CN213878015U - Sample platform for scanning electron microscope - Google Patents
Sample platform for scanning electron microscope Download PDFInfo
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- CN213878015U CN213878015U CN202022987863.6U CN202022987863U CN213878015U CN 213878015 U CN213878015 U CN 213878015U CN 202022987863 U CN202022987863 U CN 202022987863U CN 213878015 U CN213878015 U CN 213878015U
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- table body
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- electron microscope
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Abstract
The utility model discloses a sample platform for a scanning electron microscope, which belongs to the technical field of scanning electron microscope testing and comprises a cylindrical sample platform body; n groups of slide ways are arranged on the upper surface of the sample table body; each group of slide ways comprises two slide ways positioned on the same straight line, one end of each slide way is positioned on the side surface of the sample table body, and the length of each slide way is smaller than the radius of the sample table body; the straight line is superposed with one diameter of the sample table body; each slideway is provided with an upright post, and each upright post comprises a sliding block which moves in a matching way with the slideway and an upright post fixed on the upper surface of the sliding block; a pressing sheet is sleeved on the vertical rod; the upright rod is provided with external threads matched with the nut, and the axial section of the slideway is in a convex shape. The utility model discloses do not need the fixed sample of carbon tape, be convenient for get and put the sample, reduce the piece risk of thin slice, easy piece. The pressing sheet is in direct contact with the upper surface of the sample sheet, so that the conductivity of the sample is improved, and the test of a sample with poor conductivity is facilitated.
Description
Technical Field
The utility model belongs to the technical field of the scanning electron microscope test, concretely relates to sample platform for scanning electron microscope.
Background
As is well known, Scanning Electron Microscopy (SEM) is an observation instrument that is intermediate between transmission electron microscopy and optical microscopy. The method utilizes a focused narrow high-energy electron beam to scan a sample, excites various physical information through the interaction between a light beam and a substance, and collects, amplifies and re-images the information to achieve the purpose of characterizing the microscopic morphology of the substance. The resolution of the novel scanning electron microscope can reach 1 nm; the magnification can reach 30 ten thousand times and can be continuously adjusted; and the depth of field is large, the visual field is large, and the imaging stereo effect is good. In addition, the combination of the scanning electron microscope and other analytical instruments can realize the analysis of the composition of the micro-area of the substance while observing the micro-morphology. The scanning electron microscope has wide application in the research of rock soil, graphite, ceramic, nanometer material, etc. Therefore, scanning electron microscopes play a significant role in the field of scientific research.
At present, a carbon conductive adhesive tape is generally used for fixing a sample in a scanning electron microscope test, but after the thinned sample or fragile sheets such as InP and lithium niobate are fixed by the carbon adhesive tape, the sample is easy to break during sampling. And poor conductivity samples typically require gold spraying or taping to improve conductivity.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a solve the technical problem who exists among the well-known technology, provide one kind and do not need the fixed sample of carbon sticky tape, the sample platform for the scanning electron microscope of getting the put sample of being convenient for.
The utility model aims at providing a sample table for a scanning electron microscope, which comprises a cylindrical sample table body (1);
n groups of slide ways (5) are arranged on the upper surface of the sample table body (1); each group of slide ways (5) comprises two slide ways (5) positioned on the same straight line, one end of each slide way (5) is positioned on the side surface of the sample table body (1), and the length of each slide way (5) is smaller than the radius of the sample table body (1); the straight line is superposed with one diameter of the sample table body (1); n is a natural number greater than 1;
each slideway (5) is provided with an upright post (2), and each upright post (2) comprises a sliding block which moves in a matching way with the slideway (5) and an upright post fixed on the upper surface of the sliding block;
a pressing sheet (4) is sleeved on the vertical rod;
and the vertical rod is provided with an external thread matched with the nut (3).
Preferably, N is equal to 2.
Preferably, the axial section of the slideway (5) is convex.
Preferably, the sample table body (1), the upright post (2) and the pressing sheet (4) are all made of aluminum materials.
Preferably, the sliding block and the vertical rod are of an integrally formed structure.
The utility model has the advantages and positive effects that:
this application does not need the fixed sample of carbon tape through adopting above-mentioned technical scheme, is convenient for get and puts the sample, reduces the piece risk of thin slice, easy piece. The pressing sheet is in direct contact with the upper surface of the sample sheet, so that the conductivity of the sample is improved, and the test of a sample with poor conductivity is facilitated.
