CN202903575U - Sample stage for angle-adjustable scanning electron microscope - Google Patents

Abstract

The utility model relates to a sample stage for an angle-adjustable scanning electron microscope. The sample stage can be used for effectively solving the problem that the formed image is fuzzy as the end surface of a sample cannot be stably placed by the sample stage. The technical scheme for solving the problem is that the sample stage for the angle-adjustable scanning electron microscope comprises a base table body, a fracture sample fixing table body and a supporting rod; the sample stage is characterized in that the fracture sample fixing table body and the supporting rod are arranged on the base table body, wherein one end of the fracture sample fixing table body is connected with one side of the base table body through a first hinge piece to form a first rotary pair; a plurality of hemispherical slots, which are on the same straight line, are uniformly distributed on the middle part of the lower plane of the fracture sample fixing table body; one end of the supporting rod is connected with the other side of the base table body by a second hinge piece to form a second rotary pair; and the other end of the supporting rod is arranged in the hemispherical slots to form an inclined angle adjusting structure of the fracture sample fixing table body. The sample stage for the angle-adjustable scanning electron microscope disclosed by the utility model is novel and unique in structure, simple and reasonable, easy to machine, low in cost, good in imaging effect, and capable of improving the working efficiency of the scanning electron microscope. Moreover, the sample stage is innovative on the sample stage for the scanning electron microscope.

Description

A sample stage for an angle-adjustable scanning electron microscope

technical field

The utility model relates to a sample stage for a scanning electron microscope, in particular to an angle-adjustable sample stage for a scanning electron microscope.

Background technique

A scanning electron microscope is a new type of electron optical instrument. It has the characteristics of simple sample preparation, wide adjustable range of magnification, high image resolution and large depth of field. For decades, scanning electron microscopy has been widely used in the fields of biology, medicine, metallurgy and other disciplines, and has promoted the development of various related disciplines.

Another important feature of the scanning electron microscope is that the depth of field is large and the image is rich in three-dimensionality. The depth of focus of a scanning electron microscope is 10 times larger than that of a transmission electron microscope and hundreds of times larger than that of an optical microscope. Due to the large depth of field of the image, the scanned electronic image obtained has a three-dimensional shape and can provide much more information than other microscopes. This feature is very valuable to users. The fracture morphology displayed by the scanning electron microscope presents the essence of material fracture from the perspective of deep level and high depth of field. It plays an irreplaceable role in teaching, scientific research and production. It is a powerful tool in the determination of sex and so on.

The sample stage is one of the key components of the scanning electron microscope, which is used to carry the sample and characterize the local characteristics of the sample through the imaging of the optical system. However, the cross section of the sample, especially the end face of the sheet sample cannot be stably placed on the common sample stage, and is often not parallel to the sample stage. Therefore, the innovation and improvement of the sample stage for SEM is an urgent problem to be solved. the

Contents of the invention

In view of the above situation, in order to overcome the defects of the prior art, the purpose of this utility model is to provide an angle-adjustable scanning electron microscope sample stage, which can effectively solve the problem that the sample stage cannot stably place the end face of the sample, resulting in blurred imaging.

The technical scheme solved by the utility model is to include the abutment body, the fracture sample fixing platform body and the support rod. It is characterized in that the fracture sample fixing platform body and the support rod are installed on the abutment body, and one end of the fracture sample fixing platform body is A hinge is connected with one side of the abutment body to form the first rotating pair. Several hemispherical grooves on the same straight line are evenly distributed in the middle of the lower plane of the fracture sample fixing platform, and one end of the support rod passes through the second hinge. It is connected with the other side of the abutment body to form a second rotating pair, and the other end of the support rod is placed in a hemispherical groove to form an inclination angle adjustment structure for the fracture sample fixing platform body.

The utility model is novel and unique in structure, simple and reasonable, easy to process, and low in cost. It is suitable for various scanning electron microscopes and can place multiple samples at the same time. It greatly improves the working efficiency of the scanning electron microscope and is an innovation on the sample stage for the scanning electron microscope.

Description of drawings

Fig. 1 is the sectional front view of the utility model.

Fig. 2 is a cross-sectional structure diagram of a support rod of the present invention.

Fig. 3 is a partial section bottom view of the fracture sample fixing platform of the present invention.

Detailed ways

The specific embodiments of the present utility model will be described in further detail below in conjunction with the accompanying drawings.

