-spherical grooves that are evenly equipped with on the same straight line of lower flat of stage body fixedly, one end of support bar links to each other through the opposite side of the second articulated elements with the base station body, consist of the second revolute pair, the other end of support bar places in the semi-spherical grooves, consists of the fixedly angle of inclination adjustment structure of stage body of sample on the broken edge.
The utility model novel structure is unique, advantages of simple, easily processing, cost is low, is applicable to various scanning electron microscope, can lay simultaneously a plurality of samples, easy for installation simple, sample fixation and imaging effect are good, have reduced the preparation difficulty of sample, greatly improving the work efficiency of scanning electron microscope, is scanning electron microscope with the innovation on the sample stage.
Description of drawings
Fig. 1 is sectional front view of the present utility model.
Fig. 2 is the sectional structure chart of the utility model support bar.
Fig. 3 is the fixedly part section upward view of stage body of the utility model sample on the broken edge.
Embodiment
Below in conjunction with accompanying drawing embodiment of the present utility model is described in further detail.
Provided by Fig. 1 to Fig. 3, the utility model comprises the base station body, sample on the broken edge is stage body and support bar fixedly, sample on the broken edge fixedly stage body 4 and support bar 3 are housed on the base station body 1, a sample on the broken edge fixedly end of stage body 4 links to each other with a side of base station body 1 through the first articulated elements 5, consist of the first revolute pair, sample on the broken edge is the middle some semi-spherical grooves 8 that are evenly equipped with on the same straight line of lower flat of stage body 4 fixedly, one end of support bar 3 links to each other with the opposite side of base station body 1 through the second articulated elements 2, consist of the second revolute pair, the other end of support bar 3 places in the semi-spherical grooves 8, consists of the fixedly angle of inclination adjustment structure of stage body 4 of sample on the broken edge.
For guaranteeing result of use, described support bar 3 consists of length adjustment device by the rifled tube 6 of bottom and male-pipe 7 spinnings on top together, bottom second articulated elements 2 of rifled tube 6 links to each other with base station body 1, and the top of male-pipe 7 places in the semi-spherical grooves 8;
Described base station body 1 is circular;
Described base station body 1 arranged on left and right sides has the first corresponding boss 1a, the second boss 1b, sample on the broken edge fixedly has circular hole 9 on the stiff end of stage body 4, the first articulated elements 5 passes circular hole and is contained on the first boss 1a, consist of fixedly stage body rotational structure of sample on the broken edge, support bar 3 stiff ends have through hole 11, the second articulated elements 2 passes through hole and is contained on the second boss 1b, consists of the support bar rotational structure;
Screw thread on the described support bar 3 adopts fine thread, to guarantee and can finely tune the levelness of sample.
The applicant it is to be noted; the application is above-mentioned, and that provide only is a kind of embodiment; be not meant to limit the application's protection domain, every usefulness be equal to or equivalent substitution means make and the application in essence identical technical scheme all belong to the application's protection domain.
Operating position of the present utility model is, at first sample 10 usefulness conducting resinls 12 are sticked to the fixedly upper surface of stage body 4 of sample on the broken edge, observe the depth of parallelism of sample and base station body 1, then rotate external thread rod 7 and carry out length adjustment, if still can't be up to the standard requirement, then change the position of the external thread rod other end in semi-spherical grooves 8, sample by sample on the broken edge fixedly the rotation of stage body 4 be parallel to base station body 1, put it into again the fracture apperance of test sample in the test chamber of scanning electron microscope.The utility model novel structure is unique, advantages of simple, easily processing, cost is low, is applicable to various scanning electron microscope, can lay simultaneously a plurality of samples, easy for installation simple, sample fixation and imaging effect are good, have reduced the preparation difficulty of sample, greatly improving the work efficiency of scanning electron microscope, is scanning electron microscope with the innovation on the sample stage.