Drawings
FIG. 1 is a top view of a preferred embodiment of the present invention;
FIG. 2 is a top view of a partial structure of a preferred embodiment of the present invention, which is mainly used for showing the relationship between a sample stage and a slide way;
FIG. 3 is a front view of a slide in a preferred embodiment of the invention;
FIG. 4 is a structural view of a pillar in a preferred embodiment of the present invention;
fig. 5 is a diagram showing a structure of a tablet according to a preferred embodiment of the present invention.
Wherein: 1. a sample stage body; 2. a column; 3. a nut; 4. tabletting; 5. a slideway; 6. and (3) sampling.
Detailed Description
For further understanding of the contents, features and effects of the present invention, the following embodiments are exemplified and will be described in detail with reference to the accompanying drawings:
in the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
As shown in fig. 1 to 5, the technical solution of the present invention is:
a sample stage for a scanning electron microscope comprises a cylindrical sample stage body 1;
two groups of (the number of the slide groups can be adjusted according to actual requirements, but not less than two groups of) slides 5 are arranged on the upper surface of the sample table body 1; each group of slide ways 5 comprises two slide ways 5 positioned on the same straight line, one end of each slide way 5 is positioned on the side surface of the sample table body 1, and the length of each slide way 5 is smaller than the radius of the sample table body 1; the straight line is superposed with one diameter of the sample table body 1; each slideway 5 is provided with an upright post 2, and each upright post 2 comprises a sliding block which moves in a matching way with the slideway 5 and a vertical rod fixed on the upper surface of the sliding block; the slider and the upright rod are of an integrally formed structure.
The vertical rod is sleeved with a pressing sheet 4;
and the vertical rod is provided with an external thread matched with the nut 3.
As shown in fig. 3, the axial cross section of the chute 5 is convex. The slide block is inserted into the side wall of the sample table body 1 and then embedded into the large-caliber part at the lower part of the slideway 5, and the upright stanchion penetrates out of the small-caliber passage at the upper part of the slideway 5;
the sample table body 1, the stand column 2 and the pressing sheet 4 are all made of aluminum materials.
The working principle of the preferred embodiment is as follows: the sample table body is provided with an upright column slide way, and the threaded upright column can move along the slide way. The sample 6 is placed in the center of the upper surface of the sample table body, the stand column is pushed to move to the position near the sample, the pressing sheet is sleeved on the stand column, and the sample is fixed in a mode of fixing the pressing sheet through the nut.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all the modifications and equivalents of the technical spirit of the present invention to any simple modifications of the above embodiments are within the scope of the technical solution of the present invention.
Claims (5)
1. A sample stage for a scanning electron microscope; comprises a cylindrical sample table body (1); the method is characterized in that:
n groups of slide ways (5) are arranged on the upper surface of the sample table body (1); each group of slide ways (5) comprises two slide ways (5) positioned on the same straight line, one end of each slide way (5) is positioned on the side surface of the sample table body (1), and the length of each slide way (5) is smaller than the radius of the sample table body (1); the straight line is superposed with one diameter of the sample table body (1); n is a natural number greater than 1;
each slideway (5) is provided with an upright post (2), and each upright post (2) comprises a sliding block which moves in a matching way with the slideway (5) and an upright post fixed on the upper surface of the sliding block;
a pressing sheet (4) is sleeved on the vertical rod;
and the vertical rod is provided with an external thread matched with the nut (3).
2. A sample stage for a scanning electron microscope according to claim 1, characterized in that N is equal to 2.
3. The sample stage for scanning electron microscopy according to claim 1 or 2, characterized in that the axial cross section of the slide (5) is in a convex shape.
4. The sample stage for a scanning electron microscope according to claim 1, wherein the sample stage body (1), the column (2) and the pressing piece (4) are made of aluminum.
5. The sample stage for a scanning electron microscope according to claim 4, wherein the slider and the vertical rod are of an integrally molded structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022987863.6U CN213878015U (en) | 2020-12-10 | 2020-12-10 | Sample platform for scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022987863.6U CN213878015U (en) | 2020-12-10 | 2020-12-10 | Sample platform for scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213878015U true CN213878015U (en) | 2021-08-03 |
Family
ID=77067422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022987863.6U Active CN213878015U (en) | 2020-12-10 | 2020-12-10 | Sample platform for scanning electron microscope |
Country Status (1)
| Country | Link |
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| CN (1) | CN213878015U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115491642A (en) * | 2022-09-23 | 2022-12-20 | 研博智创任丘科技有限公司 | Electric arc evaporation coating device |
-
2020
- 2020-12-10 CN CN202022987863.6U patent/CN213878015U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115491642A (en) * | 2022-09-23 | 2022-12-20 | 研博智创任丘科技有限公司 | Electric arc evaporation coating device |
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