Given by Fig. 1 to Fig. 3, the utility model comprises abutment body, fracture sample fixing platform body and support rod, and fracture sample fixing platform body 4 and support rod 3 are installed on the abutment body 1, and fracture sample fixing platform body 4 One end is connected to one side of the abutment body 1 through the first hinge 5 to form a first rotating pair, and a number of hemispherical grooves 8 on the same straight line are evenly distributed in the middle of the lower plane of the fracture sample fixing platform body 4, and the support rods One end of 3 is connected with the other side of the base body 1 through the second hinge 2 to form a second rotating pair, and the other end of the support rod 3 is placed in the hemispherical groove 8 to form the inclination angle of the fracture sample fixing platform 4 Regulatory structure.

In order to ensure the use effect, the support rod 3 is screwed together by the lower internal thread tube 6 and the upper external thread tube 7 to form a length adjustment device. The lower part of the internal thread tube 6 is connected to the abutment body through the second hinge 2 1 connected, the upper part of the externally threaded pipe 7 is placed in the hemispherical groove 8;

The abutment body 1 is circular;

There are corresponding first bosses 1a and second bosses 1b on the left and right sides of the abutment body 1, and there is a round hole 9 on the fixed end of the fracture sample fixing platform body 4, through which the first hinge 5 passes. The round hole is installed on the first boss 1a to form the rotating structure of the fracture sample fixing platform. The fixed end of the support rod 3 has a through hole 11, and the second hinge 2 is installed on the second boss 1b through the through hole to form a support. Rod rotation structure;

The thread on the support rod 3 adopts fine thread to ensure that the levelness of the sample can be fine-tuned.

The applicant should point out that the above-mentioned present application is only an embodiment, and is not intended to limit the scope of protection of the application, and any equivalent or equivalent replacement means are used to make the technology that is essentially the same as the application The schemes all belong to the protection scope of the present application.

The usage of the present utility model is that firstly, the sample 10 is adhered on the upper surface of the fracture sample fixing platform body 4 with conductive glue 12, and the parallelism between the sample and the base platform body 1 is observed, and then the external threaded rod 7 is rotated to adjust the length. If the level requirement is still not met, change the position of the other end of the external threaded rod in the hemispherical groove 8, and the sample passes through the fracture. Fracture morphology of samples tested in vivo. The utility model is novel and unique in structure, simple and reasonable, easy to process, and low in cost. It is suitable for various scanning electron microscopes and can place multiple samples at the same time. It greatly improves the working efficiency of the scanning electron microscope, and is an innovation on the sample stage for the scanning electron microscope.

Claims (4)

1. adjustable-angle scanning electron microscope sample stage, comprise the base station body, sample on the broken edge is stage body and support bar fixedly, it is characterized in that, sample on the broken edge fixedly stage body (4) and support bar (3) are housed on the base station body (1), a sample on the broken edge fixedly end of stage body (4) links to each other through the side of the first articulated elements (5) with base station body (1), consist of the first revolute pair, sample on the broken edge is the middle some semi-spherical grooves (8) that are evenly equipped with on the same straight line of lower flat of stage body (4) fixedly, one end of support bar (3) links to each other through the opposite side of the second articulated elements (2) with base station body (1), consist of the second revolute pair, the other end of support bar (3) places in the semi-spherical grooves (8), consists of the fixedly angle of inclination adjustment structure of stage body (4) of sample on the broken edge.

2. adjustable-angle scanning electron microscope sample stage according to claim 1, it is characterized in that, described support bar (3) consists of length adjustment device by the rifled tube (6) of bottom and male-pipe (7) spinning on top together, bottom second articulated elements (2) of rifled tube (6) links to each other with base station body (1), and the top of male-pipe (7) places in the semi-spherical grooves (8).

3. adjustable-angle scanning electron microscope sample stage according to claim 1 is characterized in that, described base station body (1) is circular.

4. adjustable-angle scanning electron microscope sample stage according to claim 1, it is characterized in that, described base station body (1) arranged on left and right sides has corresponding the first boss (1a), the second boss (1b), sample on the broken edge fixedly has circular hole (9) on the stiff end of stage body (4), the first articulated elements (5) passes circular hole and is contained on the first boss (1a), consist of fixedly stage body rotational structure of sample on the broken edge, support bar (3) stiff end has through hole (11), the second articulated elements (2) passes through hole and is contained on the second boss (1b), consists of the support bar rotational structure.

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