Claims (4)

1. adjustable-angle scanning electron microscope sample stage, comprise the base station body, sample on the broken edge is stage body and support bar fixedly, it is characterized in that, sample on the broken edge fixedly stage body (4) and support bar (3) are housed on the base station body (1), a sample on the broken edge fixedly end of stage body (4) links to each other through the side of the first articulated elements (5) with base station body (1), consist of the first revolute pair, sample on the broken edge is the middle some semi-spherical grooves (8) that are evenly equipped with on the same straight line of lower flat of stage body (4) fixedly, one end of support bar (3) links to each other through the opposite side of the second articulated elements (2) with base station body (1), consist of the second revolute pair, the other end of support bar (3) places in the semi-spherical grooves (8), consists of the fixedly angle of inclination adjustment structure of stage body (4) of sample on the broken edge.
2. adjustable-angle scanning electron microscope sample stage according to claim 1, it is characterized in that, described support bar (3) consists of length adjustment device by the rifled tube (6) of bottom and male-pipe (7) spinning on top together, bottom second articulated elements (2) of rifled tube (6) links to each other with base station body (1), and the top of male-pipe (7) places in the semi-spherical grooves (8).
3. adjustable-angle scanning electron microscope sample stage according to claim 1 is characterized in that, described base station body (1) is circular.
4. adjustable-angle scanning electron microscope sample stage according to claim 1, it is characterized in that, described base station body (1) arranged on left and right sides has corresponding the first boss (1a), the second boss (1b), sample on the broken edge fixedly has circular hole (9) on the stiff end of stage body (4), the first articulated elements (5) passes circular hole and is contained on the first boss (1a), consist of fixedly stage body rotational structure of sample on the broken edge, support bar (3) stiff end has through hole (11), the second articulated elements (2) passes through hole and is contained on the second boss (1b), consists of the support bar rotational structure.
CN 201220633312 2012-11-27 2012-11-27 Sample stage for angle-adjustable scanning electron microscope Expired - Fee Related CN202903575U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201220633312 CN202903575U (en) 2012-11-27 2012-11-27 Sample stage for angle-adjustable scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201220633312 CN202903575U (en) 2012-11-27 2012-11-27 Sample stage for angle-adjustable scanning electron microscope

Publications (1)

Publication Number Publication Date
CN202903575U true CN202903575U (en) 2013-04-24

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CN 201220633312 Expired - Fee Related CN202903575U (en) 2012-11-27 2012-11-27 Sample stage for angle-adjustable scanning electron microscope

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103712913A (en) * 2013-10-22 2014-04-09 中国农业大学 Adjusting device and meat inspection system equipped with adjusting device
CN105158050A (en) * 2015-08-12 2015-12-16 核工业理化工程研究院 Fixing device for scanning electron microscope test of fibers and test method
CN105445299A (en) * 2015-12-12 2016-03-30 佛山市南海中南铝车轮制造有限公司 Special wheel-type X ray detection auxiliary method and device
CN109425315A (en) * 2017-08-31 2019-03-05 长鑫存储技术有限公司 test carrier and test method of semiconductor structure
CN111397961A (en) * 2020-05-07 2020-07-10 生态环境部南京环境科学研究所 Portable spherical sample sampling device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103712913A (en) * 2013-10-22 2014-04-09 中国农业大学 Adjusting device and meat inspection system equipped with adjusting device
CN103712913B (en) * 2013-10-22 2016-01-20 中国农业大学 A kind of regulating device and be provided with the detection system of this regulating device
CN105158050A (en) * 2015-08-12 2015-12-16 核工业理化工程研究院 Fixing device for scanning electron microscope test of fibers and test method
CN105445299A (en) * 2015-12-12 2016-03-30 佛山市南海中南铝车轮制造有限公司 Special wheel-type X ray detection auxiliary method and device
CN109425315A (en) * 2017-08-31 2019-03-05 长鑫存储技术有限公司 test carrier and test method of semiconductor structure
CN111397961A (en) * 2020-05-07 2020-07-10 生态环境部南京环境科学研究所 Portable spherical sample sampling device

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130424

Termination date: 20131127